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公开(公告)号：US06478979B1
公开(公告)日：2002-11-12
申请号：US09619306
申请日：2000-07-19
申请人： Paul E. Rivers , Richard M. Minday , Fred E. Behr , Daniel R. Vitcak , Richard M. Flynn , Michael G. Costello , Michael J. Parent , John G. Owens , Zhongxing Zhang
发明人： Paul E. Rivers , Richard M. Minday , Fred E. Behr , Daniel R. Vitcak , Richard M. Flynn , Michael G. Costello , Michael J. Parent , John G. Owens , Zhongxing Zhang
IPC分类号： A62D100
CPC分类号： A62D1/0057 , A62D1/0085
摘要： Fire extinguishing compositions and methods for extinguishing, controlling, or preventing fires are described wherein the extinguishing agent is a fluorinated ketone having up to two hydrogen atoms, alone, or in admixture with a co-extinguishing agent selected from hydrofluorocarbons, hydrochlorofluorocarbons, perfluorocarbons, perfluoropolyethers, hydrofluoroethers, hydrofluoropolyethers, chlorofluorocarbons, bromofluorocarbons, bromochlorofluorocarbons, iodofluorocarbons, hydrobromofluorocarbons, and mixtures thereof.
摘要翻译： 描述灭火组合物和灭火，控制或预防火灾的方法，其中灭火剂是具有至多两个氢原子的单独的氟化酮，或与选自氢氟碳化合物，氢氯氟烃，全氟化碳，全氟聚醚的共灭火剂混合 ，氢氟醚，氢氟聚醚，氯氟烃，溴氟碳氟化合物，溴氯氟碳氟化合物，碘氟碳氟化合物，氢氟碳氟化合物及其混合物。
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公开(公告)号：US06630075B2
公开(公告)日：2003-10-07
申请号：US10269179
申请日：2002-10-11
申请人： Fred E. Behr , Daniel R. Vitcak , Richard M. Flynn , Michael G. Costello , Michael J. Parent , Zhongxing Zhang
发明人： Fred E. Behr , Daniel R. Vitcak , Richard M. Flynn , Michael G. Costello , Michael J. Parent , Zhongxing Zhang
IPC分类号： C07C4904
CPC分类号： A62D1/0057 , A62D1/0085
摘要： Fire extinguishing compositions and methods for extinguishing, controlling, or preventing fires are described wherein the extinguishing agent is a fluorinated ketone having up to two hydrogen atoms, alone, or in admixture with a co-extinguishing agent selected from hydrofluorocarbons, hydrochlorofluorocarbons, perfluorocarbons, perfluoropolyethers, hydrofluoroethers, hydrofluoropolyethers, chlorofluorocarbons, bromofluorocarbons, bromochlorofluorocarbons, iodofluorocarbons, hydrobromofluorocarbons, and mixtures thereof.
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公开(公告)号：US07101492B2
公开(公告)日：2006-09-05
申请号：US11081196
申请日：2005-03-16
申请人： Michael J. Parent , Patricia M. Savu , Richard M. Flynn , Zhongxing Zhang , William M. Lamanna , Zai-Ming Qiu , George G. I. Moore
发明人： Michael J. Parent , Patricia M. Savu , Richard M. Flynn , Zhongxing Zhang , William M. Lamanna , Zai-Ming Qiu , George G. I. Moore
IPC分类号： C09K13/00
CPC分类号： C09K13/08 , H01L21/31111
摘要： Novel aqueous, acid etch solutions comprising a fluorinated surfactant are provided. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.
摘要翻译： 提供了包含氟化表面活性剂的新型含水酸蚀刻溶液。 蚀刻溶液与各种各样的衬底一起使用，例如，在含氧化硅的衬底的蚀刻中。
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公开(公告)号：US06890452B2
公开(公告)日：2005-05-10
申请号：US10290763
申请日：2002-11-08
申请人： Michael J. Parent , Patricia M. Savu , Richard M. Flynn , Zhongxing Zhang , William M. Lamanna , Zai-Ming Qiu , George G. I. Moore
发明人： Michael J. Parent , Patricia M. Savu , Richard M. Flynn , Zhongxing Zhang , William M. Lamanna , Zai-Ming Qiu , George G. I. Moore
IPC分类号： C09K13/08 , H01L21/311 , C09K13/00
CPC分类号： C09K13/08 , H01L21/31111
摘要： Novel aqueous, acid etch solutions comprising a fluorinated surfactant are provided. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.
摘要翻译： 提供了包含氟化表面活性剂的新型含水酸蚀刻溶液。 蚀刻溶液与各种各样的衬底一起使用，例如，在含氧化硅的衬底的蚀刻中。
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5.发明授权Fluorinated ketones as lubricant deposition solvents for magnetic media applications 有权氟化酮作为磁性介质应用的润滑剂沉积溶剂公开(公告)号：US06403149B1
公开(公告)日：2002-06-11
申请号：US09841383
申请日：2001-04-24
IPC分类号： B05D512
CPC分类号： G11B5/71 , C10M107/38 , C10M169/041 , C10M2211/042 , C10M2211/0425 , C10M2211/063 , C10M2213/04 , C10M2213/06 , C10M2223/08 , C10N2240/204 , C10N2250/121 , G11B5/725
摘要： A lubricant composition comprising a perfluoropolyether lubricant and fluorinated ketone solvent is described. The lubricant composition can be applied as a coating to a substrate such as magnetic media. After the coating dries, a thin uniform lubricant film covers the substrate surface. The fluorinated ketone solvent can solubilize a wide range of perfluoropolyether compounds but not potential contaminants such as water and hydrocarbons. Additionally, the solvent has low potential to adversely affect global warming.
摘要翻译： 描述了包含全氟聚醚润滑剂和氟化酮溶剂的润滑剂组合物。 润滑剂组合物可以作为涂层施加到诸如磁性介质的基底上。 涂层干燥后，薄的均匀润滑膜覆盖基材表面。 氟化酮溶剂可以溶解宽范围的全氟聚醚化合物，但不溶于潜在的污染物如水和烃。 此外，溶剂具有低的对全球变暖有不利影响的潜力。
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公开(公告)号：US07169323B2
公开(公告)日：2007-01-30
申请号：US10290765
申请日：2002-11-08
IPC分类号： C09K13/00 , C09K13/04 , C09K13/06 , H01L21/302
CPC分类号： H01L21/31111 , C09K13/08
摘要： The present invention is directed to certain fluorinated surfactants, and use thereof in acid etch solutions, such as in aqueous buffered acid etch solutions. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.
摘要翻译： 本发明涉及某些氟化表面活性剂及其在酸蚀刻溶液中的用途，例如在含水缓冲酸蚀刻溶液中。 蚀刻溶液与各种各样的衬底一起使用，例如，在含氧化硅的衬底的蚀刻中。
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7.发明授权Methods for polishing and/or cleaning copper interconnects and/or film and compositions therefor 失效用于抛光和/或清洁铜互连和/或其膜和组合物的方法公开(公告)号：US06858124B2
公开(公告)日：2005-02-22
申请号：US10320254
申请日：2002-12-16
IPC分类号： C09G1/02 , C11D1/00 , C11D3/34 , C11D11/00 , C23F3/06 , C23G1/10 , H01L21/02 , H01L21/288 , H01L21/321 , H01L21/3213 , H01L21/768 , C25F3/00 , C23G1/00
CPC分类号： H01L21/32134 , C09G1/02 , C11D1/004 , C11D3/349 , C11D11/0047 , C23F3/06 , C23G1/103 , H01L21/02074 , H01L21/3212 , H01L21/32125
摘要： The present invention provides methods of polishing and/or cleaning copper interconnects using sulfonic acid compositions.
摘要翻译： 本发明提供了使用磺酸组合物抛光和/或清洁铜互连的方法。
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公开(公告)号：US20100320416A1
公开(公告)日：2010-12-23
申请号：US12871275
申请日：2010-08-30
CPC分类号： C11D1/004 , C11D3/042 , C11D3/048 , C11D3/3947 , C11D11/0047
摘要： Described are anionic N-substituted fluorinated sulfonamide surfactants, and use thereof in cleaning and in acid etch solutions. The cleaning and etch solutions are used with a wide variety of substrates, for example, in the cleaning and etching of silicon oxide-containing substrates.
摘要翻译： 描述了阴离子N-取代的氟化磺酰胺表面活性剂，并且其用于清洁和酸蚀刻溶液中。 清洁和蚀刻溶液与多种基材一起使用，例如在含氧化硅的基材的清洗和蚀刻中。
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9.发明授权公开(公告)号：US07147767B2
公开(公告)日：2006-12-12
申请号：US10320263
申请日：2002-12-16
申请人： Steven D. Boyd , Susrut Kesari , William M. Lamanna , Michael J. Parent , Lawrence A. Zazzera , Haiyan Zhang
发明人： Steven D. Boyd , Susrut Kesari , William M. Lamanna , Michael J. Parent , Lawrence A. Zazzera , Haiyan Zhang
摘要： The present invention provides plating solutions having either copper bis(perfluoroalkanesulfonyl) imides or copper tris(perfluoroalkanesulfonyl) methides and methods of electrochemically or chemically depositing copper interconnects using these plating solutions.
摘要翻译： 本发明提供具有铜双（全氟烷基磺酰基）酰亚胺或三（全氟烷基磺酰基）磺酸铜的电镀溶液和使用这些电镀溶液电化学或化学沉积铜互连的方法。
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公开(公告)号：US06537380B2
公开(公告)日：2003-03-25
申请号：US10041924
申请日：2002-01-07
IPC分类号： C09K1300
CPC分类号： C11D3/3947 , C11D7/263 , C11D7/264 , C11D7/265 , C11D7/266 , C11D7/32 , C11D7/3263 , C11D7/3281 , C11D7/5018 , C11D11/0047 , H01L21/02052 , Y10S134/902
摘要： A homogeneous non-aqueous composition containing a fluorinated solvent, ozone, and optionally a co-solvent and the use of these compositions for cleaning and oxidizing substrates is described.
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