POLARITY INVERSION OF TYPE-II InAs/GaSb SUPERLATTICE PHOTODIODES
    4.
    发明申请
    POLARITY INVERSION OF TYPE-II InAs/GaSb SUPERLATTICE PHOTODIODES 有权
    类型II InAs / GaSb超光谱的极性反演

    公开(公告)号:US20090224229A1

    公开(公告)日:2009-09-10

    申请号:US12044091

    申请日:2008-03-07

    申请人: Manijeh Razeghi

    发明人: Manijeh Razeghi

    IPC分类号: H01L29/06 H01L21/00

    摘要: The subject invention comprises the realization of P-on-N type II InAs/GaSb superlattice photodiodes. A high-quality InAsSb layer lattice-mismatched to GaSb is used as a buffer to prepare the surface of the substrate prior to superlattice growth. The InAsSb layer also serves as an effective n-contact layer. The contact layer has been optimized to improve device performance, most notably performance that is similar to traditional N-on-P structures.

    摘要翻译: 本发明包括实现P-on-N型IIAsAs / GaSb超晶格光电二极管。 使用GaSb晶格失配的高品质InAsSb层作为缓冲液,以在超晶格生长之前制备衬底的表面。 InAsSb层也用作有效的n接触层。 接触层已经过优化,以提高设备性能,最显着的是与传统N-on-P结构相似的性能。

    Aluminum-free vertical cavity surface emitting laser (VCSELs)

    公开(公告)号:US06610553B2

    公开(公告)日:2003-08-26

    申请号:US10154876

    申请日:2002-05-24

    申请人: Manijeh Razeghi

    发明人: Manijeh Razeghi

    IPC分类号: H01L2100

    摘要: An Al-free VCSEL is grown by MOCVD procedure by growing GaInP/GaAs as a conventional distributed Bragg reflector (DBR) 36 or less periods are then formed as the active layer. The DBRs are composed of repeating layers of a 69 nm period of GaAs and a 76 nm period of InGaP to form a superlattice as quarter wave thickness stacks. After the lower layer of n-type DBR is deposited by MOCVD, a lift-off procedure opens up windows in an evaporated layer of SiO2. The active region and upper p-type DBR is then deposited by MOCVD.

    Aluminum-free vertical cavity surface emitting lasers (VCSELs)
    7.
    发明授权
    Aluminum-free vertical cavity surface emitting lasers (VCSELs) 有权
    无铝垂直腔表面发射激光器(VCSEL)

    公开(公告)号:US06480520B1

    公开(公告)日:2002-11-12

    申请号:US09550665

    申请日:2000-04-17

    申请人: Manijeh Razeghi

    发明人: Manijeh Razeghi

    IPC分类号: H02S5183

    摘要: An A1-free VCSEL is grown by MOCVD procedure by growing GaInP/GaAs as a conventional distributed Bragg reflector (DBR) 36 or less periods are then formed as the active layer. The DBRs are composed of repeating layers of a 69 nm period of GaAs and a 76 nm period of InGaP to form a superlattice as quarter wave thickness stacks. After the lower layer of n-type DBR is deposited by MOCVD, a lift-off procedure opens up windows in an evaporated layer of SiO2. The active region and upper p-type DBR is then deposited by MOCVD.

    摘要翻译: 通过生长GaInP / GaAs作为常规分布式布拉格反射器(DBR),通过MOCVD方法生长不含A1的VCSEL,然后形成36个或更少的周期作为活性层。 DBR由69nm周期的GaAs和76nm周期的InGaP的重复层组成,以形成作为四分之一波长厚度叠层的超晶格。 在通过MOCVD沉积下层的n型DBR之后,剥离过程在SiO 2的蒸发层中打开窗口。 然后通过MOCVD沉积有源区和上p型DBR。

    Long wavelength DH, SCH and MQW lasers based on Sb
    8.
    发明授权
    Long wavelength DH, SCH and MQW lasers based on Sb 失效
    基于Sb的长波长DH,SCH和MQW激光器

    公开(公告)号:US6108360A

    公开(公告)日:2000-08-22

    申请号:US870985

    申请日:1997-06-06

    申请人: Manijeh Razeghi

    发明人: Manijeh Razeghi

    IPC分类号: H01S5/323 H01S5/343 H01S5/00

    摘要: InAsSb/InAsSbP/InAs Double Heterostructures (DH) and Separate Confinement Heterostructure Multiple Quantum Well (SCH-MQW) structures are taught wherein the ability to tune to a specific wavelength within 3 .mu.m to 5 .mu.m is possible by varying the ratio of As:Sb in the active layer. Further, the active layer of a DH structure can be doped with a p-type dopant, so that the dopant level of the active layer is at least one magnitude less than the dopant level of either confinement layer and the n-p junction is within the active layer and a higher power level and better efficiency is observed. A perfect lattice matching of the InAsSb contact layers and InAsSbP confinement layer of a DH structure is found to minimize the dislocation density at the InAsSb/InAsSbP interface. Decreasing the band-offset between the active layer and the confinement layers increases the brightness of the laser. A SCH laser of the subject invention can obtain a minimum discontinuity of conduction band between the confinement layers and the waveguide by adjusting the thickness of the waveguide and the number of quantum wells. The wavelength of the emitted light can be controlled, over the range of 3 .mu.m to 5 .mu.m by changing the material composition of the active layer, by changing the thickness of the quantum well, or by changing both parameters.

    摘要翻译: InAsSb / InAsSbP / InAs双重异质结构(DH)和单独限制异质结构多量子阱(SCH-MQW)结构,其中通过改变As的比例可以调谐到3μm至5μm的特定波长的能力 :活性层中的Sb。 此外,可以用p型掺杂剂掺杂DH结构的有源层,使得有源层的掺杂剂水平比限制层的掺杂剂水平低至少一个数量级,并且np结在活性层内 层和更高的功率水平和更好的效率。 发现InAsSb接触层和DH结构的InAsSbP限制层的完美晶格匹配使InAsSb / InAsSbP界面处的位错密度最小化。 降低有源层和约束层之间的带偏移增加了激光器的亮度。 本发明的SCH激光器可以通过调整波导的厚度和量子阱的数量来获得约束层和波导之间的导带的最小不连续性。 通过改变有源层的材料组成,通过改变量子阱的厚度,或通过改变两个参数,可以控制发射光的波长在3μm到5μm之间。

    Polarity inversion of type-II InAs/GaSb superlattice photodiodes
    9.
    发明授权
    Polarity inversion of type-II InAs/GaSb superlattice photodiodes 有权
    II型InAs / GaSb超晶格光电二极管的极性反演

    公开(公告)号:US07692183B2

    公开(公告)日:2010-04-06

    申请号:US12044091

    申请日:2008-03-07

    申请人: Manijeh Razeghi

    发明人: Manijeh Razeghi

    IPC分类号: H01L31/00

    摘要: The subject invention comprises the realization of P-on-N type II InAs/GaSb superlattice photodiodes. A high-quality InAsSb layer lattice-mismatched to GaSb is used as a buffer to prepare the surface of the substrate prior to superlattice growth. The InAsSb layer also serves as an effective n-contact layer. The contact layer has been optimized to improve device performance, most notably performance that is similar to traditional N-on-P structures.

    摘要翻译: 本发明包括实现P-on-N型IIAsAs / GaSb超晶格光电二极管。 使用GaSb晶格失配的高品质InAsSb层作为缓冲液,以在超晶格生长之前制备衬底的表面。 InAsSb层也用作有效的n接触层。 接触层已经过优化,以提高设备性能,最显着的是与传统N-on-P结构相似的性能。

    InAs/GaSb infrared superlattice photodiodes doped with Beryllium
    10.
    发明授权
    InAs/GaSb infrared superlattice photodiodes doped with Beryllium 有权
    InAs / GaSb红外超晶格光电二极管掺杂铍

    公开(公告)号:US07638791B2

    公开(公告)日:2009-12-29

    申请号:US12042804

    申请日:2008-03-05

    申请人: Manijeh Razeghi

    发明人: Manijeh Razeghi

    IPC分类号: H01L31/00

    摘要: An improved photodiode and method of producing an improved photodiode comprising doping an InAs layer of an InAs/GaSb region situated on top of an InAs/GaSb:Be superlattice and below an InAs:Si/GaSb regions such that the quantum efficiency of the photodiode increases and dominant dark current mechanisms change from diffusion to band-to-band tunneling as the InAs layer is doped with Beryllium.

    摘要翻译: 改进的光电二极管和制造改进的光电二极管的方法包括掺杂位于InAs / GaSb:Be超晶格顶部并且低于InAs:Si / GaSb区域的InAs / GaSb区域的InAs层,使得光电二极管的量子效率增加 并且当InAs层掺杂有铍时,显性暗电流机制从扩散转变为带 - 带隧穿。