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公开(公告)号：US5492775A
公开(公告)日：1996-02-20
申请号：US69060
申请日：1993-05-28
CPC分类号： C23C14/085 , C23C14/08 , C23C14/58 , C23C14/5806 , C23C14/584 , G11B5/653
摘要： A high-density recording media comprising longitudinally oriented polycrystalline barium ferrite exhibits large coercivity, corrosion resistance, high hardness and durability. Films are prepared by on-axis sputtering at ambient temperatures from stoichiometric targets followed by a post-deposition anneal at approximately 850.degree.C. to induce crystallization. Crystallization yields a magnetic film with large in-plane remanence and a fine scale texturing that greatly improves the tribological performance of barium ferrite disks. Exceptional durability can be achieved on disks without overcoats. Grain sizes as small as 200 .ANG. are produced by doping with small amounts of Cr.sub.2 O.sub.3 or other additives. Coercivities greater than 4000 Oe are achieved even in small grain films.
摘要翻译： 包含纵向取向的多晶钡铁氧体的高密度记录介质具有较高的矫顽力，耐腐蚀性，高硬度和耐久性。 通过在环境温度下从化学计量的靶进行在轴溅射制备膜，然后在约850℃下进行后沉积退火以诱导结晶。 结晶产生具有大的面内剩余磁性膜和精细尺度纹理，大大提高钡铁氧体磁盘的摩擦学性能。 可以在没有大衣的磁盘上实现卓越的耐久性。 通过掺杂少量的Cr 2 O 3或其它添加剂来生产小于200安培的晶粒尺寸。 即使在小颗粒薄膜中也能获得大于4000 Oe的矫顽力。
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公开(公告)号：US5552204A
公开(公告)日：1996-09-03
申请号：US372410
申请日：1995-01-13
CPC分类号： G11B5/72 , G11B5/8408 , Y10S428/90 , Y10T428/2495 , Y10T428/24975 , Y10T428/265
摘要： A significantly thinner boron carbide overcoat layer is provided for a magnetic disk which has the same durability as thicker prior art overcoat layers for protecting an underlying magnetic layer. By employing adhesion layers selected from the group consisting of Ge, Ru, WTiSi, WTi, Si, and Y between the magnetic layer and the overcoat layer, the durability of the overcoat layer is significantly increased over a single overcoat layer of B4C. Certain process steps in the making of the B4C overcoat layer still further enhance the durability of the B4C overcoat layer by maintaining the disk or substrate specimen at a floating potential in a plasma chamber and employing low levels of argon pressure and sputtering wattage.
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公开(公告)号：US5452163A
公开(公告)日：1995-09-19
申请号：US173590
申请日：1993-12-23
申请人： Kevin R. Coffey , Robert E. Fontana , James K. Howard , Todd L. Hylton , Michael A. Parker , Ching H. Tsang
发明人： Kevin R. Coffey , Robert E. Fontana , James K. Howard , Todd L. Hylton , Michael A. Parker , Ching H. Tsang
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3903 , H01L43/10 , G11B2005/3996
摘要： A magnetoresistive read sensor incorporates a multilayer sensing element formed of one or more magnetoresistive elements in a planar array, each magnetoresistive element having a multilayer structure of at least two ferromagnetic layers separated by a nonmagnetic layer. The ferromagnetic layers are coupled antiferromagnetically by magnetostatic coupling at opposing edges of the ferromagnetic layers. A bias layer separated from the magnetoresistive sensing element by a spacer layer provides a magnetic field to bias the magnetoresistive sensing element at a desired non-signal point for linear response. The magnetoresistive sensing element is formed by alternatively depositing layers of ferromagnetic material and layers of nonmagnetic material on a substrate and then patterning the resulting structure using photolithographic techniques to provide a planar array of magnetoresistive elements. A conductive layer is deposited over the array filling in the spaces separating the magnetoresistive elements to provide electrical conductivity between the elements in the plane of the structure.
摘要翻译： 磁阻读取传感器包括由平面阵列中的一个或多个磁阻元件形成的多层感测元件，每个磁阻元件具有由非磁性层隔开的至少两个铁磁层的多层结构。 铁磁层通过在铁磁层的相对边缘处的静磁耦合而反铁磁耦合。 通过间隔层与磁阻感测元件分离的偏置层提供磁场以将磁阻感测元件偏置在期望的非信号点以进行线性响应。 磁阻感测元件通过在衬底上交替地沉积铁磁材料层和非磁性材料层而形成，然后使用光刻技术对所得结构进行构图以提供磁阻元件的平面阵列。 导电层沉积在填充在分离磁阻元件的空间中的阵列上，以提供结构平面中的元件之间的导电性。
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公开(公告)号：US5476680A
公开(公告)日：1995-12-19
申请号：US422735
申请日：1995-04-14
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3903 , H01F10/3227 , H01L43/10 , G11B2005/3996
摘要： A magnetoresistive read sensor incorporates a granular multilayer sensing element comprising a plurality of layers of generally flat particles of a ferromagnetic material embedded in a nonmagnetic electrically conductive material. A bias layer separated from the magnetoresistive sensing element by a spacer layer provides a magnetic field to bias the magnetoresistive sensing element at a desired non-signal point. The ferromagnetic and the nonmagnetic materials are mutually immiscible, or may be miscible or partially miscible and processed in a manner to control interdiffusion. The magnetoresistive sensing element is formed by alternatively despositing layers of ferromagnetic material and layers of nonmagnetic conductive material on a substrate and then annealing the structure. During the annealing cycle, the layers of nonmagnetic material above and below the ferromagnetic layers penetrate at grain boundaries and break the continuity of the ferromagnetic layers to form layers or planes of ferromagnetic particles embedded in a matrix of nonmagnetic material.
摘要翻译： 磁阻读取传感器结合了颗粒状多层感测元件，其包括嵌入在非磁性导电材料中的铁磁材料的大量平坦的平坦颗粒层。 通过间隔层与磁阻感测元件分离的偏置层提供磁场以将磁阻感测元件偏置在期望的非信号点。 铁磁性材料和非磁性材料是相互混溶的，或者可以混溶或部分混溶，并以一种控制相互扩散的方式加工。 磁阻感测元件由铁磁材料层和非磁性导电材料层交替地形成在衬底上，然后退火该结构。 在退火循环期间，铁磁性层之上和之下的非磁性材料层穿透晶界并破坏铁磁层的连续性，以形成嵌入非磁性材料基体中的铁磁颗粒的层或平面。
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5.发明授权
公开(公告)号：US5828532A
公开(公告)日：1998-10-27
申请号：US941774
申请日：1997-09-30
CPC分类号： G11B5/3903 , G11B5/00 , G11B5/40
摘要： A thin film lead structure resistant to resistance increase phenomenon resulting from contamination by mobile impurities. A thin film lead is disposed proximate to a getter layer material having a higher affinity for mobile impurities that the thin film lead. The getter layer material captures mobile impurities and prevents their migration into the thin film lead. The getter layer material may be formed over and in contact with the thin film lead, may be encapsulated within the thin film lead, or both. The getter layer material comprises a rare earth metal selected from the group consisting of yttrium, scandium, lanthanum, cerium, praseodymium, neodymium, samarium, gadolinium, terbium, dysprosium, holmium, erbium, and ytterbium. The thin film lead is preferably tantalum, but may be selected from the group consisting of niobium, vanadium, chromium, molybdenum, tungsten and iron. An alternate embodiment of the invention includes a transition metal comprising titanium, zirconium, or hafnium as the getter layer. The capture of mobile impurities by the getter layer prevents resistance increase phenomenon and embrittlement to the thin film lead. The thin film lead may be used as a thin film lead to an electrical circuit, the sensor structure in a magnetic head.
摘要翻译： 一种薄膜引线结构，抵抗由移动杂质污染导致的电阻增加现象。 薄膜引线靠近吸附剂层材料设置，该吸气剂层材料对薄膜引线的移动杂质具有更高的亲和力。 吸气层材料捕获移动杂质并防止其迁移到薄膜引线中。 吸气剂层材料可以形成在薄膜引线之上并与薄膜引线接触，可以封装在薄膜引线内，或两者都被封装。 吸气剂层材料包括选自钇，钪，镧，铈，镨，钕，钐，钆，铽，镝，钬，铒和镱的稀土金属。 薄膜引线优选为钽，但可以选自铌，钒，铬，钼，钨和铁。 本发明的替代实施方案包括包含钛，锆或铪作为吸气剂层的过渡金属。 通过吸气层捕获移动杂质防止了电阻增加现象和薄膜引线的脆化。 薄膜引线可用作薄膜引线到电路，传感器结构在磁头中。
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6.发明授权
公开(公告)号：US5227212A
公开(公告)日：1993-07-13
申请号：US739565
申请日：1991-08-02
CPC分类号： G11B5/656 , G11B5/66 , Y10S428/90 , Y10S428/928 , Y10T428/12854
摘要： An improved CoPt based or CoNi based alloy magnetic recording disk for horizontal recording has a magnetic recording layer which is a laminated structure of relatively thin magnetic alloy films separated by relatively thin non-magnetic spacer films. The resulting laminated disk structure has substantially decreased intrinsic media noise at high linear recording densities. A magnetic recording disk drive uses the low noise laminated disk and and a magnetoresistive read sensor to provide a disk drive with significantly reduced noise in the data readback signal.
摘要翻译： 用于水平记录的改进的基于CoPt或CoNi的合金磁记录盘具有磁记录层，其是由相对薄的非磁性间隔膜分离的相对薄的磁性合金膜的叠层结构。 所得的层压盘结构在高线性记录密度下具有显着降低的本征介质噪声。 磁记录盘驱动器使用低噪声层叠盘和磁阻读取传感器来提供在数据回读信号中具有显着降低的噪声的磁盘驱动器。
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7.发明授权
公开(公告)号：US4654276A
公开(公告)日：1987-03-31
申请号：US857019
申请日：1986-04-29
申请人： Richard H. Ahlert , James K. Howard , Grace S. Lim
发明人： Richard H. Ahlert , James K. Howard , Grace S. Lim
CPC分类号： G11B5/7325 , G11B5/64 , Y10S428/928 , Y10T428/12597 , Y10T428/12625 , Y10T428/12674 , Y10T428/12743 , Y10T428/1275 , Y10T428/12861 , Y10T428/12875 , Y10T428/12937 , Y10T428/12944
摘要： An improved cobalt-platinum (CoPt) thin film metal alloy media for horizontal magnetic recording has a coercivity substantially greater than prior CoPt thin film metal alloy media. A tungsten underlayer between the substrate and the CoPt magnetic layer improves the coercivity above that of media wiht conventional underlayers, such as chromium. The coercivity of the CoPt layer can be increased even further if the CoPt film is deposited in such a manner as to form an intermetallic compound of Co.sub.3 W in the interface region between the tungsten underlayer and the CoPt magnetic layer. The tungsten underlayer also improves the magnetic properties of the media when the magnetic layer is an alloy of cobalt-platinum-chromium (CoPtCr).
摘要翻译： 用于水平磁记录的改进的钴 - 铂（CoPt）薄膜金属合金介质的矫顽力显着大于先前的CoPt薄膜金属合金介质。 在基底和CoPt磁性层之间的钨底层使矫顽力提高到常规底层如铬的介质的矫顽力。 如果CoPt膜以在钨底层和CoPt磁性层之间的界面区域中形成Co 3 W的金属间化合物的方式沉积，CoPt层的矫顽力可以进一步提高。 当磁性层是钴 - 铂 - 铬（CoPtCr）的合金时，钨底层也改善了介质的磁特性。
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8.发明授权Thin film magnetic recording disk comprising alternating layers of a CoNi or CoPt alloy and a non-magnetic spacer layer 失效薄膜磁记录盘包括CoNi或CoPt合金和非磁性间隔层的交替层
公开(公告)号：US5051288A
公开(公告)日：1991-09-24
申请号：US324374
申请日：1989-03-16
CPC分类号： G11B5/656 , G11B5/66 , Y10S428/90 , Y10S428/926 , Y10S428/928 , Y10T428/12632 , Y10T428/12806
摘要： An improved CoPt based or CoNi based alloy magnetic recording disk for horizontal recording has a magnetic recording layer which is a laminated structure of relatively thin magnetic alloy films separated by relatively thin non-magnetic spacer films. The resulting laminated disk structure has substantially decreased intrinsic media noise at high linear recording densities.
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9.发明授权Process for fabricating thin film metal alloy magnetic recording disks to selectively variable coercivities 失效用于制造薄膜金属合金磁记录盘以选择性地可变矫顽力的方法
公开(公告)号：US5149409A
公开(公告)日：1992-09-22
申请号：US640182
申请日：1991-01-11
CPC分类号： G11B5/851 , C23C14/0036 , C23C14/0635
摘要： In the fabrication of thi film cobalt alloy magnetic recording disks by sputter-deposition, the coercivity of the disks can be selectively varied by introducing a predetermined amount of hydrocarbon gas, such as methane, into the argon-based sputtering atmosphere. The flow rate of the hydrocarbon gas into the sputtering chamber is directly related to the coercivity of the resulting disks. This permits the coercivity of the disks to be controlled without the necessity of changing the composition of the cobalt alloy sputtering targets, and without the necessity of changing the thickness of an underlying between the disk substrate and the magnetic layer. The use of hydrocarbon gas in the reactive sputtering of the cobalt alloy magnetic layer in the disks does not affect the intrinsic media noise of the disks, thus allowing for the manufacturing of disks with high signal-to-noise ratio (SNR) of the readback signal.
摘要翻译： 在通过溅射沉积制造薄膜钴合金磁记录盘的过程中，可以通过将预定量的烃气（例如甲烷）引入到氩基溅射气氛中来选择性地改变盘的矫顽力。 进入溅射室的烃气体的流速与所得到的盘的矫顽力直接相关。 这允许在不需要改变钴合金溅射靶的组成的情况下控制盘的矫顽力，并且不需要改变盘基片和磁性层之间的厚度。 在磁盘中的钴合金磁性层的反应性溅射中使用碳氢化合物气体不会影响磁盘的内在介质噪声，从而允许制造回读的高信噪比（SNR） 信号。
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公开(公告)号：US4749628A
公开(公告)日：1988-06-07
申请号：US857206
申请日：1986-04-29
申请人： Richard H. Ahlert , James K. Howard , Grace S. Lim
发明人： Richard H. Ahlert , James K. Howard , Grace S. Lim
CPC分类号： G11B5/64 , Y10S428/90 , Y10S428/928 , Y10T428/12806 , Y10T428/12861
摘要： A vertical magnetic recording medium is formed of multiple layers, each layer comprising a cobalt-platinum (CoPt) magnetic film formed on a hexagonal-close-packed (HCP) necleating film. The thickness of each CoPt film in each layer is sufficiently thin to assure that the film has perpendicular magnetic anisotropy. The magnetic properties of the multilayered magnetic film structure can be varied by varying the thickness of the individual films and the number of layers.
摘要翻译： 垂直磁记录介质由多层构成，每一层包括形成在六方密堆积（HCP）膜片上的钴 - 铂（CoPt）磁性膜。 每层中每个CoPt膜的厚度足够薄，以确保膜具有垂直的磁各向异性。 可以通过改变单个膜的厚度和层数来改变多层磁性膜结构的磁性能。
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