Abstract:
A method for processing substrates includes providing a bonding layer between a substrate and a carrier to bond the substrate to the carrier, processing the substrate while the substrate is supported by the carrier, and removing the bonding layer to separate the substrate from the carrier. The bonding layer may include a thermosetting release layer and thermosetting glue layers, wherein at least one of the thermosetting glue layers is provided on each side of the thermosetting release layer.
Abstract:
A method for processing substrates includes providing a bonding layer between a substrate and a carrier to bond the substrate to the carrier, processing the substrate while the substrate is supported by the carrier, and removing the bonding layer to separate the substrate from the carrier. The bonding layer may include a thermosetting release layer and thermosetting glue layers, wherein at least one of the thermosetting glue layers is provided on each side of the thermosetting release layer.
Abstract:
A semiconductor memory device includes a cell string and a first conductive pillar and a second conductive pillar connected to the cell string. The cell string includes plural memory cells, which are stacked on a substrate to be spaced apart from each other. The first conductive pillar is spaced apart from the second conductive pillar in a first direction. Each of the memory cells includes a channel layer that extends from the first conductive pillar to the second conductive pillar in the first direction, a ferroelectric layer on the channel layer, and an electrode on the ferroelectric layer. The channel layer comprises single crystalline silicon.
Abstract:
A semiconductor device includes: a substrate including a channel region; a gate dielectric a tunneling layer, a charge storage layer, and a blocking layer sequentially disposed on the channel region; and a gate electrode disposed on the gate dielectric, wherein the tunneling layer has variations in nitrogen concentrations in a direction perpendicular to the channel region, and has a maximum nitrogen concentration in a position shifted from a center of the tunneling layer toward the charge storage layer.
Abstract:
A memory chip includes a cell chip and a core-periphery chip, which are vertically stacked and are electrically connected to each other. The cell chip includes cell regions, each of which includes a memory cell layer. The core-periphery chip includes a core group region and a peripheral region which are adjacent to each other in a first direction. The core group region includes core regions arranged in a line in a second direction intersecting the first direction. Each of the core regions includes a core bank including a core circuit, and a neural processing unit (NPU) block including an NPU.
Abstract:
A semiconductor memory device is provided. The semiconductor memory device includes: a bit line that extends in a first direction; first and second word lines that extend in a second direction and cross the bit line; an active pattern on the bit line between the first and second word lines, the active pattern including first second vertical parts that are opposite to each other, and a horizontal part that extends between the first and second vertical parts; a first data storage pattern between the first word line and the first vertical part of the active pattern; a second data storage pattern between the second word line and the second vertical part of the active pattern; and a source line connected to the active pattern, the source line extending the first direction and crossing the first word line and the second word line.
Abstract:
A semiconductor memory device includes: a device isolation pattern in a semiconductor substrate and defining an active pattern extending in a first direction; a bit line crossing the active pattern on the semiconductor substrate and extending in a second direction forming an acute angle with the first direction; a word line extending across the active pattern in a third direction intersecting the second direction and extending into the semiconductor substrate; electrode plates vertically stacked on the bit line; a common electrode pattern extending through the electrode plates to the active pattern on one side of the bit line; and a ferroelectric pattern between the common electrode pattern and the electrode plates. The bit line is in contact with an upper surface of the active pattern and an upper surface of the device isolation pattern.
Abstract:
A semiconductor device may include first stacks and second stacks, which are alternately disposed on a substrate in a first direction parallel to a top surface of the substrate, and first pads and second pads connecting the first stacks to the second stacks. Each of the first and second stacks may include a gate electrode, channel patterns, which enclose a side surface of the gate electrode and are spaced apart from each other, and first and second conductive lines connected to a corresponding channel pattern. The first and second conductive lines of the second stack may be disposed to be adjacent to the first and second conductive lines, respectively, of the first stack. The first and second pads may be connected to the first and second conductive lines, respectively, of the first and second stacks.
Abstract:
Provided are a plasma treatment apparatus and a method of fabricating semiconductor device using the same. The plasma treatment apparatus includes a chamber which provides a plasma treatment space, a bottom electrode disposed in the chamber and supports a wafer, a top electrode disposed in the chamber facing the bottom electrode, a source power source which supplies a source power output of a first frequency to the bottom electrode, a bias power source which supplies a bias power output of a second frequency different from the first frequency to the bottom electrode, and a pulse power source which applies a pulse voltage to the bottom electrode, wherein the bias power output is a bias voltage which is pulse-modulated to a first voltage level in a first time section and pulse-modulated to a second voltage level in a second time section and is applied to the bottom electrode.
Abstract:
The inventive concepts provide methods of manufacturing a semiconductor device. The method includes patterning a substrate to form an active pattern, forming a gate pattern intersecting the active pattern, forming a gate spacer on a sidewall of the gate pattern, forming a growth-inhibiting layer covering an upper region of the gate pattern, and forming source/drain electrodes at opposite first and second sides of the gate pattern.