-
公开(公告)号:US20240268130A1
公开(公告)日:2024-08-08
申请号:US18374718
申请日:2023-09-29
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyungeun CHOI , Kiseok LEE
IPC: H10B80/00 , H01L23/00 , H01L25/00 , H01L25/065 , H01L25/18
CPC classification number: H10B80/00 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L2224/08146 , H01L2224/80895 , H01L2224/80896 , H01L2225/06541 , H01L2924/1431 , H01L2924/1436
Abstract: Disclosed are semiconductor devices and their fabrication methods. The semiconductor device includes a lower bonding structure that includes a lower substrate, a lower dielectric structure on the lower substrate, and a transistor between the lower substrate and the lower dielectric structure, an upper bonding structure that includes an upper dielectric structure on the lower dielectric structure, an upper substrate on the upper dielectric structure, and a memory cell structure between the upper substrate and the upper dielectric structure, a connection structure on the upper bonding structure, and a first through via that electrically connects the transistor to the memory cell structure. The transistor overlaps the memory cell structure. The first through via penetrates the upper substrate and the upper dielectric structure.
-
公开(公告)号:US20240266308A1
公开(公告)日:2024-08-08
申请号:US18236501
申请日:2023-08-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kiseok LEE , Hyungeun CHOI , Keunnam KIM , Jinwoo HAN
IPC: H01L23/00 , H01L23/522 , H01L23/528 , H10B12/00
CPC classification number: H01L24/06 , H01L23/5226 , H01L23/5283 , H10B12/315 , H10B12/482 , H01L2224/0603 , H01L2224/06102
Abstract: A semiconductor device includes a lower substrate, a lower dielectric structure on the lower substrate, a transistor between the lower substrate and the lower dielectric structure, a lower bonding pad in the lower dielectric structure, an upper dielectric structure on the lower dielectric structure, an upper substrate on the upper dielectric structure, a memory cell structure between the upper substrate and the upper dielectric structure, and an upper bonding pad in the upper dielectric structure. A top surface of the lower bonding pad is in contact with a bottom surface of the upper bonding pad. The lower bonding pad and the upper bonding pad overlap the memory cell structure.
-
公开(公告)号:US20240268129A1
公开(公告)日:2024-08-08
申请号:US18370940
申请日:2023-09-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hongjun LEE , Keunnam KIM , Hui-Jung KIM , Seokhan PARK , Kiseok LEE , Moonyoung JEONG , Jay-Bok CHOI , Hyungeun CHOI , Jinwoo HAN
IPC: H10B80/00 , H01L23/00 , H01L25/00 , H01L25/065 , H01L25/18
CPC classification number: H10B80/00 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H01L2224/08145 , H01L2224/80895 , H01L2224/80896 , H01L2225/06541 , H01L2924/1431 , H01L2924/1436
Abstract: Disclosed are semiconductor devices and their fabrication methods. The semiconductor device comprises a lower substrate, a lower dielectric structure on the lower substrate, a memory cell structure between the lower substrate and the lower dielectric structure, a lower bonding pad in the lower dielectric structure, an upper dielectric structure on the lower dielectric structure, an upper substrate on the upper dielectric structure, a transistor between the upper substrate and the upper dielectric structure, and an upper bonding pad in the upper dielectric structure. A top surface of the lower bonding pad is in contact with a bottom surface of the upper bonding pad. The lower bonding pad and the upper bonding pad overlap the memory cell structure.
-
公开(公告)号:US20230180456A1
公开(公告)日:2023-06-08
申请号:US18059492
申请日:2022-11-29
Applicant: Samsung Electronics Co., Ltd.
Inventor: Euichul JEONG , Kiseok LEE , Wonki ROH , Hyungeun CHOI
IPC: H10B12/00
CPC classification number: H01L27/10805 , H01L27/1085 , H01L27/10873 , H01L27/10885
Abstract: A semiconductor memory device including a transistor body extending in a first horizontal direction and including a first source/drain region, a single-crystal channel layer, and a second source/drain region sequentially arranged in the first horizontal direction, a gate electrode layer extending in a second horizontal direction orthogonal to the first horizontal direction and covering upper and lower surfaces of the single-crystal channel layer, a bit line connected to the first source/drain region, extending in a vertical direction, and having a first width in the second horizontal direction, a spacer covering upper and lower surfaces of the first source/drain region and having a second width greater than the first width, and a cell capacitor on a side opposite to the bit line with respect to the transistor body in the first horizontal direction and including lower and upper electrode layers and a capacitor dielectric layer therebetween may be provided.
-
公开(公告)号:US20240431122A1
公开(公告)日:2024-12-26
申请号:US18623732
申请日:2024-04-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hongjun LEE , Kiseok LEE , Hyungeun CHOI , Keunnam KIM , Incheol NAM
IPC: H10B80/00 , G11C11/4091 , H01L23/00 , H01L25/00 , H01L25/065 , H01L25/18
Abstract: A semiconductor device includes a lower chip structure, and an upper chip structure on the lower chip structure. The lower chip structure includes a memory structure, a lower interconnection structure electrically connected to the memory structure, and a lower bonding pad electrically connected to the lower interconnection structure. The upper chip structure includes an upper base, a peripheral transistor on the upper base, a first upper interconnection structure electrically connected to the peripheral transistor, on the upper base, a through-via penetrating through the upper base and electrically connected to the first upper interconnection structure, an upper bonding pad bonded to the lower bonding pad, below the upper base, and an intermediate connection structure electrically connecting the upper bonding pad and the through-via, between the upper base and the lower chip.
-
公开(公告)号:US20240098984A1
公开(公告)日:2024-03-21
申请号:US18368243
申请日:2023-09-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyungeun CHOI , Seokho SHIN , Joongchan SHIN , Kiseok LEE , Keunnam KIM , Seokhan PARK , Eunsuk JANG , Jinwoo HAN
CPC classification number: H10B12/482 , H01L29/7827 , H10B12/315 , H10B12/488
Abstract: A semiconductor device may include a substrate, a bitline extending in a first direction on the substrate, and an active pattern on the bitline. The semiconductor device may include a back gate electrode extending beside one side of the active pattern in a second direction perpendicular to the first direction across the bitline, and a wordline extending in the second direction beside the other side of the active pattern. A length of the active pattern in the second direction may be greater than a length of the bitline in the second direction.
-
公开(公告)号:US20230180452A1
公开(公告)日:2023-06-08
申请号:US17956102
申请日:2022-09-29
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kiseok LEE , Taegyu KANG , Keunnam KIM , Sung-Min PARK , Taehyun AN , Sanghyun LEE , Eunsuk JANG , Moonyoung JEONG , Euichul JEONG , Hyungeun CHOI
IPC: H01L27/108 , G11C5/04 , G11C7/18 , G11C8/14
CPC classification number: H01L27/108 , G11C5/04 , G11C7/18 , G11C8/14
Abstract: A semiconductor memory device includes a word line extended parallel to a top surface of a semiconductor substrate, a channel pattern crossing the word line and having a long axis parallel to the top surface, a bit line extended perpendicular to the top surface and in contact with a first side surface of the channel pattern, and a data storage element in contact with a second side surface of the channel pattern opposite to the first side surface. The channel pattern includes a first dopant region adjacent to the bit line, a second dopant region adjacent to the data storage element, and a channel region between the first and second dopant regions and overlapped with the word line. At least one of the first and second dopant regions includes a low concentration region adjacent to the channel region, and a high concentration region spaced apart from the channel region.
-
公开(公告)号:US20210125989A1
公开(公告)日:2021-04-29
申请号:US16986367
申请日:2020-08-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Joongchan SHIN , Changkyu KIM , Hui-Jung KIM , Iljae SHIN , Taehyun AN , Kiseok LEE , Eunju CHO , Hyungeun CHOI , Sung-Min PARK , Ahram LEE , Sangyeon HAN , Yoosang HWANG
IPC: H01L27/108 , H01L23/528
Abstract: A three-dimensional semiconductor memory device includes first semiconductor patterns, which are vertically spaced apart from each other on a substrate, each of which includes first and second end portions spaced apart from each other, and first and second side surfaces spaced apart from each other to connect the first and second end portions, first and second source/drain regions disposed in each of the first semiconductor patterns and adjacent to the first and second end portions, respectively, a channel region in each of the first semiconductor patterns and between the first and second source/drain regions, a first word line adjacent to the first side surfaces and the channel regions and vertically extended, and a gate insulating layer interposed between the first word line and the first side surfaces. The gate insulating layer may be extended to be interposed between the first source/drain regions.
-
公开(公告)号:US20240421039A1
公开(公告)日:2024-12-19
申请号:US18652381
申请日:2024-05-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyungeun CHOI , Kiseok LEE
IPC: H01L23/48 , H01L23/00 , H01L25/065 , H10B80/00
Abstract: A semiconductor device includes a lower chip structure including a memory structure and a lower wiring structure connected to the memory structure and an upper chip structure on the lower chip structure, where the upper chip structure includes an upper base, peripheral transistors below the upper base, an intermediate wiring structure below the upper base and connected to the peripheral transistors, an upper wiring structure on the upper base, a first through-via penetrating the upper base between the upper wiring structure and the intermediate wiring structure, the first through-via connecting the upper wiring structure and the intermediate wiring structure, and a second through-via extending respectively downward and penetrating the upper base between the upper wiring structure and the lower wiring structure, the second through-via connecting the upper wiring structure and the lower wiring structure.
-
公开(公告)号:US20230320066A1
公开(公告)日:2023-10-05
申请号:US17951379
申请日:2022-09-23
Applicant: Samsung Electronics Co., Ltd.
Inventor: Moonyoung JEONG , Kiseok LEE , Hyungeun CHOI , Hyungjun NOH , Sangho LEE
IPC: H01L27/108
CPC classification number: H01L27/10805
Abstract: A semiconductor device may include a substrate including a memory cell region between a first connection region and a second connection region, gate electrodes extending in a first direction and including first pad regions having a step structure on the first connection region, back gate electrodes between the gate electrodes and extending in a direction opposite the first direction, vertical conductive patterns extending in a vertical direction and spaced apart from each other in the first direction on the memory cell region of the substrate, and active layers between the gate electrodes and the back gate electrodes on the memory cell region of the substrate. The active layers may extend in a second direction, intersecting the first direction, and may be electrically connected to the vertical conductive patterns. The back gate electrodes may include second pad regions having a step structure on the second connection region.
-
-
-
-
-
-
-
-
-