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    SEMICONDUCTOR DEVICE AND MASSIVE DATA STORAGE SYSTEM INCLUDING THE SAME
    1.
    发明申请
    SEMICONDUCTOR DEVICE AND MASSIVE DATA STORAGE SYSTEM INCLUDING THE SAME 有权

    公开(公告)号：US20220139821A1

    公开(公告)日：2022-05-05

    申请号：US17376240

    申请日：2021-07-15

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Sungmin HWANG ,  Jiwon Kim ,  Jaeho Ahn ,  Joonsung Lim ,  Sukkang Sung

    IPC: H01L23/522 ,  H01L25/065 ,  H01L25/18 ,  H01L23/00

    Abstract: A semiconductor device includes lower circuit patterns on a lower substrate; lower bonding patterns on the lower circuit patterns, the lower bonding patterns including a conductive material and being electrically connected to the lower circuit patterns; upper bonding patterns on and contacting the lower bonding patterns, and including a conductive material; a passive device on the upper bonding patterns, and including a conductive material and contacting one of the upper bonding patterns; a gate electrode structure on the passive device, and including gate electrodes spaced apart from each other in a first direction, each of which extends in a second direction, and extension lengths in the second direction of the gate electrodes increasing from a lowermost level toward an uppermost level in a stepwise manner; a channel extending through at least a portion of the gate electrode structure; and an upper substrate on the channel.

    Integrated circuit device and method of fabricating the same
    2.
    发明授权
    Integrated circuit device and method of fabricating the same 有权

    公开(公告)号：US11251196B2

    公开(公告)日：2022-02-15

    申请号：US16749255

    申请日：2020-01-22

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Jaeho Ahn ,  Woosung Yang ,  Joonsung Lim ,  Sungmin Hwang

    IPC: H01L27/11582 ,  H01L27/11556 ,  H01L23/528 ,  H01L27/11526 ,  H01L23/522 ,  H01L25/065 ,  H01L23/00 ,  H01L27/11573

    Abstract: An integrated circuit device includes: a lower memory stack including a plurality of lower word lines located on a substrate, an upper memory stack located on the lower memory stack and including a plurality of upper word lines, at least one first lower interconnection layer extending in a horizontal direction at a first vertical level between the lower memory stack and the upper memory stack, and configured to be electrically connected to at least one lower word line selected from the plurality of lower word lines, a separate insulating film covering at least one first lower interconnection layer, and at least one first upper interconnection layer extending in the horizontal direction at a second vertical level higher than the upper memory stack, and configured to be electrically connected to at least one upper word line selected from the upper word lines.

    Semiconductor device and data storage system including the same
    3.
    发明授权
    Semiconductor device and data storage system including the same 有权

    公开(公告)号：US12217800B2

    公开(公告)日：2025-02-04

    申请号：US18591728

    申请日：2024-02-29

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Jaeho Ahn ,  Jiwon Kim ,  Sungmin Hwang ,  Joonsung Lim ,  Sukkang Sung

    IPC: G11C16/10 ,  G11C16/26 ,  H01L23/48 ,  H10B41/27 ,  H10B41/35 ,  H10B41/40 ,  H10B43/27 ,  H10B43/35 ,  H10B43/40

    Abstract: A semiconductor memory device includes: a semiconductor substrate having a first surface and a second surface opposing each other; a back-side insulating layer below the second surface of the semiconductor substrate; an external input/output conductive pattern below the back-side insulating layer; a circuit device including a gate electrode and a source/drain region, on the first surface of the semiconductor substrate; an internal input/output conductive pattern on the first surface of the semiconductor substrate, the internal input/output conductive pattern having at least a portion disposed on the same level as at least a portion of the gate electrode; a through-electrode structure penetrating through the semiconductor substrate and the back-side insulating layer and electrically connected to the internal input/output conductive pattern and the external input/output conductive pattern; and a memory cell array region disposed on a level higher than the circuit device, on the first surface of the semiconductor substrate.

    Integrated circuit device and method of fabricating the same
    8.
    发明授权
    Integrated circuit device and method of fabricating the same 有权

    公开(公告)号：US11581333B2

    公开(公告)日：2023-02-14

    申请号：US17573015

    申请日：2022-01-11

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Jaeho Ahn ,  Woosung Yang ,  Joonsung Lim ,  Sungmin Hwang

    IPC: H01L27/11582 ,  H01L27/11556 ,  H01L23/528 ,  H01L27/11526 ,  H01L23/522 ,  H01L25/065 ,  H01L23/00 ,  H01L27/11573

    Abstract: An integrated circuit device includes: a lower memory stack including a plurality of lower word lines located on a substrate, an upper memory stack located on the lower memory stack and including a plurality of upper word lines, at least one first lower interconnection layer extending in a horizontal direction at a first vertical level between the lower memory stack and the upper memory stack, and configured to be electrically connected to at least one lower word line selected from the plurality of lower word lines, a separate insulating film covering at least one first lower interconnection layer, and at least one first upper interconnection layer extending in the horizontal direction at a second vertical level higher than the upper memory stack, and configured to be electrically connected to at least one upper word line selected from the upper word lines.

    SEMICONDUCTOR DEVICE AND DATA STORAGE SYSTEM INCLUDING THE SAME
    10.
    发明申请
    SEMICONDUCTOR DEVICE AND DATA STORAGE SYSTEM INCLUDING THE SAME 有权

    公开(公告)号：US20220157838A1

    公开(公告)日：2022-05-19

    申请号：US17467568

    申请日：2021-09-07

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Jaeho Ahn ,  Jiwon Kim ,  Sungmin Hwang ,  Joonsung Lim ,  Sukkang Sung

    IPC: H01L27/11524 ,  H01L27/11519 ,  H01L27/11526 ,  H01L27/11556 ,  H01L27/11565 ,  H01L27/1157 ,  H01L27/11573 ,  H01L27/11582 ,  H01L23/522 ,  H01L23/528

    Abstract: A semiconductor device and a data storage system including the same, the semiconductor device including: a first structure including a peripheral circuit; and a second structure, including: a pattern structure; an upper insulating layer; a stack structure between the first structure and the pattern structure and including first and second stack portions spaced apart from each other, the first and second stack portions respectively including horizontal conductive layers and interlayer insulating layers alternately stacked; separation structures penetrating through the stack structure; memory vertical structures penetrating through the first stack portion; and a contact structure penetrating through the second stack portion, the pattern structure, and the upper insulating layer, wherein the contact structure includes a lower contact plug penetrating through at least the second stack portion and an upper contact plug contacting the lower contact plug and extending upwardly to penetrate through the pattern structure and the upper insulating layer.

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