Magnetic memory devices having a uniform perpendicular nonmagnetic metal rich anisotropy enhanced pattern
    2.
    发明授权
    Magnetic memory devices having a uniform perpendicular nonmagnetic metal rich anisotropy enhanced pattern 有权
    磁记忆装置具有均匀的垂直非磁性富金属各向异性增强图案

    公开(公告)号:US08692342B2

    公开(公告)日:2014-04-08

    申请号:US13181957

    申请日:2011-07-13

    摘要: Provided are magnetic memory devices, electronic systems and memory cards including the same, methods of manufacturing the same, and methods of controlling a magnetization direction of a magnetic pattern. In a magnetic memory device, atomic-magnetic moments non-parallel to one surface of a free pattern increase in the free pattern. Therefore, critical current density of the magnetic memory device may be reduced, such that power consumption of the magnetic memory device is reduced or minimized and/or the magnetic memory device is improved or optimized for a higher degree of integration.

    摘要翻译: 提供了磁存储器件,电子系统和包括其的存储卡,其制造方法以及控制磁性图案的磁化方向的方法。 在磁存储器件中,不平行于自由图案的一个表面的原子磁矩在自由图案中增加。 因此,可以减小磁存储器件的临界电流密度,使得磁存储器件的功耗被降低或最小化,和/或磁存储器件被改进或优化以达到更高的集成度。

    Method of Fabricating Semiconductor Device and Apparatus for Fabricating the Same
    3.
    发明申请
    Method of Fabricating Semiconductor Device and Apparatus for Fabricating the Same 有权
    制造半导体器件的方法及其制造方法

    公开(公告)号:US20120135544A1

    公开(公告)日:2012-05-31

    申请号:US13305377

    申请日:2011-11-28

    摘要: Provided is a method of fabricating a semiconductor device. The method of fabricating a semiconductor device includes forming a plurality of magnetic memory patterns spaced apart from each other on a substrate, with each of the magnetic memory patterns including a free pattern, a tunnel barrier pattern, and a reference pattern which are stacked on the substrate, performing a magnetic thermal treatment process on the magnetic memory patterns, and forming a passivation layer on the magnetic memory patterns. The magnetic thermal treatment process and the forming of the passivation layer are simultaneously performed in one reactor.

    摘要翻译: 提供一种制造半导体器件的方法。 制造半导体器件的方法包括在衬底上形成彼此间隔开的多个磁存储器图案,其中每个磁存储器图案包括堆叠在基板上的自由图案,隧道势垒图案和参考图案 对磁存储器图案执行磁热处理工艺,以及在磁存储器图案上形成钝化层。 磁性热处理工艺和钝化层的形成同时在一个反应​​器中进行。

    Magnetic memory devices having a uniform perpendicular nonmagnetic rich antisotropy enhanced pattern
    5.
    发明授权
    Magnetic memory devices having a uniform perpendicular nonmagnetic rich antisotropy enhanced pattern 有权
    磁记忆体装置具有均匀的垂直非磁性富集反相增强图案

    公开(公告)号:US08987850B2

    公开(公告)日:2015-03-24

    申请号:US14196666

    申请日:2014-03-04

    摘要: Provided are magnetic memory devices, electronic systems and memory cards including the same, methods of manufacturing the same, and methods of controlling a magnetization direction of a magnetic pattern. In a magnetic memory device, atomic-magnetic moments non-parallel to one surface of a free pattern increase in the free pattern. Therefore, critical current density of the magnetic memory device may be reduced, such that power consumption of the magnetic memory device is reduced or minimized and/or the magnetic memory device is improved or optimized for a higher degree of integration.

    摘要翻译: 提供了磁存储器件,电子系统和包括其的存储卡,其制造方法以及控制磁性图案的磁化方向的方法。 在磁存储器件中,不平行于自由图案的一个表面的原子磁矩在自由图案中增加。 因此,可以减小磁存储器件的临界电流密度,使得磁存储器件的功耗被降低或最小化,和/或磁存储器件被改进或优化以达到更高的集成度。

    MAGNETIC MEMORY DEVICES INCLUDING MAGNETIC LAYERS SEPARATED BY TUNNEL BARRIERS
    7.
    发明申请
    MAGNETIC MEMORY DEVICES INCLUDING MAGNETIC LAYERS SEPARATED BY TUNNEL BARRIERS 审中-公开
    包括由隧道障碍物分离的磁层的磁记忆装置

    公开(公告)号:US20140191346A1

    公开(公告)日:2014-07-10

    申请号:US14206053

    申请日:2014-03-12

    IPC分类号: H01L43/02

    摘要: A magnetic memory device may include a first vertical magnetic layer, a non-magnetic layer on the first vertical magnetic layer, and a first junction magnetic layer on the non-magnetic layer, with the non-magnetic layer being between the first vertical magnetic layer and the first junction magnetic layer. A tunnel barrier may be on the first junction magnetic layer, with the first junction magnetic layer being between the non-magnetic layer and the tunnel barrier. A second junction magnetic layer may be on the tunnel barrier with the tunnel barrier being between the first and second junction magnetic layers, and a second vertical magnetic layer may be on the second junction magnetic layer with the second junction magnetic layer being between the tunnel barrier and the second vertical magnetic layer.

    摘要翻译: 磁存储器件可以包括第一垂直磁性层,第一垂直磁性层上的非磁性层和非磁性层上的第一结磁性层,其中非磁性层位于第一垂直磁性层之间 和第一结磁性层。 隧道势垒可以在第一结磁性层上,其中第一结磁性层位于非磁性层和隧道势垒之间。 第二结磁性层可以在隧道势垒上,其中隧道势垒在第一和第二结磁层之间,第二垂直磁性层可以在第二结磁性层上,第二结磁性层位于隧道势垒之间 和第二垂直磁性层。

    Methods of fabricating magnetic memory devices with thin conductive bridges
    9.
    发明授权
    Methods of fabricating magnetic memory devices with thin conductive bridges 有权
    用薄导电桥制造磁存储器件的方法

    公开(公告)号:US08198102B2

    公开(公告)日:2012-06-12

    申请号:US12539747

    申请日:2009-08-12

    IPC分类号: H01L21/00

    CPC分类号: H01L43/12

    摘要: A magnetic memory device includes a free layer and a guide layer on a substrate. An insulating layer is interposed between the free layer and the guide layer. At least one conductive bridge passes through the insulating layer and electrically connects the free layer and the guide layer. A diffusion barrier may be interposed between the guide layer and the insulating layer. The device may further include a reference layer having a fixed magnetization direction on a side of the free layer opposite the insulating layer and a tunnel barrier between the reference layer and the free layer. Related fabrication methods are also described.

    摘要翻译: 磁存储器件包括在衬底上的自由层和引导层。 绝缘层介于自由层和引导层之间。 至少一个导电桥通过绝缘层并电连接自由层和引导层。 可以在引导层和绝缘层之间插入扩散阻挡层。 该装置还可以包括在与绝缘层相对的自由层的一侧上具有固定的磁化方向的参考层和参考层与自由层之间的隧道势垒。 还描述了相关的制造方法。

    MAGNETIC MEMORY DEVICES
    10.
    发明申请
    MAGNETIC MEMORY DEVICES 有权
    磁记忆装置

    公开(公告)号:US20110303996A1

    公开(公告)日:2011-12-15

    申请号:US13159236

    申请日:2011-06-13

    IPC分类号: H01L29/82

    摘要: A magnetic memory device includes a reference magnetic layer having a fixed magnetization direction, a tunnel barrier layer on the reference magnetic layer, a free layer having a variable magnetization direction on the tunnel barrier layer opposite the reference magnetic layer, and a magnetization reversal auxiliary layer on the free layer. The magnetization reversal auxiliary layer has a fixed magnetization direction that is substantially perpendicular to a plane along an interface between the tunnel barrier layer and the reference layer. The magnetization reversal auxiliary layer may be directly on the free layer, or an exchange coupling control layer may be provided between the magnetization reversal auxiliary layer and the free layer.

    摘要翻译: 一种磁存储器件包括具有固定的磁化方向的参考磁性层,参考磁性层上的隧道势垒层,在与参考磁性层相对的隧道势垒层上具有可变的磁化方向的自由层和磁化反转辅助层 在自由层上。 磁化反转辅助层具有固定的磁化方向,其基本上垂直于沿着隧道势垒层和参考层之间的界面的平面。 磁化反转辅助层可以直接在自由层上,或者可以在磁化反转辅助层和自由层之间提供交换耦合控制层。