Method for manufacturing printed circuit board with thin film capacitor embedded therein
    3.
    发明授权
    Method for manufacturing printed circuit board with thin film capacitor embedded therein 失效
    制造具有薄膜电容器的印刷电路板的制造方法

    公开(公告)号:US07485411B2

    公开(公告)日:2009-02-03

    申请号:US11700864

    申请日:2007-02-01

    IPC分类号: G03C5/00

    摘要: In a method for manufacturing a printed circuit board with a thin film capacitor embedded therein, a conductive metal is sputtered via a first mask to form a lower electrode. A dielectric material is sputtered via a second mask to form a dielectric layer. The conductive metal is sputtered via a third mask to form an upper electrode. An insulating layer is stacked on a stack body with the upper electrode formed therein and via holes are perforated from a top surface of the insulating layer to a top surface of the lower electrode and from the top surface of the insulating layer to a top surface of the upper electrode formed on the substrate. Also, the stack body with the via holes formed therein is electrolytically and electrolessly plated.

    摘要翻译: 在其中嵌入有薄膜电容器的印刷电路板的制造方法中,通过第一掩模溅射导电金属以形成下电极。 通过第二掩模溅射介电材料以形成电介质层。 通过第三掩模溅射导电金属以形成上电极。 绝缘层堆积在堆叠体上,上电极形成在其中,并且通孔从绝缘层的顶表面穿孔到下电极的顶表面,并从绝缘层的顶表面到 上电极形成在基板上。 此外,其中形成有通孔的堆叠体是电解和无电镀的。

    Method for manufacturing printed circuit board with thin film capacitor embedded therein
    4.
    发明申请
    Method for manufacturing printed circuit board with thin film capacitor embedded therein 失效
    制造具有薄膜电容器的印刷电路板的制造方法

    公开(公告)号:US20070178412A1

    公开(公告)日:2007-08-02

    申请号:US11700864

    申请日:2007-02-01

    IPC分类号: G03C5/00

    摘要: In a method for manufacturing a printed circuit board with a thin film capacitor embedded therein, a conductive metal is sputtered via a first mask to form a lower electrode. A dielectric material is sputtered via a second mask to form a dielectric layer. The conductive metal is sputtered via a third mask to form an upper electrode. An insulating layer is stacked on a stack body with the upper electrode formed therein and via holes are perforated from a top surface of the insulating layer to a top surface of the lower electrode and from the top surface of the insulating layer to a top surface of the upper electrode formed on the substrate. Also, the stack body with the via holes formed therein is electrolytically and electrolessly plated.

    摘要翻译: 在其中嵌入有薄膜电容器的印刷电路板的制造方法中,通过第一掩模溅射导电金属以形成下电极。 通过第二掩模溅射介电材料以形成电介质层。 通过第三掩模溅射导电金属以形成上电极。 绝缘层堆积在堆叠体上,上电极形成在其中,并且通孔从绝缘层的顶表面穿孔到下电极的顶表面,并从绝缘层的顶表面到 上电极形成在基板上。 此外,其中形成有通孔的堆叠体是电解和无电镀的。