摘要:
At least a part of the surface of a crystalline silicon semiconductor substrate is rendered porous to convert at least a part of the crystalline silicon semiconductor substrate to a porous silicon layer. A catalytic metal layer is formed on the porous silicon layer. An amorphous silicon thin film is formed on the catalytic metal layer. The amorphous silicon thin film is heated to monocrystallize the amorphous silicon thin film, thereby converting the amorphous silicon thin film to a crystalline silicon thin film. The crystalline silicon semiconductor substrate, provided with the crystalline silicon thin film, is joined to a support substrate so that the crystalline silicon thin film faces the support substrate. The crystalline silicon semiconductor substrate, together with the porous silicon layer, which is the crystalline silicon semiconductor substrate in its portion converted to a porous layer, is separated and removed from the crystalline silicon thin film joined to the support substrate. By virtue of the above constitution, a process for producing a crystalline silicon thin film can be realized which enables, for example, the temperature required in the production process of a crystalline silicon thin film to be lowered to improve the quality of the crystalline silicon thin film, can realize close control of a steep dopant concentration gradient and the like, and can produce a crystalline silicon thin film suitable for an increase in fabrication density and a reduction in layer thickness of semiconductor devices.
摘要:
Concave and convex are formed on the substrate 1, the amorphous silicon layer 4 is formed on the metallic catalyst 3 dispersed and arranged in a dotted shape in the concave portion of the concave and convex, the crystal phases 5 having respective orientations from the metallic catalyst 3 are grown, further the crystal phases 5 are integrated with each other by continuing heat treatment and the polycrystalline silicon layer 6 is formed. A crystalline silicon semiconductor device and its method for fabrication which are costly advantageous and capable of efficiently forming the polycrystalline silicon layer of a predetermined thickness needed as a semiconductor device are provided. Moreover, on the substrate 1, the polycrystalline silicon layer 30 oriented on the face (111), the metallic catalyst 40 consisted of Ni, the polycrystalline silicon layer 50 are formed in turn, further, after on which the amorphous silicon layer 60 of the predetermined thickness is formed, Ni element is diffused within the amorphous silicon layer 60 from the metallic catalyst layer 40 by performing heat treatment, and thereby crystallizing the amorphous silicon layer 60 into the polycrystalline silicon layer 60′.
摘要:
A stereoscopic optical system includes, at a distal end of an insertion part of an endoscope, a two-path forming optical system for forming two paths of rays involving a parallax, an image forming optical system for forming images out of light travelling along the respective paths of rays in the two-path forming optical system onto a common region, and an image sensor arranged at an image forming position of the image forming optical system. The stereoscopic optical system is further provided with a time-division path switching means that is capable of switching between the two paths of rays in a time-division manner so that only light coming from either one of the two paths of rays formed by the two-path forming optical system enters the image forming optical system.
摘要:
An endoscope system has a light source apparatus and an endoscope including an illumination optical system and an objective optical system. At least the objective optical system of the endoscope is provided with an adjustable diaphragm, and in a light path in one of the light source apparatus, the illumination optical system, and the objective optical system, an insertable/retractable filter for observation for special light is provided. The adjustable diaphragm performs a closing operation or an opening operation only when the filter for observation for special light is inserted into the light path.
摘要:
To provide a semiconductor device including a pair of antifuse elements at either a high level or a low level, an OR circuit that outputs different logic information for a case that at least one of the antifuse elements is at a high level and a case that both of the antifuse elements are at a low level, and an exclusive OR circuit that outputs different logic information for a case that the logic states are different from each other and a case that they are same as each other.
摘要:
A light reuse sheet includes a reflective surface having an uneven configuration, the reflective surface in order to reflect light in a specific direction so as to cause light to be incident to a solar battery cell, the light being incident to a solar battery module, or in order to exit light in a specific direction by reflecting the light, the light being emitted from a light emitting element of a light source module. The reflective surface satisfies the following formula where a length in a horizontal direction of a solar battery cell or a light emitting element is represented by Lx; a length in a vertical direction of a solar battery cell or a light emitting element is represented by Ly; an angle formed between a direction of an uneven configuration of the reflective surface and an edge in a horizontal direction of the solar battery cell or the light emitting element is represented by φ; and maximum width of light which passes between adjacent solar battery cells and which is reflected by a light reuse sheet and is incident to a light receiving face of a solar battery cell or maximum width of light which is not emitted from a light emitting element in a specific direction and which exits in a specific direction by reflecting the light at a light reuse sheet is represented by A. f φ = 0 = Ly · cos φ - Lx · sin φ - A ( cos 2 φ - sin 2 φ ) ( Formula 1 )
摘要:
There is provided a projector having a point light source disposed to an edge of an optical fiber for transmitting exciting light and including a fluorescent illuminant for emitting fluorescence by being exited by the exiting light, a light collecting optical system for collecting the fluorescence emitted from the point light source, a reflective display device for reflecting the fluorescence collected by the light collecting optical system and overlapping the fluorescence with an image signal, an outgoing aperture for stopping down the fluorescence overlapped with the image signal by the reflective display device, wherein the outgoing aperture and the point light source are disposed side by side in the vicinity of the front focusing surface of the light collecting optical system. With this arrangement, a bright projected image can be obtained while disposing the outgoing aperture and the point light source sufficiently near to each other, reducing aberration, and reducing the diameter of a collecting lens so that the overall size of the projector can be reduced.
摘要:
To provide a semiconductor device including a pair of antifuse elements at either a high level or a low level, an OR circuit that outputs different logic information for a case that at least one of the antifuse elements is at a high level and a case that both of the antifuse elements are at a low level, and an exclusive OR circuit that outputs different logic information for a case that the logic states are different from each other and a case that they are same as each other.
摘要:
The inner surface shape of a hole, in particular, the inner surface shape of a hole the entry of which is narrow and which becomes wider further in from the entry, can be measured at a high level of accuracy. An inner surface measuring apparatus is provided which comprises: a low coherent light source that outputs low coherent light in to two; a low coherent light dividing section that divides one portion of the low coherent light; a light path length adjusting section that adjusts a light path length of one of the low coherent lights divided by the low coherent light dividing section; a straight rod shaped probe that irradiates the other of the low coherent lights divided by the low coherent light dividing section from a front end section onto a measurement object arranged in a direction intersecting with the lengthwise direction of the probe; a low coherent light multiplexing section that multiplexes a low coherent light that returns having been reflected on the measurement object with the one low coherent light whose light path length has been adjusted by the light path length adjusting section; a light detector that detects the multiplexed low coherent light; and a rotation mechanism that relatively rotates the probe and the measurement object about an axis along the lengthwise direction of the probe.
摘要:
An illumination light detecting optical system includes an element emitting excitation light; an insertion part of a long-narrow-shape; a fluorescence luminescence component arranged near a top of the insertion part; an excitation light guiding element which leads the excitation light emitted from the light emitting element to the fluorescence luminescence component; and a light detecting element which detects return light which is a part of the illumination light. The optical system is also provided with a pillar-shaped transparent component for irradiating illumination light arranged coaxially at a forward position of the fluorescence luminescence component; an illuminating-light-extracting-element for extracting the illumination light from the pillar-shaped transparent component, out of the illumination light which enters into the inside of the pillar-shaped transparent component; and a deflecting element by which the extracted illumination light is directed toward the light detecting element.