Process for producing crystalline silicon thin film
    1.
    发明授权
    Process for producing crystalline silicon thin film 失效
    生产晶体硅薄膜的方法

    公开(公告)号:US06468841B2

    公开(公告)日:2002-10-22

    申请号:US09829450

    申请日:2001-04-10

    IPC分类号: H01L2100

    摘要: At least a part of the surface of a crystalline silicon semiconductor substrate is rendered porous to convert at least a part of the crystalline silicon semiconductor substrate to a porous silicon layer. A catalytic metal layer is formed on the porous silicon layer. An amorphous silicon thin film is formed on the catalytic metal layer. The amorphous silicon thin film is heated to monocrystallize the amorphous silicon thin film, thereby converting the amorphous silicon thin film to a crystalline silicon thin film. The crystalline silicon semiconductor substrate, provided with the crystalline silicon thin film, is joined to a support substrate so that the crystalline silicon thin film faces the support substrate. The crystalline silicon semiconductor substrate, together with the porous silicon layer, which is the crystalline silicon semiconductor substrate in its portion converted to a porous layer, is separated and removed from the crystalline silicon thin film joined to the support substrate. By virtue of the above constitution, a process for producing a crystalline silicon thin film can be realized which enables, for example, the temperature required in the production process of a crystalline silicon thin film to be lowered to improve the quality of the crystalline silicon thin film, can realize close control of a steep dopant concentration gradient and the like, and can produce a crystalline silicon thin film suitable for an increase in fabrication density and a reduction in layer thickness of semiconductor devices.

    摘要翻译: 晶体硅半导体衬底的表面的至少一部分被多孔化以将至少一部分晶体硅半导体衬底转化为多孔硅层。 在多孔硅层上形成催化金属层。 在催化金属层上形成非晶硅薄膜。 加热非晶硅薄膜以使非晶硅薄膜单晶化,从而将非晶硅薄膜转化为晶体硅薄膜。 设置有晶体硅薄膜的晶体硅半导体衬底被接合到支撑衬底,使得晶体硅薄膜面向支撑衬底。 结晶硅半导体衬底与多孔硅层一起被转换为多孔层的部分中的晶体硅半导体衬底从与支撑衬底接合的晶体硅薄膜分离并除去。 通过上述结构,可以实现制造结晶硅薄膜的方法,其例如可以降低结晶硅薄膜的生产过程所需的温度,以提高晶体硅薄膜的质量 可以实现陡峭的掺杂剂浓度梯度等的紧密控制,并且可以产生适合于增加制造密度和减小半导体器件的层厚度的晶体硅薄膜。

    Crystalline silicon semiconductor device and method for fabricating same
    2.
    发明授权
    Crystalline silicon semiconductor device and method for fabricating same 失效
    晶体硅半导体器件及其制造方法

    公开(公告)号:US06777714B2

    公开(公告)日:2004-08-17

    申请号:US09779436

    申请日:2001-02-09

    IPC分类号: H01L31036

    摘要: Concave and convex are formed on the substrate 1, the amorphous silicon layer 4 is formed on the metallic catalyst 3 dispersed and arranged in a dotted shape in the concave portion of the concave and convex, the crystal phases 5 having respective orientations from the metallic catalyst 3 are grown, further the crystal phases 5 are integrated with each other by continuing heat treatment and the polycrystalline silicon layer 6 is formed. A crystalline silicon semiconductor device and its method for fabrication which are costly advantageous and capable of efficiently forming the polycrystalline silicon layer of a predetermined thickness needed as a semiconductor device are provided. Moreover, on the substrate 1, the polycrystalline silicon layer 30 oriented on the face (111), the metallic catalyst 40 consisted of Ni, the polycrystalline silicon layer 50 are formed in turn, further, after on which the amorphous silicon layer 60 of the predetermined thickness is formed, Ni element is diffused within the amorphous silicon layer 60 from the metallic catalyst layer 40 by performing heat treatment, and thereby crystallizing the amorphous silicon layer 60 into the polycrystalline silicon layer 60′.

    摘要翻译: 在基板1上形成凹凸形状,在凹凸部的凹部分散配置的金属催化剂3上形成非晶硅层4,从金属催化剂各自取向的结晶相5 3生长,另外通过连续热处理使晶相5彼此一体化,形成多晶硅层6。 提供一种晶体硅半导体器件及其制造方法,其成本高昂且能够有效地形成作为半导体器件所需的预定厚度的多晶硅层。 此外,在基板1上,取向于表面(111)上的多晶硅层30,由Ni构成的金属催化剂40依次形成多晶硅层50,之后,再次形成多晶硅层60 通过进行热处理,形成规定的厚度,Ni元素通过热处理从金属催化剂层40扩散到非晶硅层60内,从而使非晶硅层60结晶成多晶硅层60'。

    Stereoscopic optical system, and optical apparatus for stereoscopic measurement, stereoscopic measurement apparatus and stereoscopic observation apparatus each using the same
    3.
    发明授权
    Stereoscopic optical system, and optical apparatus for stereoscopic measurement, stereoscopic measurement apparatus and stereoscopic observation apparatus each using the same 有权
    立体光学系统和用于立体测量的光学装置,立体测量装置和立体观察装置

    公开(公告)号:US08648896B2

    公开(公告)日:2014-02-11

    申请号:US12653928

    申请日:2009-12-17

    申请人: Susumu Takahashi

    发明人: Susumu Takahashi

    IPC分类号: H04N7/18

    摘要: A stereoscopic optical system includes, at a distal end of an insertion part of an endoscope, a two-path forming optical system for forming two paths of rays involving a parallax, an image forming optical system for forming images out of light travelling along the respective paths of rays in the two-path forming optical system onto a common region, and an image sensor arranged at an image forming position of the image forming optical system. The stereoscopic optical system is further provided with a time-division path switching means that is capable of switching between the two paths of rays in a time-division manner so that only light coming from either one of the two paths of rays formed by the two-path forming optical system enters the image forming optical system.

    摘要翻译: 立体光学系统在内窥镜的插入部的前端包括用于形成涉及视差的两条光线路的双路形成光学系统,用于形成沿着相应的光线行进的光的图像的成像光学系统 将双路形成光学系统中的光线路径映射到公共区域,以及布置在图像形成光学系统的图像形成位置处的图像传感器。 立体光学系统还具有时分路径切换装置,该时分路径切换装置能够以时分方式切换两条光线之间的路径,使得只有来自由两个光线形成的两条光线中的任一条光线 路径形成光学系统进入成像光学系统。

    Semiconductor device having nonvolatile memory element and manufacturing method thereof
    5.
    发明授权
    Semiconductor device having nonvolatile memory element and manufacturing method thereof 有权
    具有非易失性存储元件的半导体器件及其制造方法

    公开(公告)号:US08422327B2

    公开(公告)日:2013-04-16

    申请号:US12801124

    申请日:2010-05-24

    IPC分类号: G11C17/18

    摘要: To provide a semiconductor device including a pair of antifuse elements at either a high level or a low level, an OR circuit that outputs different logic information for a case that at least one of the antifuse elements is at a high level and a case that both of the antifuse elements are at a low level, and an exclusive OR circuit that outputs different logic information for a case that the logic states are different from each other and a case that they are same as each other.

    摘要翻译: 为了提供一种包括高电平或低电平的一对反熔丝元件的半导体器件,OR电路为至少一个反熔丝元件处于高电平的情况下输出不同的逻辑信息,以及两个 的反熔丝元件为低电平,异或电路输出逻辑状态彼此不同的情况下的不同的逻辑信息以及彼此相同的情况。

    Light reuse sheet, solar battery module, and light source module
    6.
    发明申请
    Light reuse sheet, solar battery module, and light source module 审中-公开
    光再利用片,太阳能电池模块和光源模块

    公开(公告)号:US20110240095A1

    公开(公告)日:2011-10-06

    申请号:US12998677

    申请日:2009-11-19

    IPC分类号: H01L31/0232 H01J1/62 G02B5/08

    摘要: A light reuse sheet includes a reflective surface having an uneven configuration, the reflective surface in order to reflect light in a specific direction so as to cause light to be incident to a solar battery cell, the light being incident to a solar battery module, or in order to exit light in a specific direction by reflecting the light, the light being emitted from a light emitting element of a light source module. The reflective surface satisfies the following formula where a length in a horizontal direction of a solar battery cell or a light emitting element is represented by Lx; a length in a vertical direction of a solar battery cell or a light emitting element is represented by Ly; an angle formed between a direction of an uneven configuration of the reflective surface and an edge in a horizontal direction of the solar battery cell or the light emitting element is represented by φ; and maximum width of light which passes between adjacent solar battery cells and which is reflected by a light reuse sheet and is incident to a light receiving face of a solar battery cell or maximum width of light which is not emitted from a light emitting element in a specific direction and which exits in a specific direction by reflecting the light at a light reuse sheet is represented by A.  f  φ = 0 = Ly · cos   φ - Lx · sin   φ - A  ( cos 2  φ - sin 2   φ ) ( Formula   1 )

    摘要翻译: 光再利用片材包括具有不均匀构造的反射表面,反射表面以反射特定方向的光,以使光入射到太阳能电池单元,该光入射到太阳能电池模块,或 为了通过反射光而在特定方向上退出光,光从光源模块的发光元件发射。 反射面满足下式,其中太阳能电池单元或发光元件的水平方向上的长度由Lx表示; 太阳能电池单元或发光元件的垂直方向的长度由Ly表示; 在太阳能电池单元或发光元件的反射表面的不均匀构造的方向与水平方向的边缘之间形成的角度由&phgr; 和相邻的太阳能电池单元之间通过并由光再利用片材反射并入射到太阳能电池单元的光接收面的光的最大宽度或不从发光元件发射的最大宽度的光 特定方向,通过将光反射在光再利用片材上而沿特定方向退出。 = 0 = Ly·cosθ&phgr - sin;; - 公式(公式1)

    Projector
    7.
    发明授权
    Projector 失效
    投影机

    公开(公告)号:US07854521B2

    公开(公告)日:2010-12-21

    申请号:US11644147

    申请日:2006-12-22

    申请人: Susumu Takahashi

    发明人: Susumu Takahashi

    IPC分类号: G03B21/00

    CPC分类号: G03B21/26 G03B21/005

    摘要: There is provided a projector having a point light source disposed to an edge of an optical fiber for transmitting exciting light and including a fluorescent illuminant for emitting fluorescence by being exited by the exiting light, a light collecting optical system for collecting the fluorescence emitted from the point light source, a reflective display device for reflecting the fluorescence collected by the light collecting optical system and overlapping the fluorescence with an image signal, an outgoing aperture for stopping down the fluorescence overlapped with the image signal by the reflective display device, wherein the outgoing aperture and the point light source are disposed side by side in the vicinity of the front focusing surface of the light collecting optical system. With this arrangement, a bright projected image can be obtained while disposing the outgoing aperture and the point light source sufficiently near to each other, reducing aberration, and reducing the diameter of a collecting lens so that the overall size of the projector can be reduced.

    摘要翻译: 提供一种具有点光源的投影仪,其设置在用于透射激发光的光纤的边缘并且包括用于通过出射光射出而发射荧光的荧光发光体;聚光光学系统,用于收集从所述光源发出的荧光 反射显示装置,用于反射由聚光光学系统收集的荧光并将荧光与图像信号重叠,用于通过反射显示装置停止与图像信号重叠的荧光的出射孔,其中, 光圈和点光源并排设置在聚光光学系统的前聚焦表面附近。 通过这种布置,可以获得明亮的投影图像,同时将出射孔和点光源充分地彼此靠近设置,减少像差,并且减小聚光透镜的直径,从而可以减小投影仪的总体尺寸。

    Semiconductor device having nonvolatile memory element and manufacturing method thereof
    8.
    发明申请
    Semiconductor device having nonvolatile memory element and manufacturing method thereof 有权
    具有非易失性存储元件的半导体器件及其制造方法

    公开(公告)号:US20100302833A1

    公开(公告)日:2010-12-02

    申请号:US12801124

    申请日:2010-05-24

    IPC分类号: G11C17/00 G11C29/04

    摘要: To provide a semiconductor device including a pair of antifuse elements at either a high level or a low level, an OR circuit that outputs different logic information for a case that at least one of the antifuse elements is at a high level and a case that both of the antifuse elements are at a low level, and an exclusive OR circuit that outputs different logic information for a case that the logic states are different from each other and a case that they are same as each other.

    摘要翻译: 为了提供一种包括高电平或低电平的一对反熔丝元件的半导体器件,OR电路为至少一个反熔丝元件处于高电平的情况下输出不同的逻辑信息,以及两个 的反熔丝元件为低电平,异或电路输出逻辑状态彼此不同的情况下的不同的逻辑信息以及彼此相同的情况。

    Inner surface measuring apparatus
    9.
    发明授权
    Inner surface measuring apparatus 有权
    内表面测量仪

    公开(公告)号:US07764362B2

    公开(公告)日:2010-07-27

    申请号:US12315444

    申请日:2008-12-02

    申请人: Susumu Takahashi

    发明人: Susumu Takahashi

    IPC分类号: G01B11/02 G01N21/00

    CPC分类号: G01B11/12 G01B11/2441

    摘要: The inner surface shape of a hole, in particular, the inner surface shape of a hole the entry of which is narrow and which becomes wider further in from the entry, can be measured at a high level of accuracy. An inner surface measuring apparatus is provided which comprises: a low coherent light source that outputs low coherent light in to two; a low coherent light dividing section that divides one portion of the low coherent light; a light path length adjusting section that adjusts a light path length of one of the low coherent lights divided by the low coherent light dividing section; a straight rod shaped probe that irradiates the other of the low coherent lights divided by the low coherent light dividing section from a front end section onto a measurement object arranged in a direction intersecting with the lengthwise direction of the probe; a low coherent light multiplexing section that multiplexes a low coherent light that returns having been reflected on the measurement object with the one low coherent light whose light path length has been adjusted by the light path length adjusting section; a light detector that detects the multiplexed low coherent light; and a rotation mechanism that relatively rotates the probe and the measurement object about an axis along the lengthwise direction of the probe.

    摘要翻译: 孔的内表面形状,特别是孔的内表面形状,其入口窄,并且从入口进一步变宽,可以高精度地测量。 提供一种内表面测量装置,其包括:低相干光源,其将低相干光输出到两个; 低相干光分割部分,其将一部分低相干光分开; 光路长度调整部,调整由所述低相干光分割部分分割的所述低相干光之一的光路长度; 直杆形探针,其将从前端部分分离的低相干光分离部分的低相干光的另一个照射到沿与探针的长度方向相交的方向布置的测量对象; 低相干光复用部分,其将已经在测量对象上反射的返回的低相干光与由光路长度调节部分调整光路长度的一个低相干光复用; 检测多路复用低相干光的光检测器; 以及旋转机构,其使探头和测量对象沿着探针的长度方向的轴线相对旋转。

    Illumination light detecting optical system and optical apparatus and endoscope apparatus provided with the same
    10.
    发明授权
    Illumination light detecting optical system and optical apparatus and endoscope apparatus provided with the same 有权
    照明光检测光学系统及具备该光学系统的光学装置及内窥镜装置

    公开(公告)号:US07667211B2

    公开(公告)日:2010-02-23

    申请号:US12152333

    申请日:2008-05-13

    申请人: Susumu Takahashi

    发明人: Susumu Takahashi

    IPC分类号: F21V9/16

    摘要: An illumination light detecting optical system includes an element emitting excitation light; an insertion part of a long-narrow-shape; a fluorescence luminescence component arranged near a top of the insertion part; an excitation light guiding element which leads the excitation light emitted from the light emitting element to the fluorescence luminescence component; and a light detecting element which detects return light which is a part of the illumination light. The optical system is also provided with a pillar-shaped transparent component for irradiating illumination light arranged coaxially at a forward position of the fluorescence luminescence component; an illuminating-light-extracting-element for extracting the illumination light from the pillar-shaped transparent component, out of the illumination light which enters into the inside of the pillar-shaped transparent component; and a deflecting element by which the extracted illumination light is directed toward the light detecting element.

    摘要翻译: 照明光检测光学系统包括发射激发光的元件; 长窄形的插入部分; 布置在所述插入部的顶部附近的荧光发光部件; 激发光引导元件,其将从发光元件发射的激发光引导到荧光发光部件; 以及光检测元件,其检测作为照明光的一部分的返回光。 光学系统还设置有用于照射在荧光发光部件的前方同轴布置的照明光的柱状透明部件; 用于从进入柱状透明部件的内部的照明光中取出来自柱状透明部件的照明光的照明光提取部件; 以及偏转元件,通过该偏转元件,提取的照明光被引向光检测元件。