公开(公告)号：US5007374A

公开(公告)日：1991-04-16

申请号：US324668

申请日：1989-03-17

申请人： Shunpei Yamazaki ,  Shinji Imatou ,  Mitsunori Tsuchiya ,  Kenji Itoh ,  Takashi Inushima ,  Atsushi Kawano

发明人： Shunpei Yamazaki ,  Shinji Imatou ,  Mitsunori Tsuchiya ,  Kenji Itoh ,  Takashi Inushima ,  Atsushi Kawano

IPC分类号： H01L21/205 ,  C23C16/26 ,  C23C16/517 ,  H01L21/31

CPC分类号： C23C16/517 ,  C23C16/26

摘要： An apparatus suitable for mass-production of carbon coatings having a high degree of hardness. The apparatus utilized two types of energy input. First energy is inputted to a pair of electrodes provided in a reaction chamber, between which electrodes a deposition space is defined. A number of substrates to be coated are mounted on a plurality of substrate holders which are supplied with a second electric energy. The holders are arranged parallel to the electric field to prevent disturbance of the electric field.

摘要翻译： 适用于大规模生产硬度高的碳涂层的设备。 该装置使用两种类型的能量输入。 将第一能量输入到设置在反应室中的一对电极，在该电极之间限定了沉积空间。 待涂覆的多个基板安装在被提供有第二电能的多个基板保持器上。 保持器平行于电场布置以防止电场的干扰。

公开(公告)号：US07700164B2

公开(公告)日：2010-04-20

申请号：US10978461

申请日：2004-11-02

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： B05D1/08 ,  H05H1/26 ,  H05H1/02 ,  C23C16/00 ,  C23C16/26

CPC分类号： C23C16/5096 ,  C23C16/26 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B7/24056 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S430/146

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

摘要翻译： 在用于制造碳涂层的装置中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

公开(公告)号：US06299957B1

公开(公告)日：2001-10-09

申请号：US09396382

申请日：1999-09-15

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： B32B302

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

公开(公告)号：US6001432A

公开(公告)日：1999-12-14

申请号：US911914

申请日：1997-08-15

申请人： Shunpei Yamazaki ,  Kenji Itoh

发明人： Shunpei Yamazaki ,  Kenji Itoh

IPC分类号： C23C16/458 ,  C23C16/509 ,  C23C16/54 ,  H01J37/32 ,  C23C16/00

CPC分类号： H01J37/32009 ,  C23C16/458 ,  C23C16/5096 ,  C23C16/545 ,  H01J37/32082 ,  H01J2237/3321

摘要： An apparatus for forming films on a substrate is described. The apparatus comprises a vacuum chamber, an evacuating system connected to the vacuum chamber for maintaining a predetermined pressure in the vacuum chamber, a power supply for generating electric energy at high frequencies, a first electrode disposed in the vacuum chamber and connected to the power supply for receiving the electric energy as a cathode, the substrate to be coated being mounted on the first electrode, a second electrode disposed in the vacuum chamber and grounded as an anode, an electric discharging region being formed between the first and second electrodes in order to generate a plasma region therebetween, and a gas feeding system connected to the vacuum chamber for feeding a reactive gas into the vacuum chamber through a gas outlet port formed on the second electrode. The first and second electrodes are located apart from each other by a distance of no wider than 10 mm thereby a high intensity plasma region is formed to make it possible to improve the deposition speed.

摘要翻译： 描述了用于在基板上形成膜的装置。 该设备包括真空室，连接到真空室的抽气系统，用于维持真空室中的预定压力，用于在高频下产生电能的电源;设置在真空室中并连接到电源的第一电极 为了接收作为阴极的电能，待涂布的基板安装在第一电极上，设置在真空室中并接地作为阳极的第二电极，在第一和第二电极之间形成放电区域，以便 在其间产生等离子体区域，以及连接到真空室的气体供给系统，用于通过形成在第二电极上的气体出口将反应气体供给到真空室中。 第一电极和第二电极彼此分开不大于10mm的距离，由此形成高强度等离子体区域，从而可以提高沉积速度。

公开(公告)号：US5932302A

公开(公告)日：1999-08-03

申请号：US909573

申请日：1997-08-13

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： G11B7/254 ,  C23C16/26 ,  C23C16/27 ,  C23C16/509 ,  C23C16/54 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/84 ,  G11B7/005 ,  G11B7/24 ,  G11B7/257 ,  G11B11/105 ,  B05D3/06 ,  B06B1/00

CPC分类号： C23C16/26 ,  C23C16/5096 ,  C23C16/545 ,  G11B11/10584 ,  G11B11/10586 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B11/10582 ,  Y10S427/104 ,  Y10S428/90 ,  Y10S428/913 ,  Y10S430/146 ,  Y10T428/12729 ,  Y10T428/21

摘要： In a process for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions and the coating contains pin-holes having a density of 30/mm.sup.2 or less.

摘要翻译： 在制造碳涂层的方法中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过离子轰击在物体的表面上制造涂层，并且涂层含有密度为30 / mm 2或更小的针孔。

公开(公告)号：US5017264A

公开(公告)日：1991-05-21

申请号：US582769

申请日：1990-09-14

申请人： Shunpei Yamazaki ,  Kenji Itoh

发明人： Shunpei Yamazaki ,  Kenji Itoh

IPC分类号： H01L21/311 ,  H01L21/3213 ,  H01L21/48

CPC分类号： H01L21/481 ,  H01L21/31116 ,  H01L21/31144 ,  H01L21/32139

摘要： An etching method for eliminating carbon material is described. After disposing a substrate to be treated in a CVD reaction chamber, NF.sub.3 is admitted to the chamber and converted into a plasma etchant comprising fluorine ions or radicals by inputting high frequency energy. The carbon material elimination can be applied for chamber cleaning so as to removing carbon deposited debris from the inside of the chamber.

公开(公告)号：US06835523B1

公开(公告)日：2004-12-28

申请号：US09396381

申请日：1999-09-15

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： G11B724

CPC分类号： C23C16/5096 ,  C23C16/26 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B7/24056 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S430/146

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic r cording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

摘要翻译： 在用于制造碳涂层的装置中，诸如磁性介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。

公开(公告)号：US5609774A

公开(公告)日：1997-03-11

申请号：US194571

申请日：1994-02-10

申请人： Shunpei Yamazaki ,  Masaya Kadono ,  Kenji Itoh ,  Toru Takayama ,  Yasuyuki Arai ,  Noriya Ishida

发明人： Shunpei Yamazaki ,  Masaya Kadono ,  Kenji Itoh ,  Toru Takayama ,  Yasuyuki Arai ,  Noriya Ishida

IPC分类号： H01J37/32 ,  H01L21/302

CPC分类号： H01J37/32449 ,  H01J37/32192 ,  H01J37/3244

摘要： A microwave-assisted plasma processing apparatus has a reaction chamber in which a substrate holder is provided to support a substrate to be treated. The holder is formed congruent with the inside of reaction chamber and located to substantially separate a reaction space in the reaction chamber save for a narrow clearance therebetween through which exhausted gas passes from said reaction space into said auxiliary space. By this structure, high density plasmas can be formed in the reaction chamber without substantial loss of input microwave energy.

摘要翻译： 微波辅助等离子体处理装置具有反应室，在该反应室中设置有用于支撑被处理基板的基板支架。 保持器与反应室的内部形成一致并且被设置为基本上分离反应室中的反应空间，除了其间的窄间隙，排出的气体从所述反应空间通过所述反应空间进入所述辅助空间。 通过这种结构，可以在反应室中形成高密度等离子体，而不会大量损失输入的微波能量。

公开(公告)号：US4713518A

公开(公告)日：1987-12-15

申请号：US740764

申请日：1985-06-03

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Susumu Nagayama

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Susumu Nagayama

IPC分类号： B41M5/26 ,  H01L21/302 ,  H01L27/142 ,  H01L31/0224 ,  H01L31/0392 ,  H05K3/02 ,  B23K26/00

CPC分类号： H01L31/03921 ,  H01L21/302 ,  H01L31/022466 ,  H01L31/046 ,  H01L31/0463 ,  H05K3/027 ,  Y02E10/50 ,  Y10S438/94

摘要： In a method of making an electronic device having at least a transparent conductive layer, which includes at least a step of forming a transparent conductive layer member and a step of forming a transparent conductive layer by patterning the transparent conductive layer member using a spot-shaped or linear laser beam or beams, each of which has a short wavelength of 400 nm or less and optical energy greater than the optical energy band gap of the transparent conductive layer.

摘要翻译： 在制造具有至少透明导电层的电子器件的方法中，其至少包括形成透明导电层部件的步骤和通过使用点状形成透明导电层部件来形成透明导电层的步骤 或线性激光束或光束，其每一个具有400nm或更小的短波长和大于透明导电层的光能带隙的光能。

公开(公告)号：US20050089648A1

公开(公告)日：2005-04-28

申请号：US10978461

申请日：2004-11-02

申请人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

发明人： Shunpei Yamazaki ,  Kenji Itoh ,  Shigenori Hayashi

IPC分类号： C23C16/26 ,  C23C16/509 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/84 ,  G11B7/24 ,  G11B11/105 ,  H05H1/24

CPC分类号： C23C16/5096 ,  C23C16/26 ,  G11B5/72 ,  G11B5/74 ,  G11B5/78 ,  G11B5/82 ,  G11B5/8408 ,  G11B7/24056 ,  G11B11/10582 ,  G11B11/10584 ,  G11B11/10586 ,  Y10S430/146

摘要： In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.

摘要翻译： 在用于制造碳涂层的装置中，诸如磁记录介质的物体设置在连接到高频电源的电极的一侧。 向对象提供超声波振动。 在连接到高频电源的电极和接地电极之间产生放电，以在物体表面上制造碳涂层。 此外，将电极间隔设定为6mm以下，将电极间的压力设定为15Torr〜100Torr，由此产生高密度等离子体，以在阳极侧形成离子鞘。 因此，通过轰击离子在物体的表面上制造涂层。