Process for Fabricating High-Precision Objects by High-Resolution Lithography and Dry Deposition and Objects thus Obtained
    2.
    发明申请
    Process for Fabricating High-Precision Objects by High-Resolution Lithography and Dry Deposition and Objects thus Obtained 有权
    通过高分辨率平版印刷法和干法沉积法制备高精度物体的方法

    公开(公告)号:US20140057104A1

    公开(公告)日:2014-02-27

    申请号:US13977642

    申请日:2011-12-26

    摘要: The invention relates to a process for fabricating a high-precision object made of at least one inorganic material, comprising the following steps: using a high-resolution photolithography process, employing X-rays or UV rays depending on the desired degree of precision, in a chosen direction Z, to form a negative mould, which does not deform at the microscale during the steps of the process, in a material able to withstand a step for forming the object by dry deposition and capable of either being removed without altering the object fabricated or being separated from said object; choosing, independently of the normal redox potential of its constituent elements, at least one inorganic material from the set of materials that can be deposited by dry deposition and that allow the object to be fabricated to meet its thermomechanical and environmental specifications; and forming, by means of the non-deformable negative mould, the object to be fabricated by dry deposition of said at least one inorganic material, thereby allowing an object to be fabricated with better than microscale precision, especially with respect to the angle between the walls generated by the dry deposition and said direction Z. The invention is preferably applied to the fabrication of high-precision micromechanical objects, in particular in the aeronautical and clock-/watch-making fields.

    摘要翻译: 本发明涉及一种用于制造由至少一种无机材料制成的高精度物体的方法,包括以下步骤:使用高分辨率光刻工艺,根据期望的精度采用X射线或紫外线,在 选择的方向Z,以形成在该过程的步骤期间在微尺度处不会变形的负模具,能够经受用于通过干沉积形成物体的步骤的材料,并且能够在不改变物体的情况下被移除 制造或与所述物体分离; 选择独立于其组成元素的正常氧化还原电位的至少一种无机材料,其可以通过干沉积沉积并允许物体被制造以满足其热机械和环境规格的材料组; 以及通过所述不可变形的负模具形成通过所述至少一种无机材料的干法沉积而制造的物体,从而允许以比微观精度更好的方式制造物体,特别是相对于 通过干沉积和所述方向Z产生的壁。本发明优选地应用于制造高精度微机械物体,特别是在航空和钟表制造领域。

    Method for forming a protective coating against high-temperature oxidation on a refractory composite material based on silicon and niobium
    9.
    发明授权
    Method for forming a protective coating against high-temperature oxidation on a refractory composite material based on silicon and niobium 有权
    在基于硅和铌的难熔复合材料上形成抗高温氧化保护涂层的方法

    公开(公告)号:US08591992B2

    公开(公告)日:2013-11-26

    申请号:US13243364

    申请日:2011-09-23

    IPC分类号: C23C8/28 B32B18/00

    摘要: The invention relates to a method for forming a protective coating against high-temperature oxidation on a surface of a refractory composite material based on silicon and niobium, wherein chromium present on the surface to be protected is reacted with a reactive gas which contains silicon and oxygen in order to produce a composite coating having two phases, a first phase of which is an oxide phase based on silica which has viscoplastic properties and a second phase of which is based on silicon, chromium and oxygen, and wherein the first phase and second phase are coalesced at high temperature, which allows a protective coating to be formed in which the second phase acts as a reservoir to reform, during operation, the first phase by means of reaction with an oxidising gas. The invention is preferably used in the field of aeronautical engines.

    摘要翻译: 本发明涉及一种在基于硅和铌的难熔复合材料的表面上形成抗高温氧化保护涂层的方法,其中存在于待保护表面上的铬与含有硅和氧的反应性气体反应 为了制备具有两相的复合涂层,其第一相是基于二氧化硅的氧化物相,其具有粘塑性,第二相基于硅,铬和氧,并且其中第一相和第二相 在高温下聚结,这允许形成保护涂层,其中第二相用作储存器,以在操作期间通过与氧化气体的反应来重整第一相。 本发明优选用于航空发动机领域。

    Method for forming a protective coating against high-temperature oxidation on a refractory composite material based on silicon and niobium
    10.
    发明申请
    Method for forming a protective coating against high-temperature oxidation on a refractory composite material based on silicon and niobium 有权
    在基于硅和铌的难熔复合材料上形成抗高温氧化保护涂层的方法

    公开(公告)号:US20120082857A1

    公开(公告)日:2012-04-05

    申请号:US13243364

    申请日:2011-09-23

    摘要: The invention relates to a method for forming a protective coating against high-temperature oxidation on a surface of a refractory composite material based on silicon and niobium, wherein chromium present on the surface to be protected is reacted with a reactive gas which contains silicon and oxygen in order to produce a composite coating having two phases, a first phase of which is an oxide phase based on silica which has viscoplastic properties and a second phase of which is based on silicon, chromium and oxygen, and wherein the first phase and second phase are coalesced at high temperature, which allows a protective coating to be formed in which the second phase acts as a reservoir to reform, during operation, the first phase by means of reaction with an oxidising gas. The invention is preferably used in the field of aeronautical engines.

    摘要翻译: 本发明涉及一种在基于硅和铌的难熔复合材料的表面上形成抗高温氧化保护涂层的方法,其中存在于待保护表面上的铬与含有硅和氧的反应性气体反应 为了制备具有两相的复合涂层,其第一相是基于二氧化硅的氧化物相,其具有粘塑性,第二相基于硅,铬和氧,并且其中第一相和第二相 在高温下聚结,这允许形成保护涂层,其中第二相用作储存器,以在操作期间通过与氧化气体的反应来重整第一相。 本发明优选用于航空发动机领域。