摘要:
A semiconductor device includes a device isolation layer disposed in a substrate and defining an active region, a first gate pattern on the active region, a first insulating layer on the substrate and the first gate pattern, a first body region on the first insulating layer, and a first substrate plug extending from the substrate into the first insulating layer, the first substrate plug penetrating the device isolation layer and contacting the substrate under the device isolation layer.
摘要:
An ESD protection device includes a substrate having an active fin extending in a first direction, a plurality of gate structures extending in a second direction at a given angle with respect to the first direction and partially covering the active fin, an epitaxial layer in a recess on a portion of the active fin between the gate structures, an impurity region under the epitaxial layer, and a contact plug contacting the epitaxial layer. A central portion of the impurity region is thicker than an edge portion of the impurity region, in the first direction. The contact plug lies over the central portion of the impurity region.
摘要:
This invention provides a method for fabricating a semiconductor device comprising the steps of forming buried layers on the silicon substrate; etching an epitaxial layer after said layer is grown up, the step further including the processes of etching selectively the silicon epitaxial layer of well region on which a high speed bipolar transistor is formed to be thin and keeping the silicon epitaxial layer of well region on which nMOS transistor is formed remained the same thickness as grown up; and forming a pMOS transistor, a nMOS transistor and a bipolar transistor. High efficiency and high integration is easily attained in fabricating the high speed bipolar transistor and high performance CMOS transistor on same chip and by reducing the difficulty in processing according to the method of present invention.
摘要:
A semiconductor device includes a substrate including a first active region, a second active region and a field region between the first and second active regions, and a gate structure formed on the substrate to cross the first active region, the second active region and the field region. The gate structure includes a p type metal gate electrode and an n-type metal gate electrode directly contacting each other, the p-type metal gate electrode extends from the first active region less than half way toward the second active region.
摘要:
A semiconductor device includes a substrate including a first active region, a second active region and a field region between the first and second active regions, and a gate structure formed on the substrate to cross the first active region, the second active region and the field region. The gate structure includes a p type metal gate electrode and an n-type metal gate electrode directly contacting each other, the p-type metal gate electrode extends from the first active region less than half way toward the second active region.
摘要:
Ternary CAM cells are provided. The ternary CAM cell includes a pair of half cells. Each of the half cells includes an isolation layer formed at a predetermined region of a semiconductor substrate to define a match cell active region. A search gate electrode and a node gate electrode are placed to cross over the match cell active region. A match line is electrically connected to the match cell active region, which is adjacent to the node gate electrode and is located opposite the search gate electrode. An SRAM cell is provided at the semiconductor substrate adjacent to the match cell active region. The node gate electrode is electrically connected to one of a pair of storage nodes of the SRAM cell.
摘要:
A full CMOS SRAM cell having the capability of having a reduced aspect ratio is described. The SRAM cell includes first and second transfer transistors of n-channel types, first and second driving transistors of the n-channel types and first and second load transistors of p-channel types. Each of the transistors has source and drain regions on opposite sides of a channel region formed in a semiconductor substrate and a gate over the channel region. The cell includes a first common region defined by the drain regions of the first transfer transistor and the first driving transistor connected in series therethrough. A second common region is defined by the drain regions of the second transfer transistor and the second driving transistor connected in series therethrough. The drain region of the first load transistor is disposed adjacent to the first common region between the first and second common regions. The drain region of the second load transistor is disposed between the drain region of the first load transistor and the second common region. First and second gate electrode layers are disposed generally parallel to each other, and respectively serving as the gates of the first driving transistor and the first load transistor and as the gates of the second driving transistor and the second load transistor, wherein each of the first and second gate electrode layers is made of a conductive material of a first level. First and second interconnecting layers are each made of a conductive material of a second level different from the first level, the first interconnecting layer connecting the first common region to the drain region of the first load transistor and the second gate electrode layer, the second interconnecting layer connecting the second common region to the drain region of the second load transistor and the first gate electrode layer.
摘要:
A semiconductor device includes a substrate including a first active region, a second active region and a field region between the first and second active regions, and a gate structure formed on the substrate to cross the first active region, the second active region and the field region. The gate structure includes a p type metal gate electrode and an n-type metal gate electrode directly contacting each other, the p-type metal gate electrode extends from the first active region less than half way toward the second active region.
摘要:
A semiconductor device includes a substrate including a first active region, a second active region and a field region between the first and second active regions, and a gate structure formed on the substrate to cross the first active region, the second active region and the field region. The gate structure includes a p type metal gate electrode and an n-type metal gate electrode directly contacting each other, the p-type metal gate electrode extends from the first active region less than half way toward the second active region.
摘要:
A method for fabricating a BiCMOS device to achieve a maximum performance through a of minimum processing steps, in which the BiCMOS device is exemplary for its high integration and high performance MOS transistors, self-aligned metal contact emitter type bipolar transistors having high load driving force, high performance matching characteristics and high integration, and self-aligned polycrystalline silicon emitter type bipolar transistors having high integration and high speed characteristics in low current, thereby being used in high integration, high speed digital and precise analog system. The method includes a plurality of fabrication steps including ion-implantation, formation of a thin film oxide layer, deposition of a nitride layer, etching of the oxide layer, formation of windows and others, alternately and/or sequentially in a single chip substrate.