公开(公告)号：US5541437A

公开(公告)日：1996-07-30

申请号：US404295

申请日：1995-03-14

申请人： Takamoto Watanabe ,  Shigeru Nonoyama ,  Yukihiro Takeuchi

发明人： Takamoto Watanabe ,  Shigeru Nonoyama ,  Yukihiro Takeuchi

IPC分类号： G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  G01P15/12 ,  G01P15/13 ,  H01L29/84 ,  H01L29/82

CPC分类号： G01P15/131 ,  G01P15/124 ,  G01P2015/0814 ,  Y10S73/01

摘要： In an acceleration sensor having movable gates and a movable electrode and having a signal processing portion, the movable gates generate a differential voltage from acceleration in one direction and its output signal is fed back to the movable electrode. The balance of the movable portion is kept using an electrostatic force which cancels the acceleration acting on the movable portion, and signal detection is stabilized using closed loop control. Since signal detection is on a differential basis, acceleration can be detected in only one direction. Since a change in current is detected as a voltage difference, no carrier wave is required. Since MISFETs having movable gates are formed in pairs, there is no influence of temperature drifts. The use of a differential signal similarly cancels the influence of fluctuations of the power supply. Configuration of an acceleration sensor is thus simplified.

摘要翻译： 在具有可动栅极和可动电极并具有信号处理部分的加速度传感器中，可移动栅极从一个方向的加速度产生差分电压，并将其输出信号反馈到可动电极。 使用抵消作用在可动部上的加速度的静电力来保持可动部的平衡，并且使用闭环控制来稳定信号检测。 由于信号检测是基于差分的，所以只能在一个方向上检测加速度。 由于电流变化被检测为电压差，因此不需要载波。 由于具有可动栅极的MISFET成对成形，所以不会有温度漂移的影响。 差分信号的使用也可以抵消电源波动的影响。 因此，加速度传感器的结构被简化。

公开(公告)号：US5812427A

公开(公告)日：1998-09-22

申请号：US634254

申请日：1996-04-18

申请人： Shigeru Nonoyama ,  Takamoto Watanabe

发明人： Shigeru Nonoyama ,  Takamoto Watanabe

IPC分类号： G01D5/24 ,  G01P15/125 ,  G01P15/13

CPC分类号： G01P15/124 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0814

摘要： A physical amount detecting apparatus, preferably, an acceleration sensor, includes a sensor element, an A/D converter, a control unit and an activation unit. The sensor element is activated by a supply voltage and outputs an electric signal in accordance with a predetermined physical amount. The A/D converter digitizes an analog electric signal and outputs digital data. The control unit calculates a control amount in order to control the sensor element, as the electric signal is set to a predetermined output, based on the digital data, and generates a control signal in accordance with the control amount. The activation unit activates the sensor element in accordance with the control signal. As a result, the control unit outputs a detecting signal indicating a physical amount in accordance with the control amount or the control signal.

摘要翻译： 优选地，加速度传感器的物理量检测装置包括传感器元件，A / D转换器，控制单元和激活单元。 传感器元件由电源电压激活，并根据预定的物理量输出电信号。 A / D转换器对模拟电信号进行数字化并输出数字数据。 控制单元基于数字数据，计算控制量，以便根据数字数据将电信号设置为预定的输出来控制传感器元件，并根据控制量生成控制信号。 激活单元根据控制信号启动传感器元件。 结果，控制单元根据控制量或控制信号输出指示物理量的检测信号。

公开(公告)号：US6082196A

公开(公告)日：2000-07-04

申请号：US845895

申请日：1997-04-28

申请人： Shigeru Nonoyama ,  Shigenori Yamauchi ,  Takamoto Watanabe

发明人： Shigeru Nonoyama ,  Shigenori Yamauchi ,  Takamoto Watanabe

IPC分类号： G01D5/24 ,  G01P15/125 ,  G01P15/13 ,  G01P15/14

CPC分类号： G01P15/131 ,  G01P15/125

摘要： A physical quantity detecting is capable of easily adjusting sensitivity and an offset of a detected output without being increased in size. In a signal processor for driving a sensor element in which fixed electrodes are disposed on both sides of a movable electrode displaced in response to acceleration, a signal generator generates PWM signals PA and PB in which an invalid control period during which the fixed electrodes are both deenergized only during a period corresponding to data M3 stored in a memory, is, at a predetermined ratio, inserted into a valid control period during which the fixed electrodes are alternately energized and their energization ratio is controlled so that the movable electrode is placed in position. Since the sensitivity of the sensor element to the acceleration changes according to the length of the invalid control period which does not contribute to control of the position of the movable electrode, its sensitivity can be easily adjusted by simply changing the value set in the memory.

摘要翻译： 物理量检测能够容易地调节灵敏度和检测输出的偏移而不增大尺寸。 在用于驱动传感器元件的信号处理器中，其中固定电极设置在响应于加速度而移位的可移动电极的两侧，信号发生器产生PWM信号PA和PB，其中固定电极均为无效控制周期 仅在对应于存储在存储器中的数据M3的周期期间被断电，以预定比例插入到固定电极交替通电的有效控制周期中，并且控制其通电率，使得可动电极位于 。 由于传感器元件对加速度的灵敏度根据无效控制周期的长度而变化，这对于可移动电极的位置的控制无助于其灵敏度，因此可以通过简单地改变在存储器中设置的值来容易地调整灵敏度。

公开(公告)号：US5627397A

公开(公告)日：1997-05-06

申请号：US402949

申请日：1995-03-13

申请人： Kazuhiko Kano ,  Yukihiro Takeuchi ,  Takamoto Watanabe ,  Kenichi Ao ,  Masakazu Kanosue ,  Hirofumi Uenoyama ,  Kenichi Nara

发明人： Kazuhiko Kano ,  Yukihiro Takeuchi ,  Takamoto Watanabe ,  Kenichi Ao ,  Masakazu Kanosue ,  Hirofumi Uenoyama ,  Kenichi Nara

IPC分类号： G01P1/00 ,  G01P15/12 ,  H01L29/84 ,  H01L29/82

CPC分类号： G01P15/124 ,  G01P1/006 ,  Y10S73/01

摘要： A semiconductor acceleration sensor according to the present invention performs acceleration detection by means of detecting increase or decrease in electrical current flowing between fixed electrodes formed on a semiconductor substrate taking a movable section in a movable state supported on the semiconductor substrate as a gate electrode. Two transistor structures are utilized in this detection. Current between fixed electrodes in one transistor structure increases when the movable section is subjected to acceleration and is displaced. At that time, current between fixed electrodes in the other transistor structure decreases. These two transistor structures are disposed proximately. By means of this proximate disposition, fluctuations in characteristics of both transistors are reduced, and by means of acceleration detection by differential type, temperature characteristics of the two transistors can be canceled favorably.

摘要翻译： 根据本发明的半导体加速度传感器通过检测形成在半导体衬底上的固定电极之间的电流的增加或减少来执行加速度检测，该半导体衬底以可移动状态支撑在作为栅电极的半导体衬底上的可移动状态。 在该检测中使用两个晶体管结构。 一个晶体管结构中的固定电极之间的电流在可移动部分受到加速并被移位时增加。 此时，另一晶体管结构中的固定电极之间的电流降低。 这两个晶体管结构靠近地设置。 通过这种接近的配置，两个晶体管的特性波动减小，并且通过差分类型的加速度检测，可以有利地消除两个晶体管的温度特性。

公开(公告)号：US5936159A

公开(公告)日：1999-08-10

申请号：US755097

申请日：1996-11-25

申请人： Kazuhiko Kano ,  Yukihiro Takeuchi ,  Takamoto Watanabe ,  Kenichi Ao ,  Masakazu Kanosue ,  Hirofumi Uenoyama

发明人： Kazuhiko Kano ,  Yukihiro Takeuchi ,  Takamoto Watanabe ,  Kenichi Ao ,  Masakazu Kanosue ,  Hirofumi Uenoyama

IPC分类号： G01P15/08 ,  G01P15/12 ,  H01L21/28 ,  H01L29/51 ,  H01L29/84

CPC分类号： H01L21/28238 ,  G01P15/0802 ,  G01P15/124 ,  H01L29/51 ,  H01L29/84 ,  G01P2015/0814 ,  G01P2015/0828

摘要： A semiconductor sensor including a movable member beam structure having a reduced deflection characteristic. The sensor includes a movable beam structure film suspended from a semiconductor substrate, with a gap interposed between the beam structure film and the substrate. The beam structure film is composed of a plurality of film layers that are laminated in a direction of film thickness. Further, a stress relieving layer is interposed between respective films to reduce overall internal stress on the structure.

摘要翻译： 一种半导体传感器，包括具有减小的偏转特性的可动构件梁结构。 传感器包括从半导体衬底悬挂的可移动的光束结构膜，其间插入在光束结构膜和衬底之间。 束结构膜由沿膜厚方向层叠的多个膜层构成。 此外，应力消除层插入在各个膜之间以减小结构上的整体内部应力。

公开(公告)号：US5587343A

公开(公告)日：1996-12-24

申请号：US401044

申请日：1995-03-08

申请人： Kazuhiko Kano ,  Yukihiro Takeuchi ,  Takamoto Watanabe ,  Kenichi Ao ,  Masakazu Kanosue ,  Hirofumi Uenoyama

发明人： Kazuhiko Kano ,  Yukihiro Takeuchi ,  Takamoto Watanabe ,  Kenichi Ao ,  Masakazu Kanosue ,  Hirofumi Uenoyama

IPC分类号： G01L1/18 ,  G01L1/22 ,  G01P15/08 ,  G01P15/12 ,  H01L21/28 ,  H01L29/51 ,  H01L29/84 ,  H01L21/00 ,  B44C1/22

CPC分类号： H01L21/28238 ,  G01P15/0802 ,  G01P15/124 ,  H01L29/51 ,  H01L29/84 ,  G01P2015/0828

摘要： A method for fabricating a semiconductor sensor wherein deflection of a movable member is disclosed. A silicon oxide film is formed on a silicon substrate, and a movable member composed of polycrystalline silicon is formed on the silicon oxide film by means of a low-pressured chemical vapor deposition process. At this time, silane is caused to flow into an oven, and the supply of silane is stopped when a layer of polycrystalline silicon has been deposited on the silicon substrate, and a first polycrystalline silicon layer is formed. By means of stopping the supply of silane, a silicon oxide layer of a thickness of several angstroms to several tens of angstroms is formed on the first polycrystalline silicon layer by atmosphere O.sub.2. A second polycrystalline silicon layer of a thickness of 1 .mu.m is formed on the silicon oxide layer by means of causing silane to flow into the oven. Patterning by dry etching or the like through a photo-lithographic process is performed to form a movable member. The silicon oxide film below the movable member is then etched.

摘要翻译： 一种制造半导体传感器的方法，其中公开了可移动部件的偏转。 在硅基板上形成氧化硅膜，通过低压化学气相沉积工艺在氧化硅膜上形成由多晶硅构成的可动部件。 此时，使硅烷流入烘箱，当在硅衬底上沉积多晶硅层时，停止供给硅烷，形成第一多晶硅层。 通过停止硅烷的供给，通过气氛O2在第一多晶硅层上形成厚度为几埃至数十埃的氧化硅层。 通过使硅烷流入烘箱中，在氧化硅层上形成厚度为1μm的第二多晶硅层。 进行通过光刻法的干蚀刻等的图案化，形成可动部件。 然后蚀刻可动件下方的氧化硅膜。

公开(公告)号：US20100237923A1

公开(公告)日：2010-09-23

申请号：US12661156

申请日：2010-03-11

申请人： Tomohito Terazawa ,  Shigenori Yamauchi ,  Takamoto Watanabe

发明人： Tomohito Terazawa ,  Shigenori Yamauchi ,  Takamoto Watanabe

IPC分类号： H03H11/26 ,  H03K19/177

CPC分类号： H03K19/17736 ,  H03K19/17728

摘要： A method of placing delay units of a pulse delay circuit on a programmable logic device having logic cells in each of cell strings has a step of arranging each delay unit in one logic cell of the device such that the delay units are placed in respective specific cell strings aligned in a row direction and a step of serially connecting the delay units with one another as a straight delay line such that the delay units placed in the specific cell strings in the connecting order are aligned in the row direction. In the device, an inter-string transmission delay time on a line between two logic cells of different cell strings differs from an intra-string transmission delay time on a line between two logic cells of one cell string.

摘要翻译： 将脉冲延迟电路的延迟单元放置在具有每个单元串中的逻辑单元的可编程逻辑器件上的方法具有将每个延迟单元布置在器件的一个逻辑单元中的步骤，使得延迟单元放置在相应的特定单元中 在行方向排列的串和将延迟单元串联连接的直线延迟线的步骤，使得以连接顺序放置在特定单元串中的延迟单元在行方向上对齐。 在该装置中，不同单元串的两个逻辑单元之间的行上的串间传输延迟时间与一个单元串的两个逻辑单元之间的一行上的串内传输延迟时间不同。

公开(公告)号：US07755530B2

公开(公告)日：2010-07-13

申请号：US12218531

申请日：2008-07-16

申请人： Tomohito Terazawa ,  Takamoto Watanabe

发明人： Tomohito Terazawa ,  Takamoto Watanabe

IPC分类号： H03M1/60

CPC分类号： H03M1/502

摘要： An A/D converter has a series of M delay units through which a pulse signal is transmitted while being delayed in each delay unit by a delay time depending on a level of an analog signal. A unit of the converter latches the pulse signal outputted from each delay unit at N sampling times to hold M×N latched data. Another unit of the converter receives the M×N pieces of latched data as a piece of combined data composed of the latched data arranged in an order corresponding to an arranging order of M×N sampling points in the pulse signal, converts the combined data into numeral data, corresponding to a position of the pulse signal in the delay units, at one time, and produces converted digital data corresponding to the level of the analog signal from the numeral data.

摘要翻译： A / D转换器具有一系列M个延迟单元，根据模拟信号的电平，在每个延迟单元中延迟延迟时间，脉冲信号通过该延迟单元被发送。 转换器的单位在N个采样时间中锁存从每个延迟单元输出的脉冲信号，以保持M×N个锁存数据。 转换器的另一单元接收M×N个锁存数据作为由按脉冲信号中的M×N个采样点的排列次序排列的锁存数据组成的一组合数据，将组合数据转换成 数字数据对应于延迟单元中的脉冲信号的位置，并且产生与来自数字数据的模拟信号的电平对应的转换的数字数据。

公开(公告)号：US07733152B2

公开(公告)日：2010-06-08

申请号：US12324287

申请日：2008-11-26

申请人： Takamoto Watanabe

发明人： Takamoto Watanabe

IPC分类号： G06F1/04

CPC分类号： H03K3/0315 ,  H03K23/425

摘要： A pulse signal circulates around a ring of delay elements with respective traversal signals being thereby successively outputted from the delay elements. The period of a reference signal is multiplied or divided by a real number to obtain control data specifying a required period of a clock signal as a value having an integer part and a fractional part. The control data are used to select the timings of specific traversal signal, and the clock signal is generated based these selected timings, with the timing selection being repetitively adjusted in accordance with the fractional part of the control data.

摘要翻译： 脉冲信号在延迟元件环周围循环，各个遍历信号由延迟元件依次输出。 将参考信号的周期相乘或除以实数，以获得指定时钟信号的所需周期的控制数据，作为具有整数部分和小数部分的值。 控制数据用于选择特定遍历信号的定时，并且基于这些选择的定时生成时钟信号，根据控制数据的小数部分重复地调整定时选择。

公开(公告)号：US07671313B2

公开(公告)日：2010-03-02

申请号：US11393818

申请日：2006-03-31

申请人： Takamoto Watanabe

发明人： Takamoto Watanabe

IPC分类号： H01L27/00 ,  H01J40/14

CPC分类号： H04N5/37455

摘要： An image sensor has plural array blocks B1 to B20 arranged in a two dimensional (2D) arrangement. Each array block has a sub array and a corresponding analogue to digital (A/D) converter for performing an A/D conversion of light signals (or detection signals) output from the sub array. The sub array has plural picture element cells arranged in a 2D arrangement. Each A/D converter has a pulse delay circuit having delay units of plural stages connected in series. Each delay unit delays an input pulse by a delay time corresponding to a level of the light signals received from the sub array. A pulse delay type A/D converter is used as the A/D converter, which outputs the number of the delay units as an A/D conversion data item through which the input pulse passes for a measurement time period.

摘要翻译： 图像传感器具有以二维（2D）布置排列的多个阵列块B1至B20。 每个阵列块具有子阵列和相应的模数（A / D）转换器，用于执行从子阵列输出的光信号（或检测信号）的A / D转换。 子阵列具有以2D排列布置的多个像素单元。 每个A / D转换器具有串联连接的多级延迟单元的脉冲延迟电路。 每个延迟单元将输入脉冲延迟与从子阵列接收的光信号的电平相对应的延迟时间。 使用脉冲延迟型A / D转换器作为A / D转换器，其输出延迟单元的数量作为输入脉冲经过测量时间段的A / D转换数据项。