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58 条记录 (耗时 0.032 秒)

    Surface treating apparatus, surface treating method and semiconductor device manufacturing method
    1.
    发明授权
    Surface treating apparatus, surface treating method and semiconductor device manufacturing method 失效
    表面处理装置，表面处理方法及半导体装置的制造方法

    公开(公告)号：US5505778A

    公开(公告)日：1996-04-09

    申请号：US730078

    申请日：1991-07-15

    申请人： Tetsuo Ono ,  Susumu Hiraoka ,  Sakae Saito ,  Kunio Harada ,  Mituhiro Tachibana ,  Shigeo Kubota ,  Keizo Suzuki

    发明人： Tetsuo Ono ,  Susumu Hiraoka ,  Sakae Saito ,  Kunio Harada ,  Mituhiro Tachibana ,  Shigeo Kubota ,  Keizo Suzuki

    IPC分类号： C23C16/44 ,  C23C16/452 ,  C23C16/455 ,  C23C16/54

    CPC分类号： C23C16/452 ,  C23C16/4557 ,  Y10S438/974

    摘要： An apparatus for treating solid surface using a thermally excited molecular beam according to the present invention is capable of completely preventing flying of contaminant caused by a heating source to a sample. To achieve this, in the present invention, the heating source for exciting the molecules is hermetically separated from the sample. Alternatively, a container where the heating source is housed and a container where the sample is accommodated are separated such that a conductance between the two containers is sufficiently small. In this way, chemical reactions between the molecular beam of the reactive gas which is highly reactive and the heating source heated to high temperatures can be eliminated, and flying of the contaminant to the sample can thus be greatly reduced. As a result, flying of the contaminating substances caused by the heating source to the sample can be prevented, and reduction in the surface treating rate of the sample, caused by the contaminant, can be prevented.

    摘要翻译： 根据本发明的使用热激发分子束处理固体表面的设备能够完全防止由加热源引起的污染物飞溅到样品。 为了实现这一点，在本发明中，用于激发分子的加热源与样品气密分离。 或者，容纳加热源的容器和容纳样品的容器被分离，使得两个容器之间的电导足够小。 以这种方式，可以消除高反应性的反应性气体的分子束与加热到高温的加热源之间的化学反应，从而大大减少污染物向样品的飞散。 结果，可以防止由加热源引起的对样品的污染物质的飞溅，并且可以防止由污染物引起的样品表面处理速度的降低。

    Plasma x-ray source
    2.
    发明授权
    Plasma x-ray source 失效
    等离子X射线源

    公开(公告)号：US4715054A

    公开(公告)日：1987-12-22

    申请号：US795776

    申请日：1985-11-07

    申请人： Yasuo Kato ,  Kunio Harada ,  Shigeo Kubota ,  Yoshio Watanabe ,  Seiichi Murayama

    发明人： Yasuo Kato ,  Kunio Harada ,  Shigeo Kubota ,  Yoshio Watanabe ,  Seiichi Murayama

    IPC分类号： H01J35/22 ,  H05G2/00 ,  H05H1/24 ,  H01J35/00 ,  H05G1/00

    CPC分类号： H05G2/003 ,  H05H1/52

    摘要： A plasma X-ray source comprises inner and outer cylindrical electrodes disposed coaxially and with a certain distance with respect to each other, an electrical insulator disposed between end portions of the inner and outer cylindrical electrodes, and a discharge vessel disposed to envelop the inner and outer cylindrical electrodes. A pulse voltage is applied between the inner and outer cylindrical electrodes to produce plasma in the discharge vessel. An electrically conductive spherical shield is disposed to envelop a space where the plasma is pinched, and the spherical shield is maintained at a potential equal to that applied to the outer cylindrical electrode.

    摘要翻译： 等离子体X射线源包括同轴并且相对于彼此具有一定距离的内部和外部圆柱形电极，设置在内部和外部圆柱形电极的端部之间的电绝缘体，以及放电容器，其设置成包围内部和外部 外圆柱形电极。 在内圆柱形电极和外圆柱形电极之间施加脉冲电压，以在放电容器中产生等离子体。 设置导电球形屏蔽以包围等离子体被夹持的空间，并且球形屏蔽保持在等于施加到外圆柱形电极的电位的电位。

    Photometer and analyzing system provided with photometer
    3.
    发明授权
    Photometer and analyzing system provided with photometer 有权
    配有光度计的光度计和分析系统

    公开(公告)号：US08675187B2

    公开(公告)日：2014-03-18

    申请号：US13141378

    申请日：2009-12-22

    申请人： Kunio Harada ,  Sakuichiro Adachi ,  Isao Yamazaki

    发明人： Kunio Harada ,  Sakuichiro Adachi ,  Isao Yamazaki

    IPC分类号： G01J1/00

    CPC分类号： G01N21/59 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/10 ,  G01N21/0332 ,  G01N2201/062

    摘要： In an analysis system for detecting amounts of components contained in samples, many samples can be measured simultaneously in the whole of the system by use of compact inexpensive photometers. An LED with low heat generation and a long life span is used as a light source. Compactness is achieved by bended optical axis instead of a straight one. Components for bending an optical axis and components for condensing light to ensure an amount of light are in common use to reduce the number of components. Compactness, reduction of the number of components, and integration achieve easy optical axis alignment and precise measurement.

    摘要翻译： 在用于检测样品中包含的组分量的分析系统中，可以通过使用紧凑廉价的光度计在整个系统中同时测量许多样品。 使用具有低发热和长寿命的LED作为光源。 通过弯曲光学轴而不是直线实现紧凑性。 用于弯曲光轴的部件和用于聚光的部件以确保一定量的光通常用于减少部件的数量。 紧凑，减少部件数量，集成实现轻松对准和精确测量。

    Luminescence detection apparatus
    8.
    发明申请
    Luminescence detection apparatus 审中-公开
    发光检测装置

    公开(公告)号：US20060141494A1

    公开(公告)日：2006-06-29

    申请号：US11209702

    申请日：2005-08-24

    申请人： Hideki Kambara ,  Tomoharu Kajiyama ,  Kunio Harada ,  Masao Kamahori

    发明人： Hideki Kambara ,  Tomoharu Kajiyama ,  Kunio Harada ,  Masao Kamahori

    IPC分类号： C12Q1/68 ,  C12M1/34

    CPC分类号： G01N21/03 ,  G01N21/6428 ,  G01N21/6452 ,  G01N21/76

    摘要： An object of the present invention is to provide a luminescence detection apparatus compact in size which is capable of conveniently determining DNA base sequences at a low cost. According to the present invention, a luminescence detection apparatus 1 is provided comprising: a plurality of reaction cells 6 each having a transparent bottom portion; a solution-dispensing portion 19 equipped with capillaries 18 positioned above the reaction cells 6 and put into a one-to-one correspondence with the reaction cells 6; and a light-detecting portion 29 having a plurality of light-sensing elements 24 put into a one-to-one correspondence with the reaction cells 6 and arranged in proximity to the bottom surfaces of the reaction cells 6, wherein the a plurality of light-sensing elements 24 of the light-detecting portion 29 detect respective luminescences in the reaction cells 6 generated by injecting reagent solutions from the solution-dispensing portion 19 to the reaction cells 6.

    摘要翻译： 本发明的目的是提供一种尺寸紧凑的发光检测装置，其能够以低成本方便地确定DNA碱基序列。 根据本发明，提供一种发光检测装置1，其包括：多个反应池6，每个反应池6具有透明底部; 溶液分配部分19，其配备有位于反应单元6上方并与反应单元6一一对应的毛细管18; 以及具有多个光检测元件24的光检测部分29，其与反应单元6一一对应地布置在反应单元6的底表面附近，其中多个光 光检测部分29的光敏元件24检测通过从溶液分配部分19将反应池6注入试剂溶液而产生的反应池6中的相应发光。