POROUS PLATINUM NANOROD ELECTRODE ARRAY FLEXIBLE SENSOR DEVICES AND FABRICATION

    公开(公告)号:US20210371987A1

    公开(公告)日:2021-12-02

    申请号:US17291236

    申请日:2019-11-07

    Abstract: A method for fabricating a Pt nanorod electrode array sensor device includes forming planar metal electrodes on a flexible film, co-depositing Pt alloy on the planar metal electrodes via physical vapor deposition, and dealloying the Pt alloy to etch Pt nanorods from the deposited Pt alloy. A Pt nanorod electrode sensor device includes a plurality of porous Pt nanorods on a planar metal electrode forming a sensor electrode. The planar metal electrode is on a flexible substrate. An electrode lead on the flexible substrate extends away from the planar metal electrode. Insulation is around porous Pt nanorods an upon the electrode lead.

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