Epitaxial silicon membranes
    2.
    发明授权
    Epitaxial silicon membranes 失效
    外延硅膜

    公开(公告)号:US5273829A

    公开(公告)日:1993-12-28

    申请号:US774010

    申请日:1991-10-08

    摘要: The subject invention provides a silicon membrane material made from silicon that is epitaxially deposited at low temperatures greater than or equal to 500.degree. C. and doped with controlled amounts of boron and germanium. A silicon membrane structure is provided and made by one or more layers of ultra thin epitaxially deposited silicon layers that are precisely controlled in both thickness and composition. At least one of the layers is doped with boron in a concentration range greater than 2.times.10.sup.20 atoms of boron per cubic centimeter of silicon, or with germanium in a concentration range greater than 5.times.10.sup.20 atoms of germanium per cubic centimeter of silicon, or with a combination of boron and germanium in these concentration ranges. A silicon membrane fabrication process is also provided which requires no additional masking film to protect the membrane surface during KOH etching of the bulk silicon substrate.

    摘要翻译: 本发明提供了由硅制成的硅膜材料,其在大于或等于500℃的低温下外延沉积,并掺杂受控量的硼和锗。 硅膜结构由一层或多层超薄外延沉积的硅层提供并制成,其在厚度和组成上精确控制。 这些层中的至少一层掺杂了硼,其浓度范围大于每立方厘米硅的2×1020个原子的硼,或者锗浓度范围大于每立方厘米硅的5×1020原子,或者与 硼和锗在这些浓度范围内。 还提供了硅膜制造方法,其不需要额外的掩模膜来在体硅衬底的KOH蚀刻期间保护膜表面。

    Magnetic head slider having a protective coating thereon
    3.
    发明授权
    Magnetic head slider having a protective coating thereon 失效
    磁头滑块,其上具有保护涂层

    公开(公告)号:US5159508A

    公开(公告)日:1992-10-27

    申请号:US634671

    申请日:1990-12-27

    IPC分类号: G11B5/29 G11B5/31 G11B5/60

    摘要: A magnetic head slider having a protective coating on the rails thereof, the protective coating comprising a thin adhesion layer and a thin layer of amorphous hydrogenated carbon. The protective coating is deposited on the air bearing surface of the slider after the thin film magnetic heads are lapped to a chosen dimension, but before the pattern of rails is produced on the air bearing surface. The protective coating protects the magnetic head during the rail fabrication process and in usage in a magnetic recording system protects the magnetic head from wear and corrosion damage.

    摘要翻译: 一种在其轨道上具有保护涂层的磁头滑块,保护涂层包括薄粘合层和非晶氢化碳薄层。 在将薄膜磁头研磨成选定的尺寸之后,但是在空气轴承表面上产生轨道图案之前,保护涂层沉积在滑块的空气支承表面上。 保护涂层在轨道制造过程中保护磁头,并且在磁记录系统中使用可保护磁头免受磨损和腐蚀的损害。

    Method for producing high energy electroluminescent devices
    4.
    发明授权
    Method for producing high energy electroluminescent devices 失效
    高能电致发光器件的制造方法

    公开(公告)号:US5151383A

    公开(公告)日:1992-09-29

    申请号:US307154

    申请日:1989-02-06

    摘要: A method is described for fabricating electroluminescent devices exhibiting visible electroluminescence at room temperature, where the devices include at least one doped layer of amorphous hydrogenated silicon (a-Si:H). The a-Si:H layer is deposited on a substrate by homogeneous chemical vapor deposition (H-CVD) in which the substrate is held at a temperature lower than about 200.degree. C. and the a-Si:H layer is doped in-situ during deposition, the amount of hydrogen incorporated in the deposited layer being 12-50 atomic percent. The bandgap of the a-Si:H layer is between 1.6 and 2.6 eV, and in preferrable embodiments is between 2.0 and 2.6 eV. The conductivity of the a-Si:H layer is chosen in accordance with device requirements, and can be 10.sup.16 -10.sup.19 carriers/cm.sup.2. The bandgap of the a-Si:H layer depends at least in part on the temperature of the substrate on which the layer is deposited, and can be "tuned" by changing the substrate temperature.

    摘要翻译: 描述了一种用于制造在室温下显示可见电致发光的电致发光器件的方法,其中器件包括至少一个非晶氢化硅掺杂层(a-Si:H)。 通过均匀化学气相沉积(H-CVD)将a-Si:H层沉积在衬底上,其中衬底保持在低于约200℃的温度,并且a-Si:H层被掺杂在 在沉积期间原位,沉积层中掺入的氢的量为12-50原子%。 a-Si:H层的带隙在1.6和2.6eV之间,优选的实施方案是在2.0和2.6eV之间。 a-Si:H层的电导率根据器件要求选择,可以为1016-1019载体/ cm2。 a-Si:H层的带隙至少部分取决于沉积该层的衬底的温度,并且可以通过改变衬底温度“调谐”。

    Effective narrow band gap base transistor
    5.
    发明授权
    Effective narrow band gap base transistor 失效
    有效的窄带隙基极晶体管

    公开(公告)号:US4972246A

    公开(公告)日:1990-11-20

    申请号:US171603

    申请日:1988-03-22

    CPC分类号: H01L29/157 H01L29/1004

    摘要: A homojunction bipolar transistor having a superlattice base region comprising alternate layers of extrinsic and intrinsic layers, with extrinsic layers being of the opposite conductivity of the emitter and collector layers of the transistor. The alternate extrinsic and intrinsic layers have substantially different doping levels providing abrupt transitions in the valence and conduction bands between layers. The abrupt transitions result in the energy band gap in the base region being effectively reduced with respect to the band gap in the emitter region. In one embodiment, the effective narrow band gap base transistor is implemented by converting a portion of the upper layers of the superlattice to a homogeneous region by heavily doping the portion to form the emitter of the transistor.

    Method and apparatus for low temperature, low pressure chemical vapor
deposition of epitaxial silicon layers
    7.
    发明授权
    Method and apparatus for low temperature, low pressure chemical vapor deposition of epitaxial silicon layers 失效
    用于外延硅层的低温,低压化学气相沉积的方法和装置

    公开(公告)号:US5607511A

    公开(公告)日:1997-03-04

    申请号:US186195

    申请日:1994-01-24

    摘要: A method and apparatus for depositing single crystal, epitaxial films of silicon on a plurality of substrates in a hot wall, isothermal deposition system is described. The deposition temperatures are less than about 800.degree. C., and the operating pressures during deposition are such that non-equilibrium growth kinetics determine the deposition of the silicon films. An isothermal bath gas of silicon is produced allowing uniform deposition of epitaxial silicon films simultaneously on multiple substrates. This is a flow system in which means are provided for establishing an ultrahigh vacuum in the range of about 10.sup.-9 Torr prior to epitaxial deposition. The epitaxial silicon layers can be doped in-situ to provide very abruptly defined regions of either n- or p-type conductivity.

    摘要翻译: 描述了一种用于在热壁中的多个基板上沉积单晶硅外延膜的方法和装置,等温沉积系统。 沉积温度低于约800℃,并且沉积期间的操作压力使得非平衡生长动力学决定了硅膜的沉积。 产生硅的等温浴气,允许在多个基板上同时沉积外延硅膜。 这是一种流程系统,其中提供了用于在外延沉积之前建立在约10-9乇范围内的超高真空度的装置。 外延硅层可以原位掺杂以提供非常突然限定的n型或p型导电性区域。

    Low capacitance bipolar junction transistor and fabrication process
therfor
    9.
    发明授权
    Low capacitance bipolar junction transistor and fabrication process therfor 失效
    低电容双极性晶体管和制造工艺

    公开(公告)号:US5117271A

    公开(公告)日:1992-05-26

    申请号:US624018

    申请日:1990-12-07

    摘要: This invention relates to a bipolar transistor which incorporates, in a raised base regime, an emitter, collector pedestal and intrinsic and extrinsic bases all of which are self-aligned. The invention also relates to a process for fabricating such devices which obtains the self-alignment of the above mentioned elements using a single lithographic and masking step. The structure of the transistor, in addition to having the self-aligned elements, incorporates a composite dielectric isolation layer which not only permits the carrying out of a number of functions during device fabrication but also provides for desired electrical characteristics during device operation. The composite isolation layer consists of an oxide layer adjacent the semiconductor surface; a nitride layer on the oxide layer and an oxide layer on the nitride layer in the final structure of the device. The last mentioned oxide layer starts out early in the fabrication process as a layer of oxidizable material, preferable polycrystalline silicon, which, at later steps in the process, acts as an etch-stop in its unoxidized state and as a memory element and mask in its oxidized state when a self-aligned datum element is removed and the thus exposed underlying dielectric elements must be removed to provide a planar emitter opening. The resulting transistor includes a planar emitter-emitter contact interface which provides for fine control of emitter depth in the underlying intrinsic base region.