Anodes for fluorine gas discharge lasers
    1.
    发明申请
    Anodes for fluorine gas discharge lasers 有权
    氟气放电激光器阳极

    公开(公告)号:US20080002752A1

    公开(公告)日:2008-01-03

    申请号:US11818022

    申请日:2007-06-11

    IPC分类号: H01S3/097 H01S3/03 H01S3/22

    摘要: Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight potions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode.

    摘要翻译: 公开了一种用于氟气体放电激光器的电极,其可以包括跨越所述一对侧壁和所述一对端壁之间的中心线轴线的冠,包括形成电极的放电区域的至少一部分的第一材料; 横截面的冠部具有以预旋转方向旋转的倾斜椭圆的上半部的形状,使得与椭圆形的短中心线轴线的切线与水平方向成一角度。 另一实施例可以包括具有顶部部分和分别与顶部部分相交的第一和第二侧壁部分的阳极刀片; 阳极叶片形成为顶部部分的横截面形状为曲线形状,并且沿着曲率半径与第一和第二侧壁部分的每一个的大体上直的部分相交,并且顶部部分斜切远离第一和第二侧壁部分的不对称排出侧 阳极。

    Gas discharge laser chamber improvements

    公开(公告)号:US20050226301A1

    公开(公告)日:2005-10-13

    申请号:US10815387

    申请日:2004-03-31

    摘要: A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

    Halogen gas discharge laser electrodes

    公开(公告)号:US20050047471A1

    公开(公告)日:2005-03-03

    申请号:US10877737

    申请日:2004-06-25

    摘要: A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.

    Cathodes for fluorine gas discharge lasers

    公开(公告)号:US20060274809A1

    公开(公告)日:2006-12-07

    申请号:US11488205

    申请日:2006-07-18

    IPC分类号: H01S3/097

    摘要: A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine is disclosed which may comprise a copper and copper alloy cathode body having an upper curved region containing the discharge footprint for the cathode comprising copper and a lower portion comprising a copper alloy, with the facing portion of the electrode if formed in a arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper including at least the arcuate portion, the electrode may comprise a bonded element machined from two pieces of material the first made of copper and the second made of a copper alloy bonded together before machining. The electrode may also comprise a first and a second elongated lopsided V-shaped groove formed along substantially all of the elongated electrode body forming a discharge receiving ridge between the first and second lopsided V-shaped grooves, with a differentially faster eroding material filling the first and second lopsided V-shaped grooves. also disclosed is an electrode system in which the one electrode, e.g., the cathode bows during operation and may comprise at least one of a first and second elongated gas discharge electrode being machined to form a crown to receive the gas discharge that compensates for the bowing of at least one of the gas discharge electrodes during operation of the fluorine gas discharge laser.

    High pulse repetition rate gas discharge laser

    公开(公告)号:US20060291517A1

    公开(公告)日:2006-12-28

    申请号:US11169203

    申请日:2005-06-27

    IPC分类号: H01S3/22 H01S3/03 H01S3/097

    CPC分类号: H01S3/036 H01S3/0384

    摘要: A pulsed gas discharge laser operating at an output laser pulse repetition rate of greater than 4 kHz and a method of operating same is disclosed which may comprise a high voltage electrode having a longitudinal extent; a main insulator electrically insulating the high voltage electrode from a grounded gas discharge chamber; a preionizer longitudinally extending along at least a portion of the longitudinal extent of the high voltage electrode; a preionization shim integral with the electrode extending toward the preionizer. The preionizer may be formed integrally with the main insulator. The preionization shim may substantially cover the gap between the electrode and the preionizer. The apparatus and method may comprise the high voltage electrode being disposed in an electrode receiving pocket in the main insulator and formed to present an elongated discharge receiving area facing another electrode within the gas discharge chamber, an aerodynamic fairing attached to the high voltage electrode and substantially closing the gas flow disturbance pocket and presenting an aerodynamically smooth surface to the gas flow.

    Line narrowing module
    6.
    发明申请

    公开(公告)号:US20060114957A1

    公开(公告)日:2006-06-01

    申请号:US11000684

    申请日:2004-11-30

    IPC分类号: H01S3/22

    摘要: A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive center wavelength selection optic moveably mounted within an optical path of the line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a first tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic, by selecting an angle of transmission of the laser light pulse beam containing the pulse toward the dispersive center wavelength selection optic; a second tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse by changing the position of the dispersive center wavelength selection optic relative to the nominal optical path of the line narrowing module; wherein the second tuning mechanism coarsely selects a value for the center wavelength and the first tuning mechanism more finely selects the value for the center wavelength. The apparatus and method may further comprise at least one beam expanding and redirecting prism in the optical path of the line narrowing module; the first tuning mechanism selecting an angle of incidence of the at least a first spatially defined portion of the laser light pulse beam by changing the position of the at least one beam expanding prism relative to the nominal optical path of the line narrowing module. The first and second tuning mechanisms may be controlled by a center wavelength controller during a burst based upon feedback from a center wavelength detector detecting the center wavelength of at least one other pulse in the burst of pulses and the controller providing the feedback based upon an algorithm employing the detected center wavelength for the at least one other pulse in the burst. The first tuning mechanism may comprise an electro-mechanical course positioning mechanism and a fine positioning mechanism comprising an actuatable material that changes position or shape when actuated.

    Multi-outlet medical dispensing device
    9.
    发明申请
    Multi-outlet medical dispensing device 失效
    多出口医疗点胶装置

    公开(公告)号:US20050245872A1

    公开(公告)日:2005-11-03

    申请号:US11119062

    申请日:2005-04-28

    摘要: A medical delivery device comprising an elongate body having a plunger slidably and sealingly engaged to form a cavity to receive fluid materials and a first outlet disposed at an end of said body and has a male luer end portion and a valve assembly is disposed within the first outlet. The valve assembly has a valve means movable between an open position and a closed position and biasing means for biasing the valve means to a closed position. Actuating means are disposed within the male luer end portion and coupled to the valve means such that the valve means is movable to an open position when a female luer end portion of a medical accessory is coupled with the male luer end portion. A second outlet is disposed at the same end as the first outlet for controlling the exchange of gases from the environment to said cavity under the action of the plunger. Lastly, a third outlet is disposed at the same end as the first outlet for controlling the exchange of gases from the cavity to the environment under the action of the plunger.

    摘要翻译: 一种医疗输送装置,包括细长体,该细长体具有可滑动并密封地接合以形成腔体以接纳流体材料的柱塞和设置在所述主体的端部处的第一出口,并且具有阳鲁尔端部和阀组件设置在第一 出口。 阀组件具有可在打开位置和关闭位置之间移动的阀装置和用于将阀装置偏压到关闭位置的偏压装置。 致动装置设置在阳鲁尔端部内并且联接到阀装置,使得当医疗附件的阴鲁尔端部与阳路厄端部耦合时,阀装置可移动到打开位置。 第二出口设置在与第一出口相同的端部,用于在柱塞的作用下控制从环境到所述空腔的气体交换。 最后,第三出口设置在与第一出口相同的端部,用于在柱塞的作用下控制从空腔到环境的气体交换。