利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

19 条记录 (耗时 0.035 秒)

    Line narrowing module
    1.
    发明申请
    Line narrowing module 有权

    公开(公告)号：US20060114957A1

    公开(公告)日：2006-06-01

    申请号：US11000684

    申请日：2004-11-30

    申请人： J. Martin Algots ,  Robert Bergstedt ,  Walter Gillespie ,  Vladimir Kulgeyko ,  William Partlo ,  German Rylov ,  Richard Sandstrom ,  Brian Strate ,  Timothy Dyer

    发明人： J. Martin Algots ,  Robert Bergstedt ,  Walter Gillespie ,  Vladimir Kulgeyko ,  William Partlo ,  German Rylov ,  Richard Sandstrom ,  Brian Strate ,  Timothy Dyer

    IPC分类号： H01S3/22

    CPC分类号： H01S3/1055 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/036 ,  H01S3/08 ,  H01S3/08004 ,  H01S3/08059 ,  H01S3/097 ,  H01S3/106 ,  H01S3/2251

    摘要： A line narrowing method and module for a narrow band DUV high power high repetition rate gas discharge laser producing output laser light pulse beam pulses in bursts of pulses, the module having a nominal optical path are disclosed which may comprise: a dispersive center wavelength selection optic moveably mounted within an optical path of the line narrowing module, selecting at least one center wavelength for each pulse determined at least in part by the angle of incidence of the laser light pulse beam containing the respective pulse on the dispersive wavelength selection optic; a first tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse upon the dispersive center wavelength selection optic, by selecting an angle of transmission of the laser light pulse beam containing the pulse toward the dispersive center wavelength selection optic; a second tuning mechanism operative in part to select the angle of incidence of the laser light pulse beam containing the respective pulse by changing the position of the dispersive center wavelength selection optic relative to the nominal optical path of the line narrowing module; wherein the second tuning mechanism coarsely selects a value for the center wavelength and the first tuning mechanism more finely selects the value for the center wavelength. The apparatus and method may further comprise at least one beam expanding and redirecting prism in the optical path of the line narrowing module; the first tuning mechanism selecting an angle of incidence of the at least a first spatially defined portion of the laser light pulse beam by changing the position of the at least one beam expanding prism relative to the nominal optical path of the line narrowing module. The first and second tuning mechanisms may be controlled by a center wavelength controller during a burst based upon feedback from a center wavelength detector detecting the center wavelength of at least one other pulse in the burst of pulses and the controller providing the feedback based upon an algorithm employing the detected center wavelength for the at least one other pulse in the burst. The first tuning mechanism may comprise an electro-mechanical course positioning mechanism and a fine positioning mechanism comprising an actuatable material that changes position or shape when actuated.

    Gas discharge laser chamber improvements
    2.
    发明申请
    Gas discharge laser chamber improvements 有权

    公开(公告)号：US20050226301A1

    公开(公告)日：2005-10-13

    申请号：US10815387

    申请日：2004-03-31

    申请人： William Partlo ,  Yoshiho Amada ,  James Carmichael ,  Timothy Dyer ,  Walter Gillespie ,  Bryan Moosman ,  Richard Morton ,  Curtis Rettig ,  Brian Strate ,  Thomas Steiger ,  Fedor Trintchouk ,  Richard Ujazdowski

    发明人： William Partlo ,  Yoshiho Amada ,  James Carmichael ,  Timothy Dyer ,  Walter Gillespie ,  Bryan Moosman ,  Richard Morton ,  Curtis Rettig ,  Brian Strate ,  Thomas Steiger ,  Fedor Trintchouk ,  Richard Ujazdowski

    IPC分类号： H01S3/03 ,  H01S3/036 ,  H01S3/038 ,  H01S3/041 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/22 ,  H01S3/225

    CPC分类号： H01S3/036 ,  H01S3/0384 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/225

    摘要： A method and apparatus if disclosed which may comprise a high power high repetition rate gas discharge laser UV light source which may comprise: a gas discharge chamber comprising an interior wall comprising a vertical wall and an adjacent bottom wall; a gas circulation fan creating a gas flow path adjacent the interior vertical wall and the adjacent bottom wall; an in-chamber dust trap positioned a region of low gas flow, which may be along an interior wall and may comprise at least one meshed screen, e.g., a plurality of meshed screens, which may comprise at least two different gauge meshed screens. The dust trap may extend along the bottom interior wall of the chamber and/or a vertical portion of the interior wall. The dust trap may comprise a first meshed screen having a first gauge; a second meshed screen having a second gauge smaller than the first gauge; and the second meshed screen intermediate the first meshed screen and the interior wall. The chamber may comprise a plurality of dust collecting recesses in at least one of the vertical interior wall and the bottom wall of the chamber which may be selected from a group comprising a one-part recess and a multi-part recess, which may comprise two sections angled with respect to each other. The dust trap may comprise a pressure trap positioned between a portion of a main insulator and an interior wall of the chamber. The chamber may comprise a gas circulating fan comprising a cross-flow fan with a fan cutoff that may comprise a vortex control pocket. The chamber may comprise a preionization mechanism comprising a preionization tub containing a ground rod within an elongated opening in the preionization tube that may comprise a compliant member, an automatic preionization shut-off mechanism, a preionization onset control mechanism and/or a focusing element. The chamber may comprise an elongated baffle plate that may comprise a plurality of pyramidal structures including varying numbers of generally pyramidal elements and oriented in groups of varying numbers of generally pyramidal elements and oriented along and transverse to the longitudinal axis. Acoustic resonances within the chamber may also be reduced by introducing an artificial jitter into the timing of the laser discharges varying the inter-pulse period randomly or in a repeating pattern from pulse to pulse within a burst.

    Halogen gas discharge laser electrodes
    3.
    发明申请
    Halogen gas discharge laser electrodes 有权

    公开(公告)号：US20050047471A1

    公开(公告)日：2005-03-03

    申请号：US10877737

    申请日：2004-06-25

    申请人： Thomas Steiger ,  Richard Ujazdowski ,  Timothy Dyer ,  Thomas Duffey ,  Walter Gillespie ,  Bryan Moosman ,  Richard Morton ,  Brian Strate

    发明人： Thomas Steiger ,  Richard Ujazdowski ,  Timothy Dyer ,  Thomas Duffey ,  Walter Gillespie ,  Bryan Moosman ,  Richard Morton ,  Brian Strate

    IPC分类号： H01S20060101 ,  H01S3/038 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/22 ,  H01S3/225

    CPC分类号： H01S3/225 ,  H01S3/0381 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/0971 ,  H01S3/09713

    摘要： A method and apparatus for operating a gas discharge laser is disclosed which may comprise a laser chamber containing a laser gas, the laser gas comprising a halogen, two elongated electrode elements defining a cathode and an anode, each of the cathode and anode having an elongated discharge receiving region having a discharge receiving region width defining a width of an electric discharge between the electrode elements in the laser gas, the discharge receiving region defining two longitudinal edges, and the anode comprising: a first elongated anode portion comprising a first anode material defining a first anode material erosion rate, located entirely within the discharge receiving region of the anode, a pair of second elongated anode portions comprising a second anode material defining a second anode material erosion rate, respectively located on each side of the first anode portion and at least partially within the discharge receiving region; an elongated electrode center base portion integral with the first elongated anode portion; and wherein each of the respective pair of second elongated anode portions is mechanically bonded to the center base portion. The electrode element may comprise a cathode. The first and second materials may be different materials such as different brass alloys with different erosion rates in the halogen gas. The first elongated cathode portion may comprising a first cathode material, located entirely within the discharge receiving region comprising a first portion of an ellipse intersecting elongated side walls, with a bottom wall opposite the portion of the ellipse; and a pair of second elongated cathode side portions comprising a second cathode material with the intersection of each respective second cathode portion and the portion of the ellipse forming the discharge receiving region of the first cathode portion, forming respective ellipsoidal extensions of the first portion. The members may be mechanically bonded to the center base portion. Some may be diffusion bonded to the center base portion and/or each other. The electrode assembly may have a hooded discharge receiving region extension at respective ends of the electrode and the electrode portion may be formed with or bonded to the center base portion and may have slanted side walls.

    Anodes for fluorine gas discharge lasers
    6.
    发明申请
    Anodes for fluorine gas discharge lasers 有权
    氟气放电激光器阳极

    公开(公告)号：US20080002752A1

    公开(公告)日：2008-01-03

    申请号：US11818022

    申请日：2007-06-11

    申请人： Timothy Dyer ,  Richard Morton ,  Walter Gillespie ,  Thomas Steiger

    发明人： Timothy Dyer ,  Richard Morton ,  Walter Gillespie ,  Thomas Steiger

    IPC分类号： H01S3/097 ,  H01S3/03 ,  H01S3/22

    CPC分类号： H01S3/038 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256

    摘要： Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight potions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode.

    摘要翻译： 公开了一种用于氟气体放电激光器的电极，其可以包括跨越所述一对侧壁和所述一对端壁之间的中心线轴线的冠，包括形成电极的放电区域的至少一部分的第一材料; 横截面的冠部具有以预旋转方向旋转的倾斜椭圆的上半部的形状，使得与椭圆形的短中心线轴线的切线与水平方向成一角度。 另一实施例可以包括具有顶部部分和分别与顶部部分相交的第一和第二侧壁部分的阳极刀片; 阳极叶片形成为顶部部分的横截面形状为曲线形状，并且沿着曲率半径与第一和第二侧壁部分的每一个的大体上直的部分相交，并且顶部部分斜切远离第一和第二侧壁部分的不对称排出侧 阳极。