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公开(公告)号：US06783640B2
公开(公告)日：2004-08-31
申请号：US10050787
申请日：2002-01-18
IPC分类号： C23C1434
CPC分类号： C23C14/0042 , C23C14/544
摘要： In a sputtering method for forming a film on a substrate in a film forming space while monitoring emission intensity of plasma, the method comprises the steps of detecting a thickness of the film formed on the substrate; comparing a detected value with a preset value of the film thickness; and deciding a target value of the emission intensity in accordance with a compared result. With the method, a transparent conductive film is formed which has high uniformity in film thickness, sheet resistance and transmittance and hence has superior characteristics.
摘要翻译： 在监测等离子体的发光强度的同时，在成膜空间的基板上形成膜的溅射方法中，该方法包括以下步骤：检测在基板上形成的膜的厚度; 将检测值与膜厚的预设值进行比较; 并根据比较结果决定发光强度的目标值。 通过该方法，形成了透明导电膜，其膜厚度，薄层电阻和透射率均匀性高，因此具有优异的特性。
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2.发明授权Method of forming silicon-based thin film, method of forming silicon-based semiconductor layer, and photovoltaic element 失效形成硅基薄膜的方法，形成硅基半导体层的方法和光电元件公开(公告)号：US06855621B2
公开(公告)日：2005-02-15
申请号：US09983427
申请日：2001-10-24
申请人： Takaharu Kondo , Masafumi Sano , Akira Sakai , Yasuyoshi Takai , Ryo Hayashi , Toshihiro Yamashita
发明人： Takaharu Kondo , Masafumi Sano , Akira Sakai , Yasuyoshi Takai , Ryo Hayashi , Toshihiro Yamashita
IPC分类号： C23C16/24 , C23C16/505 , C23C16/511 , C30B25/10 , H01L21/205 , H01L31/0224 , H01L31/0368 , H01L31/0392 , H01L31/04 , H01L31/18 , H01L21/20 , H01L21/26 , H01L21/302 , H01L21/31
CPC分类号： H01L21/02532 , C23C16/24 , C23C16/505 , C23C16/511 , C30B25/105 , C30B29/06 , H01L21/02425 , H01L21/0245 , H01L21/02516 , H01L21/02576 , H01L21/02579 , H01L21/02609 , H01L21/0262 , H01L31/022466 , H01L31/03687 , H01L31/0392 , H01L31/1816 , Y02E10/548
摘要： The method of the present invention is a method of forming a silicon-based semiconductor layer by introducing a source gas into a vacuum vessel and forming a silicon-based semiconductor layer containing a microcrystal on a substrate introduced into the vacuum vessel by plasma CVD, which comprises a first step of forming a first region with a source gas containing halogen atoms, and a second step of forming a second region on the first region under a condition where the source gas containing halogen atoms in the second step is lower in gas concentration than that of the first step, thereby providing a method of forming a silicon-based semiconductor layer having an excellent photoelectric characteristic at a film forming rate of an industrially practical level and a photovoltaic element using the silicon-based semiconductor layer formed by the method.
摘要翻译： 本发明的方法是通过将源气体引入真空容器中并通过等离子体CVD在引入真空容器的基板上形成含有微晶体的硅基半导体层来形成硅基半导体层的方法， 包括用含有卤素原子的源气体形成第一区域的第一步骤，以及在第二步骤中含有卤素原子的气体气体的气体浓度低的条件下，在第一区域上形成第二区域的第二步骤， 从而提供一种以工业实用水平的成膜速度形成具有优异光电特性的硅基半导体层的方法和使用通过该方法形成的硅基半导体层的光电元件。
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3.发明授权公开(公告)号：US06716324B2
公开(公告)日：2004-04-06
申请号：US10058802
申请日：2002-01-30
IPC分类号： C23C1434
CPC分类号： H01L31/022425 , H01L31/022466 , H01L31/022475 , Y02E10/50
摘要： Provided is a method of forming a transparent, conductive film on a semiconductor layer formed on a substrate, by sputtering, wherein voltages are applied independently of each other to both a target and the substrate, respectively, and a bias voltage appearing in the substrate is controlled so as to form the transparent, conductive film on only a portion except for a defective region of the semiconductor layer, thereby restraining shunting of the transparent, conductive film and achieving excellent appearance thereof. Also provided are a defective region compensation method of a semiconductor layer, a photovoltaic element, and a method of producing the photovoltaic element.
摘要翻译： 提供了通过溅射在形成在基板上的半导体层上形成透明导电膜的方法，其中分别将电压彼此独立地施加到靶和基板两者，并且基板中出现的偏压为 被控制以在除了半导体层的缺陷区域之外的部分上形成透明导电膜，从而抑制透明导电膜的分流并实现其优异的外观。 还提供了半导体层的有缺陷的区域补偿方法，光电元件以及制造光电元件的方法。
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公开(公告)号：US06740210B2
公开(公告)日：2004-05-25
申请号：US09973713
申请日：2001-10-11
IPC分类号： C23C1434
CPC分类号： C23C14/086 , C23C14/0036 , C23C14/541 , C23C14/562
摘要： Since the transfer speed of a substrate is controlled to compensate for a film-forming rate, and an electric power applied to heating means for heating the substrate is controlled so that thermal equilibrium of the substrate is maintained, a film having a uniform thickness and quality can be stably formed even when sputtering is performed for a long time.
摘要翻译： 由于控制基板的转印速度以补偿成膜速度，并且控制施加到用于加热基板的加热装置的电力，使得保持基板的热平衡，具有均匀厚度和质量的膜 即使长时间进行溅射也能够稳定地形成。
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公开(公告)号：US20090087708A1
公开(公告)日：2009-04-02
申请号：US12298236
申请日：2007-04-20
申请人： Toshihiro Yamashita , Takayuki Ishikawa , Michiko Morita , Kenichi Goto , Ikuhiro Taniguchi , Kenji Yonekura , Hayato Chikugo
发明人： Toshihiro Yamashita , Takayuki Ishikawa , Michiko Morita , Kenichi Goto , Ikuhiro Taniguchi , Kenji Yonekura , Hayato Chikugo
IPC分类号： H01M8/04
CPC分类号： H01M8/04029
摘要： A fuel cell system according to this invention comprises: a pressurizing valve (2a) provided on a cooling water circulation path; a reservoir tank (5) into which the cooling water flows through a pipe (4) when the pressurizing valve (2a) is open; an air supply pipe (13) that is connected to the reservoir tank (5) to supply air for diluting a fuel gas when the fuel gas accumulates in the reservoir tank (5); and a diluted gas exhaust pipe (15) for discharging the diluted fuel gas from the reservoir tank (5).
摘要翻译： 根据本发明的燃料电池系统包括：设置在冷却水循环路径上的加压阀（2a） 储存罐（5），当加压阀（2a）打开时冷却水流过管道（4）; 空气供给管（13），其连接到所述储存箱（5），以在所述燃料气体积存在所述储存箱（5）中时供给稀释燃料气体的空气; 以及用于从储存罐（5）排出稀释的燃料气体的稀释排气管（15）。
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公开(公告)号：US5506598A
公开(公告)日：1996-04-09
申请号：US5361
申请日：1993-01-19
IPC分类号： G02F1/133 , G02F1/1343 , G02F1/136 , G02F1/1362 , G02F1/1368 , G09G3/36
CPC分类号： G02F1/13624 , G09G3/3648 , G09G3/3659 , G09G2300/0809 , G09G3/3614
摘要： An active matrix substrate including a plurality of pixels arranged in a matrix manner and a plurality of switching elements connected in series to each of the plurality of pixels, each of the plurality of switching elements having a gate electrode, a gate electrode of at least one of the plurality of switching elements being electrically isolated from those of the other remaining switching elements.
摘要翻译： 一种有源矩阵基板，包括以矩阵方式布置的多个像素和与多个像素中的每一个串联连接的多个开关元件，所述多个开关元件中的每一个具有栅极电极，至少一个栅极电极 多个开关元件与其它剩余开关元件的电气隔离。
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公开(公告)号：US06028580A
公开(公告)日：2000-02-22
申请号：US719442
申请日：1996-09-25
IPC分类号： G02F1/136 , G02F1/1368 , G09G3/36 , H01L27/12 , H01L29/786
CPC分类号： H01L27/12 , G02F1/136259 , G09G3/3688
摘要： A driving circuit integrated type active-matrix liquid crystal display device is arranged such that a buffer composed of a P-channel thin film transistor and an N-channel thin film transistor that are connected in series is adopted for the P-channel thin film transistor and an N-channel thin film transistor; at least one of the P-channel thin film transistor and the N-channel thin film transistor is composed of a plurality of thin film transistors that are connected in parallel; and at least one of a power source line and an output line connected to the plurality of thin film transistors connected in parallel is formed in a wiring pattern composed of a main wiring section and a branched wiring section branched into respective thin film transistors. The described arrangement permits a line-shaped defect due to a defective thin film transistor which constitutes a buffer of the drive circuit to be eliminated with ease, while improving a yield of panels.
摘要翻译： 驱动电路集成型有源矩阵液晶显示装置被布置为使得由P沟道薄膜晶体管和N沟道薄膜晶体管组成的缓冲器串联连接的P沟道薄膜晶体管 和N沟道薄膜晶体管; P沟道薄膜晶体管和N沟道薄膜晶体管中的至少一个由并联连接的多个薄膜晶体管构成; 并且连接到并联连接的多个薄膜晶体管的电源线和输出线中的至少一个形成在由主配线部分和分支成各个薄膜晶体管的分支布线部分组成的布线图案中。 所述布置允许由于构成驱动电路的缓冲器的缺陷薄膜晶体管而容易地消除的线状缺陷，同时提高了面板的产量。
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公开(公告)号：US5977563A
公开(公告)日：1999-11-02
申请号：US842795
申请日：1997-04-15
IPC分类号： G02F1/136 , G02F1/1362 , G02F1/1368 , H01L21/77 , H01L21/84 , H01L27/12 , H01L27/088 , H01L29/41
CPC分类号： G02F1/1362 , H01L27/1214 , G02F1/136259
摘要： In an active matrix substrate having thereon a matrix of pixels each composed of a pair of a TFT and a pixel electrode, when the shorting of the pixel electrodes in adjacent pixels occurs, an electrical connection between the pixel electrode and drain electrode in the TFT of a matching pair in either of the shorted pixel electrodes is cut. For example, when the shorting of two adjacent pixels occurs, the pixel electrodes in both the pixels are driven by the TFT in the non-cut pixel. This arrangement makes it possible to make a display defect resulted from the shorting of adjacent pixels on the active matrix substrate less noticeable, and hence to upgrade display quality.
摘要翻译： 在其上具有由一对TFT和像素电极构成的像素矩阵的有源矩阵基板中，当相邻像素中的像素电极发生短路时，TFT中的像素电极和漏电极之间的电连接 在任一个短路像素电极中的匹配对被切割。 例如，当发生两个相邻像素的短路时，两个像素中的像素电极由非切割像素中的TFT驱动。 这种布置使得可以使由于有源矩阵基板上的相邻像素的短路而导致的显示缺陷不太明显，并且因此提高显示质量。
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公开(公告)号：US5576730A
公开(公告)日：1996-11-19
申请号：US43384
申请日：1993-04-06
IPC分类号： G02F1/136 , G02F1/133 , G02F1/1345 , G02F1/1368 , G09F9/30 , G09G3/00 , G09G3/36 , G01R31/28
CPC分类号： G09G3/006 , G09G3/3648 , G09G3/3688 , Y10S345/904
摘要： An active matrix substrate including an external signal supplying circuit for externally supplying the video signals to the data lines. The external signal supplying circuit includes a data line connection section connected to the data lines; an inspection signal inputting section and an inspection signal outputting section both connected to the data line connection section; and a switching device for electrically connecting the inspection signal inputting section or the inspection signal outputting section to the data line connection section. After the active matrix substrate is subjected to an electrical inspection, a short ring is formed for electrically connecting an inspection signal inputting terminal provided with an inspection signal inputting section, an inspection signal outputting terminal provided with an inspection signal outputting section, a first terminal provided with a gate driving circuit, a second terminal provided with a source driving circuit, and the data line connection section, in a case when the active matrix substrate is judged to have no defect; and then the short ring is removed after an alignment treatment of a display medium.
摘要翻译： 一种有源矩阵基板，包括用于向数据线外部供应视频信号的外部信号提供电路。 外部信号提供电路包括连接到数据线的数据线连接部分; 检测信号输入部和检查信号输出部，两者都连接到数据线连接部; 以及用于将检查信号输入部分或检查信号输出部分电连接到数据线连接部分的切换装置。 在有源矩阵基板进行电气检查之后，形成短环，用于将设置有检查信号输入部的检查信号输入端子，设置有检查信号输出部的检查信号输出端子，提供的第一端子 在有源矩阵基板被判断为没有缺陷的情况下，具有栅极驱动电路，设置有源极驱动电路的第二端子和数据线连接部， 然后在显示介质的取向处理之后移除短环。
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公开(公告)号：US5453135A
公开(公告)日：1995-09-26
申请号：US174011
申请日：1993-12-28
IPC分类号： H01L31/04 , H01L31/052 , H01L31/06
CPC分类号： H01L31/056 , H01L31/022483 , H01L31/0392 , H01L31/076 , H01L31/1884 , Y02E10/52 , Y02E10/548
摘要： A photoelectric conversion device comprising at least a metal layer, a transparent conductive layer disposed on said metal layer, and an active semiconductor layer disposed on said transparent conductive layer, characterized in that said transparent conductive layer comprises a layer having an uneven surface which is composed of a zinc oxide material having an X-ray diffraction pattern in which (a) the peak intensity of the (2,0,0) planes of ZnO.sub.2 is 1/200 or less of (b) the peak intensity of the (0,0,2) planes of ZnO and (c) the peak intensity of the (1,0,1) planes of Zn is 1/200 or less of the peak intensity (b).
摘要翻译： 一种光电转换装置，其至少包括金属层，设置在所述金属层上的透明导电层和设置在所述透明导电层上的有源半导体层，其特征在于，所述透明导电层包括具有凹凸表面的层， 的具有X射线衍射图的氧化锌材料，其中（a）ZnO 2的（2,0,0）面的峰强度为（b）的（O， 0,2）平面，（c）Zn的（1,0,1）面的峰强度是峰强度（b）的1/200以下。
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