公开(公告)号：US20050122188A1

公开(公告)日：2005-06-09

申请号：US10976242

申请日：2004-10-28

申请人： Tsukasa Funasaka ,  Masahiro Oshio

发明人： Tsukasa Funasaka ,  Masahiro Oshio

IPC分类号： H03H9/02 ,  H03H9/64

CPC分类号： H03H9/02236 ,  H03H9/02551 ,  H03H9/02834

摘要： A surface acoustic wave element is provided including, as a substrate, a quartz-rotator Y plate whose Euler angle is expressed as (0, θ, ψ), and an IDT and reflectors provided on this substrate. The IDT is formed of Al as its main ingredient, and arranged so that an angle ψ, which the propagation direction of a surface acoustic wave and the X-axis of the quartz-rotator Y plate make, is 90±10°, and a normalized film-thickness H/λ of the IDT, and the cut angle θ satisfy the following Relation A: θ min≧θ≧θ max (where, θ=129 through 144°); θ min=857.06(H/λ)2+23.656(H/λ)+123.68; and θ max=2502.4(H/λ)2+73.1(H/λ)+121.7.

摘要翻译： 提供了一种表面声波元件，其包括作为基底的欧拉角表示为（0，θ，psi）的石英旋转器Y板，以及设置在该基板上的IDT和反射器。 IDT由Al作为其主要成分，并且布置成使得表面声波的传播方向和石英旋转器Y板的X轴的角度psi为90±10°，并且 IDT的标准化膜厚度H /λ和切割角度θ满足以下关系A：<？in-line-formula description =“In-line Formulas”end =“lead”>>θmin> =θ> = theta max（其中，θ= 129到144°）; <？in-line-formula description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> theta min = 857.06（H /lambda)²+23.656(H/lambda)+123.68; 和<？in-line-formula description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> theta max = 2502.4（ H /λ）2 + 73.1（H /λ）+ 121.7。 <？in-line-formula description =“In-line Formulas”end =“tail”？>

公开(公告)号：US08342021B2

公开(公告)日：2013-01-01

申请号：US12705764

申请日：2010-02-15

申请人： Masahiro Oshio

发明人： Masahiro Oshio

IPC分类号： G01P1/02

CPC分类号： G01P1/023 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00293 ,  G01C19/56 ,  G01P2015/0814

摘要： A composite sensor includes: a package including a container and a lid; a plurality of spaces that is partitioned by at least the container and the lid, and has different pressures, the plurality of the spaces including a first space sealed at around an atmospheric pressure and a second space sealed at a depressurized state; an acceleration sensor element disposed in the first space; and a vibration type angular velocity sensor element disposed in the second space. In the sensor, the first space has a volume smaller than a volume of the second space.

摘要翻译： 复合传感器包括：包括容器和盖子的包装件; 多个空间，其至少由所述容器和所述盖分隔，并且具有不同的压力，所述多个空间包括在大气压附近密封的第一空间和在减压状态下密封的第二空间; 设置在所述第一空间中的加速度传感器元件; 以及设置在所述第二空间中的振动型角速度传感器元件。 在传感器中，第一空间的体积小于第二空间的体积。

公开(公告)号：US08850887B2

公开(公告)日：2014-10-07

申请号：US13404475

申请日：2012-02-24

申请人： Yoshinao Yanagisawa ,  Masahiro Oshio ,  Takayuki Kikuchi ,  Toshihiro Nishida ,  Masayuki Takahashi

发明人： Yoshinao Yanagisawa ,  Masahiro Oshio ,  Takayuki Kikuchi ,  Toshihiro Nishida ,  Masayuki Takahashi

IPC分类号： G01C19/56 ,  H03H9/24 ,  G01C19/5776

CPC分类号： G01C19/56 ,  G01C19/5776 ,  H03H9/2468

摘要： A detection circuit includes a synchronous detection circuit (synchronous detection section) that synchronously detects a signal that includes a detection signal of a vibrator (an output signal of an amplifier), a switched capacitor filter (SCF) circuit that filters a signal that has been synchronously detected by the synchronous detection circuit (an output signal of a programmable gain amplifier), and an output buffer that buffers and outputs a signal that has been filtered by the SCF circuit, the gain of the SCF circuit being larger than 1.

摘要翻译： 检测电路包括同步检测电路（同步检测部分），其同步地检测包括振动器的检测信号（放大器的输出信号）的信号，对已经被存储的信号进行滤波的开关电容滤波器（SCF）电路 由同步检测电路（可编程增益放大器的输出信号）同步检测的缓冲器，其输出缓冲并输出由SCF电路滤波的信号，SCF电路的增益大于1。

公开(公告)号：US08573058B2

公开(公告)日：2013-11-05

申请号：US12710569

申请日：2010-02-23

申请人： Masahiro Oshio

发明人： Masahiro Oshio

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  B81B3/0051 ,  B81B2201/0235 ,  G01P1/023 ,  G01P15/0802 ,  G01P2015/0814

摘要： An acceleration sensor includes: a support member; a fixed electrode provided on the support member; a movable unit; a movable electrode provided on the movable unit and disposed opposed to the fixed electrode to generate capacity; and a projection extending from the opposed surface of at least either the fixed electrode or the movable electrode in one direction within the surface.

摘要翻译： 加速度传感器包括：支撑构件; 设置在所述支撑构件上的固定电极; 可移动单元; 可移动电极，设置在所述可动单元上并与所述固定电极相对设置，以产生能力; 以及从固定电极或可动电极中的至少一个的相对表面在表面内的一个方向延伸的突起。

公开(公告)号：US20090058226A1

公开(公告)日：2009-03-05

申请号：US12204746

申请日：2008-09-04

申请人： Makoto Furuhata ,  Masahiro Oshio ,  Takamitsu Higuchi

发明人： Makoto Furuhata ,  Masahiro Oshio ,  Takamitsu Higuchi

IPC分类号： H01L41/04 ,  G01P15/09

CPC分类号： G01P15/097 ,  G01C19/5607 ,  G01P15/09 ,  H03H9/21

摘要： A tuning fork oscillating piece includes: a base; a pair of oscillating arms extending from the base in directions substantially parallel with each other; a drive piezoelectric element provided at least on one main surface or side surface of each of the oscillating arms to allow bending oscillation of the oscillating arms by piezoelectric distortion caused by applied charge; a detection piezoelectric element provided on the surface opposed to the surface of each of the oscillating arms on which the drive piezoelectric element is provided to convert the piezoelectric distortion caused by the bending oscillation of the oscillating arms into charge and output the charge. The drive piezoelectric element has a drive piezoelectric section. The detection piezoelectric element has a detection piezoelectric section. The absolute value of the piezoelectric d constant of the drive piezoelectric section is larger than the absolute value of the piezoelectric d constant of the detection piezoelectric section. The absolute value of the piezoelectric g constant of the detection piezoelectric section is larger than the absolute value of the piezoelectric g constant of the drive piezoelectric section.

摘要翻译： 音叉振荡片包括：基座; 一对摆动臂，其基本上彼此平行地延伸; 驱动压电元件，其设置在每个摆动臂的至少一个主表面或侧表面上，以通过由施加的电荷引起的压电变形来允许振荡臂的弯曲振荡; 检测压电元件设置在与设置有驱动压电元件的每个振荡臂的表面相对的表面上，以将由振荡臂的弯曲振荡引起的压电变形转换为充电并输出电荷。 驱动压电元件具有驱动压电部。 检测用压电元件具有检测压电部。 驱动压电部的压电d常数的绝对值大于检测压电部的压电d常数的绝对值。 检测用压电部的压电g常数的绝对值大于驱动压电部的压电体g的绝对值。

公开(公告)号：US07474033B2

公开(公告)日：2009-01-06

申请号：US11147220

申请日：2005-06-08

申请人： Masahiro Oshio

发明人： Masahiro Oshio

IPC分类号： H01L41/00

CPC分类号： H03H9/1071 ,  H03H3/10 ,  H03H9/02559 ,  H03H9/02614 ,  H03H9/02818 ,  H03H9/02984 ,  H03H9/14538

摘要： A surface acoustic wave device, comprising a lithium-tantalate substrate and an IDT electrode that excites a pseudo-longitudinal wave type leaky surface acoustic wave in the surface of the lithium-tantalate substrate, wherein a normalized substrate thickness t/λ, which is a thickness t of the lithium-tantalate substrate normalized by an IDT wavelength λ, is in a range of 1≦t/λ≦22.

摘要翻译： 一种声表面波装置，其特征在于，包括在所述锂钽酸盐基板的表面中激发伪纵波型泄漏表面声波的锂钽酸锂基板和IDT电极，其中，所述正电荷基板厚度t /λ为 由IDT波长λ标准化的钽酸锂底物的厚度t在1 <= t /λ<22的范围内。

公开(公告)号：US07579932B2

公开(公告)日：2009-08-25

申请号：US11571432

申请日：2005-07-01

申请人： Michiaki Takagi ,  Katsuro Yoneya ,  Masahiro Oshio

发明人： Michiaki Takagi ,  Katsuro Yoneya ,  Masahiro Oshio

IPC分类号： H03H9/145 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/0042 ,  H03H9/02551 ,  H03H9/02842 ,  H03H9/14588

摘要： A longitudinally coupled multi-mode SAW resonator filter includes input and output interdigital transducers (IDTs) with a control IDT therebetween to control a state of the surface acoustic wave. The input, output, and control IDTs alternatively arrange two different zones C and E having respective electrode period lengths PC and PE, being equal to a sum of the electrode finger width L and spacing S between electrode fingers, and a number of respective pairs MC and ME of electrode fingers is set to 1 in both zones C and E. Electrode fingers in zones C and E are all connected to a feeder conductor. Hence, a filter having small insertion loss, and a wide fractional bandwidth of 2000-4000 ppm is achieved by canceling and decreasing sums of reflected waves from the electrode fingers in zones C and E, and decreasing the effective reflection coefficient per the electrode finger.

摘要翻译： 纵向耦合的多模SAW谐振滤波器包括其间具有控制IDT的输入和输出叉指式换能器（IDT），以控制表面声波的状态。 输入，输出和控制IDT交替地布置具有相应的电极周期长度PC和PE的两个不同的区域C和E，其等于电极指之间的电极指宽度L和间距S之和以及多个相应的对MC 并且电极指的ME在两个区域C和E中都设置为1.区域C和E中的电极手指都连接到馈线导体。 因此，通过抵消和减少来自区域C和E中的电极指的反射波的总和，并且降低每个电极指的有效反射系数，实现了具有小插入损耗和2000-4000ppm的宽分数带宽的滤波器。

公开(公告)号：US08640540B2

公开(公告)日：2014-02-04

申请号：US12984068

申请日：2011-01-04

申请人： Masahiro Oshio

发明人： Masahiro Oshio

IPC分类号： G01P15/097 ,  G01C19/24 ,  G01P3/44

CPC分类号： G01C19/5762 ,  G01C19/5747

摘要： A vibrating element includes: a first support portion and a second support portion; a first vibrating arm which extends along a first axis, one end of the first vibrating arm being connected to the first support portion; a second vibrating arm which extends along the first axis, one end of the second vibrating arm being connected to the second support portion; an oscillating member which is sandwiched between the other ends of the first vibrating arm and the second vibrating arm, and has openings; and detection arms which extend along a second axis perpendicular to the first axis from the inner walls of the openings of the oscillating member in plan view.

摘要翻译： 振动元件包括：第一支撑部分和第二支撑部分; 第一振动臂，其沿着第一轴线延伸，所述第一振动臂的一端连接到所述第一支撑部; 第二振动臂，其沿着所述第一轴线延伸，所述第二振动臂的一端连接到所述第二支撑部; 摆动构件，其夹在第一振动臂和第二振动臂的另一端之间，并具有开口; 以及在平面图中从摆动件的开口的内壁沿垂直于第一轴线的第二轴线延伸的检测臂。

公开(公告)号：US20080018416A1

公开(公告)日：2008-01-24

申请号：US11571432

申请日：2005-07-01

申请人： Michiaki Takagi ,  Katsuro Yoneya ,  Masahiro Oshio

发明人： Michiaki Takagi ,  Katsuro Yoneya ,  Masahiro Oshio

IPC分类号： H03H9/64

CPC分类号： H03H9/0042 ,  H03H9/02551 ,  H03H9/02842 ,  H03H9/14588

摘要： It is aimed to provide a resonator type SAW filter having a relatively wide fractional bandwidth by canceling and decreasing reflection coefficients of electrode fingers each other with a ¼ wavelength electrode in a multi-longitudinal-mode-coupled resonator type SAW filter. The resonator type SAW filter includes, on a piezoelectric substrate, an input interdigital transducer that excites a surface acoustic wave, an output interdigital transducer that receives the surface acoustic wave excited by the input interdigital transducer, a control interdigital transducer interposed between the input interdigital transducer and the output interdigital transducer that controls a state of the surface acoustic wave, and a pair of reflectors arranged on outer sides of both the input interdigital transducer and the output interdigital transducer. And, the input interdigital transducer, the output interdigital transducer, and the control interdigital transducer alternatively arrange two different zones C and E. An electrode period length P is set as PC and a number of pairs MC of the electrode fingers is set to 1 in zone C and the electrode period length P is set as PE and a number of pairs ME of the electrode fingers is set to 1 in zone E on the condition that the electrode period length P as a sum of an electrode finger width L and a spacing S between the electrode fingers is equal to L+S. The electrode fingers in zones C and E are all connected to a feeder conductor. As a result, a multi-longitudinal-mode-coupled resonator type SAW filter having a small insertion loss, and a wide fractional bandwidth of 2000 to 4000 ppm is achieved by canceling and decreasing sums of reflected waves from the electrode fingers in zones C and E, and decreasing the effective reflection coefficient per the electrode finger.

摘要翻译： 旨在通过在多纵模耦合谐振器型SAW滤波器中通过用1/4波长电极抵消和减少电极指的反射系数来提供具有相对宽的分数带宽的谐振器型SAW滤波器。 谐振器型SAW滤波器在压电基板上包括激励表面声波的输入叉指换能器，接收由输入叉指式换能器激发的表面声波的输出叉指换能器，插入在输入叉指式换能器之间的控制叉指式换能器 以及控制声表面波状态的输出叉指换能器，以及布置在输入叉指式换能器和输出叉指式换能器两侧的一对反射器。 并且，输入叉指式换能器，输出叉指式换能器和控制叉指式换能器交替地布置两个不同的区域C和E.电极周期长度P设置为PC，并且电极指的对数MC被设置为1 区域C和电极周期长度P被设置为PE，并且在电极周期长度P作为电极指宽度L和间距之和的条件下，区域E中电极指的对数ME被设置为1 电极指之间的S等于L + S。 区域C和E中的电极指全部连接到馈线导体。 结果，通过在区域C和C中消除和减少来自电极指的反射波的和，实现具有小插入损耗和2000至4000ppm的宽分数带宽的多纵模耦合谐振器型SAW滤波器， E，并且减小每个电极指的有效反射系数。

公开(公告)号：US20050275487A1

公开(公告)日：2005-12-15

申请号：US11142472

申请日：2005-06-02

申请人： Masahiro Oshio

发明人： Masahiro Oshio

IPC分类号： H03H3/10 ,  H03H9/02 ,  H03H9/05 ,  H03H9/10 ,  H03H9/64

CPC分类号： H03H9/0547 ,  H01L2224/16225 ,  H01L2924/16195 ,  H03H3/10 ,  H03H9/02622 ,  H03H9/0585 ,  H03H9/059 ,  H03H9/1071

摘要： A method for adjusting frequency of a surface acoustic wave device includes performing a frequency adjustment. The surface acoustic wave device includes a substrate including at least one of a lithium tantalate substrate, a lithium niobate substrate, and a lithium tetraborate substrate. The surface acoustic wave device further includes an IDT electrode formed on the substrate that excites a pseudo-longitudinal leaky surface acoustic wave. The performing includes frequency adjustment by adjusting a thickness of the substrate at a side opposite in a thickness direction to a side on which the IDT electrode is formed.

摘要翻译： 用于调整声表面波装置的频率的方法包括进行频率调整。 表面声波装置包括包括钽酸锂衬底，铌酸锂衬底和四硼酸锂衬底中的至少一种的衬底。 表面声波装置还包括形成在基板上的IDT电极，其激励伪纵向泄漏声波。 执行包括通过调整在与形成IDT电极的一侧的厚度方向相反的一侧的衬底的厚度来进行频率调整。