公开(公告)号：US20090186479A1

公开(公告)日：2009-07-23

申请号：US12318971

申请日：2009-01-13

申请人： Tsuneyuki Okabe ,  Hitoshi Katoh ,  Junya Hiraka ,  Hiroyuki Kikuchi

发明人： Tsuneyuki Okabe ,  Hitoshi Katoh ,  Junya Hiraka ,  Hiroyuki Kikuchi

IPC分类号： H01L21/285 ,  C23C16/46 ,  C23C16/52

CPC分类号： H01L21/02186 ,  C23C16/409 ,  C23C16/448 ,  C23C16/4486 ,  C23C16/45531 ,  C23C16/52

摘要： A semiconductor processing system including a semiconductor processing apparatus and a gas supply apparatus for supplying a process gas into the semiconductor processing apparatus includes a control section configured to control an operation of a pressure adjusting mechanism for adjusting the pressure inside a vaporizing chamber. The control section is preset to cause the pressure inside the vaporizing chamber to fall within a predetermined pressure range with reference to a pressure detection value obtained by a pressure detector. The predetermined pressure range is defined by an upper limit lower than a first limit value, at which vaporization of the liquid material starts being inhibited due to an increase in the pressure, and a lower limit higher than a second limit value, at which vaporization of the liquid material starts being unstable and the pressure inside the vaporizing chamber starts pulsating movement due to a decrease in the pressure.

摘要翻译： 包括半导体处理装置和用于向半导体处理装置供给处理气体的气体供给装置的半导体处理系统包括：控制部，被配置为控制用于调节蒸发室内的压力的压力调节机构的操作。 参照由压力检测器得到的压力检测值，控制部被预先设定为使蒸发室内的压力落入规定的压力范围内。 预定压力范围由低于第一极限值的上限限定，在第一极限值下，液体材料的蒸发由于压力的增加而被抑制，并且比第二极限值高的第二极限值的下限， 液体材料开始不稳定，并且由于压力的降低，蒸发室内部的压力开始脉动运动。

公开(公告)号：US08721790B2

公开(公告)日：2014-05-13

申请号：US12963673

申请日：2010-12-09

申请人： Hitoshi Kato ,  Manabu Honma ,  Kohichi Orito ,  Yasushi Takeuchi ,  Hiroyuki Kikuchi

发明人： Hitoshi Kato ,  Manabu Honma ,  Kohichi Orito ,  Yasushi Takeuchi ,  Hiroyuki Kikuchi

IPC分类号： C23C16/453 ,  C23C16/455 ,  C23C16/458 ,  H01L21/306 ,  C23F1/00 ,  C23C16/06 ,  C23C16/22

CPC分类号： C23C16/45551 ,  C23C16/4412 ,  C23C16/45521 ,  C23C16/45578

摘要： A film deposition apparatus includes a turntable provided in the chamber and having on a first surface a substrate receiving area in which a substrate is placed; first and second reaction gas supplying portions supplying first and second reaction gases to the first surface, respectively; a separation gas supplying portion provided between the first reaction gas supplying portion and the second reaction gas supplying portion and supplying a separation gas that separates the first reaction gas and the second reaction gas; an evacuation port that evacuates the chamber; a space defining member provided for at least one of the first and second reaction gas supplying portions and defining a first space between the at least one of the first and second reaction gas supplying portions and the turntable and a second space so that the separation gas is likely to flow through the second space rather than the first space.

摘要翻译： 一种成膜装置，包括设置在所述室中并在第一表面上具有放置基板的基板接收区域的转盘; 分别向第一表面供应第一和第二反应气体的第一和第二反应气体供应部分; 分离气体供给部，设置在第一反应气体供给部和第二反应气体供给部之间，供给分离第一反应气体和第二反应气体的分离气体; 疏散室的疏散口; 设置在所述第一反应气体供给部和所述第二反应气体供给部中的至少一个的空间限定部件，在所述第一反应气体供给部和所述第二反应气体供给部中的至少一个与所述转台之间形成第一空间， 可能流经第二空间而不是第一空间。

公开(公告)号：USD697848S1

公开(公告)日：2014-01-21

申请号：US29414296

申请日：2012-02-27

申请人： Souichi Maruyama ,  Hiroyuki Kikuchi ,  Ilwon Lee

设计人： Souichi Maruyama ,  Hiroyuki Kikuchi ,  Ilwon Lee

公开(公告)号：US08443926B2

公开(公告)日：2013-05-21

申请号：US13057179

申请日：2009-09-03

申请人： Yoshihisa Kanno ,  Hiroyuki Kikuchi

发明人： Yoshihisa Kanno ,  Hiroyuki Kikuchi

IPC分类号： B62K11/00 ,  B62M7/00

CPC分类号： B62K11/10 ,  B60L3/0023 ,  B60L3/0046 ,  B60L11/1874 ,  B60L11/1877 ,  B60L2200/12 ,  B60L2240/36 ,  B62K25/283 ,  B62K25/32 ,  B62K2202/00 ,  B62K2204/00 ,  B62M7/12 ,  Y02T10/7005 ,  Y02T10/705

摘要： An electric motorcycle in which a power drive unit and a motive power generation motor for traveling are secured to a swing arm swinging around a pivot shaft, and power from a battery is supplied through the power drive unit to the motive power generation motor. A hollow inside of the swing arm is partitioned into an air introducing space and an equipment fixing space by a partition wall. The power drive unit is secured in the equipment fixing space so as to be in close contact with the partition wall and a fin extending from the partition wall to the air introducing space are formed at a fixing surface of the air introducing space to which the power drive unit is attached.

摘要翻译： 一种电动摩托车，其中动力驱动单元和用于行进的动力发电电动机固定在围绕枢轴摆动的摆臂上，并且来自电池的动力通过动力驱动单元提供给动力发电电动机。 摆臂的中空内部通过分隔壁分隔成空气导入空间和设备固定空间。 电力驱动单元被固定在设备固定空间中以与分隔壁紧密接触，并且在空气引入空间的固定表面处形成从分隔壁延伸到空气引入空间的翅片， 驱动单元被连接。

公开(公告)号：US20130087097A1

公开(公告)日：2013-04-11

申请号：US13644697

申请日：2012-10-04

申请人： Hitoshi KATO ,  Takeshi Kobayashi ,  Hiroyuki Kikuchi ,  Shigehiro Miura

发明人： Hitoshi KATO ,  Takeshi Kobayashi ,  Hiroyuki Kikuchi ,  Shigehiro Miura

IPC分类号： C23C16/50 ,  C23C16/52 ,  C23C16/458

CPC分类号： C23C16/45536 ,  C23C16/45544 ,  C23C16/507 ,  H01J37/321 ,  H01J37/3211

摘要： An apparatus is configured to include a gas supplying part configured to supply a plasma generating gas on a surface on a substrate mounting area side in a turntable and an antenna configured to convert the plasma generating gas to plasma by induction coupling and provided facing the surface of the substrate mounting area side in the turntable so as to extend from a center part to an outer edge part of the turntable. The antenna is arranged so as to have a distance from the turntable in the substrate mounting area not less than 3 mm longer on the center part side than on the outer edge part side.

摘要翻译： 一种装置，被配置为包括气体供应部件，其构造成在转盘的基板安装区域侧的表面上提供等离子体产生气体，以及天线，被配置为通过感应耦合将等离子体产生气体转换成等离子体， 旋转台中的基板安装区域侧从转台的中心部分延伸到外边缘部分。 天线布置成在中心部分侧比在外边缘部分侧不小于3mm的基板安装区域中的转盘具有距离。

公开(公告)号：US08118129B2

公开(公告)日：2012-02-21

申请号：US12041177

申请日：2008-03-03

申请人： Masamoto Ito ,  Hiroyuki Kikuchi

发明人： Masamoto Ito ,  Hiroyuki Kikuchi

IPC分类号： B60K1/04 ,  B60K13/04 ,  B60K13/06 ,  B62D61/02

CPC分类号： B60K1/04 ,  B60Y2200/12 ,  B62K11/04 ,  B62K11/10 ,  B62K2202/00 ,  B62K2204/00 ,  B62M23/02 ,  H01M8/04044 ,  H01M8/04291 ,  H01M2250/20 ,  Y02P70/56 ,  Y02T90/32

摘要： A layout for an exhaust pipe which also serves as a drainage pipe which prevents splashing of water generated in a fuel cell toward a passenger or splashing toward a tire. Humid excessive gas supplied from a fuel cell is diluted in a dilution box by off-gas discharged from the fuel cell and is used for humidifying air in the humidifier. An exhaust pipe is connected to the dilution box, and diluted hydrogen gas is discharged via the exhaust pipe. Vapor mixed in hydrogen gas is condensed in the exhaust pipe and turned into water, which is drained through the exhaust pipe that extends rearwardly of a vehicle body through the interior of a power unit. A discharge port of the exhaust pipe (which is also a drainage port for water generated in the fuel cell) is positioned at the widthwise center of the vehicle body.

摘要翻译： 排气管的布局，其还用作排水管，其防止在燃料电池中产生的水飞向乘客或向轮胎飞溅。 从燃料电池供应的潮湿的过量气体通过从燃料电池排出的废气在稀释箱中稀释，并用于加湿器中的空气加湿。 排气管连接到稀释盒，稀释的氢气经排气管排出。 在氢气中混合的蒸汽在排气管中被冷凝并变成水，其通过从动力单元的内部从车身向后延伸的排气管排出。 排气管（其也是在燃料电池中产生的水的排水口）的排出口位于车体的宽度方向的中心。

公开(公告)号：US08087230B2

公开(公告)日：2012-01-03

申请号：US12103270

申请日：2008-04-15

申请人： Hiroyuki Kikuchi ,  Tomoyuki Takeshita ,  Tetsuya Mori ,  Akira Soeda ,  Shin Yasuchika ,  Makoto Momosaki ,  Hidehiko Yamamoto

发明人： Hiroyuki Kikuchi ,  Tomoyuki Takeshita ,  Tetsuya Mori ,  Akira Soeda ,  Shin Yasuchika ,  Makoto Momosaki ,  Hidehiko Yamamoto

IPC分类号： F01N3/00

CPC分类号： F01N13/08 ,  F01N3/10 ,  F01N13/008 ,  F01N2560/025 ,  F01N2590/04 ,  Y02A50/2322

摘要： An exhaust system for discharging exhaust gases through an exhaust passageway, emitted from a multi-cylinder combustion engine mounted on a motor vehicle includes a partition plate formed therein for dividing the exhaust passageway into a plurality of juxtaposed exhaust passages and having a communicating hole defined therein, and an exhaust gas sensor positioned at a location in proximity of the communicating hole for detecting a composition of the exhaust gases.

摘要翻译： 一种排气系统，用于通过从安装在机动车辆上的多气缸内燃机排出的排气通道排出的废气包括形成在其中的分隔板，用于将排气通道分成多个并置的排气通道，并具有限定在其中的连通孔 以及位于邻近连通孔的位置处的废气传感器，用于检测废气的组成。

公开(公告)号：US20110039026A1

公开(公告)日：2011-02-17

申请号：US12852545

申请日：2010-08-09

申请人： Hitoshi Kato ,  Hiroyuki Kikuchi ,  Shigehiro Ushikubo

发明人： Hitoshi Kato ,  Hiroyuki Kikuchi ,  Shigehiro Ushikubo

IPC分类号： C23C14/22 ,  C23C16/44

CPC分类号： C23C16/45551 ,  C23C16/402 ,  C23C16/45536

摘要： A silicon oxide film is deposited by rotating a rotation table on which a wafer W is placed to allow BTBAS gas to be adsorbed on an upper surface of the wafer W and supply a O3 gas to the upper surface of the wafer W for allowing the BTBAS gas adsorbed on the upper surface of the wafer W to react. After depositing the silicon oxide film, a reforming process is performed every deposition cycle by supplying a plasma of Ar gas to the silicon oxide film on the wafer from an activated gas injector.

摘要翻译： 通过旋转放置晶片W的旋转台来沉积氧化硅膜，以允许BTBAS气体吸附在晶片W的上表面上，并将O 3气体供应到晶片W的上表面，以允许BTBAS 吸附在晶片W的上表面上的气体反应。 在沉积氧化硅膜之后，通过从活化气体注入器向晶片上的氧化硅膜提供Ar气体的等离子体，进行每个沉积循环的重整过程。

公开(公告)号：US20100260935A1

公开(公告)日：2010-10-14

申请号：US12753932

申请日：2010-04-05

申请人： HITOSHI KATO ,  Manabu Honma ,  Hiroyuki Kikuchi

发明人： HITOSHI KATO ,  Manabu Honma ,  Hiroyuki Kikuchi

IPC分类号： C23C16/52 ,  C23C16/00 ,  C23C16/46

CPC分类号： H01L21/67115 ,  C23C16/402 ,  C23C16/45519 ,  C23C16/45536 ,  C23C16/45551 ,  C23C16/45578 ,  C23C16/458 ,  C23C16/46 ,  C23C16/463 ,  C23C16/482 ,  C23C16/54 ,  H01L21/6719 ,  H01L21/67207 ,  H01L21/68764 ,  H01L21/68771

摘要： A rotation table on which a wafer is placed is rotated around a vertical axis in order to supply to an upper surface of the wafer a first reaction gas for allowing the first reaction gas to be adsorbed on the upper surface, an auxiliary gas that reacts with the first reaction gas to produce an intermediate product having reflowability, and a second reaction gas that is reacted with the intermediate product to produce a reaction product in this order; and the reaction product is heated by a heating lamp in order to densify the reaction product.

摘要翻译： 放置晶片的旋转台围绕垂直轴旋转，以向晶片的上表面提供用于允许第一反应气体吸附在上表面上的第一反应气体，与 产生具有回流性的中间产物的第一反应气体和与中间产物反应以产生反应产物的第二反应气体; 并且通过加热灯加热反应产物以使反应产物致密化。

公开(公告)号：US07774867B2

公开(公告)日：2010-08-17

申请号：US12009510

申请日：2008-01-18

申请人： Masayoshi Orita ,  Hiroshi Goto ,  Yuki Kobayashi ,  Hiroyuki Kikuchi

发明人： Masayoshi Orita ,  Hiroshi Goto ,  Yuki Kobayashi ,  Hiroyuki Kikuchi

IPC分类号： A41D13/00

CPC分类号： A41D13/018 ,  Y10S2/03

摘要： An airbag jacket, to be fitted in a rider jacket, includes an airbag body configured to fill with gas from an inflator operatively connected with the airbag body. The airbag body includes a flat front piece, a flat back piece substantially identical to the flat front piece; the flat front and back pieces having an opening formed therein for permitting an user of the airbag jacket to pass his or her head therethrough. The flat front and back pieces are joined together along a peripheral boundary thereof and along a peripheral boundary of the opening by sewing or bonding so as provide a plurality of continuously formed body covering portions including at least a back covering portion, a shoulder covering portion and a front covering portion.

摘要翻译： 安装在骑手护套中的安全气囊夹套包括安全气囊本体，其构造成从与气囊主体可操作地连接的充气机填充气体。 气囊本体包括平坦的前部件，与平坦的前部件基本相同的平的后部件; 平坦的前部和后部具有形成在其中的开口，用于允许安全气囊护套的使用者将他或她的头部通过。 平坦的前后片通过缝合或接合沿着其周边边界并沿着开口的周边边界连接在一起，从而提供多个连续成形的主体覆盖部分，其至少包括后覆盖部分，肩部覆盖部分和 前覆盖部分。