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1.发明授权Method for making micromechanical structures having at least one lateral, small gap therebetween and micromechanical device produced thereby 有权用于制造具有至少一个横向的小间隙的微机械结构的方法和由此产生的微机械装置公开(公告)号：US06846691B2
公开(公告)日：2005-01-25
申请号：US10625992
申请日：2003-07-24
申请人： Wan-Thai Hsu , John R. Clark , Clark T. C. Nguyen
发明人： Wan-Thai Hsu , John R. Clark , Clark T. C. Nguyen
CPC分类号： B81C1/0019 , B81B2201/0235 , B81B2201/0242 , B81B2201/0271 , B81B2203/0307 , B81C1/00626 , B81C2201/0109 , H03H3/007 , H03H3/0072 , H03H3/013 , H03H9/02362 , H03H9/2436 , H03H9/46 , H03H9/462 , H03H9/505 , H03H2009/02496
摘要： A method and resulting formed device are disclosed wherein the method combines polysilicon surface-micromachining with metal electroplating technology to achieve a capacitively-driven, lateral micromechanical resonator with submicron electrode-to-resonator capacitor gaps. Briefly, surface-micromachining is used to achieve the structural material for a resonator, while conformal metal-plating is used to implement capacitive transducer electrodes. This technology makes possible a variety of new resonator configurations, including disk resonators and lateral clamped-clamped and free-free flexural resonators, all with significant frequency and Q advantages over vertical resonators. In addition, this technology introduces metal electrodes, which greatly reduces the series resistance in electrode interconnects, thus, minimizing Q-loading effects while increasing the power handling ability of micromechanical resonators.
摘要翻译： 公开了一种方法和产生的形成的器件，其中该方法将多晶硅表面微机械加工与金属电镀技术相结合，以实现具有亚微米电极到谐振器的电容器间隙的电容驱动的横向微机械谐振器。 简而言之，使用表面微加工来实现谐振器的结构材料，而使用保形金属镀来实现电容式换能器电极。 该技术使得各种新的谐振器配置成为可能，包括磁盘谐振器和横向夹紧和自由弯曲谐振器，与垂直谐振器相比具有显着的频率和Q优点。 此外，该技术引入了金属电极，这大大降低了电极互连中的串联电阻，从而在增加微机械谐振器的功率处理能力的同时最大限度地减小了Q负载效应。
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2.发明授权公开(公告)号：US06958566B2
公开(公告)日：2005-10-25
申请号：US10217877
申请日：2002-08-13
申请人： Clark T.-C. Nguyen , Wan-Thai Hsu
发明人： Clark T.-C. Nguyen , Wan-Thai Hsu
CPC分类号： H03H9/2463 , H03H9/02448 , H03H9/24 , H03H2009/02511
摘要： A mechanical resonator device which has a phenomena-dependent electrical stiffness is provided. The phenomena may be temperature or acceleration, for example. The device includes a substrate and a resonator supported above the substrate by supports. The device further includes an electrode supported above the substrate adjacent the resonator by supports to obtain an electrode-to-resonator gap wherein electrical stiffness generated across the gap is phenomena-dependent to take instability of resonant frequency of the device caused by the phenomena into consideration.
摘要翻译： 提供了具有现象依赖性电刚度的机械谐振器装置。 这种现象可能是温度或加速度。 该器件包括衬底和通过支撑件支撑在衬底上的谐振器。 该装置还包括通过支撑件支撑在与衬底相邻的衬底上方的电极以获得电极到谐振器间隙，其中跨越间隙产生的电刚度是现象依赖于由于现象而引起的器件的谐振频率的不稳定性 。
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公开(公告)号：US06739190B2
公开(公告)日：2004-05-25
申请号：US09938412
申请日：2001-08-23
申请人： Wan-Thai Hsu , Clark T. C. Nguyen
发明人： Wan-Thai Hsu , Clark T. C. Nguyen
IPC分类号： G01P300
CPC分类号： H03H9/505 , H03H3/0072 , H03H3/013 , H03H9/02362 , H03H9/02448 , H03H9/2436 , H03H9/462 , H03H2009/02496
摘要： A micromechanical resonator device is disclosed that utilizes competition between the thermal dependencies of geometrically tailored stresses and Young's modulus to (1) reduce the temperature coefficient (TCf) of the resonance frequencies of the micromechanical resonator device without any additional power consumption; and (2) introduce a zero TCf temperature at which subsequent oven-controlled resonators may be biased. A key feature in this resonator design involves the strategic sizing of the geometries of the resonator and its support structure to harness thermal expansion temperature coefficients that oppose and cancel those of Young's modulus variation. This transforms the original monotonically decreasing resonance frequency versus temperature curve to an S-shaped curve (or a linear one with a much smaller slope), with a smaller overall frequency excursion over a given temperature range, and with points at which the resonance frequency TCf is zero. This design strategy is a key to attaining the needed temperature stability for reference oscillator applications in portable wireless communications and for RF channel-select filter banks. In addition, for cases where the thermal response of a resonator need not be nulled, but rather must satisfy a given shape, this technique can also be used to tailor a specific resonance frequency versus temperature curve.
摘要翻译： 公开了一种微机械谐振器装置，其利用几何定制应力和杨氏模量的热依赖性之间的竞争，以（1）降低微机械谐振器装置的谐振频率的温度系数（TCf），而没有任何额外的功率消耗; 和（2）引入零TCf温度，随后的控温谐振器可能被偏置。 该共振器设计中的一个关键特征涉及谐振器及其支撑结构的几何形状的策略尺寸，以利用对抗和消除杨氏模量变化的热膨胀温度系数。 这将原始单调降低的共振频率对温度曲线转换为S形曲线（或具有小得多的斜率的线性曲线），在给定温度范围内具有较小的总频率偏移，以及谐振频率TCf 是零。 该设计策略是实现便携式无线通信和RF通道选择滤波器组中参考振荡器应用所需的温度稳定性的关键。 此外，对于谐振器的热响应不需要为零而是必须满足给定形状的情况，该技术也可用于定制特定谐振频率对温度曲线。
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4.发明授权Temperature compensated resonator with a pair of spaced apart internal dielectric layers 有权具有一对隔开的内部电介质层的温度补偿谐振器公开(公告)号：US09431993B1
公开(公告)日：2016-08-30
申请号：US13287068
申请日：2011-11-01
申请人： Wan-Thai Hsu , John Ryan Clark
发明人： Wan-Thai Hsu , John Ryan Clark
CPC分类号： H03H9/02448 , H03H3/0076 , H03H9/02244 , H03H9/02259 , H03H9/02338 , H03H9/2431 , H03H2009/02291 , H03H2009/02322 , H03H2009/02503 , H03H2009/241 , H03H2009/2442
摘要： A device includes a substrate, an electrode supported by the substrate, an anchor supported by the substrate, and a composite structure supported by the anchor, disposed adjacent the electrode, and configured for resonant vibration. The composite structure includes an external layer and an internal dielectric region covered by the external layer.
摘要翻译： 一种装置包括基板，由基板支撑的电极，由基板支撑的锚固体以及由锚固件支撑的复合结构，该复合结构邻近电极设置并且被配置为用于共振振动。 复合结构包括外层和被外层覆盖的内部电介质区域。
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公开(公告)号：US07170369B2
公开(公告)日：2007-01-30
申请号：US11218673
申请日：2005-09-02
CPC分类号： H03H3/0077 , H03H9/02393 , H03H9/1057 , H03H9/2452 , H03H2009/0233 , Y10T29/42
摘要： A method for modifying the resonance frequency of a micro-mechanical resonator, and resonators on which the method is practiced. A packaged resonator is trimmed by directing electromagnetic energy to the resonator through a transparent portion of the package. The removal of mass (by the energy) affects the resonance frequency of the resonator in a predictable manner. In some embodiments, the energy is sourced from a femtosecond laser. In some variations of the illustrative embodiment, the amount of mass to be removed is determined as a function of its location on the resonator. A mass-trimming map is developed that identifies a plurality of potential mass-trimming sites on the resonator. A site can be classified as a fine-tuning site or a coarse-tuning site as a function of the degree to which mass removal at those sites affects the resonance frequency. The sites can also be characterized as a function of their position relative to features of the resonator (e.g., nodal lines, etc.). Based on a differential between the measured and desired resonance frequency of the resonator, and expressions that relate resonance frequency to location-dependent mass, actual sites for mass removal are selected from among of the plurality of potential mass-trimming sites.
摘要翻译： 一种用于修改微机械谐振器的谐振频率的方法以及实施该方法的谐振器。 通过将电磁能量通过封装的透明部分引导到谐振器来修整封装的谐振器。 质量（通过能量）的去除以可预测的方式影响谐振器的谐振频率。 在一些实施例中，能量源自飞秒激光。 在说明性实施例的一些变型中，要去除的质量的量被确定为其在谐振器上的位置的函数。 开发了一种质量修剪图，其识别谐振器上的多个潜在的质量修剪位置。 随着这些位置的质量去除程度会影响共振频率，一个站点可以被归类为微调站点或粗调站点。 这些位置也可以被表征为它们相对于谐振器的特征（例如节点线等）的位置的函数。 基于谐振器的测量和期望谐振频率之间的差异以及将共振频率与位置相关质量相关联的表达式，从多个潜在质量修剪位置中选择用于质量去除的实际位置。
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公开(公告)号：US08878633B1
公开(公告)日：2014-11-04
申请号：US13294950
申请日：2011-11-11
申请人： Wan-Thai Hsu , Guohong He , John Ryan Clark
发明人： Wan-Thai Hsu , Guohong He , John Ryan Clark
CPC分类号： H03H9/0023 , H03B5/30 , H03H9/02244 , H03H9/02259 , H03H9/02338 , H03H9/02409 , H03H9/02417 , H03H9/02448 , H03H9/2431 , H03H9/2447 , H03H9/2452 , H03H9/505 , H03H2007/008 , H03H2009/02291 , H03H2009/02354 , H03H2009/02511 , H03H2009/241
摘要： A micromechanical device includes a substrate, a micromechanical structure supported by the substrate and configured for overtone resonant vibration relative to the substrate, and a plurality of electrodes supported by the substrate and spaced from the micromechanical structure by respective gaps. The plurality of electrodes include multiple drive electrodes configured relative to the micromechanical structure to excite the overtone resonant vibration with a differential excitation signal, or multiple sense electrodes configured relative to the micromechanical structure to generate a differential output from the overtone resonant vibration.
摘要翻译： 微机械装置包括衬底，由衬底支撑并被配置为相对于衬底的谐波振荡的微机械结构，以及由衬底支撑并由微机械结构通过相应的间隙间隔开的多个电极。 多个电极包括相对于微机械结构构造的多个驱动电极，以利用差分激励信号激励泛音共振振动，或者相对于微机械结构配置的多个感测电极，以产生来自谐波谐振振动的差分输出。
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公开(公告)号：US08686802B1
公开(公告)日：2014-04-01
申请号：US13351215
申请日：2012-01-16
申请人： Andrew Robert Brown , John Ryan Clark , Wan-Thai Hsu , Graham Yorke Mostyn , William Cochrane Ingle
发明人： Andrew Robert Brown , John Ryan Clark , Wan-Thai Hsu , Graham Yorke Mostyn , William Cochrane Ingle
CPC分类号： G01N29/30 , G01N29/022 , G01N29/036 , H03B5/30
摘要： A method of configuring a device comprising a MEMS resonator includes initiating operation of the device, estimating a first parameter of the MEMS resonator based on the initiated operation, the first parameter not varying with the bias voltage, monitoring the operation of the device at a plurality of levels of the bias voltage, calculating a second parameter of the MEMS resonator based on the monitored operation, the second parameter varying with the bias voltage, determining an operational level of the bias voltage based on the estimated first parameter and the calculated second parameter, and configuring the device in accordance with the determined operational level of the bias voltage.
摘要翻译： 一种配置包括MEMS谐振器的装置的方法包括启动装置的操作，基于所启动的操作来估计MEMS谐振器的第一参数，第一参数不随着偏置电压而变化，监测多个装置的操作 基于所监视的操作来计算MEMS谐振器的第二参数，第二参数随偏置电压变化，基于估计的第一参数和所计算的第二参数确定偏置电压的操作电平， 以及根据确定的偏置电压的操作电平配置该装置。
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公开(公告)号：US07679466B1
公开(公告)日：2010-03-16
申请号：US12041486
申请日：2008-03-03
IPC分类号： H03B5/32
摘要： Disclosed herein is a timing device that includes a resonator device to generate a resonator output signal at a frequency offset from a desired frequency, a counter configured to generate an extraction signal in accordance with the frequency offset, and a timing signal generator configured to track time with a count based on the resonator output signal and modified by the extraction signal downward to reach the desired frequency.
摘要翻译： 本文公开了一种定时装置，其包括谐振器装置，用于产生频率偏离期望频率的谐振器输出信号，配置为根据频率偏移产生提取信号的计数器以及被配置为跟踪时间的定时信号发生器 具有基于谐振器输出信号的计数并由提取信号向下修改以达到期望的频率。
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9.发明申请公开(公告)号：US20070096850A1
公开(公告)日：2007-05-03
申请号：US11550983
申请日：2006-10-19
申请人： Xiangxiang Huang , James MacDonald , Wan-Thai Hsu
发明人： Xiangxiang Huang , James MacDonald , Wan-Thai Hsu
IPC分类号： H03H9/00
CPC分类号： H03H3/0077 , H03H9/02393 , H03H9/1057 , H03H9/2452 , H03H2009/0233 , Y10T29/42
摘要： A method for modifying the resonance frequency of a micro-mechanical resonator, and resonators on which the method is practiced. A packaged resonator is trimmed by directing electromagnetic energy to the resonator through a transparent portion of the package. The removal of mass (by the energy) affects the resonance frequency of the resonator in a predictable manner. In some embodiments, the energy is sourced from a femtosecond laser. In some variations of the illustrative embodiment, the amount of mass to be removed is determined as a function of its location on the resonator. A mass-trimming map is developed that identifies a plurality of potential mass-trimming sites on the resonator. A site can be classified as a fine-tuning site or a coarse-tuning site as a function of the degree to which mass removal at those sites affects the resonance frequency. The sites can also be characterized as a function of their position relative to features of the resonator (e.g., nodal lines, etc.). Based on a differential between the measured and desired resonance frequency of the resonator, and expressions that relate resonance frequency to location-dependent mass, actual sites for mass removal are selected from among of the plurality of potential mass-trimming sites.
摘要翻译： 一种用于修改微机械谐振器的谐振频率的方法以及实施该方法的谐振器。 通过将电磁能量通过封装的透明部分引导到谐振器来修整封装的谐振器。 质量（通过能量）的去除以可预测的方式影响谐振器的谐振频率。 在一些实施例中，能量源自飞秒激光。 在说明性实施例的一些变型中，要去除的质量的量被确定为其在谐振器上的位置的函数。 开发了一种质量修剪图，其识别谐振器上的多个潜在的质量修剪位置。 随着这些位置的质量去除程度会影响共振频率，一个站点可以被归类为微调站点或粗调站点。 这些位置也可以被表征为它们相对于谐振器的特征（例如节点线等）的位置的函数。 基于谐振器的测量和期望谐振频率之间的差异以及将共振频率与位置相关质量相关联的表达式，从多个潜在质量修剪位置中选择用于质量去除的实际位置。
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公开(公告)号：US08193869B1
公开(公告)日：2012-06-05
申请号：US12699732
申请日：2010-02-03
申请人： Andrew R. Brown , Wan-Thai Hsu , Kenneth R. Cioffi
发明人： Andrew R. Brown , Wan-Thai Hsu , Kenneth R. Cioffi
IPC分类号： H03B5/32
CPC分类号： H03B5/36
摘要： A device has a resonator coupled to input and output nodes, the resonator being characterized by a transducer to drive the output node, and further characterized by a feedthrough capacitance such that portions of the input signal bypass the transducer to allow a spurious signal to reach the output node. The device includes a compensation capacitor coupled to the output node to define a compensation capacitance in accordance with the feedthrough capacitance. A phase inversion circuit is coupled to the compensation capacitance to generate a compensation signal and coupled to the output node such that the spurious signal is offset by the compensation signal. In some cases, a differential amplifier of the phase inversion circuit has the compensation capacitance in a feedback path to offset the feedthrough capacitance. In these and other cases, the compensation capacitance and the feedthrough capacitance may be unmatched to avoid overcompensation.
摘要翻译： 器件具有耦合到输入和输出节点的谐振器，谐振器的特征在于用于驱动输出节点的换能器，并且进一步的特征在于馈通电容，使得输入信号的部分绕过换能器以允许寄生信号到达 输出节点。 该器件包括耦合到输出节点的补偿电容器，以根据馈通电容来定义补偿电容。 相位反转电路耦合到补偿电容以产生补偿信号并耦合到输出节点，使得杂散信号被补偿信号偏移。 在某些情况下，相位反转电路的差分放大器具有反馈路径中的补偿电容以抵消馈通电容。 在这些和其他情况下，补偿电容和馈通电容可能是不匹配的，以避免过度补偿。
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