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    METHOD OF COATING INNER AND OUTER SURFACES OF PIPES FOR THERMAL SOLAR AND OTHER APPLICATIONS
    1.
    发明申请
    METHOD OF COATING INNER AND OUTER SURFACES OF PIPES FOR THERMAL SOLAR AND OTHER APPLICATIONS 有权
    用于热太阳能和其他应用的管道内外表面涂层方法

    公开(公告)号：US20090311443A1

    公开(公告)日：2009-12-17

    申请号：US12465494

    申请日：2009-05-13

    申请人： William J. Boardman ,  Thomas B. Casserly ,  Deepak Upadhyaya ,  Karthik Boinappaly ,  Rahul Ramamurti

    发明人： William J. Boardman ,  Thomas B. Casserly ,  Deepak Upadhyaya ,  Karthik Boinappaly ,  Rahul Ramamurti

    IPC分类号： C23C16/448

    CPC分类号： C23C16/045 ,  C23C16/503 ,  C23C16/515 ,  H01J37/32009 ,  H01J37/32596 ,  H01J37/32706

    摘要： In accordance with one embodiment of the invention, a workpiece having a smaller cross sectional dimension (e.g., diameter) is centered within a workpiece having a larger cross sectional dimension, with the workpieces being electrically connected. In this embodiment, surfaces of the two workpieces can be coated simultaneously, either with the same coating material or different coating materials. In another embodiment, holes are located along the length of an internal metal tube which functions as a gas distribution injector and anode holder. A ceramic liner may be placed inside the internal metal tube, with a conductive wire within the ceramic liner. The internal metal tube may be biased as a cathode, while the internal wire is biased as an anode. The hollow cathode effect is applied in all spaces directly adjacent to the surface or surfaces being coated. In some applications, different surfaces being coated are biased at different voltages.

    摘要翻译： 根据本发明的一个实施例，具有较小横截面尺寸（例如直径）的工件在具有较大横截面尺寸的工件中居中，其中工件电连接。 在该实施例中，可以使用相同的涂层材料或不同的涂层材料同时涂覆两个工件的表面。 在另一个实施例中，沿着内部金属管的长度设置孔，其用作气体分配注入器和阳极保持器。 陶瓷衬垫可以放置在内部金属管的内部，导电线在陶瓷衬里内。 内部金属管可以被偏置为阴极，而内部电线被偏置为阳极。 空心阴极效应被施加在与被涂覆的表面或表面直接相邻的所有空间中。 在一些应用中，被涂覆的不同表面在不同的电压下被偏置。

    Method of coating inner and outer surfaces of pipes for thermal solar and other applications
    2.
    发明授权
    Method of coating inner and outer surfaces of pipes for thermal solar and other applications 有权
    用于热太阳能和其他应用的管道内表面和外表面的方法

    公开(公告)号：US08343593B2

    公开(公告)日：2013-01-01

    申请号：US12465494

    申请日：2009-05-13

    申请人： William J. Boardman ,  Thomas B. Casserly ,  Deepak Upadhyaya ,  Karthik Boinappaly ,  Rahul Ramamurti

    发明人： William J. Boardman ,  Thomas B. Casserly ,  Deepak Upadhyaya ,  Karthik Boinappaly ,  Rahul Ramamurti

    IPC分类号： C23C16/448

    CPC分类号： C23C16/045 ,  C23C16/503 ,  C23C16/515 ,  H01J37/32009 ,  H01J37/32596 ,  H01J37/32706

    摘要： A method of coating at least one exterior surface of at least one workpiece is disclosed. The method may be used for coating inner and outer surfaces of pipes. A hollow workpiece is positioned within a chamber. A spacing between a multi-dimensional interior surface of the chamber and an exterior surface of the workpiece is fixed. Conditions are established to maintain a hollow cathode effect within the spacing and within the hollow workpiece. The conditions include biasing anodes at opposite ends of a hollow cathode effect region, and biasing the interior surface of the chamber and the workpiece as cathodes. The interior surface and the workpiece may be maintained at a common bias voltage or, in at least one embodiment, at differing voltages.

    摘要翻译： 公开了一种涂覆至少一个工件的至少一个外表面的方法。 该方法可用于涂覆管道的内表面和外表面。 中空工件位于腔室内。 室的多维内表面和工件的外表面之间的间隔是固定的。 建立条件以在间隔内和中空工件内保持空心阴极效应。 这些条件包括将阳极偏置在空心阴极效应区域的相对端，并且将室和工件的内表面偏压为阴极。 内表面和工件可以保持在公共偏置电压，或者在至少一个实施例中保持在不同的电压。

    METHOD FOR PRODUCING AMORPHOUS CARBON COATINGS ON EXTERNAL SURFACES USING DIAMONDOID PRECURSORS
    5.
    发明申请
    METHOD FOR PRODUCING AMORPHOUS CARBON COATINGS ON EXTERNAL SURFACES USING DIAMONDOID PRECURSORS 审中-公开
    使用金刚石前驱体在外表面生产非晶碳涂层的方法

    公开(公告)号：US20090029067A1

    公开(公告)日：2009-01-29

    申请号：US12113254

    申请日：2008-05-01

    申请人： Steven F. Sciamanna ,  Andrew W. Tudhope ,  Robert M. Carlson ,  William J. Boardman ,  Thomas B. Casserly ,  Pankaj Jyoti Hazarika ,  Deepak Upadhyaya

    发明人： Steven F. Sciamanna ,  Andrew W. Tudhope ,  Robert M. Carlson ,  William J. Boardman ,  Thomas B. Casserly ,  Pankaj Jyoti Hazarika ,  Deepak Upadhyaya

    IPC分类号： C23C16/513

    CPC分类号： C23C16/26

    摘要： The invention relates to a method for forming high sp3 content amorphous carbon coatings deposited by plasma enhanced chemical vapor deposition on external surfaces. This method allows adjustment of tribological properties, such as hardness, Young's modulus, wear resistance and coefficient of friction as well as optical properties, such as refractive index. In addition the resulting coatings are uniform and have high corrosion resistance. By controlling pressure, type of diamondoid precursor and bias voltage, the new method prevents the diamondoid precursor from fully breaking upon impact with the substrate. The diamondoid retains sp3 bonds which yields a high sp3 content film at higher pressure. This enables a faster deposition rate than would be possible without the use of a diamondoid precursor.

    摘要翻译： 本发明涉及用于形成通过等离子体增强化学气相沉积在外表面上沉积的高含量无定形碳涂层的方法。 该方法允许调节摩擦学性能，例如硬度，杨氏模量，耐磨性和摩擦系数以及光学性质如折射率。 此外，所得涂层是均匀的并且具有高耐腐蚀性。 通过控制压力，类金刚石前体和偏置电压，新方法可防止金刚石类前体在与基材碰撞时完全破裂。 金刚石保留sp3键，其在较高压力下产生高的sp3含量的膜。 这使得能够在不使用金刚石前体的情况下实现比可能更快的沉积速率。

    METHOD FOR PRODUCING DIAMOND-LIKE CARBON COATINGS USING DIAMONDOID PRECURSORS ON INTERNAL SURFACES
    8.
    发明申请
    METHOD FOR PRODUCING DIAMOND-LIKE CARBON COATINGS USING DIAMONDOID PRECURSORS ON INTERNAL SURFACES 有权
    在内表面上使用金刚石前驱体制造金刚石碳涂层的方法

    公开(公告)号：US20090176035A1

    公开(公告)日：2009-07-09

    申请号：US12113256

    申请日：2008-05-01

    申请人： Andrew W. Tudhope ,  William J. Boardman ,  Steven F. Sciamanna ,  Thomas B. Casserly ,  Robert M. Carlson

    发明人： Andrew W. Tudhope ,  William J. Boardman ,  Steven F. Sciamanna ,  Thomas B. Casserly ,  Robert M. Carlson

    IPC分类号： B05D3/04

    CPC分类号： C23C16/045 ,  C23C16/26 ,  C23C16/50 ,  C23C16/503 ,  C23C16/509 ,  C23C16/52

    摘要： The invention relates to a method for forming high sp3 content amorphous carbon coatings deposited by plasma enhanced chemical vapor deposition on internal surfaces and employing the “hollow-cathode” technique. This method allows adjustment of tribological properties, such as hardness, Young's modulus, wear resistance and coefficient of friction as well as optical properties, such as refractive index. In addition the resulting coatings are uniform and have high corrosion resistance. By controlling pressure, type of diamondoid precursor and bias voltage, the new method prevents the diamondoid precursor from fully breaking upon impact with the substrate. The diamondoid retains sp3 bonds which yields a high sp3 content film at higher pressure. This enables a faster deposition rate than would be possible without the use of a diamondoid precursor.

    摘要翻译： 本发明涉及一种用于形成通过等离子体增强化学气相沉积在内表面上并采用“中空阴极”技术沉积的高含量无定形碳涂层的方法。 该方法允许调节摩擦学性能，例如硬度，杨氏模量，耐磨性和摩擦系数以及光学性质如折射率。 此外，所得涂层是均匀的并且具有高耐腐蚀性。 通过控制压力，类金刚石前体和偏置电压，新方法可防止金刚石类前体在与基材碰撞时完全破裂。 金刚石保留sp3键，其在较高压力下产生高的sp3含量的膜。 这使得能够在不使用金刚石前体的情况下实现比可能更快的沉积速率。

    Method for making cusp-free anti-fuse structures
    9.
    发明授权
    Method for making cusp-free anti-fuse structures 失效
    制造无尖锐反熔丝结构的方法

    公开(公告)号：US5328865A

    公开(公告)日：1994-07-12

    申请号：US11084

    申请日：1993-01-29

    申请人： William J. Boardman ,  David P. Chan ,  Kuang-Yeh Chang ,  Calvin T. Gabriel ,  Vivek Jain ,  Subhash R. Nariani

    发明人： William J. Boardman ,  David P. Chan ,  Kuang-Yeh Chang ,  Calvin T. Gabriel ,  Vivek Jain ,  Subhash R. Nariani

    IPC分类号： H01L21/768 ,  H01L23/525 ,  H01L21/70 ,  H01L27/00

    CPC分类号： H01L23/5252 ,  H01L21/76888 ,  H01L2924/0002

    摘要： A method for making an anti-fuse structure characterized by the steps of forming a conductive base layer; forming an anti-fuse layer over the base layer; patterning the anti-fuse layer to form an anti-fuse island; forming an insulating layer over the anti-fuse island; forming a via hole through the insulating layer to the anti-fuse island; forming a conductive connection layer over the insulating layer and within the via hole; and patterning the conductive connection layer to form a conductive contact to the anti-fuse island. Preferably, the anti-fuse island comprises amorphous silicon which can optionally be covered with a thin layer of a titanium-tungsten alloy.

    摘要翻译： 一种制造抗熔丝结构的方法，其特征在于形成导电基层的步骤; 在基层上形成抗熔丝层; 图案化抗熔丝层以形成抗熔丝岛; 在反熔丝岛上形成绝缘层; 形成通过所述绝缘层到所述反熔丝岛的通孔; 在所述绝缘层上并在所述通孔内形成导电连接层; 以及图案化所述导电连接层以形成与所述反熔丝岛的导电接触。 优选地，抗熔丝岛包括非晶硅，其可任选地被钛 - 钨合金的薄层覆盖。