公开(公告)号：US20070248908A1

公开(公告)日：2007-10-25

申请号：US11380098

申请日：2006-04-25

申请人： Wu-Song Huang ,  David Medeiros ,  Gregory Wallraff

发明人： Wu-Song Huang ,  David Medeiros ,  Gregory Wallraff

IPC分类号： G03C1/00

CPC分类号： G03F7/0392 ,  G03F7/38

摘要： The present invention discloses a chemically amplified (CA) resist composition for printing features having a dimension of about 30 nm or less and a method of forming a material structure having a pattern containing features having a dimension of about 30 nm or less by using the inventive CA resist. The CA resist composition comprises (a) about 1 to about 50 weight % of a copolymer, (b) about 0.02 to about 25 weight % of a photoacid generator, (c) about 47 to about 99 weight % of a solvent, and (d) about 0.004 to about 25 weight % of a base additive. The copolymer comprises at least one hydrophilic monomer unit containing one or more polar functional groups and at least one hydrophobic monomer unit containing one or more aromatic groups. Some, but not all, of the one or more polar functional groups in the copolymer are protected with acid labile moieties having a low activation energy.

摘要翻译： 本发明公开了一种用于印刷尺寸为约30nm或更小的特征的化学放大（CA）抗蚀剂组合物，以及通过使用本发明形成具有尺寸为约30nm或更小的特征的图案的材料结构的方法 CA抗拒。 CA抗蚀剂组合物包含（a）约1至约50重量％的共聚物，（b）约0.02至约25重量％的光酸产生剂，（c）约47至约99重量％的溶剂和（ d）约0.004至约25重量％的基础添加剂。 共聚物包含至少一个含有一个或多个极性官能团的亲水性单体单元和至少一个含有一个或多个芳族基团的疏水性单体单元。 共聚物中一个或多个极性官能团的一些但不是全部由具有低活化能的酸不稳定部分保护。

公开(公告)号：US20060128914A1

公开(公告)日：2006-06-15

申请号：US11330659

申请日：2006-01-12

申请人： Robert Allen ,  Gregory Breyta ,  Phillip Brock ,  Richard DiPietro ,  Debra Fenzel-Alexander ,  Carl Larson ,  David Medeiros ,  Dirk Pfeiffer ,  Ratnam Sooriyakumaran ,  Hoa Truong ,  Gregory Wallraff

发明人： Robert Allen ,  Gregory Breyta ,  Phillip Brock ,  Richard DiPietro ,  Debra Fenzel-Alexander ,  Carl Larson ,  David Medeiros ,  Dirk Pfeiffer ,  Ratnam Sooriyakumaran ,  Hoa Truong ,  Gregory Wallraff

IPC分类号： C08F220/22

CPC分类号： C08F220/22 ,  C08F220/28 ,  G03F7/0046 ,  G03F7/0382 ,  Y10S430/108

摘要： A photoresist composition is provided that includes a polymer having at least one acrylate or methacrylate monomer having a formula where R1 represents hydrogen (H), a linear or branched alkyl group of 1 to 20 carbons, or a semi- or perfluorinated linear or branched alkyl group of 1 to 20 carbons; and where R2 represents an unsubstituted aliphatic group or a substituted aliphatic group having zero or one trifluoromethyl (CF3) group attached to each carbon of the substituted aliphatic group, or a substituted or unsubstituted aromatic group; and where R3 represents hydrogen (H), methyl (CH3), trifluoromethyl (CF3), difluoromethyl (CHF2), fluoromethyl (CH2F), or a semi- or perfluorinated aliphatic chain; and where R4 represents trifluoromethyl (CF3), difluoromethyl (CHF2), fluoromethyl (CH2F), or a semi- or perfluorinated substituted or unsubstituted aliphatic group. A method of patterning a substrate using the photoresist composition is also provided herein.

摘要翻译： 提供了一种光致抗蚀剂组合物，其包括具有至少一个具有下式的丙烯酸酯或甲基丙烯酸酯单体的聚合物，其中R 1表示氢（H），1至20个碳的直链或支链烷基或 1至20个碳的半或全氟化的直链或支链烷基; 其中R 2表示未取代的脂族基团或具有与取代的脂族基团的每个碳上连接的具有0或1个三氟甲基（CF 3 N 3）基团的取代的脂族基团，或 取代或未取代的芳基; 其中R 3表示氢（H），甲基（CH 3），三氟甲基（CF 3），二氟甲基（CHF 2） （CH 2 CO 2），或半或全氟化脂族链; 并且其中R 4表示三氟甲基（CF 3 S），二氟甲基（CH 2）2，氟甲基（CH 2 CH 2） ）或半或全氟取代或未取代的脂族基团。 本文还提供了使用光致抗蚀剂组合物图案化衬底的方法。

公开(公告)号：US20050019696A1

公开(公告)日：2005-01-27

申请号：US10916934

申请日：2004-08-12

申请人： Robert Allen ,  Gregory Breyta ,  Phillip Brock ,  Richard DiPietro ,  Debra Fenzel-Alexander ,  Carl Larson ,  David Medeiros ,  Dirk Pfeiffer ,  Ratnam Sooriyakumaran ,  Hoa Truong ,  Gregory Wallraff

发明人： Robert Allen ,  Gregory Breyta ,  Phillip Brock ,  Richard DiPietro ,  Debra Fenzel-Alexander ,  Carl Larson ,  David Medeiros ,  Dirk Pfeiffer ,  Ratnam Sooriyakumaran ,  Hoa Truong ,  Gregory Wallraff

IPC分类号： C08F20/22 ,  C08F220/28 ,  G03F7/004 ,  G03F7/038 ,  G03F7/039 ,  H01L21/027 ,  G03C1/73

CPC分类号： C08F220/22 ,  C08F220/28 ,  G03F7/0046 ,  G03F7/0382 ,  Y10S430/108

摘要： A photoresist composition is provided that includes a polymer having at least one acrylate or methacrylate monomer having a formula where R1 represents hydrogen (H), a linear or branched alkyl group of 1 to 20 carbons, or a semi- or perfluorinated linear or branched alkyl group of 1 to 20 carbons; and where R2 represents an unsubstituted aliphatic group or a substituted aliphatic group having zero or one trifluoromethyl(CF3) group attached to each carbon of the substituted aliphatic group, or a substituted or unsubstituted aromatic group; and where R3 represents hydrogen (H), methyl(CH3), trifluoromethyl(CF3), difluoromethyl(CHF2), fluoromethyl (CH2F), or a semi- or perfluorinated aliphatic chain; and where R4 represents trifluoromethyl(CF3), difluoromethyl(CHF2), fluoromethyl(CH2F), or a semi- or perfluorinated substituted or unsubstituted aliphatic group. A method of patterning a substrate using the photoresist composition is also provided herein.

摘要翻译： 提供了一种光致抗蚀剂组合物，其包括具有至少一个具有下式的丙烯酸酯或甲基丙烯酸酯单体的聚合物：其中R 1表示氢（H），1至20个碳的直链或支链烷基，或半或全氟化线性 或碳原子数为1〜20的支链烷基; 并且其中R 2表示未取代的脂族基团或具有连接在取代的脂族基团的每个碳上的零个或一个三氟甲基（CF 3）基团的取代的脂族基团，或取代或未取代的芳族基团; 并且其中R 3表示氢（H），甲基（CH 3），三氟甲基（CF 3），二氟甲基（CHF 2），氟甲基（CH 2 F）或半或全氟化脂族链; 并且其中R 4表示三氟甲基（CF 3），二氟甲基（CHF 2），氟甲基（CH 2 F）或半或全氟取代或未取代的脂族基团。 本文还提供了使用光致抗蚀剂组合物图案化衬底的方法。

公开(公告)号：US20070212654A1

公开(公告)日：2007-09-13

申请号：US11371820

申请日：2006-03-09

申请人： Carl Larson ,  Sharee McNab ,  Steven Steen ,  Raman Viswanathan ,  Gregory Wallraff

发明人： Carl Larson ,  Sharee McNab ,  Steven Steen ,  Raman Viswanathan ,  Gregory Wallraff

IPC分类号： G03F7/20

CPC分类号： G03F7/2022

摘要： A method of lithography is disclosed, which allows for independent resist process optimization of two or more exposure steps that are performed on a single resist layer. By providing for a separate post-exposure bake after each resist exposure step, pattern resolution for each exposure can be optimized. The method can generally be used with different lithographic techniques, and is well-suited for hybrid lithography. It has been applied to the fabrication of a device, in which the active area and the gate levels are defined in separate mask levels using hybrid lithography with an e-beam source and a 248 nm source respectively. Conditions for post-exposure bakes after the two exposure steps are independently adjusted to provide for optimized results.

摘要翻译： 公开了一种光刻方法，其允许在单个抗蚀剂层上执行的两个或多个曝光步骤的独立抗蚀剂工艺优化。 通过在每个抗蚀剂曝光步骤之后提供单独的曝光后烘烤，可以优化每个曝光的图案分辨率。 该方法通常可以用于不同的光刻技术，并且非常适用于混合光刻。 已经将其应用于器件的制造，其中使用具有电子束源和248nm源的混合光刻将有源面积和栅极电平限定在分开的掩模级中。 独立调整两次曝光步骤后暴露后烘烤条件以提供优化结果。

公开(公告)号：US20050255707A1

公开(公告)日：2005-11-17

申请号：US11184702

申请日：2005-07-19

申请人： Mark Hart ,  Ho-Cheol Kim ,  Robert Miller ,  Gregory Wallraff

发明人： Mark Hart ,  Ho-Cheol Kim ,  Robert Miller ,  Gregory Wallraff

IPC分类号： B01L3/00 ,  H01L21/322 ,  H01L21/31

CPC分类号： B01L3/5085 ,  B01J2219/00619 ,  B01J2219/00621 ,  B01J2219/00644 ,  B01L2200/12 ,  B01L2300/0609 ,  B01L2300/069 ,  B01L2300/0829 ,  B01L2300/0851 ,  B01L2300/165 ,  B01L2300/168 ,  C40B60/08

摘要： A biomolecular array includes a substrate across which is distributed an array of discrete regions of a porous substance formed from a porogen-containing organosilicate material. The porous substance is designed to bind chemical targets useful in biotechnology applications, such as gene expression, protein, antibody, and antigen experiments. The regions are preferably optically isolated from each other and may be shaped to enhance detection of optical radiation emanating from the porous substance, e.g., as a result of irradiation of the regions with ultraviolet light. The discrete regions may be configured as microscopic wells within the substrate, or they may reside on top of the substrate in the form of microscopic mesas.

摘要翻译： 生物分子阵列包括基底，其上分布有由含致孔剂的有机硅酸盐材料形成的多孔物质的离散区域的阵列。 多孔物质被设计用于结合可用于生物技术应用的化学靶，例如基因表达，蛋白质，抗体和抗原实验。 这些区域优选地彼此光学隔离，并且可以被成形为增强从多孔物质发出的光辐射的检测，例如，作为由紫外线照射该区域的结果。 离散区域可以被配置为衬底内的微观阱，或者它们可以以微观台面的形式驻留在衬底的顶部上。

公开(公告)号：US20080026330A1

公开(公告)日：2008-01-31

申请号：US11868320

申请日：2007-10-05

申请人： Robert Allen ,  Phillip Brock ,  Dario Gil ,  William Hinsberg ,  Carl Larson ,  Linda Sundberg ,  Gregory Wallraff

发明人： Robert Allen ,  Phillip Brock ,  Dario Gil ,  William Hinsberg ,  Carl Larson ,  Linda Sundberg ,  Gregory Wallraff

IPC分类号： G03C5/00 ,  C08F20/06

CPC分类号： G03F7/11 ,  G03F7/0046 ,  G03F7/2041 ,  Y10S430/108 ,  Y10S430/111

摘要： A topcoat material for applying on top of a photoresist material is disclosed. The topcoat material comprises at least one solvent and a polymer which has a dissolution rate of at least 3000 Å/second in aqueous alkaline developer. The polymer contains a hexafluoroalcohol monomer unit comprising one of the following two structures: wherein n is an integer. The topcoat material may be used in lithography processes, wherein the topcoat material is applied on a photoresist layer. The topcoat material is preferably insoluble in water, and is therefore particularly useful in immersion lithography techniques using water as the imaging medium.

摘要翻译： 公开了一种用于施加在光致抗蚀剂材料上的面漆材料。 面漆材料包含至少一种溶剂和在含水碱性显影剂中具有至少3000 /秒的溶解速率的聚合物。 聚合物含有包含以下两种结构之一的六氟醇单体单元：其中n是整数。 面漆材料可以用于光刻工艺中，其中将顶涂层材料施加在光致抗蚀剂层上。 面漆材料优选不溶于水，因此特别适用于使用水作为成像介质的浸渍光刻技术。

公开(公告)号：US20070117040A1

公开(公告)日：2007-05-24

申请号：US11284358

申请日：2005-11-21

申请人： Phillip Brock ,  Jennifer Cha ,  Dario Gil ,  Carl Larson ,  Linda Sundberg ,  Gregory Wallraff

发明人： Phillip Brock ,  Jennifer Cha ,  Dario Gil ,  Carl Larson ,  Linda Sundberg ,  Gregory Wallraff

IPC分类号： G03C1/00

CPC分类号： G03F7/2041 ,  C09D129/04 ,  C09D131/04 ,  G03F7/11 ,  C08L2666/04

摘要： A topcoat material for applying on top of a photoresist material is disclosed. The topcoat material comprises a polymer which is sparingly soluble or insoluble in water at a temperature of about 25° C. or below but soluble in water at a temperature of about 60° C. or above. The polymer contains poly vinyl alcohol monomer unit and a poly vinyl acetate or poly vinyl ether monomer unit having the following polymer structure: wherein R is an aliphatic or alicyclic radical; m and n are independently integers, and are the same or different; and p is zero or 1. The topcoat material may be used in lithography processes, wherein the topcoat material is applied on a photoresist layer. The topcoat material is particularly useful in immersion lithography techniques using water as the imaging medium. The topcoat material of the present invention are also useful for immersion lithography employing organic liquid as immersion medium.

摘要翻译： 公开了一种用于施加在光致抗蚀剂材料上的面漆材料。 面漆材料包括在约25℃或更低的温度下微溶或不溶于水的聚合物，但在约60℃或更高的温度下可溶于水。 聚合物含有聚乙烯醇单体单元和具有以下聚合物结构的聚乙酸乙烯酯或聚乙烯醚单体单元：其中R是脂族或脂环族基团; m和n独立地是整数，并且相同或不同; 并且p为零或1.面漆材料可用于光刻工艺，其中将顶涂层材料施加在光致抗蚀剂层上。 面漆材料在使用水作为成像介质的浸没式光刻技术中特别有用。 本发明的面漆材料也可用于使用有机液体作为浸渍介质的浸渍光刻。

公开(公告)号：US20060251989A1

公开(公告)日：2006-11-09

申请号：US11125971

申请日：2005-05-09

申请人： Gregory Breyta ,  Daniel Dawson ,  Carl Larson ,  Gregory Wallraff

发明人： Gregory Breyta ,  Daniel Dawson ,  Carl Larson ,  Gregory Wallraff

IPC分类号： G03C1/00

CPC分类号： G03F7/0392 ,  G03F7/001 ,  G03F7/031 ,  G03F7/2004 ,  Y10S430/115 ,  Y10S430/127

摘要： A class of lithographic photoresist combinations is disclosed which is suitable for use with visible light and does not require a post-exposure bake step. The disclosed photoresists are preferably chemical amplification photoresists and contain a photosensitizer having the structure of formula (I): where Ar1 and Ar2 are independently selected from monocyclic aryl and monocyclic heteroaryl, R1 and R2 may be the same or different, and have the structure —X—R3 where X is O or S and R3 is C1-C6 hydrocarbyl or heteroatom-containing C1-C6 hydrocarbyl, and R4 and R5 are independently selected from the group consisting of hydrogen and —X—R3, or, if ortho to each other, may be taken together to form a five- or six-membered aromatic ring, with the proviso that any heteroatom contained within Ar1, Ar2, or R3 is O or S. The use of the disclosed photoresists, particularly for the manufacture of holographic diffraction gratings, is also disclosed.

摘要翻译： 公开了一类光刻抗蚀剂组合物，其适用于可见光并且不需要曝光后烘烤步骤。 所公开的光致抗蚀剂优选是化学放大光致抗蚀剂，并含有具有式（I）结构的光敏剂：其中Ar 1和Ar 2独立地选自单环芳基和单环杂芳基 R 1和R 2可以相同或不同，并且具有结构-XR 3，其中X是O或S，R“ SUP> 3是C 1 -C 6烃基或含杂原子的C 1 -C 6 N >烃基，R 4和R 5独立地选自氢和-XR 3 O 3，或者如果各自的邻位 另一个可以一起形成五元或六元芳环，条件是含有Ar 1，Ar 2或R 0的任何杂原子 > 3 是O或S.还公开了所公开的光致抗蚀剂的使用，特别是用于制造全息衍射光栅。

公开(公告)号：US20050123852A1

公开(公告)日：2005-06-09

申请号：US10729452

申请日：2003-12-04

申请人： Robert Allen ,  Gregory Breyta ,  Phillip Brock ,  Richard DiPietro ,  Ratnam Sooriyakumaran ,  Hoa Truong ,  Gregory Wallraff

发明人： Robert Allen ,  Gregory Breyta ,  Phillip Brock ,  Richard DiPietro ,  Ratnam Sooriyakumaran ,  Hoa Truong ,  Gregory Wallraff

IPC分类号： G03F7/004 ,  G03F7/039 ,  G03F7/40

CPC分类号： G03F7/0392 ,  G03F7/0046 ,  G03F7/0397 ,  Y10S430/106 ,  Y10S430/108 ,  Y10S430/111

摘要： Polymers containing an acetal or ketal linkage and their use in lithographic photoresist compositions, particularly in chemical amplification photoresists, are provided. The polymer is prepared from at least one first olefinic monomer containing an acetal or ketal linkage, the acid-catalyzed cleavage of which renders the polymer soluble in aqueous base; and at least one second olefinic monomer selected from (i) an olefinic monomer containing a pendant fluorinated hydroxyalkyl group RH, (ii) an olefinic monomer containing a pendant fluorinated alkylsulfonamide group RS, and (iii) combinations thereof. The acetal or ketal linkage may be contained within an acid-cleavable substituent RCL in the first olefinic monomer. A method for using the photoresist compositions containing these polymers in preparing a patterned substrate is also provided in which the polymer is rendered soluble in aqueous base at a temperature of less than about 100° C. by acid-catalyzed deprotection of pendent acetal- or ketal-protected carboxylic acid groups.

摘要翻译： 提供了含有缩醛或缩酮键的聚合物及其在平版光刻胶组合物中的用途，特别是在化学放大光致抗蚀剂中。 聚合物由至少一种含有缩醛或缩酮键的第一烯属单体制备，其酸催化裂解使聚合物可溶于碱水溶液; 和至少一种第二烯烃单体，其选自（i）含有侧氟化羟基烷基R H的烯烃单体，（ii）含有侧氟化烷基磺酰胺基R S的烯烃单体， SUP），和（iii）其组合。 缩醛或缩酮键可以包含在第一烯烃单体中的酸可裂解取代基R CL中。 还提供了一种使用含有这些聚合物的光致抗蚀剂组合物来制备图案化基材的方法，其中聚合物在低于约100℃的温度下可溶于碱水溶液，通过酸催化的侧链缩醛或缩酮脱保护 保护的羧酸基团。

公开(公告)号：US20050070124A1

公开(公告)日：2005-03-31

申请号：US10676422

申请日：2003-09-30

申请人： Robert Miller ,  Ho-Cheol Kim ,  Eric Connor ,  Victor Lee ,  Gregory Wallraff ,  Willi Volksen

发明人： Robert Miller ,  Ho-Cheol Kim ,  Eric Connor ,  Victor Lee ,  Gregory Wallraff ,  Willi Volksen

IPC分类号： G03F7/075 ,  G03F7/40 ,  H01L21/312 ,  H01L21/316 ,  H01L21/31

CPC分类号： H01L21/02126 ,  G03F7/0757 ,  G03F7/40 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02348 ,  H01L21/3122 ,  H01L21/31695

摘要： A low dielectric constant, patterned, nanoporous material and a method of forming the material. The material is formed by depositing a layer onto a substrate, said layer comprising a reactive organosilicate material, a porogen, an initiator, and a solvent; exposing portions of the layer to energy (e.g., thermal energy or electromagnetic radiation) to change the solubility of portions of the organosilicate material with respect to the solvent; selectively removing more soluble portions of the layer to generate a relief pattern; and decomposing the porogen to thereby generate a nanoporous organosilicate layer.

摘要翻译： 低介电常数，图案化，纳米多孔材料和形成材料的方法。 该材料通过在基底上沉积一层而形成，所述层包含反应性有机硅酸盐材料，致孔剂，引发剂和溶剂; 将层的部分暴露于能量（例如，热能或电磁辐射）以改变部分有机硅酸盐材料相对于溶剂的溶解度; 选择性地去除层的更多可溶部分以产生浮雕图案; 并分解致孔剂从而产生纳米多孔有机硅酸盐层。