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1.发明授权Interferometric methods for metrology of surfaces, films and underresolved structures 有权用于测量表面，薄膜和欠解析结构的干涉测量方法公开(公告)号：US08854628B2
公开(公告)日：2014-10-07
申请号：US13238732
申请日：2011-09-21
IPC分类号： G01B9/02 , G01B11/02 , G01N21/41 , G01N21/43 , G01N21/21 , G01N21/45 , G01N21/47 , G01B11/06
CPC分类号： G01B9/02043 , G01B9/02057 , G01B9/0209 , G01B11/0675 , G01B2290/70 , G01N21/21 , G01N21/45 , G01N21/47
摘要： A method for determining information about a test object includes combining two or more scanning interference signals to form a synthetic interference signal; analyzing the synthetic interference signal to determine information about the test object; and outputting the information about the test object. Each of the two or more scanning interference signals correspond to interference between test light and reference light as an optical path length difference between the test and reference light is scanned, wherein the test and reference light are derived from a common source. The test light scatters from the test object over a range of angles and each of the two or more scanning interferometry signals corresponds to a different scattering angle or polarization state of the test light.
摘要翻译： 用于确定关于测试对象的信息的方法包括组合两个或更多个扫描干扰信号以形成合成干扰信号; 分析合成干扰信号以确定关于测试对象的信息; 并输出关于测试对象的信息。 两个或更多个扫描干涉信号中的每一个对应于测试光和参考光之间的干涉，因为扫描测试和参考光之间的光程长度差，其中测试和参考光源自公共源。 测试光在测试对象的范围内散射，并且两个或更多个扫描干涉测量信号中的每一个对应于测试光的不同的散射角或极化状态。
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2.发明申请公开(公告)号：US20120069326A1
公开(公告)日：2012-03-22
申请号：US13238732
申请日：2011-09-21
CPC分类号： G01B9/02043 , G01B9/02057 , G01B9/0209 , G01B11/0675 , G01B2290/70 , G01N21/21 , G01N21/45 , G01N21/47
摘要： A method for determining information about a test object includes combining two or more scanning interference signals to form a synthetic interference signal; analyzing the synthetic interference signal to determine information about the test object; and outputting the information about the test object. Each of the two or more scanning interference signals correspond to interference between test light and reference light as an optical path length difference between the test and reference light is scanned, wherein the test and reference light are derived from a common source. The test light scatters from the test object over a range of angles and each of the two or more scanning interferometry signals corresponds to a different scattering angle or polarization state of the test light.
摘要翻译： 用于确定关于测试对象的信息的方法包括组合两个或更多个扫描干扰信号以形成合成干扰信号; 分析合成干扰信号以确定关于测试对象的信息; 并输出关于测试对象的信息。 两个或更多个扫描干涉信号中的每一个对应于测试光和参考光之间的干涉，因为扫描测试和参考光之间的光程长度差，其中测试和参考光源自公共源。 测试光在测试对象的范围内散射，并且两个或更多个扫描干涉测量信号中的每一个对应于测试光的不同的散射角或极化状态。
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公开(公告)号：US20130155413A1
公开(公告)日：2013-06-20
申请号：US13765936
申请日：2013-02-13
IPC分类号： G01B9/02
CPC分类号： G01B9/0209 , G01B9/02007 , G01B9/0201 , G01B9/02027 , G01B9/02039 , G01B9/02057 , G01B9/02068 , G01B9/02077 , G01B11/2441 , G01B2290/45 , G01B2290/70 , Y10T29/49002
摘要： A system includes an interference microscope having one or more optical elements arranged to image a test object to an image plane by combining test light from the test object with reference light from a reference object to form an interference pattern at the image plane, wherein the test and reference light are derived from a common broadband light source. The system includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light, a multi-element detector positioned at the image plane and configured to record the interference pattern for each of a series of OPD increments and to generate multiple interferometry signals each having a fringe carrier frequency indicative of changes in the OPD as the OPD is scanned, where there is phase diversity among the interferometry signals, and an electronic processor coupled to the multi-element detector and scanning stage and configured to process the interference signals based on the phase diversity to determine information about the OPD increments having sensitivity to perturbations to the OPD increments at frequencies greater than the fringe carrier frequency.
摘要翻译： 一种系统包括具有一个或多个光学元件的干涉显微镜，该光学元件被布置成通过将来自测试对象的测试光与来自参考对象的参考光组合在一起而在图像平面上形成干涉图案来将测试对象图像成像平面，其中测试 参考光源自普通宽带光源。 该系统包括被配置为扫描测试和参考光之间的光程差（OPD）的扫描级，位于图像平面处的多元件检测器，并且被配置为记录一系列OPD增量中的每一个的干涉图案，并且 生成多个干涉测量信号，每个干涉测量信号具有指示在扫描OPD时OPD变化的边缘载波频率，其中在干涉测量信号之间存在相位分集，以及耦合到多元件检测器和扫描级的电子处理器并且被配置为处理 基于相位分集的干扰信号以确定关于具有对大于边缘载波频率的频率的对OPD的扰动敏感度的OPD增量的信息。
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公开(公告)号：US08885172B2
公开(公告)日：2014-11-11
申请号：US13361492
申请日：2012-01-30
CPC分类号： G01B9/02059 , G01B9/02003 , G01B9/02007 , G01B9/02076 , G01B2290/15 , G01B2290/70 , G01D5/266 , G01D5/347 , G01D5/34723 , G03F7/70775
摘要： An encoder interferometry system includes an interferometer positioned to receive first and second beams having different frequencies, in which the interferometer has at least one polarizing beam splitting element for directing the first beam along a measurement path to define a measurement beam and the second beam along a reference path to define a reference beam. The encoder interferometry system further includes a encoder scale positioned to diffract the measurement beam at least once, a detector positioned to receive the measurement and reference beams after the measurement beam diffracts from the encoder scale, and an output component positioned to receive the measurement and reference beams before they reach the detector and deflect spurious portions of the first and second beam away from the detector.
摘要翻译： 编码器干涉测量系统包括干涉仪，其定位成接收具有不同频率的第一和第二波束，其中干涉仪具有至少一个偏振分束元件，用于沿着测量路径引导第一光束以限定测量光束，并且第二光束沿着 参考路径来定义参考光束。 编码器干涉测量系统还包括一个定位成将测量光束衍射至少一次的编码器刻度;定位成在测量光束从编码器尺度衍射之后接收测量和参考光束的检测器;以及定位成接收测量和参考的输出部件 光束在它们到达检测器之前并且将第一和第二光束的杂散部分偏离检测器。
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5.发明授权公开(公告)号：US06417927B2
公开(公告)日：2002-07-09
申请号：US09301301
申请日：1999-04-28
申请人： Peter J. de Groot
发明人： Peter J. de Groot
IPC分类号： G01N2141
CPC分类号： G03F7/70775 , G01B9/0207 , G01B2290/60 , G03F7/70883
摘要： Methods and apparatus that combine dispersion interferometry with refractometry to compensate for refractive index fluctuations in the measurement path of a dispersion interferometer over both short and long time periods. Dispersion and refractometry data are weighted over appropriate time intervals, and means and methods are also provided for initializing &Ggr;, the inverse dispersive power, so that the dispersion and refractometry data are self consistent. A refractometer is placed in close proximity to the measurement path of the dispersion interferometer to experience substantially the same air flow and act as a surrogate for obtaining information about the index of refraction.
摘要翻译： 将色散干涉测量与折射法组合的方法和装置，以补偿在短时间和长时间段内的色散干涉仪的测量路径中的折射率波动。 分散和折射数据在适当的时间间隔内进行加权，并且还提供了用于初始化Ggr，逆色散功率的手段和方法，使得色散和折射测量数据是自相一致的。 折射计放置在离散干涉仪的测量路径附近，以经历基本上相同的空气流并充当用于获得关于折射率的信息的替代物。
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6.发明授权Methods and systems for interferometric analysis of surfaces and related applications 有权用于表面和相关应用的干涉测量分析的方法和系统公开(公告)号：US08107085B2
公开(公告)日：2012-01-31
申请号：US12552452
申请日：2009-09-02
申请人： Peter J. de Groot
发明人： Peter J. de Groot
IPC分类号： G01B11/02
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination can be based on a template, which may be indicative of an instrument response of the interferometer used to obtain the low coherence interference signal.
摘要翻译： 用于确定对象的空间属性的方法包括从包括两个或多个接口的测量对象获得扫描低相干干扰信号。 扫描低相干干涉信号包括两个或多个重叠的低相干干涉信号，每个干涉信号由相应的接口产生。 基于低相干干扰信号，确定至少一个接口的空间属性。 在某些情况下，确定是基于低相干干扰信号的子集而不是整个信号。 或者或另外，该确定可以基于模板，其可以指示用于获得低相干干扰信号的干涉仪的仪器响应。
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公开(公告)号：US20110255096A1
公开(公告)日：2011-10-20
申请号：US13028787
申请日：2011-02-16
IPC分类号： G01B9/02
摘要： A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
摘要翻译： 用于确定关于沿着编码器刻度的自由度的变化的信息的方法包括沿不同的路径引导第一波束和第二波束，并组合第一和第二波束以形成输出波束，其中第一和第二波束从 公共源，第一和第二光束具有不同的频率，其中第一光束以非Littrow角接触编码器刻度，并且第一光束从编码器刻度至少一次衍射; 基于所述输出光束检测干扰信号，所述干扰信号包括与所述第一光束和所述第二光束之间的光程差有关的外差相位; 以及基于所述外差相位确定关于所述编码器刻度的自由度的信息。
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8.发明授权公开(公告)号：US07468799B2
公开(公告)日：2008-12-23
申请号：US12020351
申请日：2008-01-25
CPC分类号： G01B11/0675 , G01B9/02057 , G01B9/0207 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/8422 , G02F1/13392 , G02F2001/133354
摘要： A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.
摘要翻译： 一种方法，包括：为具有多个接口的样本的至少一个空间位置提供低相干扫描干涉测量数据，其中使用具有照明几何形状和照明频谱的低相干扫描干涉仪来收集数据，并且其中数据包括 低相干扫描干涉测量信号，具有对应于多个界面的多个边缘对比区域; 以及基于条纹对比的对应区域和关于照明几何形状的信息之间的距离来确定至少一对界面之间的距离。
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公开(公告)号：US07466429B2
公开(公告)日：2008-12-16
申请号：US11768550
申请日：2007-06-26
IPC分类号： G01B11/02
CPC分类号： G01B11/0675 , G01B9/0201 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B2290/50 , G01B2290/70 , G01N21/211 , G01N21/8422 , G01N21/9501
摘要： A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.
摘要翻译： 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的可导出信息与对应于测试对象的多个模型的信息进行比较，其中通过测试对象的一系列特征对多个模型进行参数化。 被比较的可推导信息可以涉及测试对象的第一表面位置的扫描干涉测量信号的形状。
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公开(公告)号：US08670127B2
公开(公告)日：2014-03-11
申请号：US13326117
申请日：2011-12-14
IPC分类号： G01B9/02
摘要： A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
摘要翻译： 用于确定关于沿着编码器刻度的自由度的变化的信息的方法包括沿不同的路径引导第一波束和第二波束，并组合第一和第二波束以形成输出波束，其中第一和第二波束从 公共源，第一和第二光束具有不同的频率，其中第一光束以非Littrow角接触编码器刻度，并且第一光束从编码器刻度至少一次衍射; 基于所述输出光束检测干扰信号，所述干扰信号包括与所述第一光束和所述第二光束之间的光程差有关的外差相位; 以及基于所述外差相位确定关于所述编码器刻度的自由度的信息。
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