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    Focused ion beam system and sample processing method using the same
    1.
    发明授权
    Focused ion beam system and sample processing method using the same 有权
    聚焦离子束系统和样品处理方法使用相同

    公开(公告)号：US08581206B2

    公开(公告)日：2013-11-12

    申请号：US12707024

    申请日：2010-02-17

    申请人： Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

    发明人： Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

    IPC分类号： G21K5/10 ,  G21K5/08 ,  G21K1/00 ,  G21K5/04

    CPC分类号： H01J37/20 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/208

    摘要： A focused ion beam system includes a sample holder having a fixing plane for fixing a sample, a sample base on which the sample holder is provided, a focused ion beam irradiating mechanism that irradiates a focused ion beam to the sample, microtweezers that hold the sample and have the axial direction at a predetermined angle to a surface of the sample base, an opening/closing mechanism that opens and closes the microtweezers, a rotating mechanism that rotates the microtweezers about the axial direction, and a moving mechanism that moves the position of the microtweezers.

    摘要翻译： 聚焦离子束系统包括具有用于固定样品的固定平面的样品保持器，其上设置有样品保持器的样品基底，将聚焦离子束照射到样品的聚焦离子束照射机构，保持样品的微量滴定器 并且具有与样品台的表面成预定角度的轴向方向，打开和关闭微型加热器的开闭机构，使微型加热器绕轴向旋转的旋转机构，以及移动机构， 微动员。

    FOCUSED ION BEAM SYSTEM AND SAMPLE PROCESSING METHOD USING THE SAME
    2.
    发明申请
    FOCUSED ION BEAM SYSTEM AND SAMPLE PROCESSING METHOD USING THE SAME 有权
    聚焦离子束系统和采用该方法的样品处理方法

    公开(公告)号：US20100213386A1

    公开(公告)日：2010-08-26

    申请号：US12707024

    申请日：2010-02-17

    申请人： Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

    发明人： Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

    IPC分类号： G21K5/10 ,  G21K5/08 ,  G21K1/00 ,  G21K5/04

    CPC分类号： H01J37/20 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/208

    摘要： A focused ion beam system includes a sample holder having a fixing plane for fixing a sample, a sample base on which the sample holder is provided, a focused ion beam irradiating mechanism that irradiates a focused ion beam to the sample, microtweezers that hold the sample and have the axial direction at a predetermined angle to a surface of the sample base, an opening/closing mechanism that opens and closes the microtweezers, a rotating mechanism that rotates the microtweezers about the axial direction, and a moving mechanism that moves the position of the microtweezers.

    摘要翻译： 聚焦离子束系统包括具有用于固定样品的固定平面的样品保持器，其上设置有样品保持器的样品基底，将聚焦离子束照射到样品的聚焦离子束照射机构，保持样品的微量滴定器 并且具有与样品台的表面成预定角度的轴向方向，打开和关闭微型加热器的开闭机构，使微型加热器绕轴向旋转的旋转机构，以及移动机构， 微动员。

    Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope
    5.
    发明授权
    Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope 有权
    制备透射电子显微镜样品的方法和透射电子显微镜的样品片

    公开(公告)号：US08191168B2

    公开(公告)日：2012-05-29

    申请号：US12264750

    申请日：2008-11-04

    申请人： Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

    发明人： Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

    IPC分类号： G01N13/10

    CPC分类号： H01J37/3056 ,  B82Y15/00 ,  G01N1/286 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/2067 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

    摘要： Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface. The method of preparing a sample piece for a transmission electron microscope is characterized by including: a first step of cutting out the sample piece from a sample body Wa with a charged particle beam, the sample piece being coupled to the sample body at a coupling portion; a second step of grabbing with the microtweezers the grabbing portion of the sample piece with the finished surface of the sample piece cut out in the first step being covered with the microtweezers; a third step of detaching the sample piece grabbed with the microtweezers in the second step from the sample body by cutting the coupling portion with the charged particle beam with a grabbed state of the sample piece being maintained; and a fourth step of transferring and fixing with the microtweezers the sample piece detached in the third step onto a sample holder.

    摘要翻译： 提供了一种制备透射电子显微镜样品的方法，用于透射电子显微镜的样品片，其包括可透射电子显微镜观察的基本上平面的成品表面，以及微型加工者可以在不接触成品的情况下抓取的抓取部分 表面。 制备透射电子显微镜样品的方法的特征在于包括：第一步骤，利用带电粒子束从样品体Wa切出样品片，样品片以耦合部分 ; 第二步骤是用微型加湿器抓住样品的抓取部分，其中在第一步骤中切出的样品的成品表面被微型加工机覆盖; 第三步骤，通过用保持样品的抓取状态的带电粒子束切割耦合部分，将样品从第二步骤中剥离出来; 以及第四步骤，用微型加工机将第三步骤中拆卸的样品片转移和固定到样品架上。

    METHOD OF PREPARING A TRANSMISSION ELECTRON MICROSCOPE SAMPLE AND A SAMPLE PIECE FOR A TRANSMISSION ELECTRON MICROSCOPE
    6.
    发明申请
    METHOD OF PREPARING A TRANSMISSION ELECTRON MICROSCOPE SAMPLE AND A SAMPLE PIECE FOR A TRANSMISSION ELECTRON MICROSCOPE 有权
    传输电子显微镜样品的制备方法和传输电子显微镜的样品片

    公开(公告)号：US20090119807A1

    公开(公告)日：2009-05-07

    申请号：US12264750

    申请日：2008-11-04

    申请人： Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

    发明人： Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

    IPC分类号： G01N13/10

    CPC分类号： H01J37/3056 ,  B82Y15/00 ,  G01N1/286 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/2067 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

    摘要： Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface. The method of preparing a sample piece for a transmission electron microscope is characterized by including: a first step of cutting out the sample piece from a sample body Wa with a charged particle beam, the sample piece being coupled to the sample body at a coupling portion; a second step of grabbing with the microtweezers the grabbing portion of the sample piece with the finished surface of the sample piece cut out in the first step being covered with the microtweezers; a third step of detaching the sample piece grabbed with the microtweezers in the second step from the sample body by cutting the coupling portion with the charged particle beam with a grabbed state of the sample piece being maintained; and a fourth step of transferring and fixing with the microtweezers the sample piece detached in the third step onto a sample holder.

    摘要翻译： 提供了一种制备透射电子显微镜样品的方法，用于透射电子显微镜的样品片，其包括可透射电子显微镜观察的基本上平面的成品表面，以及微型加工者可以在不接触成品的情况下抓取的抓取部分 表面。 制备透射电子显微镜样品的方法的特征在于包括：第一步骤，利用带电粒子束从样品体Wa切出样品片，样品片以耦合部分 ; 第二步骤是用微型加湿器抓住样品的抓取部分，其中在第一步骤中切出的样品的成品表面被微型加工机覆盖; 第三步骤，通过用保持样品的抓取状态的带电粒子束切割耦合部分，将样品从第二步骤中剥离出来; 以及第四步骤，用微型加工机将第三步骤中拆卸的样品片转移和固定到样品架上。

    Composite charged particle beam apparatus
    7.
    发明授权
    Composite charged particle beam apparatus 有权
    复合带电粒子束装置

    公开(公告)号：US09214316B2

    公开(公告)日：2015-12-15

    申请号：US13622023

    申请日：2012-09-18

    申请人： Yo Yamamoto ,  Xin Man ,  Tatsuya Asahata

    发明人： Yo Yamamoto ,  Xin Man ,  Tatsuya Asahata

    IPC分类号： H01J37/00 ,  H01J37/22 ,  G01N23/225 ,  H01J37/30 ,  H01J37/305 ,  G01N23/04

    CPC分类号： H01J37/222 ,  G01N23/04 ,  G01N23/225 ,  G01N2223/045 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/31745

    摘要： A composite charged particle beam apparatus comprises an FIB column having an ion beam irradiation axis and an SEM column having an electron beam irradiation axis, the FIB and SEM columns being arranged relative to one another so that the beam irradition axes intersect with each other substantially at a right angle. A sample stage is provided for mounting a sample, and a detector detects secondary particles generated from the sample when irradiated with the ion beam or the electron beam. An observation image formation portion forms an FIB image and an SEM image based on a detection signal of the detector. A display portion displays the FIB image and the SEM image in which a horizontal direction of the sample in the FIB image and said horizontal direction of the sample in the SEM image are the same thereby making it possible for an operator to easily comprehend the positional relationship of the observation image of the sample.

    摘要翻译： 复合带电粒子束装置包括具有离子束照射轴的FIB柱和具有电子束照射轴的SEM柱，FIB和SEM列相对于彼此布置，使得束辐照轴基本上彼此相交 一个直角 提供了用于安装样品的样品台，并且当用离子束或电子束照射时，检测器检测从样品产生的二次颗粒。 观察图像形成部基于检测器的检测信号，形成FIB图像和SEM图像。 显示部显示FIB图像中的样本的水平方向和SEM图像中的样本的水平方向相同的FIB图像和SEM图像，由此能够使操作者容易地理解位置关系 的样品的观察图像。