公开(公告)号：US20130082176A1

公开(公告)日：2013-04-04

申请号：US13622023

申请日：2012-09-18

Applicant: Yo YAMAMOTO ,  Xin MAN ,  Tatsuya ASAHATA

Inventor： Yo YAMAMOTO ,  Xin MAN ,  Tatsuya ASAHATA

IPC: H01J37/22

CPC classification number: H01J37/222 ,  G01N23/04 ,  G01N23/225 ,  G01N2223/045 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/31745

Abstract: Provided is a composite charged particle beam apparatus, including: an FIB column (1); an SEM column (2), which is arranged substantially at a right angle with respect to the FIB column (1); a sample stage (3) for mounting a sample (4); a secondary electron detector (5) for detecting a secondary particle generated from the sample (4); an observation image formation portion (8) for forming an FIB image and an SEM image based on a detection signal; and a display portion (9) for displaying the FIB image and the SEM image in which a horizontal direction of the sample in the FIB image and a horizontal direction of the sample in the SEM image are the same.

Abstract translation: 提供一种复合带电粒子束装置，包括：FIB柱（1）; 相对于FIB柱（1）基本上成直角布置的SEM柱（2）; 用于安装样品（4）的样品台（3）; 用于检测从样品（4）产生的二次颗粒的二次电子检测器（5）; 用于形成FIB图像的观察图像形成部分（8）和基于检测信号的SEM图像; 以及用于显示FIB图像中的FIB图像中的样本的水平方向和SEM图像中的样本的水平方向相同的FIB图像和SEM图像的显示部（9）。

公开(公告)号：US09214316B2

公开(公告)日：2015-12-15

申请号：US13622023

申请日：2012-09-18

Applicant: Yo Yamamoto ,  Xin Man ,  Tatsuya Asahata

Inventor： Yo Yamamoto ,  Xin Man ,  Tatsuya Asahata

IPC: H01J37/00 ,  H01J37/22 ,  G01N23/225 ,  H01J37/30 ,  H01J37/305 ,  G01N23/04

CPC classification number: H01J37/222 ,  G01N23/04 ,  G01N23/225 ,  G01N2223/045 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/31745

Abstract: A composite charged particle beam apparatus comprises an FIB column having an ion beam irradiation axis and an SEM column having an electron beam irradiation axis, the FIB and SEM columns being arranged relative to one another so that the beam irradition axes intersect with each other substantially at a right angle. A sample stage is provided for mounting a sample, and a detector detects secondary particles generated from the sample when irradiated with the ion beam or the electron beam. An observation image formation portion forms an FIB image and an SEM image based on a detection signal of the detector. A display portion displays the FIB image and the SEM image in which a horizontal direction of the sample in the FIB image and said horizontal direction of the sample in the SEM image are the same thereby making it possible for an operator to easily comprehend the positional relationship of the observation image of the sample.

Abstract translation: 复合带电粒子束装置包括具有离子束照射轴的FIB柱和具有电子束照射轴的SEM柱，FIB和SEM列相对于彼此布置，使得束辐照轴基本上彼此相交 一个直角 提供了用于安装样品的样品台，并且当用离子束或电子束照射时，检测器检测从样品产生的二次颗粒。 观察图像形成部基于检测器的检测信号，形成FIB图像和SEM图像。 显示部显示FIB图像中的样本的水平方向和SEM图像中的样本的水平方向相同的FIB图像和SEM图像，由此能够使操作者容易地理解位置关系 的样品的观察图像。

公开(公告)号：US08191168B2

公开(公告)日：2012-05-29

申请号：US12264750

申请日：2008-11-04

Applicant: Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

Inventor： Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

IPC: G01N13/10

CPC classification number: H01J37/3056 ,  B82Y15/00 ,  G01N1/286 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/2067 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface. The method of preparing a sample piece for a transmission electron microscope is characterized by including: a first step of cutting out the sample piece from a sample body Wa with a charged particle beam, the sample piece being coupled to the sample body at a coupling portion; a second step of grabbing with the microtweezers the grabbing portion of the sample piece with the finished surface of the sample piece cut out in the first step being covered with the microtweezers; a third step of detaching the sample piece grabbed with the microtweezers in the second step from the sample body by cutting the coupling portion with the charged particle beam with a grabbed state of the sample piece being maintained; and a fourth step of transferring and fixing with the microtweezers the sample piece detached in the third step onto a sample holder.

Abstract translation: 提供了一种制备透射电子显微镜样品的方法，用于透射电子显微镜的样品片，其包括可透射电子显微镜观察的基本上平面的成品表面，以及微型加工者可以在不接触成品的情况下抓取的抓取部分 表面。 制备透射电子显微镜样品的方法的特征在于包括：第一步骤，利用带电粒子束从样品体Wa切出样品片，样品片以耦合部分 ; 第二步骤是用微型加湿器抓住样品的抓取部分，其中在第一步骤中切出的样品的成品表面被微型加工机覆盖; 第三步骤，通过用保持样品的抓取状态的带电粒子束切割耦合部分，将样品从第二步骤中剥离出来; 以及第四步骤，用微型加工机将第三步骤中拆卸的样品片转移和固定到样品架上。

公开(公告)号：US20110226948A1

公开(公告)日：2011-09-22

申请号：US13065238

申请日：2011-03-17

Applicant: Keiichi Tanaka ,  Yo Yamamoto ,  Xin Man ,  Junichi Tashiro ,  Toshiaki Fujii

Inventor： Keiichi Tanaka ,  Yo Yamamoto ,  Xin Man ,  Junichi Tashiro ,  Toshiaki Fujii

IPC: H01J37/26

CPC classification number: H01J37/3056 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3005 ,  H01J2237/226 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: There is provided a sample processing and observing method including irradiating a focused ion beam to a sample to form an observed surface, irradiating an electron beam to the observed surface to form an observed image, removing the surface opposite to the observed surface of the sample, forming a lamella including the observed surface and obtaining a transmission observed image for the lamella.

Abstract translation: 提供了一种样品处理和观察方法，包括将聚焦离子束照射到样品上以形成观察表面，向观察表面照射电子束以形成观察图像，除去与样品的观察表面相反的表面， 形成包括观察表面的薄片并获得薄片的透射观察图像。

公开(公告)号：US08581206B2

公开(公告)日：2013-11-12

申请号：US12707024

申请日：2010-02-17

Applicant: Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

Inventor： Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

IPC: G21K5/10 ,  G21K5/08 ,  G21K1/00 ,  G21K5/04

CPC classification number: H01J37/20 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/208

Abstract: A focused ion beam system includes a sample holder having a fixing plane for fixing a sample, a sample base on which the sample holder is provided, a focused ion beam irradiating mechanism that irradiates a focused ion beam to the sample, microtweezers that hold the sample and have the axial direction at a predetermined angle to a surface of the sample base, an opening/closing mechanism that opens and closes the microtweezers, a rotating mechanism that rotates the microtweezers about the axial direction, and a moving mechanism that moves the position of the microtweezers.

Abstract translation: 聚焦离子束系统包括具有用于固定样品的固定平面的样品保持器，其上设置有样品保持器的样品基底，将聚焦离子束照射到样品的聚焦离子束照射机构，保持样品的微量滴定器 并且具有与样品台的表面成预定角度的轴向方向，打开和关闭微型加热器的开闭机构，使微型加热器绕轴向旋转的旋转机构，以及移动机构， 微动员。

公开(公告)号：US20100213386A1

公开(公告)日：2010-08-26

申请号：US12707024

申请日：2010-02-17

Applicant: Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

Inventor： Xin Man ,  Kouji Iwasaki ,  Junichi Tashiro

IPC: G21K5/10 ,  G21K5/08 ,  G21K1/00 ,  G21K5/04

CPC classification number: H01J37/20 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/208

Abstract: A focused ion beam system includes a sample holder having a fixing plane for fixing a sample, a sample base on which the sample holder is provided, a focused ion beam irradiating mechanism that irradiates a focused ion beam to the sample, microtweezers that hold the sample and have the axial direction at a predetermined angle to a surface of the sample base, an opening/closing mechanism that opens and closes the microtweezers, a rotating mechanism that rotates the microtweezers about the axial direction, and a moving mechanism that moves the position of the microtweezers.

Abstract translation: 聚焦离子束系统包括具有用于固定样品的固定平面的样品保持器，其上设置有样品保持器的样品基底，将聚焦离子束照射到样品的聚焦离子束照射机构，保持样品的微量滴定器 并且具有与样品台的表面成预定角度的轴向方向，打开和关闭微型加热器的开闭机构，使微型加热器绕轴向旋转的旋转机构，以及移动机构， 微动员。

公开(公告)号：US08274049B2

公开(公告)日：2012-09-25

申请号：US13065238

申请日：2011-03-17

Applicant: Keiichi Tanaka ,  Yo Yamamoto ,  Xin Man ,  Junichi Tashiro ,  Toshiaki Fujii

Inventor： Keiichi Tanaka ,  Yo Yamamoto ,  Xin Man ,  Junichi Tashiro ,  Toshiaki Fujii

IPC: H01L21/66

CPC classification number: H01J37/3056 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3005 ,  H01J2237/226 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: There is provided a sample processing and observing method including irradiating a focused ion beam to a sample to form an observed surface, irradiating an electron beam to the observed surface to form an observed image, removing the surface opposite to the observed surface of the sample, forming a lamella including the observed surface and obtaining a transmission observed image for the lamella.

Abstract translation: 提供了一种样品处理和观察方法，包括将聚焦离子束照射到样品上以形成观察表面，向观察表面照射电子束以形成观察图像，除去与样品的观察表面相反的表面， 形成包括观察表面的薄片并获得薄片的透射观察图像。

公开(公告)号：US20090119807A1

公开(公告)日：2009-05-07

申请号：US12264750

申请日：2008-11-04

Applicant: Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

Inventor： Xin Man ,  Kouji Iwasaki ,  Tatsuya Asahata

IPC: G01N13/10

CPC classification number: H01J37/3056 ,  B82Y15/00 ,  G01N1/286 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/204 ,  H01J2237/206 ,  H01J2237/2067 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface. The method of preparing a sample piece for a transmission electron microscope is characterized by including: a first step of cutting out the sample piece from a sample body Wa with a charged particle beam, the sample piece being coupled to the sample body at a coupling portion; a second step of grabbing with the microtweezers the grabbing portion of the sample piece with the finished surface of the sample piece cut out in the first step being covered with the microtweezers; a third step of detaching the sample piece grabbed with the microtweezers in the second step from the sample body by cutting the coupling portion with the charged particle beam with a grabbed state of the sample piece being maintained; and a fourth step of transferring and fixing with the microtweezers the sample piece detached in the third step onto a sample holder.

Abstract translation: 提供了一种制备透射电子显微镜样品的方法，用于透射电子显微镜的样品片，其包括可透射电子显微镜观察的基本上平面的成品表面，以及微型加工者可以在不接触成品的情况下抓取的抓取部分 表面。 制备透射电子显微镜样品的方法的特征在于包括：第一步骤，利用带电粒子束从样品体Wa切出样品片，样品片以耦合部分 ; 第二步骤是用微型加湿器抓住样品的抓取部分，其中在第一步骤中切出的样品的成品表面被微型加工机覆盖; 第三步骤，通过用保持样品的抓取状态的带电粒子束切割耦合部分，将样品从第二步骤中剥离出来; 以及第四步骤，用微型加工机将第三步骤中拆卸的样品片转移和固定到样品架上。