Sputtering apparatus
    1.
    发明授权
    Sputtering apparatus 失效
    溅射装置

    公开(公告)号:US4412906A

    公开(公告)日:1983-11-01

    申请号:US332996

    申请日:1981-12-21

    CPC分类号: H01L21/31 C23C14/3407

    摘要: A sputtering apparatus includes a target and a substrate holder respectively supported in a lower portion and an upper portion of a vacuum chamber, a gas jet opening located near the upper surface of the target, and gas withdrawal conduits located near the substrate holder, so that by supplying a gas to the vacuum chamber through the gas jet opening, the gas pressure in the chamber gradually decreases from the region near the target to the region near the substrate holder.

    摘要翻译: 溅射装置包括分别支撑在真空室的下部和上部中的靶和衬底保持器,位于靶的上表面附近的气体射流开口和位于衬底保持器附近的气体取出管道,使得 通过通过气体喷射口向真空室供给气体,室内的气体压力从靠近靶的区域逐渐减小到靠近衬底保持器的区域。

    Thin layer depositing apparatus
    2.
    发明授权
    Thin layer depositing apparatus 失效
    薄层沉积设备

    公开(公告)号:US4466876A

    公开(公告)日:1984-08-21

    申请号:US356720

    申请日:1982-03-10

    摘要: A thin layer depositing apparatus comprising a reaction vessel for putting therein substrates to be provided with a desired thin layer and a gas accelerating nozzle positioned at a desired portion of the reaction vessel so that reactive gas is introduced in the reaction vessel through the gas accelerating nozzle.

    摘要翻译: 一种薄层沉积设备,包括:反应容器,用于将其中设置有所需薄层的基板和位于反应容器的所需部分的气体加速喷嘴,使得反应气体通过气体加速喷嘴引入反应容器 。

    Syringe Device and Method of Preparing Medicine Using the Device
    3.
    发明申请
    Syringe Device and Method of Preparing Medicine Using the Device 失效
    注射装置及使用装置制备药物的方法

    公开(公告)号:US20080177226A1

    公开(公告)日:2008-07-24

    申请号:US11883934

    申请日:2006-02-08

    IPC分类号: A61M37/00 A61M5/178

    摘要: A syringe device and a method of preparing medicine using the device capable of easily and accurately performing operations for mixing and dissolving a lyophilized product into a dissolution liquid before use. A double ended needle assembly and an intermediate holder are fitted to the first cylindrical part of a connection holder, a first syringe in which the dissolution liquid is stored is inserted into the first cylindrical part through the intermediate holder, and a second syringe in which the lyophilized product is stored in a depressurized state is fixedly inserted into the second cylindrical part of the connection holder. First, the intermediate holder is locked by a finger hooking projected piece, the first syringe is pushed into the intermediate holder in the locked state of the double ended needle assembly at an initial position by locking ribs, and the first syringe is unsealed by one end of the double ended needle. Next, the intermediate holder and the double ended needle assembly are pushed into the first cylindrical part by the first syringe, and the second syringe in the second cylindrical part is unsealed by the other end of the double ended needle.

    摘要翻译: 一种注射器装置和使用该装置的药物的制备方法,其能够容易且准确地进行使用前将冻干品混入并溶解于溶解液中的作业。 双端针组件和中间保持器安装在连接保持器的第一圆柱形部分上,其中存储溶解液体的第一注射器通过中间保持器插入第一圆柱形部分,第二注射器中, 冻干产品储存在减压状态,固定地插入到连接保持器的第二圆柱形部分中。 首先,中间保持器被指钩突起部件锁定,第一注射器通过锁定肋在初始位置处被锁定在双头针组件的锁定状态中,并且第一注射器被一端开封 的双针针。 接下来,中间保持器和双头针组件通过第一注射器被推入第一圆筒部,第二圆筒部的第二注射器被双头针的另一端开封。

    Method of forming a pattern
    5.
    发明授权
    Method of forming a pattern 失效
    形成图案的方法

    公开(公告)号:US06569595B1

    公开(公告)日:2003-05-27

    申请号:US09512286

    申请日:2000-02-24

    IPC分类号: G03F700

    CPC分类号: G03F7/091

    摘要: A method of forming a pattern which comprises the steps of, forming a matrix pattern on a work film, filling an opened space in the matrix pattern with a mask material layer containing at least one kind of a network carbon polymer having a repeating unit represented by the following general formulas (CP1) to (CP4) on the work film, forming a mask material pattern by removing the matrix pattern, and forming a work film pattern by transferring the mask material pattern to the work film: wherein R is halogen atom, hydrogen atom or a substituted or unsubstituted hydrocarbon group, A is a polyvalent organic group, and m, n and k denote respectively a positive integer.

    摘要翻译: 一种形成图案的方法,包括以下步骤:在工作膜上形成矩阵图案,用掩模材料层填充矩阵图案中的开放空间,掩模材料层含有至少一种具有由 在工作薄膜上的以下通式(CP1)〜(CP4),通过去除矩阵图案形成掩模材料图案,并通过将掩模材料图案转印到工作薄膜上形成工作薄膜图案:其中R是卤素原子, 氢原子或取代或未取代的烃基,A为多价有机基团,m,n和k分别表示正整数。

    Optical element molding method and optical material for molding optical element
    6.
    发明授权
    Optical element molding method and optical material for molding optical element 有权
    光学元件成型方法和用于模制光学元件的光学材料

    公开(公告)号:US06368524B1

    公开(公告)日:2002-04-09

    申请号:US09820799

    申请日:2001-03-30

    IPC分类号: B29D1100

    摘要: An optical element molding method for molding an optical element having an asymmetrical optically functional surface by pressing a heated preform in which, after a center part of a transfer surface of a molding die and a center part of the preform are brought into contact with each other, peripheries of the center part of the preform are brought into contact with the transfer surface, to transfer the form of the transfer surface to the preform. Consequently, the optically functional surface shape can be favorably transferred to the preform.

    摘要翻译: 一种光学元件成型方法,用于通过对加热的预成型件进行挤压来模制具有不对称光学功能表面的光学元件,其中,在成型模具的转印面的中心部分和预成型体的中心部分彼此接触之后 ,使预成型体的中心部分的周边与转印面接触,将转印面的形状转印到预成型体上。 因此,光学功能表面形状可以有利地转移到预成型件。

    Curable organopolysiloxane compositions
    8.
    发明授权
    Curable organopolysiloxane compositions 失效
    可固化的有机聚硅氧烷组合物

    公开(公告)号:US4077943A

    公开(公告)日:1978-03-07

    申请号:US725280

    申请日:1976-09-21

    摘要: Organopolysiloxane compositions are provided which are curable to elastomers and exhibit an excellent adhesion to the various surfaces of metals, glasses, ceramics and the like. The organopolysiloxane composition comprises (a) a diorganopolysiloxane terminated at both chain ends with vinyl groups directly bonded to the terminal silicon atoms in a molecule, (b) an organohydrogenpolysiloxane having at least two hydrogen atoms bonded directly to the silicon atoms in a molecule and at least one epoxy or ester group bonded to the silicon atom through an Si--C linkage in a molecule, and (c) a platinum catalyst. The compositions are useful for applications, such as, potting of electronic circuit units, coating of electrical parts, impregnation of fly-back transformers for television sets and coating of junctions for semiconductor devices.

    摘要翻译: 提供了可固化到弹性体并且对金属,玻璃,陶瓷等的各种表面具有优异粘附性的有机聚硅氧烷组合物。 有机基聚硅氧烷组合物包含(a)在两个末端封端的二有机聚硅氧烷,其中分子内直接与末端硅原子键合的乙烯基团,(b)具有至少两个氢原子的有机氢聚硅氧烷,其直接键合在分子中的硅原子上, 通过分子中的Si-C键与硅原子键合的至少一个环氧基或酯基,和(c)铂催化剂。 组合物可用于电子电路单元的灌封,电气部件的涂覆,用于电视机的回扫变压器的浸渍以及用于半导体器件的结的涂覆。

    Method for forming pattern
    9.
    发明授权
    Method for forming pattern 失效
    形成图案的方法

    公开(公告)号:US07198886B2

    公开(公告)日:2007-04-03

    申请号:US11138216

    申请日:2005-05-27

    IPC分类号: G03F7/30

    摘要: A method of forming a pattern, which comprises forming a masking material layer on a surface of a working film by coating the surface with a solution of a mixture comprising an inorganic compound having a bond between an inorganic element and oxygen atom, and a volatile unit, volatilizing the volatile unit to thereby make the masking material layer porous, forming a resist layer on a surface of the masking material layer, patterning the resist film to form a resist pattern, dry-etching the masking material layer to thereby transfer the resist pattern to the masking material layer, thereby forming a masking material pattern, and dry etching the working film to thereby transfer the masking material pattern to the working film to thereby form a working film pattern.

    摘要翻译: 一种形成图案的方法,其包括通过用包含无机元素和氧原子之间的键的无机化合物的混合物的溶液和挥发性单元涂覆表面来在工作膜的表面上形成掩模材料层 挥发挥发性单元,使掩模材料层多孔,在掩模材料层的表面上形成抗蚀剂层,图案化抗蚀剂膜以形成抗蚀剂图案,干蚀刻掩模材料层,从而将抗蚀剂图案 到掩蔽材料层,从而形成掩模材料图案,并干燥蚀刻加工膜,从而将掩模材料图案转印到工作膜上,从而形成工作膜图案。

    Method for forming a pattern and method of manufacturing semiconductor device
    10.
    发明申请
    Method for forming a pattern and method of manufacturing semiconductor device 审中-公开
    用于形成图案的方法和制造半导体器件的方法

    公开(公告)号:US20050153245A1

    公开(公告)日:2005-07-14

    申请号:US10940757

    申请日:2004-09-15

    摘要: Disclosed is a method of forming a pattern comprising coating a solution containing a compound having a silicon-nitrogen linkage in the main chain thereof over a surface of a working film to form a mask, replacing the nitrogen in the mask by oxygen, forming a resist film on a surface of the mask, forming a resist pattern by subjecting the resist film to a patterning exposure and to a developing treatment, transcribing the resist pattern to the mask to form a masking pattern, and transcribing the masking pattern to the working film to form a working film pattern.

    摘要翻译: 公开了一种形成图案的方法,包括在工作膜的表面上在其主链中涂覆含有具有硅 - 氮键的化合物的溶液以形成掩模,用氧代替掩模中的氮,形成抗蚀剂 在掩模的表面上形成抗蚀剂图案,通过使抗蚀剂膜进行图案化曝光和显影处理,将抗蚀剂图案转印到掩模以形成掩模图案,并将掩模图案转印到工作膜上,形成抗蚀剂图案 形成工作电影模式。