公开(公告)号：US08076827B2

公开(公告)日：2011-12-13

申请号：US12560059

申请日：2009-09-15

申请人： Yasuyuki Saitou ,  Osamu Kawachi ,  Kaoru Sakinada ,  Yasuyuki Oda

发明人： Yasuyuki Saitou ,  Osamu Kawachi ,  Kaoru Sakinada ,  Yasuyuki Oda

IPC分类号： H01L41/053

CPC分类号： H03H3/08 ,  H01L2224/0554 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/16225 ,  H01L2924/00014 ,  H03H9/059 ,  H03H9/1064 ,  H03H9/1078 ,  Y10T29/42 ,  H01L2224/05599 ,  H01L2224/0555 ,  H01L2224/0556

摘要： An acoustic wave device includes a substrate, a device chip that has a piezoelectric substrate and is flip-chip mounted on a surface of the substrate, a first insulation layer that has a dielectric constant lower than that of the piezoelectric substrate and is provided on a surface of the device chip opposite to another surface that faces the substrate, and a metal seal part that seals the device chip.

摘要翻译： 声波装置包括基板，具有压电基板并且被倒装安装在基板的表面上的器件芯片，具有比压电基板的介电常数低的介电常数的第一绝缘层， 器件芯片的与面向衬底的另一表面相对的表面以及密封器件芯片的金属密封部分。

公开(公告)号：US20050190014A1

公开(公告)日：2005-09-01

申请号：US11065363

申请日：2005-02-25

申请人： Yasuyuki Saitou ,  Osamu Kawachi

发明人： Yasuyuki Saitou ,  Osamu Kawachi

IPC分类号： H03H9/145 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/6483 ,  H03H9/25 ,  H03H9/643 ,  H03H9/6473 ,  H03H9/6496

摘要： A surface acoustic wave device includes a surface acoustic wave resonator. The surface acoustic wave resonator includes comb-like electrodes and reflection electrodes provided on both sides of the comb-like electrodes, and each of the reflection electrodes has at least two different pitches. It is thus possible to suppress the ripple components.

摘要翻译： 表面声波装置包括表面声波谐振器。 表面声波谐振器包括梳状电极和设置在梳状电极两侧的反射电极，并且每个反射电极具有至少两个不同的间距。 因此可以抑制纹波成分。

公开(公告)号：US07400220B2

公开(公告)日：2008-07-15

申请号：US11065363

申请日：2005-02-25

申请人： Yasuyuki Saitou ,  Osamu Kawachi

发明人： Yasuyuki Saitou ,  Osamu Kawachi

IPC分类号： H03H9/00 ,  H03H9/25

CPC分类号： H03H9/6483 ,  H03H9/25 ,  H03H9/643 ,  H03H9/6473 ,  H03H9/6496

摘要： A surface acoustic wave device includes a surface acoustic wave resonator. The surface acoustic wave resonator includes comb-like electrodes and reflection electrodes provided on both sides of the comb-like electrodes, and each of the reflection electrodes has at least two different pitches. It is thus possible to suppress the ripple components.

摘要翻译： 表面声波装置包括表面声波谐振器。 表面声波谐振器包括梳状电极和设置在梳状电极两侧的反射电极，并且每个反射电极具有至少两个不同的间距。 因此可以抑制纹波成分。

公开(公告)号：US20100096358A1

公开(公告)日：2010-04-22

申请号：US12647794

申请日：2009-12-28

申请人： Shinji TANIGUCHI ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Go Endo ,  Yasuyuki Saitou ,  Hisanori Ehara ,  Masanori Ueda

发明人： Shinji TANIGUCHI ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Go Endo ,  Yasuyuki Saitou ,  Hisanori Ehara ,  Masanori Ueda

IPC分类号： C23F1/00

CPC分类号： H03H9/205 ,  H03H3/00 ,  H03H3/0073 ,  H03H3/04 ,  H03H9/0211 ,  H03H9/02118 ,  H03H9/02133 ,  H03H9/02149 ,  H03H9/131 ,  H03H9/132 ,  H03H9/15 ,  H03H9/173 ,  H03H9/174 ,  H03H9/178 ,  H03H9/54 ,  H03H9/568 ,  H03H9/587 ,  H03H9/588 ,  H03H9/605 ,  H03H9/6483 ,  H03H2003/021 ,  H03H2003/023 ,  H03H2003/0414 ,  H03H2003/0471 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49124 ,  Y10T29/49208 ,  Y10T29/49224

摘要： A ladder filter includes a series resonator having a first film laminate in which an upper electrode and a lower electrode face each other across a piezoelectric film, and a first film provided on the first film laminate, and a parallel resonator having a second film laminate having a structure similar to that of the first film laminate, a second film provided on the second film laminate, and another first film identical to the first film.

摘要翻译： 梯形滤波器包括串联谐振器，其具有第一膜层叠体，其中上电极和下电极在压电膜上彼此面对，第一膜设置在第一膜层叠体上，并且具有第二膜层叠体， 类似于第一膜层压体的结构，设置在第二膜层压体上的第二膜和与第一膜相同的另一第一膜。

公开(公告)号：US07786649B2

公开(公告)日：2010-08-31

申请号：US11790530

申请日：2007-04-26

申请人： Tokihiro Nishihara ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Masanori Ueda ,  Yasuyuki Saitou

发明人： Tokihiro Nishihara ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Masanori Ueda ,  Yasuyuki Saitou

IPC分类号： H01L41/04

CPC分类号： H03H9/564 ,  H03H9/568

摘要： A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric thin-film resonators has a portion in which the upper electrode overlaps the lower electrode across the piezoelectric film. The above portion has a shape different from shapes of corresponding portions of other piezoelectric thin-film resonators, so that a spurious component in the above at least one of the piezoelectric thin-film resonators occur at a frequency different from frequencies of spurious components that occur in the other piezoelectric thin-film resonators.

摘要翻译： 滤波器包括具有基板，由基板支撑的下电极，设置在下电极上的压电膜和设置在压电膜上的上电极的压电薄膜谐振器。 压电薄膜谐振器中的至少一个具有上电极跨越压电膜与下电极重叠的部分。 上述部分具有与其它压电薄膜谐振器的相应部分的形状不同的形状，使得上述至少一个压电薄膜谐振器中的杂散分量以与发生的杂散分量的频率不同的频率出现 在其他压电薄膜谐振器中。

公开(公告)号：US20070252662A1

公开(公告)日：2007-11-01

申请号：US11790530

申请日：2007-04-26

申请人： Tokihiro Nishihara ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Masanori Ueda ,  Yasuyuki Saitou

发明人： Tokihiro Nishihara ,  Shinji Taniguchi ,  Masafumi Iwaki ,  Tsuyoshi Yokoyama ,  Takeshi Sakashita ,  Masanori Ueda ,  Yasuyuki Saitou

IPC分类号： H03H9/70 ,  H03H9/58

CPC分类号： H03H9/564 ,  H03H9/568

摘要： A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric thin-film resonators has a portion in which the upper electrode overlaps the lower electrode across the piezoelectric film. The above portion has a shape different from shapes of corresponding portions of other piezoelectric thin-film resonators, so that a spurious component in the above at least one of the piezoelectric thin-film resonators occur at a frequency different from frequencies of spurious components that occur in the other piezoelectric thin-film resonators.

摘要翻译： 滤波器包括具有基板，由基板支撑的下电极，设置在下电极上的压电膜和设置在压电膜上的上电极的压电薄膜谐振器。 压电薄膜谐振器中的至少一个具有上电极跨越压电膜与下电极重叠的部分。 上述部分具有与其它压电薄膜谐振器的相应部分的形状不同的形状，使得上述至少一个压电薄膜谐振器中的杂散分量以与发生的杂散分量的频率不同的频率出现 在其他压电薄膜谐振器中。

公开(公告)号：US08756777B2

公开(公告)日：2014-06-24

申请号：US12647794

申请日：2009-12-28

申请人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Go Endo ,  Yasuyuki Saitou ,  Hisanori Ehara ,  Masanori Ueda

发明人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Go Endo ,  Yasuyuki Saitou ,  Hisanori Ehara ,  Masanori Ueda

IPC分类号： H04R17/00 ,  H03H9/205 ,  H03H9/56 ,  H03H9/64 ,  H03H9/15 ,  H03H9/17 ,  H03H9/54 ,  H03H9/60 ,  H03H3/00 ,  H03H3/007

CPC分类号： H03H9/205 ,  H03H3/00 ,  H03H3/0073 ,  H03H3/04 ,  H03H9/0211 ,  H03H9/02118 ,  H03H9/02133 ,  H03H9/02149 ,  H03H9/131 ,  H03H9/132 ,  H03H9/15 ,  H03H9/173 ,  H03H9/174 ,  H03H9/178 ,  H03H9/54 ,  H03H9/568 ,  H03H9/587 ,  H03H9/588 ,  H03H9/605 ,  H03H9/6483 ,  H03H2003/021 ,  H03H2003/023 ,  H03H2003/0414 ,  H03H2003/0471 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49124 ,  Y10T29/49208 ,  Y10T29/49224

摘要： A method of manufacturing a ladder filter including first and second resonators includes: forming a piezoelectric film on an entire surface of a substrate that has respective lower electrodes of the first and second resonator formed thereon, an conductive film on the piezoelectric film, and a second film on the conductive film; forming a pattern of the second film in a prescribed region in the second area; forming a first film on an entire surface of the substrate; etching the first film, forming a pattern of the first film, the second film and the conductive film in the second area, and forming a pattern of the first film and the conductive film in the first area, to form respective upper electrodes from the conductor film; and thereafter, etching the piezoelectric film to form respective patterns of the piezoelectric film in the first and second areas, respectively.

摘要翻译： 一种制造包括第一和第二谐振器的梯形滤波器的方法包括：在其上形成有第一和第二谐振器的各个下电极的基板的整个表面上形成压电膜，在压电膜上形成导电膜， 导电膜上的膜; 在所述第二区域中的规定区域中形成所述第二膜的图案; 在所述基板的整个表面上形成第一膜; 蚀刻第一膜，在第二区域中形成第一膜，第二膜和导电膜的图案，并且在第一区域中形成第一膜和导电膜的图案，以从导体形成相应的上电极 电影; 然后蚀刻压电膜，分别在第一和第二区域形成压电膜的各自图案。

公开(公告)号：US07737806B2

公开(公告)日：2010-06-15

申请号：US12122246

申请日：2008-05-16

申请人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Go Endo ,  Yasuyuki Saitou ,  Masanori Ueda

发明人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Go Endo ,  Yasuyuki Saitou ,  Masanori Ueda

IPC分类号： H03H9/00 ,  H01L41/04

CPC分类号： H03H9/174 ,  H03H9/0211 ,  H03H9/02133 ,  H03H9/132 ,  H03H9/173

摘要： A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelectric film being interposed between the lower electrode and the upper electrode facing each other; and an additional film that is formed on the substrate on at least a part of the outer periphery of the lower electrode at the portion at which the lower electrode and the upper electrode face each other, with the additional film being laid along the lower electrode.

摘要翻译： 压电薄膜谐振器包括：形成在基板上的下电极; 形成在基板和下电极上的压电膜; 形成在所述压电膜上的上部电极，所述压电膜的一部分介于所述下部电极和所述上部电极对置之间; 以及附加膜，其在下电极和上电极彼此面对的部分处在下电极的外周的至少一部分上形成在基板上，附加膜沿着下电极放置。

公开(公告)号：US20080284543A1

公开(公告)日：2008-11-20

申请号：US12122246

申请日：2008-05-16

申请人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Go Endo ,  Yasuyuki Saitou ,  Masanori Ueda

发明人： Shinji Taniguchi ,  Tokihiro Nishihara ,  Tsuyoshi Yokoyama ,  Masafumi Iwaki ,  Motoaki Hara ,  Go Endo ,  Yasuyuki Saitou ,  Masanori Ueda

IPC分类号： H03H9/54 ,  H01L41/047

CPC分类号： H03H9/174 ,  H03H9/0211 ,  H03H9/02133 ,  H03H9/132 ,  H03H9/173

摘要： A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelectric film being interposed between the lower electrode and the upper electrode facing each other; and an additional film that is formed on the substrate on at least a part of the outer periphery of the lower electrode at the portion at which the lower electrode and the upper electrode face each other, with the additional film being laid along the lower electrode.

摘要翻译： 压电薄膜谐振器包括：形成在基板上的下电极; 形成在基板和下电极上的压电膜; 形成在所述压电膜上的上部电极，所述压电膜的一部分介于所述下部电极和所述上部电极对置之间; 以及附加膜，其在下电极和上电极彼此面对的部分处在下电极的外周的至少一部分上形成在基板上，附加膜沿着下电极放置。

公开(公告)号：US20080169885A1

公开(公告)日：2008-07-17

申请号：US11972316

申请日：2008-01-10

申请人： Masanori Ueda ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Go Endo ,  Yasuyuki Saitou

发明人： Masanori Ueda ,  Tokihiro Nishihara ,  Shinji Taniguchi ,  Tsuyoshi Yokoyama ,  Go Endo ,  Yasuyuki Saitou

IPC分类号： H01L41/22 ,  H03H9/00

CPC分类号： H03H3/04 ,  H03H9/174 ,  H03H2003/0428 ,  Y10T29/42

摘要： A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film provided on the lower electrode; an upper electrode provided on the piezoelectric film so as to face the lower electrode across the piezoelectric film to thus define a resonance portion; and a weight load film provided on the upper electrode, the weight load film being provided in the resonance portion and having an area smaller than that of the resonance portion.

摘要翻译： 压电薄膜谐振器包括：设置在基板上的下电极; 设置在下电极上的压电膜; 设置在所述压电膜上以与所述下电极相对的所述压电膜的上电极，从而限定谐振部; 以及设置在所述上​​部电极上的重量载荷膜，所述重量载荷膜设置在所述共振部分中并且具有小于所述共振部分的面积的面积。