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公开(公告)号：US5477048A
公开(公告)日：1995-12-19
申请号：US118820
申请日：1993-09-10
申请人： Yoshitomo Nakagawa , Tetsumasa Ito , Toru Eto
发明人： Yoshitomo Nakagawa , Tetsumasa Ito , Toru Eto
CPC分类号： H01J49/105
摘要： An inductively coupled mass spectrometer for detecting impurities present in infinitesimal concentrations in a sample. The basic spectrometer structure includes: a nebulizer connected to receive a solution of the sample and a gas for causing the nebulizer to produce a spray in the form of a mist composed of droplets of the sample solution; a spray chamber disposed for receiving the spray and classifying the droplets in the spray; a plasma torch operative for conducting a stream composed of the sample solution and at least one gas; a high frequency power source and a work coil coupled to the plasma torch for supplying energy to generate and maintain a plasma which ionizes the sample solution in the stream; and a mass detector disposed for receiving the ionized sample solution from the plasma torch and operative for detecting impurities in the ionized sample solution. The spray chamber further receives an additional flow of argon gas which acts to suppress the generation of molecular ions in the plasma, so that the analytical performance for detecting impurities, such as Fe or K or the like, is improved.
摘要翻译： 用于检测样品中以微量浓度存在的杂质的电感耦合质谱仪。 基本光谱仪结构包括：连接以接收样品溶液的雾化器和用于使喷雾器产生由样品溶液的液滴组成的雾状喷雾的气体; 设置成用于接收喷雾并在喷雾中分级液滴的喷雾室; 用于进行由样品溶液和至少一种气体组成的物流的等离子体焰炬; 高频电源和耦合到等离子体焰炬的工作线圈，用于提供能量以产生和维持使流中的样品溶液离子化的等离子体; 以及质量检测器，其被设置用于接收来自等离子体焰炬的电离样品溶液，并用于检测电离样品溶液中的杂质。 喷雾室还接收额外的氩气流，其用于抑制等离子体中的分子离子的产生，从而提高了用于检测诸如Fe或K等的杂质的分析性能。
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2.发明授权
公开(公告)号：US6002129A
公开(公告)日：1999-12-14
申请号：US78470
申请日：1998-05-14
CPC分类号： H01J49/105
摘要： A sample introducing apparatus for an inductively coupled plasma mass spectrometric and spectrochemical analyzer is provided to have a branch pipe at a sample pipe of a plasma torch for introducing an oxygen gas controllable in flow rate. The sample, after mixed with a sufficient amount of oxygen, is burnt by a plasma to oxidize and vaporize carbon.
摘要翻译： 提供了一种用于电感耦合等离子体质谱和光谱分析仪的样品引入装置，在等离子体焰炬的样品管上具有用于引入以流量可控的氧气的分支管。 样品与足够量的氧气混合后，被等离子体燃烧以氧化和蒸发碳。
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公开(公告)号：US5559337A
公开(公告)日：1996-09-24
申请号：US302503
申请日：1994-09-08
申请人： Tetsumasa Ito , Yoshitomo Nakagawa
发明人： Tetsumasa Ito , Yoshitomo Nakagawa
CPC分类号： H01J49/061
摘要： In order to provide an ion beam lens to which a film causing a charge and rendering the analysis unstable will not adhere, the ion lens is provided with a deflector for deflecting an ion beam 90.degree.. The side of the deflector opposite the sampling interface is provided with an opening. Also, a correction electrode having at least a pair of elements is interposed between the deflector and a mass filter. Not only may a minute amount of impurities in a sample be detected, but also measurements may be conducted on a consistently stable basis.
摘要翻译： 为了提供离子束透镜，导致电荷的膜不能粘附到该离子束透镜上，离子透镜设置有用于使离子束偏转90度的偏转器。 与采样接口相对的偏转器侧设置有开口。 此外，具有至少一对元件的校正电极插入在偏转器和质量过滤器之间。 不仅可以检测样品中的微量的杂质，而且可以一直稳定地进行测量。
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公开(公告)号：US5334834A
公开(公告)日：1994-08-02
申请号：US45422
申请日：1993-04-13
申请人： Tetsumasa Ito , Yoshitomo Nakagawa
发明人： Tetsumasa Ito , Yoshitomo Nakagawa
CPC分类号： H01J49/105
摘要： A structure for enabling control of the plasma potential of an ICP-MS. The structure includes: a shield plate 10 made of metal inserted between a plasma torch 1 and a high-frequency coil 2, a variable capacitor 11 connected between the shield plate 10 and ground, and an insulation member 15 is arranged to prevent contact of the high-frequency coil 2 with the shield plate 10. Even if a sample is introduced into ICP by any known method, it becomes capable to perform ICP-MS analysis while optimizing the response to interfering ions and detection sensitivity.
摘要翻译： 一种能够控制ICP-MS的等离子体电位的结构。 该结构包括：插入在等离子体焰炬1和高频线圈2之间的金属制的屏蔽板10，连接在屏蔽板10和地之间的可变电容器11和绝缘构件15，以防止 高频线圈2与屏蔽板10.即使通过任何已知的方法将样品引入ICP中，也能够在优化对干扰离子的响应和检测灵敏度的同时进行ICP-MS分析。
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公开(公告)号：US5773823A
公开(公告)日：1998-06-30
申请号：US585953
申请日：1996-01-16
申请人： Tetsumasa Ito , Yoshitomo Nakagawa
发明人： Tetsumasa Ito , Yoshitomo Nakagawa
CPC分类号： H01J49/06 , H01J49/421 , H01J49/429
摘要： Simplified measurements may be conducted using a plasma ion source mass spectrometer by performing an ion count while scanning an ion beam and setting voltages applied to electrodes of at least an ion lens and a deflector at values which maximize the count value. The mass spectrometer comprises a plasma ion source for ionizing a sample in a plasma, a vacuum vessel containing deflection, detection and monitoring devices, a sampling interface for introducing the ionized sample into the vacuum vessel, and a data processing unit. An ion lens collects and condenses the ionized sample. A mass filter separates ions in the ion beam by mass. A deflector deflects the ion beam by 90 degrees to prevent light from the plasma from entering the mass filter. A scanning electrode scans the ion beam, and a detector detects ions that have passed through the mass filter and provides a corresponding output signal. A power supplies a scanning signal to the scanning electrode, and applies predetermined voltage signals to the ion lens and the deflector. The data processing unit counts output signals from the detector in synchronism with the scanning signal applied to the scanning electrode. Based upon the voltage applied to the scanning electrode and the output signal of the detector, the data processing unit calculates optimum values of voltages to be applied to the deflector, the scanning electrode and the ion lens.
摘要翻译： 可以使用等离子体离子源质谱仪进行简化的测量，通过在扫描离子束的同时执行离子计数，并且以使计数值最大化的值来设置施加到至少离子透镜和偏转器的电极的电压。 质谱仪包括用于电离等离子体中的样品的等离子体离子源，包含偏转的真空容器，检测和监测装置，用于将电离样品引入真空容器的采样接口和数据处理单元。 离子透镜收集并冷凝离子化样品。 质量过滤器将离子束中的离子质量分离。 偏转器将离子束偏转90度，以防止等离子体的光进入质量过滤器。 扫描电极扫描离子束，检测器检测已经通过质量过滤器的离子并提供相应的输出信号。 A电源向扫描电极提供扫描信号，并向离子透镜和偏转器施加预定的电压信号。 数据处理单元与施加到扫描电极的扫描信号同步地对来自检测器的输出信号进行计数。 基于施加到扫描电极的电压和检测器的输出信号，数据处理单元计算要施加到偏转器，扫描电极和离子透镜的电压的最佳值。
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公开(公告)号：US4930439A
公开(公告)日：1990-06-05
申请号：US227469
申请日：1988-08-02
CPC分类号： G03F1/74 , C23C16/047 , H01J37/3056 , H01J2237/006
摘要： An apparatus for treating a sample comprises an ion source for irradiating a designated area of the sample with a focused ion beam, a vessel for storing compound to be vaporized, a heater surrounding the vessel for heating the compound to vaporize the same inside the vessel to produce compound vapor, and a nozzle for directing the compound vapor in the form of a vapor stream onto the designated area of the sample being irradiated with the focused ion beam. A valve is disposed along the fluid communication path between the vessel and the nozzle and has a closed state for blocking the flow of compound vapor through the nozzle and an open state for permitting the flow of compound vapor through the nozzle. The apparatus can be used to form pattern films on substrates, to repair defects in photo-masks and X-ray masks, and to cut or connect wiring in integrated circuits.
摘要翻译： 用于处理样品的装置包括用于用聚焦离子束照射样品的指定区域的离子源，用于储存待蒸发的化合物的容器，围绕容器的加热器，用于加热化合物以使其在容器内蒸发， 产生复合蒸汽，以及用于将蒸汽流形式的化合物蒸气引导到被聚焦离子束照射的样品的指定区域上的喷嘴。 阀沿着容器和喷嘴之间的流体连通路径设置，并且具有用于阻挡复合蒸气通过喷嘴的流动的闭合状态和用于允许化合物蒸汽流过喷嘴的打开状态。 该装置可用于在基板上形成图案膜，修复光掩模和X射线掩模中的缺陷，以及在集成电路中切割或连接布线。
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7.发明授权Composite focused ion beam device, process observation method using the same, and processing method 有权复合聚焦离子束装置，工艺观察方法采用相同的加工方法公开(公告)号：US08274063B2
公开(公告)日：2012-09-25
申请号：US12733091
申请日：2008-08-06
申请人： Takashi Kaito , Yoshitomo Nakagawa , Junichi Tashiro , Yasuhiko Sugiyama , Toshiaki Fujii , Kazuo Aita , Takashi Ogawa
发明人： Takashi Kaito , Yoshitomo Nakagawa , Junichi Tashiro , Yasuhiko Sugiyama , Toshiaki Fujii , Kazuo Aita , Takashi Ogawa
IPC分类号： H01J49/00
CPC分类号： H01J37/08 , G01N1/04 , G01N1/06 , H01J37/3005 , H01J37/3056 , H01J2237/0807 , H01J2237/0817 , H01J2237/31745
摘要： A composite focused ion beam device has a first ion beam irradiation system that irradiates a first ion beam for processing a sample and a second ion beam irradiation system that irradiates a second ion beam for processing or observing the sample. The first ion beam irradiation system has a plasma type gas ion source that generates first ions for forming the first ion beam, each of the first ions having a first mass. The second ion beam irradiation system has a gas field ion source that generates second ions for forming the second ion beam. Each of the second ions has a second mass smaller than that of the first mass.
摘要翻译： 复合聚焦离子束装置具有照射用于处理样品的第一离子束的第一离子束照射系统和照射第二离子束用于处理或观察样品的第二离子束照射系统。 第一离子束照射系统具有产生用于形成第一离子束的第一离子的等离子体型气体离子源，每个第一离子具有第一质量。 第二离子束照射系统具有产生用于形成第二离子束的第二离子的气体场离子源。 每个第二离子具有比第一质量小的第二质量。
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公开(公告)号：US07755065B2
公开(公告)日：2010-07-13
申请号：US12046987
申请日：2008-03-12
IPC分类号： H01J37/08
CPC分类号： H01J37/08 , H01J37/28 , H01J2237/006 , H01J2237/061 , H01J2237/0817 , H01J2237/182 , H01J2237/188 , H01J2237/31749
摘要： A focused ion beam apparatus includes a plasma generator having a plasma torch therein, which lets plasma flow out while being kept inside, a differential exhaust chamber that is connected to the plasma torch via the torch orifice to cause adiabatic expansion of the plasma flowing out of the plasma torch to form a supersonic flow of the plasma, a drawing orifice provided at the differential exhaust chamber at a position facing the torch orifice to draw ions from the supersonic flow of the plasma, a drawing electrode that electrostatically accelerates ions having passed through the drawing orifice to further draw ions, and an ion optical system that focuses the ions drawn from the drawing electrode and causing the ions to enter the sample by optically manipulating the ions.
摘要翻译： 聚焦离子束装置包括等离子体发生器，其中具有等离子体焰炬，其允许等离子体在被保持在内部的同时流出;差动排气室，其通过炬孔连接到等离子体焰炬，以使等离子体流出的等离子体 等离子体焰炬以形成等离子体的超音速流动，在差动排气室处设置在面向炬孔的位置处以从等离子体的超音速流中吸引离子的抽吸孔，静电加速已经通过 拉伸孔以进一步拉伸离子;以及离子光学系统，其聚焦从拉伸电极吸取的离子并通过光学操作离子使离子进入样品。
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公开(公告)号：US4999492A
公开(公告)日：1991-03-12
申请号：US497601
申请日：1990-03-22
申请人： Yoshitomo Nakagawa
发明人： Yoshitomo Nakagawa
CPC分类号： H01J49/04
摘要： An apparatus for carrying out inductively coupled plasma mass spectrometry to effect identification and quantification of a trace element contained in a sample solution. A plasma torch is provided for converting the sample solution into a plasma. A sampling interface has a sampling orifice and a skimmer orifice for drawing therethrough the plasma to form an ion beam. A mass filter is provided for effecting mass-separation of the ion beam to filter ions. A detector detects ions which pass through the mass filter. An optical system is composed of a lens, a deflector and a junction member for efficiently introducing the ion beam from the sampling interface into the mass filter. An ammeter is connected to the junction member between the optical system and the mass filter. A monitoring device is provided for monitoring the state of the ion beam within the optical system according to the output of the ammeter and an adjusting device is provided for adjusting the optical system while monitoring the output of the ammeter and an output of the detector.
摘要翻译： 一种用于进行电感耦合等离子体质谱法以实现样品溶液中包含的微量元素的鉴定和定量的装置。 提供了一种将样品溶液转化成等离子体的等离子体焰炬。 采样接口具有采样孔和分离器孔，用于从其中抽出等离子体以形成离子束。 提供质量过滤器来实现离子束质量分离以过滤离子。 检测器检测通过质量过滤器的离子。 光学系统由透镜，偏转器和接合部件构成，用于将来自采样接口的离子束有效地引入质量过滤器。 电流表连接到光学系统和质量过滤器之间的接合构件。 提供监测装置，用于根据电流表的输出监测光学系统内的离子束的状态，并提供调节装置，用于在监测电流表的输出和检测器的输出的同时调节光学系统。
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公开(公告)号：US4874632A
公开(公告)日：1989-10-17
申请号：US921820
申请日：1986-10-17
IPC分类号： G03F1/00 , G03F1/72 , G03F1/74 , H01L21/027
CPC分类号： G03F1/74 , Y10S438/947
摘要： A process for forming a pattern film comprises irradating a predetermined area of a substrate with an ion beam while simultaneously having present a polymerizable or carbonizable organic compound to thereby polymerize or carbonize the compound upon the area, the compound having a vapor pressure at room temperature of 1.times.10.sup.-4 to 5.times.10.sup.-3 Torr. The process is particularly suited for correcting so-called white-spot defects in the manufacture of photomasks.
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