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公开(公告)号：US06341527B1
公开(公告)日：2002-01-29
申请号：US09680391
申请日：2000-10-04
IPC分类号： G01L912
CPC分类号： G01L9/0075
摘要： A capacitive pressure sensor includes lower and upper wafers, a stationary electrode, first and second pads, a movable electrode, and a plurality of extraction electrodes. The lower wafer has a first capacitor forming portion and a first pad forming portion communicating with it. The upper wafer has a second capacitor forming portion, constituting a capacitor chamber together with the first capacitor forming portion, and a second pad forming portion communicating with it. The stationary electrode is formed on a bottom surface of the first capacitor forming portion. The first pad is formed on a bottom surface of the first pad forming portion and connected to the stationary electrode through a first interconnection. The movable electrode is formed on a bottom surface of the second capacitor forming portion to oppose the stationary electrode. The second pad is formed in the second pad forming portion and connected to the movable electrode through a second interconnection. The extraction electrodes are connected to the first and second pads and extracted outside through holes in the lower wafer. The lower and upper wafers are bonded to each other such that their pad forming portions are covered with their bonding surfaces.
摘要翻译： 电容式压力传感器包括下晶片和上晶片，固定电极，第一和第二焊盘，可动电极和多个提取电极。 下晶片具有第一电容器形成部分和与其连通的第一焊盘形成部分。 上晶片具有与第一电容器形成部分一起构成电容器室的第二电容器形成部分和与其连通的第二焊盘形成部分。 固定电极形成在第一电容器形成部分的底表面上。 第一焊盘形成在第一焊盘形成部分的底表面上，并通过第一互连连接到固定电极。 可动电极形成在第二电容器形成部分的底表面上以与固定电极相对。 第二焊盘形成在第二焊盘形成部分中，并通过第二互连连接到可动电极。 引出电极连接到第一和第二焊盘，并通过下晶片中的孔抽出。 下晶片和上晶片彼此接合，使得它们的焊盘形成部分被其接合表面覆盖。
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2.发明授权
公开(公告)号：US5479827A
公开(公告)日：1996-01-02
申请号：US319532
申请日：1994-10-07
CPC分类号： G01L9/0075
摘要： A capacitive pressure sensor is provided which is capable of highly accurately and reliably measuring pressure over a wide range from an extremely low level to a high level without being affected by environmental changes. The capacitive pressure sensor is constructed of a first diaphragm; a second diaphragm arranged in parallel with the first diagram; a diaphragm support arranged between the first and second diaphragms for supporting the first and second diaphragms along the periphery thereof to define a space isolated from the outside; a plurality of pillars having respective ends fixed on the opposing surfaces of the first and second diaphragms for securely supporting the first and second diaphragms; a movable electrode formed on one of the opposing surfaces of the first and second diaphragms; and a fixed electrode formed in the space without contacting with the plurality of pillars and securely supported by the diaphragm support. Pressure values measured by the capacitive pressure sensor are substantially free from errors due to fluctuations in atmospheric pressure and errors caused by aging changes of residual stress on the bonding interface.
摘要翻译： 提供一种电容式压力传感器，其能够在不受环境变化影响的情况下，从极低水平到高水平的高范围高度准确可靠地测量压力。 电容式压力传感器由第一隔膜构成; 与第一图平行设置的第二隔膜; 隔膜支撑件，布置在第一和第二隔膜之间，用于沿其周边支撑第一和第二隔膜以限定与外部隔离的空间; 多个支柱，其各自的端部固定在第一和第二隔膜的相对表面上，用于牢固地支撑第一和第二隔膜; 形成在所述第一和第二隔膜的相对表面之一上的可动电极; 以及固定电极，其形成在所述空间中，而不与所述多个支柱接触并且被所述隔膜支撑件牢固地支撑。 由电容压力传感器测量的压力值基本上没有由于大气压力的波动和由接合界面上的残余应力的老化变化引起的误差的误差。
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公开(公告)号：US5349492A
公开(公告)日：1994-09-20
申请号：US994713
申请日：1992-12-22
CPC分类号： G01L9/0075
摘要： A capacitive pressure sensor includes first and second substrates, a groove, and first and second electrodes. The first substrate consists of an electrical insulating material. The second substrate consists of the same material as that for the first substrate and has a peripheral portion directly bonded to the first substrate. The groove is formed in a central portion of the surface of one of the first and second substrates. The first and second substrates oppose each other through the groove. The first electrode is coupled to a surface, of the first substrate, which opposes the second substrate so as to be movable together with the first substrate. The second electrode is arranged on a surface, of the second substrate, which opposes the first substrate so as to be parallel to the first electrode. The first and second substrate may consist of quartz glass or sapphire. The first and second substrates are bonded to each other at a temperature lower than the melting point of the substrate material without forming any bonding layer.
摘要翻译： 电容式压力传感器包括第一和第二基板，凹槽以及第一和第二电极。 第一衬底由电绝缘材料组成。 第二基板由与第一基板相同的材料组成，并且具有直接接合到第一基板的周边部分。 凹槽形成在第一和第二基板之一的表面的中心部分中。 第一和第二基板通过凹槽彼此相对。 第一电极耦合到第一衬底的与第二衬底相对的表面，以便与第一衬底一起移动。 第二电极布置在第二基板的与第一基板相对的表面上，以平行于第一电极。 第一和第二衬底可以由石英玻璃或蓝宝石组成。 第一基板和第二基板在低于基板材料的熔点的温度下彼此结合，而不形成任何结合层。
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公开(公告)号：US06382030B1
公开(公告)日：2002-05-07
申请号：US09423933
申请日：1999-11-11
IPC分类号： G01L912
CPC分类号： G01P15/125 , G01L9/0075 , G01P1/023 , G01P15/0802 , H01L21/76897 , H01L2224/05568 , H01L2224/05573 , H01L2224/0558 , H01L2224/16235 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01023 , H01L2924/01024 , H01L2924/01033 , H01L2924/0104 , H01L2924/01041 , H01L2924/01047 , H01L2924/0106 , H01L2924/01072 , H01L2924/01073 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/15174 , H01L2924/30105 , H01L2224/05644 , H01L2924/00014 , H01L2224/05669
摘要： Pads 24 and 25 to be bonded to connection members are formed at positions where the pads face electrode extraction holes 4a to 4c. A bonding agent 12 low in wettability for the surfaces of electrodes 1 and 3 is used. The bonding agent 12 and high-wettability material form the surfaces of the pads 24 and 25. This can firmly bond the connection members to the electrodes 1 and 3, and can prevent the electrodes 1 and 3 from short-circuiting.
摘要翻译： 在焊盘面对电极引出孔4a至4c的位置处形成要连接到连接构件的焊盘24和25。 使用电极1和3的表面的润湿性低的接合剂12。 接合剂12和高润湿性材料形成焊盘24和25的表面。这可以将连接构件牢固地结合到电极1和3，并且可以防止电极1和3短路。
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公开(公告)号：US20120064302A1
公开(公告)日：2012-03-15
申请号：US13263805
申请日：2010-04-09
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , C01B33/02 , C01B33/027 , C01B33/18 , C01P2004/01 , C01P2004/20 , C23C18/06 , C23C18/08 , C23C18/1208 , C23C18/1279 , C23C18/14 , H01L21/02164 , H01L21/02282 , H01L21/0237 , H01L21/02532 , H01L21/02623 , H01L21/02656 , H01L21/31 , Y10T428/24612
摘要： A patterning method comprising the steps of:the first step of disposing at least one silane compound selected from the group consisting of a silicon hydride compound and a silicon halide compound in the space between a substrate and a patterned mold; andthe second step of subjecting the silane compound to at least one treatment selected from a heat treatment and an ultraviolet exposure treatment.A pattern composed of silicon can be formed by carrying out the second step in an inert atmosphere or a reducing atmosphere and a pattern composed of silicon oxide can be formed by carrying out at least part of the second step in an oxygen-containing atmosphere.
摘要翻译： 一种图案化方法，包括以下步骤：在衬底和图案化模具之间的空间中设置选自由硅化合物和硅卤化物组成的组中的至少一种硅烷化合物的第一步骤; 以及对硅烷化合物进行选自热处理和紫外线曝光处理中的至少一种处理的第二步骤。 可以通过在惰性气氛或还原气氛中进行第二步骤形成由硅构成的图案，并且可以通过在含氧气氛中进行至少一部分第二步骤来形成由氧化硅组成的图案。
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公开(公告)号：US20110256699A1
公开(公告)日：2011-10-20
申请号：US13142147
申请日：2009-10-26
申请人： Takashi Masuda
发明人： Takashi Masuda
IPC分类号： H01L21/283
CPC分类号： H01L29/872 , H01L21/0485 , H01L21/0495 , H01L29/0619 , H01L29/1608 , H01L29/47 , H01L29/6606
摘要： Provided is a method for manufacturing a silicon carbide semiconductor device which is capable of obtaining the silicon carbide semiconductor device having a high forward current and a low reverse leakage current by a simple method. The method for manufacturing a silicon carbide semiconductor device includes the steps of: forming a film made of a first electrode material on one surface of a silicon carbide substrate, and forming an ohmic electrode by performing heat treatment at a temperature range of 930 to 950° C.; and forming a film made of a second electrode material on the other surface of the silicon carbide substrate, and forming a Schottky electrode by performing heat treatment.
摘要翻译： 提供一种能够通过简单的方法获得具有高正向电流和低反向泄漏电流的碳化硅半导体器件的制造碳化硅半导体器件的方法。 制造碳化硅半导体器件的方法包括以下步骤：在碳化硅衬底的一个表面上形成由第一电极材料制成的膜，并通过在930至950℃的温度范围内进行热处理形成欧姆电极 C。; 以及在所述碳化硅衬底的另一表面上形成由第二电极材料制成的膜，并通过进行热处理形成肖特基电极。
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公开(公告)号：US20110144498A1
公开(公告)日：2011-06-16
申请号：US12958806
申请日：2010-12-02
申请人： Kouji Ando , Shouichi Nakauchi , Takeshi Sugio , Takashi Masuda
发明人： Kouji Ando , Shouichi Nakauchi , Takeshi Sugio , Takashi Masuda
CPC分类号： A61B8/466 , A61B8/463 , A61B8/469 , A61B8/483 , G06T19/003 , G06T2210/41 , G06T2219/004 , G06T2219/028
摘要： According to one embodiment, a medical image display apparatus includes a storage unit storing data of a three-dimensional image, a slice image generating unit generating three slice images associated with three slices from the three-dimensional image, a display unit displaying the three slice images respectively in three display areas, an ROI marker generating unit generating three ROI markers to be respectively superimposed on the displayed three slice images, the three ROI markers corresponding to a single ROI, an operation unit performing operation of changing relative positions between the three slice images and the three ROI markers, and a display control unit controlling move the three slice images in the three display areas in accordance with the operation of changing the relative positions and fix the three ROI markers at center positions of the three display areas.
摘要翻译： 根据一个实施例，医疗图像显示装置包括存储三维图像数据的存储单元，从三维图像生成与三个切片相关联的三个切片图像的切片图像生成单元，显示三个切片 分别在三个显示区域中的ROI标记生成单元，生成分别叠加在显示的三个图像上的三个ROI标记，与单个ROI对应的三个ROI标记，操作单元，执行改变三个切片之间的相对位置的操作 图像和三个ROI标记，以及显示控制单元，根据改变相对位置的操作，将三个ROI标记固定在三个显示区域的中心位置，控制三个显示区域中的三个切片图像。
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公开(公告)号：US20110015428A1
公开(公告)日：2011-01-20
申请号：US12919108
申请日：2009-04-21
IPC分类号： C07C227/16
CPC分类号： C07C227/16 , C07B55/00 , C07C227/32 , C07C229/20
摘要： By reacting a β-hydroxy-α-amino acid with sulfuryl fluoride (SO2F2) in the presence of an organic base, it is possible to produce an α-fluoro-β-amino acid of the formula [2]. By using a C8-12 tertiary amine having two or more alkyl groups of C3 or higher, and especially diisopropylethylamine, as the organic base, by-production of quantery ammonium salts is effectively suppressed. By applying the production process of the present invention, it is possible to very easily produce (2R)-3-(dibenzylamino)-2-fluoropropionic acid methyl ester, which is extremely important as a pharmaceutical intermediate, with high positional selectivity even on an industrial scale.
摘要翻译： 通过在有机碱的存在下使β-羟基-α-氨基酸与硫酰氟（SO2F2）反应，可以制备式[2]的α-氟 - 二 - 氨基酸。 通过使用具有两个以上具有3个以上的烷基的C8-12叔胺，特别是二异丙基乙胺作为有机碱，有效地抑制了副铵盐的副产物。 通过应用本发明的制备方法，可以非常容易地制备作为药物中间体极其重要的（2R）-3-（二苄基氨基）-2-氟丙酸甲酯，即使在 工业规模。
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公开(公告)号：US07636232B2
公开(公告)日：2009-12-22
申请号：US12260222
申请日：2008-10-29
申请人： Kenro Mitsuda , Yoshiyuki Takuma , Daigo Takemura , Kazuki Kubo , Tetsuo Mitani , Fumiyuki Miyamoto , Takashi Masuda
发明人： Kenro Mitsuda , Yoshiyuki Takuma , Daigo Takemura , Kazuki Kubo , Tetsuo Mitani , Fumiyuki Miyamoto , Takashi Masuda
IPC分类号： H01G9/00
摘要： A porous electrolytic solution reservoir which is capable of being impregnated with an electrolytic solution is provided in an exterior case so as to make contact with a separator. The average diameter of the pores in the electrolytic solution reservoir is greater than the average diameter of pores in the separator. The electrolytic solution reservoir is impregnated with a predetermined amount of electrolytic solution, so that the occupation ratio of electrolytic solution within the pores in the separator becomes 50% or more when fully charged, and the occupation ratio of electrolytic solution within the pores in the electrolytic solution reservoir becomes 100% or less when fully discharged.
摘要翻译： 在外壳中设置能够浸渍电解液的多孔电解液储存器，以便与隔膜接触。 电解液储存器中的孔的平均直径大于分离器中孔的平均直径。 电解液储存器用预定量的电解液浸渍，使得当充满电时，隔膜孔内电解液的占有率变为50％以上，电解液中电解液的占空比 溶液储存器在完全放电时变为100％以下。
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公开(公告)号：US07626154B2
公开(公告)日：2009-12-01
申请号：US11560265
申请日：2006-11-15
申请人： Masafumi Sei , Takashi Masuda
发明人： Masafumi Sei , Takashi Masuda
摘要： Frequency characteristics of an optical low-pass filter (2) are set in such a way that a first false color passing rate indicative of the rate of frequency components passing through a frequency component region not lower than the Nyquist frequency fa for the lowest sampling frequency fs among the sampling frequencies in the longitudinal, the lateral, and the oblique directions for each color in an image sensor (5), i.e. a frequency component region lower than one half of the Nyquist frequency fs of the sampling frequency fs of the image sensor (5), is not higher than a specified value. An output image signal is created from a pixel signal created by the image sensor (5) so that N pixel signals (N is real number of 2 or above) created by the image sensor (5) correspond to one output image signal.
摘要翻译： 光学低通滤波器（2）的频率特性被设置为使得指示频率分量的速率的第一假色通过率通过不低于奈奎斯特频率fa的频率分量区域，用于最低采样频率 在图像传感器（5）中的每种颜色的纵向，横向和倾斜方向的采样频率中的fs，即低于图像传感器（5）的采样频率fs的奈奎斯特频率fs的一半的频率分量区域 （5），不高于规定值。 由图像传感器（5）创建的像素信号产生输出图像信号，使得由图像传感器（5）创建的N个像素信号（N是2或以上的实数）对应于一个输出图像信号。
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