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    Electromagnetically actuated micromachined flap
    4.
    发明授权
    Electromagnetically actuated micromachined flap 失效
    电磁致动微机械瓣

    公开(公告)号：US5629918A

    公开(公告)日：1997-05-13

    申请号：US377018

    申请日：1995-01-20

    申请人： Chih-Ming Ho ,  Denny K. Miu ,  Jeremy Tzong-Shyng Leu ,  Raanan Miller ,  Amish Desai ,  Chang Liu ,  Tom Tsao ,  Yu-Chong Tai

    发明人： Chih-Ming Ho ,  Denny K. Miu ,  Jeremy Tzong-Shyng Leu ,  Raanan Miller ,  Amish Desai ,  Chang Liu ,  Tom Tsao ,  Yu-Chong Tai

    IPC分类号： B44C1/22

    CPC分类号： H02K99/00

    摘要： A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate. The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.

    摘要翻译： 表面微加工微磁致动器设置有能够使用磁力作为致动力来实现高于100微米的大偏转的挡板。 翼片通过一个或多个梁耦合到基底并且在基底上悬臂。 坡度合金层或磁性线圈设置在翼片上，使得当翼片被放置在磁场中时，可以使其选择性地相互作用并旋转出磁致动器的平面。 通过蚀刻设置在翼片和基底之间的下面的牺牲层，将悬臂翼片从下面的基底释放。 蚀刻出来的和现在的悬臂翼片被磁力驱动，以保持其与基底不接触，同时刚刚蚀刻的装置被干燥以获得高的释放产率。

    Electrostatic particle transportation
    7.
    发明授权
    Electrostatic particle transportation 失效
    静电颗粒运输

    公开(公告)号：US06185084B2

    公开(公告)日：2001-02-06

    申请号：US09167407

    申请日：1998-10-06

    申请人： Yu-Chong Tai ,  Sang Wook Lee ,  Amish Desai

    发明人： Yu-Chong Tai ,  Sang Wook Lee ,  Amish Desai

    IPC分类号： H01T2300

    CPC分类号： H02N1/004 ,  B03C3/885 ,  B03C5/028 ,  B65G54/02

    摘要： Methods and apparatus implementing a technique for electrostatically transporting a particle through a medium. In general, one implementation includes a substrate; a first insulation layer formed on the substrate; a plurality of electrodes arranged in a sequence on the insulation layer, where the electrodes are divided into a plurality of groups and the electrodes are arranged by group; a second insulation layer over at least one of the electrodes; and a phase shift circuit connected to the electrodes which supplies a voltage wave-form to each group of electrodes, where each voltage wave-form for each group is phase-shifted relative to the other phase-shifted wave-forms.

    摘要翻译： 实施用于通过介质静电输送颗粒的技术的方法和装置。 通常，一个实施方案包括基底; 形成在所述基板上的第一绝缘层; 在所述绝缘层上依次排列的多个电极，其中所述电极被分成多组，所述电极按组排列; 在所述电极中的至少一个上方的第二绝缘层; 以及连接到电极的相移电路，其向每组电极提供电压波形，其中每组的每个电压波形相对于另一个相移波形相移。

    Integrated LC-ESI on a chip
    8.
    发明授权
    Integrated LC-ESI on a chip 有权
    集成LC-ESI芯片

    公开(公告)号：US07976779B2

    公开(公告)日：2011-07-12

    申请号：US11177505

    申请日：2005-07-11

    申请人： Yu-Chong Tai ,  Jun Xie ,  Jason Shih ,  Terry Lee ,  Yunan Miao

    发明人： Yu-Chong Tai ,  Jun Xie ,  Jason Shih ,  Terry Lee ,  Yunan Miao

    IPC分类号： B01L3/00 ,  G01N30/02 ,  F04F99/00 ,  C02F11/00 ,  C02F1/469

    CPC分类号： G01N30/34 ,  G01N30/16 ,  G01N30/6095 ,  G01N30/7266

    摘要： A microfluidic system with on-chip pumping which can be used for liquid chromatography and also electrospray ionization mass spectrometry and which provides improved efficiency, better integration with sensors, improved portability, reduced power consumption, and reduced cost. The system can include (A) a main chip comprising: a substrate having a front face and a back face; a chromatography column on the front face of said substrate, wherein said column has an inlet and an outlet; an electrospray ionization (ESI) nozzle on the front face of said substrate, wherein said nozzle has an inlet and an outlet, and wherein the inlet of the nozzle is microfluidically coupled to the outlet of the column; one or more pump systems on the front face of said substrate comprising a pump chamber, one or more electrodes, and an outlet microfluidically coupled to the inlet of said column; and (B) a reservoir chip comprising a front surface and a back surface, wherein the reservoir chip has one or more cavities in the back surface which when disposed next to the front surface of the main chip extends the volume of the pump chamber of one of the pump system. Microfabrication can be used to prepare the chips, which can be assembled with a cover and inserted into a testing jig for electronic control and mass spectral analysis. Peptide separations are demonstrated which compete with present commercial systems.

    摘要翻译： 具有片上泵浦的微流体系统，其可用于液相色谱和电喷雾离子化质谱，并且其提供更高的效率，更好地与传感器的集成，改进的便携性，降低的功率消耗和降低的成本。 该系统可以包括（A）主芯片，其包括：具有正面和背面的基板; 所述基板前表面上的色谱柱，其中所述色谱柱具有入口和出口; 在所述基板的前表面上的电喷雾离子化（ESI）喷嘴，其中所述喷嘴具有入口和出口，并且其中所述喷嘴的入口微流体耦合到所述塔的出口; 所述衬底的前表面上的一个或多个泵系统包括泵室，一个或多个电极和微流体耦合到所述塔的入口的出口; 和（B）包括前表面和后表面的储存器芯片，其中所述储存器芯片在所述后表面中具有一个或多个空腔，当所述储存器芯片靠近所述主芯片的前表面设置时，所述泵室的体积将一个 的泵系统。 可以使用微加工来制备芯片，其可以与盖组装并插入用于电子控制和质谱分析的测试夹具中。 展示了与现有商业系统竞争的肽分离。

    Integrated LC-ESI on a chip
    9.
    发明申请
    Integrated LC-ESI on a chip 有权
    集成LC-ESI芯片

    公开(公告)号：US20060193748A1

    公开(公告)日：2006-08-31

    申请号：US11177505

    申请日：2005-07-11

    申请人： Yu-Chong Tai ,  Jun Xie ,  Jason Shih ,  Terry Lee ,  Yunan Miao

    发明人： Yu-Chong Tai ,  Jun Xie ,  Jason Shih ,  Terry Lee ,  Yunan Miao

    IPC分类号： G01N30/02 ,  H01J49/00

    CPC分类号： G01N30/34 ,  G01N30/16 ,  G01N30/6095 ,  G01N30/7266

    摘要： A microfluidic system with on-chip pumping which can be used for liquid chromatography and also electrospray ionization mass spectrometry and which provides improved efficiency, better integration with sensors, improved portability, reduced power consumption, and reduced cost. The system can include (A) a main chip comprising: a substrate having a front face and a back face; a chromatography column on the front face of said substrate, wherein said column has an inlet and an outlet; an electrospray ionization (ESI) nozzle on the front face of said substrate, wherein said nozzle has an inlet and an outlet, and wherein the inlet of the nozzle is microfluidically coupled to the outlet of the column; one or more pump systems on the front face of said substrate comprising a pump chamber, one or more electrodes, and an outlet microfluidically coupled to the inlet of said column; and (B) a reservoir chip comprising a front surface and a back surface, wherein the reservoir chip has one or more cavities in the back surface which when disposed next to the front surface of the main chip extends the volume of the pump chamber of one of the pump system. Microfabrication can be used to prepare the chips, which can be assembled with a cover and inserted into a testing jig for electronic control and mass spectral analysis. Peptide separations are demonstrated which compete with present commercial systems.

    摘要翻译： 具有片上泵浦的微流体系统，其可用于液相色谱和电喷雾离子化质谱，并且其提供更高的效率，更好地与传感器的集成，改进的便携性，降低的功率消耗和降低的成本。 该系统可以包括（A）主芯片，其包括：具有正面和背面的基板; 所述基板前表面上的色谱柱，其中所述色谱柱具有入口和出口; 在所述基板的前表面上的电喷雾离子化（ESI）喷嘴，其中所述喷嘴具有入口和出口，并且其中所述喷嘴的入口微流体耦合到所述塔的出口; 所述衬底的前表面上的一个或多个泵系统包括泵室，一个或多个电极和微流体耦合到所述塔的入口的出口; 和（B）包括前表面和后表面的储存器芯片，其中所述储存器芯片在所述后表面中具有一个或多个空腔，当所述储存器芯片靠近所述主芯片的前表面设置时，所述泵室的体积将一个 的泵系统。 可以使用微加工来制备芯片，其可以与盖组装并插入用于电子控制和质谱分析的测试夹具中。 展示了与现有商业系统竞争的肽分离。

    IC-processed polymer nano-liquid chromatography system on-a-chip and method of making it
    10.
    发明申请
    IC-processed polymer nano-liquid chromatography system on-a-chip and method of making it 审中-公开
    IC加工聚合物纳米液相色谱系统芯片及其制备方法

    公开(公告)号：US20050051489A1

    公开(公告)日：2005-03-10

    申请号：US10917257

    申请日：2004-08-11

    申请人： Yu-Chong Tai ,  Qing He ,  Jun Xie ,  Changlin Pang ,  Terry Lee

    发明人： Yu-Chong Tai ,  Qing He ,  Jun Xie ,  Changlin Pang ,  Terry Lee

    IPC分类号： G01N30/60 ,  G01N30/64 ,  B01D15/08

    CPC分类号： H05K3/284 ,  G01N30/6047 ,  G01N30/6095 ,  G01N2030/645 ,  G03F1/80 ,  G01N2030/625

    摘要： Embodiments in accordance with the present invention relate to packed-column nano-liquid chromatography (nano-LC) systems integrated on-chip, and methods for producing and using same. The microfabricated chip includes a column, frits/filters, an injector, and a detector, fabricated in a process compatible with those conventionally utilized to form integrated circuits. The column can be packed with supports for various different stationary phases to allow performance of different forms of nano-LC, including but not limited to reversed-phase, normal-phase, adsorption, size-exclusion, affinity, and ion chromatography. A cross-channel injector injects a nanolitre/picolitre-volume sample plug at the column inlet. An electrochemical/conductivity sensor integrated at the column outlet measures separation signals. A self-aligned channel-strengthening technique increases pressure rating of the microfluidic system, allowing it to withstand the high pressure normally used in high performance liquid chromatography (HPLC). On-chip sample injection, separation, and detection of mixture of anions in water is successfully demonstrated using ion-exchange nano-LC.

    摘要翻译： 根据本发明的实施方案涉及集成在片上的填充柱纳米液相色谱（nano-LC）系统及其制造和使用方法。 微制造的芯片包括柱状物，玻璃料/过滤器，注射器和检测器，以与传统上用于形成集成电路的那些兼容的方法制造。 该柱可以填充有用于各种不同固定相的载体，以允许不同形式的纳米LC的性能，包括但不限于反相，正相，吸附，尺寸排阻，亲和力和离子色谱。 交叉通道注射器在柱入口处注入纳升/皮升体积的样品塞。 集成在色谱柱出口处的电化学/电导率传感器测量分离信号。 自对准的通道加强技术提高了微流体系统的压力等级，使其能够承受通常用于高效液相色谱（HPLC）的高压。 使用离子交换纳米LC成功地证明了在水中阴离子的混合物的片上样品注入，分离和检测。