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公开(公告)号:US5921678A
公开(公告)日:1999-07-13
申请号:US19071
申请日:1998-02-05
申请人: Amish Desai , Xing Yang , Yu-Chong Tai , Elaine Marzluff , Dirk Bockenkamp , Stephen Mayo
发明人: Amish Desai , Xing Yang , Yu-Chong Tai , Elaine Marzluff , Dirk Bockenkamp , Stephen Mayo
CPC分类号: B01L3/5027 , B01F13/0059 , B01F5/0256 , B01F5/0602 , B01J19/0093 , B01F2005/0025 , B01F2005/0621 , B01J2219/00783 , B01J2219/00797 , B01L2300/0816 , B01L2300/0867 , B01L2300/0883 , B01L2400/0487 , B01L2400/084 , Y10S366/03
摘要: A micromachined, high Reynolds number, sub-millisecond liquid mixer for the study of chemical reaction kinetics. This bulk micromachined silicon mixer is capable of initiating and quenching chemical reactions in intervals as short as 100 .mu.s. The mixer chip contains two tee mixers connected by one channel which serves as a reaction chamber. Each tee mixer consists of opposing channels where liquids meet head-on and exit into a third channel forming the base of a "T".
摘要翻译: 用于研究化学反应动力学的微加工,高雷诺数,亚毫秒液体混合器。 该体积微加工硅混合器能够以短至100微秒的间隔引发和淬灭化学反应。 混合器芯片包含用作反应室的一个通道连接的两个三通混合器。 每个三通混合器由相对的通道组成,其中液体前进并且进入形成“T”的基部的第三通道。
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公开(公告)号:US07297943B2
公开(公告)日:2007-11-20
申请号:US11472392
申请日:2006-06-22
申请人: Yu-Chong Tai , Xuan-Qi Wang , Amish Desai , Terry D. Lee , Lawrence Licklider
发明人: Yu-Chong Tai , Xuan-Qi Wang , Amish Desai , Terry D. Lee , Lawrence Licklider
CPC分类号: H01J49/167 , G01N30/6095 , G01N30/7266 , H01J49/0018
摘要: A MEMS device with an overhanging ‘polymer’ capillary provides vital and significant improvements in interfacing a MEMS electrospray nozzle to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters and centimeter long serpentine micro channels provided on-chip and fabricated using a low temperature process.
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公开(公告)号:US5629918A
公开(公告)日:1997-05-13
申请号:US377018
申请日:1995-01-20
申请人: Chih-Ming Ho , Denny K. Miu , Jeremy Tzong-Shyng Leu , Raanan Miller , Amish Desai , Chang Liu , Tom Tsao , Yu-Chong Tai
发明人: Chih-Ming Ho , Denny K. Miu , Jeremy Tzong-Shyng Leu , Raanan Miller , Amish Desai , Chang Liu , Tom Tsao , Yu-Chong Tai
IPC分类号: B44C1/22
CPC分类号: H02K99/00
摘要: A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic coil is disposed on the flap such that when the flap is placed in a magnetic field, it can be caused to selectively interact and rotate out of the plane of the magnetic actuator. The cantilevered flap is released from the underlying substrate by etching out an underlying sacrificial layer disposed between the flap and the substrate. The etched out and now cantilevered flap is magnetically actuated to maintain it out of contact with the substrate while the just etched device is dried in order to obtain high release yields.
摘要翻译: 表面微加工微磁致动器设置有能够使用磁力作为致动力来实现高于100微米的大偏转的挡板。 翼片通过一个或多个梁耦合到基底并且在基底上悬臂。 坡度合金层或磁性线圈设置在翼片上,使得当翼片被放置在磁场中时,可以使其选择性地相互作用并旋转出磁致动器的平面。 通过蚀刻设置在翼片和基底之间的下面的牺牲层,将悬臂翼片从下面的基底释放。 蚀刻出来的和现在的悬臂翼片被磁力驱动,以保持其与基底不接触,同时刚刚蚀刻的装置被干燥以获得高的释放产率。
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公开(公告)号:US07692141B2
公开(公告)日:2010-04-06
申请号:US11942647
申请日:2007-11-19
申请人: Yu-Chong Tai , Xuan-Qi Wang , Amish Desai , Terry D. Lee , Lawrence Licklider
发明人: Yu-Chong Tai , Xuan-Qi Wang , Amish Desai , Terry D. Lee , Lawrence Licklider
CPC分类号: H01J49/167 , G01N30/6095 , G01N30/7266 , H01J49/0018
摘要: A MEMS device with an overhanging ‘polymer’ capillary provides vital and significant improvements in interfacing a MEMS electrospray nozzle to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters and centimeter long serpentine micro channels provided on-chip and fabricated using a low temperature process.
摘要翻译: 具有突出“聚合物”毛细管的MEMS器件在将MEMS电喷雾喷嘴连接到MS入口或其他宏观仪器时提供了重要且显着的改进。 与此相关的制造方法容易扩展到包括内置的微粒过滤器和片上提供的厘米长的蛇形微通道,并使用低温工艺制造。
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公开(公告)号:US20070085038A1
公开(公告)日:2007-04-19
申请号:US11472392
申请日:2006-06-22
申请人: Yu-Chong Tai , Xuan-Qi Wang , Amish Desai , Terry Lee , Lawrence Licklider
发明人: Yu-Chong Tai , Xuan-Qi Wang , Amish Desai , Terry Lee , Lawrence Licklider
IPC分类号: H01J37/08
CPC分类号: H01J49/167 , G01N30/6095 , G01N30/7266 , H01J49/0018
摘要: A MEMS device with an overhanging ‘polymer’ capillary provides vital and significant improvements in interfacing a MEMS electrospray nozzle to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters and centimeter long serpentine micro channels provided on-chip and fabricated using a low temperature process.
摘要翻译: 具有突出“聚合物”毛细管的MEMS器件在将MEMS电喷雾喷嘴连接到MS入口或其他宏观仪器时提供了重要且显着的改进。 与此相关的制造方法容易扩展到包括内置的微粒过滤器和片上提供的厘米长的蛇形微通道,并使用低温工艺制造。
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公开(公告)号:US06185084B2
公开(公告)日:2001-02-06
申请号:US09167407
申请日:1998-10-06
申请人: Yu-Chong Tai , Sang Wook Lee , Amish Desai
发明人: Yu-Chong Tai , Sang Wook Lee , Amish Desai
IPC分类号: H01T2300
摘要: Methods and apparatus implementing a technique for electrostatically transporting a particle through a medium. In general, one implementation includes a substrate; a first insulation layer formed on the substrate; a plurality of electrodes arranged in a sequence on the insulation layer, where the electrodes are divided into a plurality of groups and the electrodes are arranged by group; a second insulation layer over at least one of the electrodes; and a phase shift circuit connected to the electrodes which supplies a voltage wave-form to each group of electrodes, where each voltage wave-form for each group is phase-shifted relative to the other phase-shifted wave-forms.
摘要翻译: 实施用于通过介质静电输送颗粒的技术的方法和装置。 通常,一个实施方案包括基底; 形成在所述基板上的第一绝缘层; 在所述绝缘层上依次排列的多个电极,其中所述电极被分成多组,所述电极按组排列; 在所述电极中的至少一个上方的第二绝缘层; 以及连接到电极的相移电路,其向每组电极提供电压波形,其中每组的每个电压波形相对于另一个相移波形相移。
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公开(公告)号:US5994696A
公开(公告)日:1999-11-30
申请号:US13961
申请日:1998-01-27
申请人: Yu-Chong Tai , Amish Desai , Terry Lee , Mike Davis
发明人: Yu-Chong Tai , Amish Desai , Terry Lee , Mike Davis
CPC分类号: H01J49/167 , H01J49/0018 , H01J49/04
摘要: An apparatus for MEMS electrospray nozzle for mass spectroscopy formed with top and bottom of SiN, and a between layer of material. The material between the top and bottom forms a filter and also reduces the amount of dead space in the nozzle.
摘要翻译: 用于质谱的MEMS电喷雾喷嘴的装置由SiN的顶部和底部以及材料层之间形成。 顶部和底部之间的材料形成过滤器并且还减少喷嘴中的死空间的量。
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公开(公告)号:US20080276819A1
公开(公告)日:2008-11-13
申请号:US11801358
申请日:2007-05-09
申请人: Amish Desai , Bob Melendes , Ming Lu , Brian Fuchs , Stephen Chau
发明人: Amish Desai , Bob Melendes , Ming Lu , Brian Fuchs , Stephen Chau
CPC分类号: H05K1/0212 , F42B3/13 , H05K1/16 , H05K3/281 , H05K3/4611 , H05K2201/09063 , H05K2203/063
摘要: A microcavity structure. In an illustrative embodiment, the microcavity structure includes a first substrate, which has a region of interest. A second substrate with a perforation therein is bonded to the first substrate. The perforation coincides with the region of interest. In a specific embodiment, the first substrate is implemented via a Printed Circuit Board (PCB). The region of interest includes one or more circuit components, including an actuator, such as a bridgewire, thereon or therein. A smoothing layer is included between the PCB and the actuator. A bonding gasket adheres the first substrate to the second substrate. The perforation accommodates energetic material that is selectively ignited via the actuator.
摘要翻译: 微腔结构。 在说明性实施例中,微腔结构包括具有感兴趣区域的第一衬底。 其中具有穿孔的第二基底被结合到第一基底。 穿孔与感兴趣的区域一致。 在具体实施例中,第一基板经由印刷电路板(PCB)实现。 感兴趣的区域包括一个或多个电路部件,包括在其上或其中的致动器,例如桥接器。 PCB和执行器之间包含一个平滑层。 接合垫圈将第一衬底粘附到第二衬底。 穿孔适应通过致动器选择性点燃的高能材料。
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公开(公告)号:US07938065B2
公开(公告)日:2011-05-10
申请号:US12002195
申请日:2007-12-14
申请人: Amish Desai
发明人: Amish Desai
IPC分类号: F23Q7/02
CPC分类号: F42B3/121
摘要: An actuator assembly that includes, in one example embodiment, a substrate with a bridge coupled between a first electrode and a second electrode on the substrate. A lithographically disposed flyer is positioned in proximity to the bridge. In a more specific embodiment, the actuator assembly further includes a lithographically disposed barrel that partially surrounds the flyer. A fireset is coupled to pins that extend through the substrate to the first electrode and the second electrode. The flyer further includes a three-dimensional surface adapted to flatten during flight. The flyer may be concave, convex, or may star shaped, may have perforations therein, or may exhibit another shape or other features.
摘要翻译: 在一个示例性实施例中,包括耦合在第一电极和基板上的第二电极之间的桥的衬底的致动器组件。 光刻布置的飞翼位于桥附近。 在更具体的实施例中,致动器组件还包括部分地围绕传单的光刻设置的筒。 火花塞耦合到穿过衬底延伸到第一电极和第二电极的引脚。 传单还包括适于在飞行期间变平的三维表面。 传单可以是凹的,凸的或可以是星形的,其中可以具有穿孔,或者可以呈现另外的形状或其它特征。
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公开(公告)号:US07021217B2
公开(公告)日:2006-04-04
申请号:US10405338
申请日:2003-04-01
IPC分类号: F42B3/10
CPC分类号: B64G1/26 , B64G1/403 , F02K9/94 , F42B3/006 , F42B10/661
摘要: A versatile cavity actuator. The versatile cavity actuator includes a cavity having one or more polymer-based sidewalls. An energetic material is disposed therein. A heater is disposed on or within the cavity. In a specific embodiment, the cavity includes a thermally insulating base positioned beneath the heater, which is positioned near the bottom of the cavity. The polymer-based sidewalls are constructed from a photo-curable epoxy, which is disposed on a substrate via microelectromechanical processes. The sidewalls are angled or parabolic and are constructed via a low-temperature lithographic spin process compatible with post integrated circuit processing.
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