公开(公告)号：US5223913A

公开(公告)日：1993-06-29

申请号：US858631

申请日：1992-03-27

Applicant: Osamu Ando ,  Toshiaki Fukuma

Inventor： Osamu Ando ,  Toshiaki Fukuma

IPC: G01J3/00 ,  G01J3/02 ,  G01J3/06 ,  G01J3/10 ,  G01J3/12 ,  G01J3/18

CPC classification number: G01J3/10 ,  G01J3/02 ,  G01J3/0235 ,  G01J3/027 ,  G01J3/06 ,  G01J2003/063 ,  G01J2003/064 ,  G01J2003/1213 ,  G01J3/18

Abstract: A spectrophotometer including: a) a light source switching mechanism for switching a plurality of light sources by swinging a light source mirror; b) a filter selecting mechanism; c) a diffraction grating rotating mechanism; and d) a controller for determining the operation origins of the three driving mechanisms using a rough origin sensor provided for the diffraction grating rotating mechanism and a photometer. The operation of the controller is to: i) determine an origin of the movement of the filter by making an end of the filter frame to touch a stopper; ii) determine a rough origin of the diffraction grating using the rough origin sensor; and iii) determine an origin of the movement of the light source mirror and a precise origin of the movement of the diffraction grating by detecting the position at which the photometer detects the maximum intensity of light.

公开(公告)号：US20170016769A1

公开(公告)日：2017-01-19

申请号：US14825252

申请日：2015-08-13

Applicant: HC PHOTONICS CORP.

Inventor： Ming-Hsien CHOU ,  Jian-Long XIAO ,  Ya-Wen CHUANG ,  Jyh-Rou SZE ,  Po-Jui CHEN ,  Chun-Fu LIN ,  Long-Jeng LEE ,  Chun-Li CHANG ,  Chi Hung HUANG ,  Da-Ren LIU

IPC: G01J3/44 ,  G01N21/64

CPC classification number: G01J3/4406 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/06 ,  G01J3/2823 ,  G01J2001/442 ,  G01J2003/063 ,  G01N21/6408 ,  G01N21/6456 ,  G01N2021/6421 ,  G01N2201/0697 ,  G01N2201/10

Abstract: The present invention provides a measurement system of real-time spatially-resolved spectrum and time-resolved spectrum and a measurement module thereof. The measurement system includes an excitation light and a measurement module. The excitation light excites a fluorescent sample and the measurement module receives and analyzes fluorescence emitted by the fluorescent sample. The measurement module includes a single-photon linear scanner and a linear CCD spectrometer. The single-photon linear scanner selectively intercepts a light beam component of a multi-wavelength light beam that has a predetermined wavelength to generate a single-wavelength time-resolved signal, wherein the multi-wavelength light beam is generated by splitting the fluorescence. The linear CCD spectrometer receives the multi-wavelength light beam and generates a spatially-resolved full-spectrum fluorescence signal. With the implementation of the present invention, the spatially-resolved full-spectrum fluorescence signal and the single-wavelength time-resolved signal can be observed at the same time. Thus, the facility of a fluorescence spectrometer is improved.

Abstract translation: 本发明提供实时空间分辨光谱和时间分辨光谱的测量系统及其测量模块。 测量系统包括激发光和测量模块。 激发光激发荧光样品，测量模块接收和分析由荧光样品发出的荧光。 测量模块包括单光子线性扫描仪和线性CCD光谱仪。 单光子线性扫描器选择性地截取具有预定波长的多波长光束的光束分量以产生单波长时间分辨信号，其中通过分离荧光产生多波长光束。 线性CCD光谱仪接收多波长光束并产生空间分辨全谱荧光信号。 通过本发明的实现，可以同时观察空间分辨全谱荧光信号和单波长时间分辨信号。 因此，提高了荧光光谱仪的设备。

公开(公告)号：US4916645A

公开(公告)日：1990-04-10

申请号：US201250

申请日：1988-06-02

Applicant: Charles E. Wuest ,  John B. Collins

Inventor： Charles E. Wuest ,  John B. Collins

IPC: G01J3/02 ,  G01J3/06 ,  G01J3/18 ,  G01J3/28 ,  G01J3/32 ,  G01J3/443 ,  G01N21/71 ,  G01N21/73 ,  G01N21/74

CPC classification number: G01J3/28 ,  G01J3/32 ,  G01J2003/063 ,  G01J2003/066 ,  G01J3/18 ,  G01N21/73 ,  G01N21/74

Abstract: Iterative compensation of drift of peak positions of spectral lines is effected in a spectral monochromator including a grating, a detector of spectral fractions of a spectral band, a stepper motor for varying relative orientation of the grating and the detector, and a computer. Computer-defined spectral windows each encopasses a spectral band and has an initial spectral center. Each window is scanned to determine a peak spectral position. Calculation is made for determining a spectral position error of the peak position from the initial center for each corresponding window. A functional average of the offsets for the peaks is calculated as a linear function of window position, and a revised spectral center for each window is calculated as being equal to the initial center plus the functional average for the window position determined from the linear function. Each window is shifted correspondingly. The step of successively scanning through each window is repeated to determine a new peak position for each corresponding band, whereby each new peak position is maintained near the spectral center of each corresponding window.

公开(公告)号：US5255071A

公开(公告)日：1993-10-19

申请号：US406726

申请日：1989-09-13

Applicant: Fred H. Pollak ,  Hong-En Shen

Inventor： Fred H. Pollak ,  Hong-En Shen

IPC: G01N21/27 ,  G01J1/24 ,  G01J3/06 ,  G01N21/17 ,  G01N21/55 ,  H01L21/66 ,  G01N21/25

CPC classification number: G01N21/1717 ,  G01J1/24 ,  G01J2003/063 ,  G01J2003/066 ,  G01N2021/1725 ,  G01N21/55 ,  G01N2201/0695 ,  G01N2201/126

Abstract: A method and apparatus for determining the characteristics of materials, particularly of semi-conductors, semi-conductor heterostructures and semi-conductor interfaces by the use of photoreflectance, in which monochromatic light and an acousto-optically modulated light beam reflected from the sample is detected to produce a d.c. signal and an a.c. signal, whereby the d.c. signal is applied to one input of a computer and the a.c. signal is used with another input of the computer which controls the light intensity of the monochromatic light impinging on the sample to maintain the d.c. signal substantially constant. The modulation frequency of the modulated pump beam and/or the wavelength of the monochromatic light can also be varied by the computer. Information about trap times can be obtained by determining the dependence of the in-phase signal on the pump modulating frequency, respectively.

公开(公告)号：US5096295A

公开(公告)日：1992-03-17

申请号：US664592

申请日：1991-03-01

Applicant: Robert J. Krupa ,  Edward E. Owen ,  Stanley L. Shiller

Inventor： Robert J. Krupa ,  Edward E. Owen ,  Stanley L. Shiller

IPC: G01J3/06

CPC classification number: G01J3/06 ,  G01J2003/063 ,  G01J2003/066

Abstract: In its preferred embodiment, a scanning monochromator uses a pulse-driven micro-stepping motor to drive a spectral-dispersion element via a reduction-gear harmonic drive. The motor is directly coupled to the input hub of the reduction-gear drive, and the output hub of the reduction-gear drive directly supports the spectral-dispersion element. By selecting a motor with a great number of steps per revolution, and a harmonic drive with a great reduction ratio, a resolution of 5 million pulsed steps is available, per single rotation of the output hub of the reduction-gear drive. This translates into more than 600,000 incremental angular-displacement steps over a usable 45.degree. range of dispersion-element rotation.

Abstract translation: 在其优选实施例中，扫描单色仪使用脉冲驱动微步进电机经由减速齿轮谐波驱动来驱动频谱色散元件。 电机直接连接在减速齿轮传动装置的输入轮毂上，减速齿轮传动装置的输出轮毂直接支撑分光元件。 通过选择每转数很多的电机，以及减速比大的谐波驱动器，减速齿轮传动的输出轮毂每旋转一次就可以获得500万次脉冲步进的分辨率。 这在可用的45°范围的分散体旋转中转化为超过60万个增量角位移步长。

公开(公告)号：US4652761A

公开(公告)日：1987-03-24

申请号：US677950

申请日：1984-12-04

Applicant: James B. Kerr ,  Charles T. McElroy ,  David I. Wardle

Inventor： James B. Kerr ,  Charles T. McElroy ,  David I. Wardle

IPC: G01J3/06 ,  G01J3/18 ,  G01J3/28 ,  G01J3/32

CPC classification number: G01J3/32 ,  G01J2003/063 ,  G01J2003/2866 ,  G01J2003/2876 ,  G01J2003/326 ,  G01J3/0202 ,  G01J3/0229 ,  G01J3/0291 ,  G01J3/1838

Abstract: A holographic grating spectrophotometer for detecting ozone and sulphur dioxide in the atmosphere is described which provides automatic calibration and which provides automatic linearity correction for the photomultiplier tube. Automatic calibration is provided by using a computer to control a stepper motor to move the grating so that the photomultiplier tube receives maximum intensity at the calibration wavelength of 302.1 nm from a mercury source. Automatic linearity correction is obtained by cycling a wavelength selection mask across exit slits located in the focal plane of the device and firstly combines separately taken counts of two different wavelengths and comparing this sum with the sum of counts of these wavelengths taken simultaneously. The difference is used to calculate photomultiplier tube deadtime and improve accuracy of the results. In a preferred embodiment five wavelengths are used to calculate ozone and sulphur dioxide levels, and a stepper motor driving a cylindrical wavelength selection mask permits exit slits to be exposed to predetermined wavelengths one at a time.

Abstract translation: 描述了用于检测大气中的臭氧和二氧化硫的全息光栅分光光度计，其提供自动校准，并且为光电倍增管提供自动线性校正。 通过使用计算机来控制步进电机来移动光栅来提供自动校准，使得光电倍增管在距离汞源的302.1nm的校准波长处接收最大强度。 通过将波长选择掩模穿过位于器件的焦平面中的出口狭缝来获得自动线性校正，并且首先将分离的两个不同波长的计数组合并将该和与同时采用的这些波长的计数之和进行比较。 差异用于计算光电倍增管死区时间，提高结果精度。 在优选实施例中，使用五个波长来计算臭氧和二氧化硫水平，并且驱动圆柱形波长选择掩模的步进电机允许出口狭缝一次暴露于预定波长。

公开(公告)号：US12124053B2

公开(公告)日：2024-10-22

申请号：US18081971

申请日：2022-12-15

Applicant: Cymer, LLC

Inventor： Eric Anders Mason

IPC: G02B26/00 ,  G01J3/06 ,  G01J3/14 ,  G01J3/18 ,  G02B5/04 ,  G02B27/12 ,  G02B27/14 ,  G02B27/42 ,  G03F7/00 ,  H01L21/027 ,  H01S3/00 ,  H01S3/08 ,  H01S3/23 ,  G01J3/12 ,  H01S3/225

CPC classification number: G02B27/4244 ,  G01J3/06 ,  G01J3/14 ,  G01J3/1804 ,  G02B26/007 ,  G03F7/70575 ,  H01L21/0275 ,  H01S3/0085 ,  H01S3/08004 ,  H01S3/2308 ,  G01J2003/061 ,  G01J2003/063 ,  G01J2003/064 ,  G01J2003/069 ,  G01J2003/1208 ,  H01S3/08009 ,  H01S3/225 ,  H01S3/2366

Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

公开(公告)号：US20180107017A1

公开(公告)日：2018-04-19

申请号：US15295280

申请日：2016-10-17

Applicant: Cymer, LLC

Inventor： Eric Anders Mason

IPC: G02B27/42 ,  H01S3/23 ,  H01S3/00 ,  G02B26/00 ,  H01L21/027

CPC classification number: G02B27/4244 ,  G01J3/06 ,  G01J3/14 ,  G01J3/1804 ,  G01J2003/061 ,  G01J2003/063 ,  G01J2003/064 ,  G01J2003/069 ,  G01J2003/1208 ,  G02B26/007 ,  G03F7/70575 ,  H01L21/0275 ,  H01S3/0085 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/225 ,  H01S3/2308 ,  H01S3/2366

Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

公开(公告)号：US5231462A

公开(公告)日：1993-07-27

申请号：US840863

申请日：1992-02-25

Applicant: Tsing Dschen

Inventor： Tsing Dschen

IPC: G01J3/06 ,  G01J3/18 ,  G01J3/26 ,  G01J3/433

CPC classification number: G01J3/433 ,  G01J2003/063 ,  G01J3/18 ,  G01J3/26 ,  G01N2201/069

Abstract: A spectrophotometer useful for measuring absorption or emission bands of a substance irradiated with optical radiation, comprises a light source for producing the optical radiation, a monochromator for isolating light of wavelength (W) from the optical radiation and which modulates the wavelength (W) by a predetermined wavelength amplitude (.delta.W), and a photodetector for detecting the intensity of light passing through the monochromator and for producing a measuring signal in response thereto. The monochromator operates under the control of an electronic control unit which produces a control signal that causes the monochromator to scan across a portion of the spectrum of the optical radiation at a frequency (f.sub.2) to transmit a narrow band of radiation at the wavelength (W). The control unit includes a modulation generator which produces a signal that causes the monochromator to modulate the wavelength (W) by the predetermined wavelength amplitude (.delta.W) at a frequency (f.sub.1). The spectrophotometer also includes an electronic evaluation unit which amplifies an a.c. component of the measuring signal that is attributable to the wavelength modulation in synchronization with the signal produced by the modulation generator. In one preferred embodiment, the monochromator comprises a diffraction grating and a drive unit which causes the diffraction to rotate about a pivot axis and which superimposes an oscillatory motion on the rotational movement. In another preferred embodiment, the monochromator comprises a Fabry-Perot resonator and a drive unit which adjusts the optical length of the Fabry-Perot resonator under the control of the control unit.

Abstract translation: 可用于测量用光辐射照射的物质的吸收或发射带的分光光度计包括用于产生光学辐射的光源，用于隔离来自光学辐射的波长（W）的光的单色仪，并且通过 预定波长幅度（ΔW）和用于检测通过单色仪的光的强度并用于响应于此产生测量信号的光电检测器。 单色仪在电子控制单元的控制下操作，该电子控制单元产生一个控制信号，该控制信号使单色仪以频率（f2）扫描光辐射的一部分光谱，以将波长（W ）。 控制单元包括一个调制发生器，该调制发生器产生一个使单色仪在频率（f1）下将波长（W）调制预定波长振幅（ΔW）的信号。 分光光度计还包括一个电子评估单元，其放大一个等 与由调制发生器产生的信号同步的归因于波长调制的测量信号的分量。 在一个优选实施例中，单色仪包括衍射光栅和驱动单元，该驱动单元使衍射围绕枢转轴线旋转并且在旋转运动上叠加振荡运动。 在另一个优选实施例中，单色仪包括法布里 - 珀罗谐振器和驱动单元，其在控制单元的控制下调节法布里 - 珀罗谐振器的光学长度。

公开(公告)号：US4971439A

公开(公告)日：1990-11-20

申请号：US302061

申请日：1989-01-18

Applicant: James R. Brown

Inventor： James R. Brown

IPC: G01J3/06 ,  G01J3/12 ,  G01J3/28

CPC classification number: G01J3/06 ,  G01J2003/063 ,  G01J2003/066 ,  G01J2003/068 ,  G01J2003/1273 ,  G01J2003/2866

Abstract: A calibration method and apparatus for economical and rapid calibration of a scientific instrument utilizing a monochromator to generate monochromatic light utilizing controllable means for determining the angular position of a light dispersing element in the monochromator and a filter having a narrow absorption band(s) to determine a relationship between the wavelength of the monochromatic light generated by the monochromator and an angular position of the dispersing element so that the dispersing element can be rotated to an exact position for the monochromator to generate a selected wavelength of monochromatic light.

Abstract translation: 一种用于经济和快速校准科学仪器的校准方法和装置，利用单色仪产生单色光，利用可控装置来确定单色仪中的光分散元件的角位置和具有窄吸收带的滤光片，以确定 由单色仪产生的单色光的波长与分散元件的角度位置之间的关系，使得分散元件可以旋转到用于单色仪的精确位置以产生所选择的单色光的波长。