Abstract:
The invention concerns a method for producing a chip module (72, 73, 89, 90) having a carrier substrate (30, 81) and at least one chip (33) arranged on the carrier substrate, as well as a contact conductor arrangement (45) for connecting chip pads (34) to contacts (69, 70, 71) arranged on a contact face (56) of the chip module, in which method the front face of the chip which is provided with the chip pads is secured to the carrier substrate and then the contact conductor arrangement is formed by structuring of a contact material layer (31, 80) of the carrier substrate.
Abstract:
The invention relates to a chip assembly (18) having a connection substrate (12) and a plurality of semiconductor substrates (1) arranged on the connection substrate, in particular chips, wherein connection surfaces (5) arranged on a contact surface of the chips (1) are connected to connection surfaces on a contact surface (14) of the connection substrate (12), wherein a side edge of the chips (1) extends parallel to the contact surface of the connection substrate (12), and the contact surface of the chips (1) extends transversely to the contact surface of the connection substrate (12), through-connections (13) arranged in the connection substrate connect outside contacts (15) arranged on an outside contact side to the contact surfaces designed as inside contacts (14) on the contact surface of the connection substrate, and connection surfaces of the chips (1) adjacent to the side edge are connected to the inside contacts of the connection substrate via a remelted solder material depot (16). The invention further relates to a method for manufacturing a chip assembly (18).
Abstract:
A method and device for the alternating contacting of two wafer-type component composite arrangements (12,14) from a plurality of connected similar components, particularly a semiconductor wafer with a functional component wafer, for the production of electronic modules on a wafer plane, wherein the two component composite arrangements provided with contact metallizations respectively on the opposite-lying contact surfaces (38,39) thereof are pressed against each other in order to form contact pairs with the contact metallizations thereof and the contacting of the contact metallizations occurs by backward impingement of one compound composite arrangement (12) with laser radiation, wherein the wavelength of the laser radiation is selected according to the absorption degree of the backwardly impinged upon component-composite arrangement such that transmission of the laser radiation by the backwardly impinged upon component-composite arrangement is substantially prohibited or absorption of the laser radiation occurs essentially in the contact metallizations of one or both component-composite arrangements. .
Abstract:
The invention relates to a chip assembly (18) having a connection substrate (12) and a plurality of semiconductor substrates arranged on the connection substrate, in particular chips 1, wherein connection surfaces (5) arranged on a contact surface of the chips are connected to connection surfaces on a contact surface of the connection substrate, wherein the chips extend having a side edge parallel to and the contact surface thereof transverse to the contact surface of the connection substrate, wherein through-connections (13) are arranged in the connection substrate which connect outside contacts (15) arranged on an outside contact side to the contact surfaces designed as inside contacts (14) on the contact surface of the connection substrate, wherein connection surfaces of the chips arranged adjacent to the side edge are connected to the inside contacts of the connection substrate via a remelted solder material depot (16). The invention further relates to a method for producing a chip assembly (18).
Abstract:
The invention relates to a solder sphere feeding device (40) comprising a solder sphere reservoir (20) for receiving a quantity of solder spheres and a metering device (31) for dispensing a metered quantity of solder spheres (16) to a delivery device, wherein the metering device comprises an ultrasonic system (32) and a dispensing mouthpiece (21) with a dispensing tubule (43), the ultrasonic system applies vibrations to the dispensing mouthpiece, and the solder sphere reservoir or the dispensing mouthpiece of the solder sphere reservoir is provided with a pressure line (23) for injecting a gas under pressure into the solder sphere feeding device.
Abstract:
The present invention relates to a method for the electrical bonding of connection areas of two substrates (6, 7), more particularly of a chip (6) and of a carrier substrate (7), two wafers or a plurality of superposed chips and a substrate. The method according to the invention is performed in two successive phases, in a first phase, the chip (6) being positioned with its connection areas against connection areas of the substrate (7) and rearward application of laser energy (5) to the chip (6), and, in a subsequent second phase, in a housing (3), a flux medium (for example a nitrogen-formic acid mixture) being applied and at the same time a reflow being performed by means of rearward application of laser energy (5) to the chip (6), and a process of purging the housing interior subsequently being performed. The invention also concerns a device for performing the second phase of the method according to the invention. The device according to the invention for performing the second phase of the method comprises a support table (1) and a housing (3), which together with a top of the support table (1) forms a housing interior, in which the component arrangement is positioned, and a laser light source (5), which is oriented such that the laser radiation impinges on the first substrate (6) on the rear side.
Abstract:
The present invention relates to a method for electrically contact-connecting connection areas of two substrates (6, 7), more particularly of a chip (6) and of a carrier substrate (7). Furthermore, the invention relates to a device for performing a second phase of the method according to the invention. The method according to the invention is effected in two successive phases, wherein, in a first phase, the chip (6) is positioned with its connection areas against connection areas of the substrate (7) and laser energy (5) is applied to the chip (6) at the rear and, in a subsequent second phase, in a housing (3), a flux medium is applied and at the same time a reflow is performed by means of laser energy (5) being applied to the chip (6) at the rear, and a process of purging the housing interior is subsequently performed. The device according to the invention for performing a second phase of the method comprises a carrier table (1) and a housing (3), which together with a top side of the carrier table (1) forms a housing interior, in which the component arrangement is positioned, and also a laser light source (5), which is oriented in such a way that the laser radiation impinges on the first substrate (6) on the rear side.
Abstract:
The invention relates to a method for forming solder deposits (34) on raised contact metallization structures (24) of connection surfaces (23) of a substrate (19) designed in particular as a semiconductor component, wherein wetting surfaces (26) of the contact metallization structures (24) are brought in contact with a solder material layer (15) arranged on a solder material carrier (13), the substrate (19) is heated and the temperature of the solder material layer (15) is controlled at least during the duration of the contact, and subsequently the contact metallization structures (24) wetted with solder material (34) and the solder material layer (15) are separated, thus making it possible to prevent the formation of contact bridges between adjoining contact metallization structures (24) resulting from the surface tension of fused solder material when the wetting surfaces (26) of the contact metallization structures (24) and the solder material layer (15) are separated.
Abstract:
The invention relates to a test contact arrangement (15) for testing semiconductor components, comprising at least one test contact (10) arranged in a test contact frame (13) of the type of a cantilever arm, a fastening base (12) and a contact arm (30) which is provided with a contact tip (11) and connected to the fastening base. According to the invention, the fastening base is inserted with its fastening projection (16) into a frame opening (14) of the test contact frame in such a manner that a lower edge (17) of the fastening projection is essentially aligned flush with a lower side (18) of the test contact frame.
Abstract:
The invention relates to a method and device for transferring a chip (18), which is arranged on a transfer substrate (26), to a contact substrate (50) and for contacting the chip to the contact substrate, during which the chip, which is adhesively attached via its rear side (19) to a holding surface of the transfer substrate, said holding surface facing the contact substrate. The rear side of the chip is subjected to the action of laser energy passing through the transfer substrate, and a pressing device (45, 46) acting upon the rear of the chip and through the transfer substrate brings the chip, via its chip contacts (59, 60) located opposite a contact surface (58) of the contact substrate, into contact with substrate contacts (56, 57) located on the contact surface, and a thermal connection is established between the chip contacts and the substrate contacts.