INTERPOSER AND MANUFACTURING METHOD OF THE INTERPOSER
    8.
    发明公开
    INTERPOSER AND MANUFACTURING METHOD OF THE INTERPOSER 审中-公开
    ZWISCHENSTÜCKUND VERFAHREN ZUR HERSTELLUNG DESZWISCHENSTÜCKS

    公开(公告)号:EP2187438A1

    公开(公告)日:2010-05-19

    申请号:EP08868233.1

    申请日:2008-10-09

    申请人: Ibiden Co., Ltd.

    IPC分类号: H01L23/32 H01L25/04 H01L25/18

    摘要: The objective of the present invention is to provide an interposer in which numerous wiring distributions may be arranged with the smallest possible number of layers, and which is suitable for large-volume signal transmission between electronic components. The interposer according to the present invention is structured with: a support substrate; a first insulation layer made of inorganic material and formed on the support substrate; first lands formed in the first insulation layer; second lands formed in the first insulation layer; first wiring formed in the first insulation layer and electrically connecting the first lands and the second lands; a second insulation layer formed on the first insulation layer, the first lands, the second lands and the first wiring, and having first opening portions for first via conductors and second opening portions for second via conductors; first pads formed on the second insulation layer to load a first electronic component; second pads formed on the second insulation layer to load a second electronic component; second wiring formed on the second insulation layer; first via conductors formed in the first opening portions and electrically connecting the first lands and the first pads; and second via conductors formed in the second opening portions and electrically connecting the second lands and the second wiring. It is characterized that the first pads and the second pads are electrically connected through the first wiring and the second wiring, and the second wiring has a longer wiring length and a greater thickness than the first wiring.

    摘要翻译: 本发明的目的是提供一种中间层,其中可布置多个布线分布,其层数最小,适用于电子部件之间的大容量信号传输。 根据本发明的插入件结构为:支撑基板; 由无机材料制成并形成在所述支撑基板上的第一绝缘层; 形成在第一绝缘层中的第一焊盘; 形成在第一绝缘层中的第二焊盘; 第一布线形成在第一绝缘层中并电连接第一焊盘和第二焊盘; 形成在第一绝缘层上的第二绝缘层,第一焊盘,第二焊盘和第一布线,并且具有用于第一通孔导体的第一开口部分和用于第二通路导体的第二开口部分; 形成在第二绝缘层上以加载第一电子部件的第一焊盘; 形成在所述第二绝缘层上以加载第二电子部件的第二焊盘; 形成在第二绝缘层上的第二布线; 第一通孔,形成在第一开口部分中并电连接第一焊盘和第一焊盘; 以及形成在第二开口部分中的第二通孔导体,并电连接第二焊盘和第二布线。 其特征在于,第一焊盘和第二焊盘通过第一布线和第二布线电连接,并且第二布线具有比第一布线更长的布线长度和更大的厚度。