Abstract:
PROBLEM TO BE SOLVED: To provide a method of fabricating thin film dielectrics having high-capacitance density, low loss tangent, high insulation breakdown voltage, and other desirable physical and electrical properties. SOLUTION: Deposited thin-film dielectrics having columnar grains and high dielectric constants are formed on heat treated and polished metal foil. The sputtered dielectrics are annealed at low oxygen partial pressures, thereby obtaining a high-capacitance density thin film dielectrics. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide an inexpensive interposer having a thin-film capacitor having very high capacitance. SOLUTION: The interposer has a glass substrate 46 having a first through electrode 47 buried therein; a plurality of resin layers 68, 20, 32 supported by the glass substrate; a thin-film capacitor, as thin-film capacitors 18a, 18b buried between the first resin layer 68 out of the resin layers and the second resin layer 20 out of the resin layers, having first capacitor electrodes 12a, 12b, second capacitor electrodes 16 formed oppositely to the first capacitor electrodes, and capacitor dielectric films 14 formed between the first and second capacitor electrodes and having a dielectric constant of ≥200; and second through electrodes 77a, 77b piercing through the resin layers, electrically connected the first through electrode and electrically connected to the first capacitor electrode or the second capacitor electrode. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide an LC-composite electronic component wherein deterioration of filter characteristic when used as an LC filter is restrained. SOLUTION: The electronic component 100 has a substrate 1, a lower conductor layer 2 provided on the substrate 1, an inorganic dielectric film 5 covering the lower conductor layer 2, and an upper conductor layer 3 with an upper electrode 3C provided on the inorganic dielectric film 5. The lower conductor layer 2 has a lower electrode 2C constituting a capacitor C1 together with the upper electrode 3C and the inorganic dielectric film 5, and a coil 2L constituting an inductor L1. An entire of the inorganic dielectric film 5 is formed integrally; and the lower conductor layer 2 is in contact with the substrate 1, the inorganic dielectric film 5, and the upper conductor layer 3 alone. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a printed circuit board incorporating a capacitor having a dielectric thin film using a laser lift-off and a capacitor manufactured by this method. SOLUTION: There are provided a manufacturing method of the present invention incorporating a thin film capacitor, including: forming a dielectric thin film 13 on a transparent substrate 11 and then applying heat treatment thereto; forming a conductive layer 15 on the dielectric thin film thus subjected to the heat treatment; irradiating a lower part of the transparent substrate of a lamination formed as described above with laser beams, thereby separating the transparent substrate from this lamination; forming a conductive layer 17 having a prescribed pattern on the dielectric thin film from which the transparent substrate is separated; and forming an insulating layer and the conductive layer alternately by desired number of times on the conductive layer in upper/lower parts of the formed thin film, and a printed circuit board incorporating the thin film capacitor manufactured by this method. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing compound metal-oxide dielectric film in which the film structure of a part of a metal element is formed in an ordinary low temperature film forming step, and then the synthesis and the crystallization of the other metal are implemented using a hydrothermal synthesis method, and to provide a compound metal-oxide dielectric film. SOLUTION: The method of manufacturing a dielectric film comprising compound metal oxide comprising at least two sorts of metal elements on a substrate comprises the steps of forming an amorphous thin film comprising a part of the metal element of at least two sorts of metal elements, providing a hydrothermal reaction solution in which the precursor of the other remained metal element of at least two sorts of metal elements is mixed, allowing the amorphous thin film to be immersed in the hydrothermal reaction solution, and hydrothermally treating the amorphous thin film such that a compound oxide film in which the other remained metal is synthesized with the amorphous thin film and crystallized is formed. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a thin film capacitor etc. which includes a dielectric film of a sufficient dielectric constant obtained through a low temperature film-forming process. SOLUTION: A thin film capacitor which includes a dielectric film of a dielectric constant of 15 or more is formed using a first and second metal electrode films and an amorphous metal oxide of BiZnNb positioned between the electrodes. A laminated layer structure is formed with the first metal electrode film, the dielectric film of dielectric constant 15 or more formed using the amorphous metal oxide of BiZnNb, and the second metal electrode film in order. Since the amorphous metal oxide of BiZnNb applied as a dielectric film exhibits a high dielectric constant even without proceeding a high-temperature heat treatment process for crystallization, it can be usefully used as a thin film capacitor of a laminated layers structure of a polymer base, such as a printed circuit substrate. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide thin film capacitors, more particularly, thin film capacitors formed on metal foils which can be embedded in a printed circuit board (PWB) attached to a printed circuit board package, such that a capacitance for reducing, connecting and controlling voltage is provided to an integrated circuit die. SOLUTION: The capacitor is directed to a dielectric thin film composition comprising (1) one or more barium/titanium-containing additives selected from (a) barium titanate, (b) any composition that can form barium titanate during firing, and (c) mixtures thereof; dissolved in (2) organic medium. The thin film composition is doped with 0.002-0.05 atom percent of a dopant comprising an element selected from Sc, Cr, Fe, Co, Ni, Ca, Zn, Al, Ga, Y, Nd, Sm, Eu, Gd, Dy, Ho, Er, Yb, Lu and mixtures thereof, and to capacitors comprising such compositions. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a wiring substrate for preventing generation of oxidation, corrosion, and migration of connecting point, and obtaining excellent continuity condition at the connecting point. SOLUTION: In the wiring substrate where a metal wiring pattern including the connecting points for external connections is formed on the substrate; an organic thin film including cylane is formed on the substrate covering the metal wiring pattern, and the connecting point is connected in conductive via an organic thin film. Like the related art where a resin protecting film formed at the connecting point is broken or erased at the time of connection, conductive connection can be realized, for example, even in the case of external component having weak contact pressure. COPYRIGHT: (C)2007,JPO&INPIT