摘要:
There are provided a novel norbornene derivative which is a material for a chemically amplifying type photoresist for F2 laser, possesses excellent transparency and improved dry etching resistivity and has a fluorine-containing ketone unit or fluorine-containing tertiary alcohol unit directly bonded to the norbornene backbone; a fluorine-containing polymer obtained by using the norbornene derivative as a copolymerizable monomer; and a chemically amplifying type photoresist composition comprising the fluorine-containing polymer, a photoacid generator and a solvent.
摘要:
PROBLEM TO BE SOLVED: To provide a new fluorine-containing cyclic compound and a fluorine-containing polymer compound and to provide a resist material having high transparency in broad wavelength area from an ultraviolet light area to a near-infrared light area and having high adhesiveness and film-forming property to substrates and high etching resistance together and to provide a pattern-forming method using the resist material and to provide a package material for semiconductor devices. SOLUTION: The fluorine-containing cyclic compound is represented by general formula (1) [wherein R1a is a 1-25C cyclic alkyl group, a cyclic alkenyl group or a cyclic alkynyl group; R2 and R3 are each a hydrogen atom, a halogen atom, a 1-25C straight-chain or branched or cyclic alkyl group and R1a, R2 and R3 may be each an atomic group containing a fluorine atom, an oxygen atom, a sulfur atom, a nitrogen atom or a carbon-carbon double bond]. COPYRIGHT: (C)2005,JPO&NCIPI
摘要:
PROBLEM TO BE SOLVED: To provide a material for a chemically amplifying type photoresist for F 2 laser which possesses excellent transparency and improved dry etching resistance. SOLUTION: The material is a fluorine-containing polymer having a ring structure in a polymer main chain represented by the formula (13):-(M1)-(M2)-(N)- (wherein M1 is a structural unit derived from a norbornene derivative having a fluorine-containing alcohol structure; M2 is a structural unit obtained from a 2 or 3C ethylenic monomer which is a fluorine-containing monomer containing at least one fluorine atom; and N is a structural unit derived from a monomer copolymerizable with the structural units M1 and M2). The polymer includes 1-99 mol% of the structural unit M1, 1-99 mol% of the structural unit M2 and 0-98 mol% of the structural unit N and has a number average molecular weight of 500-1,000,000. COPYRIGHT: (C)2009,JPO&INPIT
摘要:
Vitamin D derivatives having general formula (1) which are hydroxylated at the 24-position and considered as one of metabolites of physiologically active vitamin D derivatives substituted at the 2 beta -position wherein R1, R2, R3 and R4 are the same or different and each represents hydrogen or a protective group; X and Y represent each H or OR5, provided that Y is OR5 when X is H, and Y is H when X is OR5 (wherein R5 represents hydrogen or a protective group, or R1 and R5 may together form a vicinal-diol protective group); synthesis intermediates useful in synthesizing these vitamin D derivatives; and medicinal compositions containing these vitamin D derivatives.