Fluorine-containing polymer having fluorine-containing norbornene derivative unit
    7.
    发明专利
    Fluorine-containing polymer having fluorine-containing norbornene derivative unit 有权
    含有含氟的异丁烯衍生物单元的含氟聚合物

    公开(公告)号:JP2008308691A

    公开(公告)日:2008-12-25

    申请号:JP2008172180

    申请日:2008-07-01

    摘要: PROBLEM TO BE SOLVED: To provide a material for a chemically amplifying type photoresist for F 2 laser which possesses excellent transparency and improved dry etching resistance. SOLUTION: The material is a fluorine-containing polymer having a ring structure in a polymer main chain represented by the formula (13):-(M1)-(M2)-(N)- (wherein M1 is a structural unit derived from a norbornene derivative having a fluorine-containing alcohol structure; M2 is a structural unit obtained from a 2 or 3C ethylenic monomer which is a fluorine-containing monomer containing at least one fluorine atom; and N is a structural unit derived from a monomer copolymerizable with the structural units M1 and M2). The polymer includes 1-99 mol% of the structural unit M1, 1-99 mol% of the structural unit M2 and 0-98 mol% of the structural unit N and has a number average molecular weight of 500-1,000,000. COPYRIGHT: (C)2009,JPO&INPIT

    摘要翻译: 要解决的问题:为了提供具有优异的透明度和改善的耐干蚀刻性的用于F 2 SB 3激光的化学放大型光致抗蚀剂的材料。 解决方案:该材料是在由式(13)表示的聚合物主链中具有环结构的含氟聚合物: - (M1) - (M2) - (N) - (其中M1是结构单元 衍生自具有含氟醇结构的降冰片烯衍生物; M2是由含有至少一个氟原子的含氟单体的2或3C烯属单体获得的结构单元; N是衍生自单体的结构单元 可与结构单元M1和M2共聚)。 该聚合物包括1-99mol%的结构单元M1,1-99mol%的结构单元M2和0-98mol%的结构单元N,并且数均分子量为500-1,000,000。 版权所有(C)2009,JPO&INPIT