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公开(公告)号：US08681407B2
公开(公告)日：2014-03-25
申请号：US13581837
申请日：2011-03-24
申请人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
发明人： Soichiro Hiraoka , Kazuki Komaki , Masaki Tada , Shigeo Furukawa , Kiyomi Furukawa , Shinsuke Nakazono , Yuta Yamamoto , Toshiaki Horie
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , B81B3/0051 , B81B2201/042
摘要： An optical reflection element has a frame, a pair of meandering-shaped vibration elements, a mirror having a reflection surface, and a pair of protective beams. The vibration elements have their respective outer ends supported by confronting portions of an inside of the frame. The vibration elements support the mirror with respective inner ends thereof. The protective beams extend from the respective confronting portions of the inside of the frame toward the mirror with a predetermined space from the vibration elements and in parallel with a vibration axis of the vibration elements.
摘要翻译： 光反射元件具有框架，一对曲折形状的振动元件，具有反射面的反射镜和一对保护光束。 振动元件的各自的外端由框架内部的相对部分支撑。 振动元件支撑着镜子的相应内端。 保护梁从振动元件的预定空间与振动元件的振动轴线平行地从框架内部的相应的相对部分向镜子延伸。
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公开(公告)号：US08477398B2
公开(公告)日：2013-07-02
申请号：US13264530
申请日：2010-05-10
IPC分类号： G02B26/08
CPC分类号： G02B26/0833 , G02B27/01 , G02B27/017 , G02B2027/0147
摘要： An optical reflection element has a frame-shaped supporting body, a first oscillator and a second oscillator each having a meander shape, and a mirror portion. A line segment connecting a joining position between the mirror portion and the first oscillator to a joining position between the supporting body and the first oscillator, and a line segment connecting a joining position of the mirror portion and the second oscillator to a joining position of the supporting body and the second oscillator cross a mirror portion central axis. As one illustrative condition to be satisfied, an outer circumference of at least any one of turn portions of the first oscillator and the second oscillator is deviated from a first end portion axis that is parallel to the mirror portion central axis and extends along a first side of the mirror portion.
摘要翻译： 光反射元件具有框形支撑体，第一振荡器和第二振荡器，每个具有曲折形状和反射镜部分。 将反射镜部分和第一振荡器之间的接合位置连接到支撑体和第一振荡器之间的接合位置的线段，以及将镜部分和第二振荡器的接合位置连接到第二振荡器的接合位置的线段 支撑体和第二振荡器穿过反射镜部分中心轴线。 作为要满足的一个说明性条件，第一振荡器和第二振荡器的至少任一个的旋转部分的外圆周与第一端部轴线偏离，第一端部轴线平行于反射镜部分中心轴线并且沿着第一侧面 的镜部分。
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3.发明授权Optical reflection element with drive and monitor elements separated by a separation groove 有权具有驱动和监视元件的光学反射元件由分隔槽分隔开公开(公告)号：US08462411B2
公开(公告)日：2013-06-11
申请号：US13130150
申请日：2009-11-18
CPC分类号： G02B26/0858 , G02B26/101
摘要： An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.
摘要翻译： 光反射元件包括镜部分和耦合到镜部分的振荡器。 振荡器包括基座，绝缘层，驱动元件和监视元件。 绝缘层形成在基座上。 驱动元件和监视元件形成在绝缘层上，并通过分隔槽相互分离。 驱动元件和监视元件中的每一个包括在绝缘层上依次形成的下电极层，压电层和上电极层。 监视器元件具有高检测精度，允许光反射元件以高精度执行自激驱动。
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公开(公告)号：US08273302B2
公开(公告)日：2012-09-25
申请号：US12532908
申请日：2008-05-14
IPC分类号： B01D21/28
CPC分类号： B01D21/283 , B01L3/502753 , B01L3/502761 , B01L2200/0636 , B01L2200/0652 , B01L2300/0816 , B01L2400/0436
摘要： A component separating device includes a flow channel, an acoustic wave generator for generating an acoustic wave in the flow channel, a first inlet channel for introducing a fist solution containing solid particles into the flow channel, a second inlet channel for introducing a second solution, and outlet channels for discharging a solution from the flow channel. A density grade generator is provided at the first inlet channel for forming a density grade of the solid particles. This component separating device extracts the solid particles into a high-purity solution at a high collecting rate.
摘要翻译： 元件分离装置包括流路，用于在流路中产生声波的声波发生器，用于将含有固体粒子的第一溶液引入流路的第一入口通道，用于引入第二溶液的第二入口通道， 以及用于从流动通道排出溶液的出口通道。 在第一入口通道处设置密度级发生器，用于形成固体颗粒的密度等级。 该组分分离装置以高收集速率将固体颗粒提取成高纯度溶液。
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公开(公告)号：US20100219488A1
公开(公告)日：2010-09-02
申请号：US12676826
申请日：2008-09-04
CPC分类号： G01N33/48728 , B81B2201/0214 , B81B2201/052 , B81C1/00206 , Y10T428/23943
摘要： A silicon structure of the present invention is provided with a silicon substrate (1) to become a base, and a plurality of fibrous projections (2) made of silicon dioxide and directly joined to a silicon-made surface (1a) of the silicon substrate (1). By arbitrarily constructing an area where these fibrous projections (2) are formed in a predetermined area, it is possible to render the area to have at least either hydrophilicity or water retentivity, so as to provide a silicon structure useful for a variety of devices.
摘要翻译： 本发明的硅结构设置有成为基底的硅基板（1）和由二氧化硅制成的直接接合到硅基板的硅制表面（1a）的多个纤维突起（2） （1）。 通过任意构造这些纤维状突起（2）形成在预定区域的区域，可以使该区域具有至少亲水性或保水性，以提供可用于各种装置的硅结构。
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6.发明申请DEVICE FOR MEASURING CELLULAR POTENTIAL, SUBSTRATE USED FOR THE SAME AND METHOD OF MANUFACTURING SUBSTRATE FOR DEVICE FOR MEASURING CELLULAR POTENTIAL 审中-公开用于测量细胞电位的装置，用于其的底物和制造用于测量细胞潜能的装置的基板的方法公开(公告)号：US20100019756A1
公开(公告)日：2010-01-28
申请号：US11913116
申请日：2007-05-11
申请人： Soichiro Hiraoka , Masaya Nakatani , Hiroshi Ushio
发明人： Soichiro Hiraoka , Masaya Nakatani , Hiroshi Ushio
CPC分类号： G01N33/5438 , G01N33/48728 , G01N33/5005 , Y10T428/24273 , Y10T428/24298
摘要： A device for measuring cellular potential includes a substrate, a first electrode tank, a first electrode, a second electrode tank and a second electrode. The first electrode tank and the second electrode tank are disposed on the upper side and lower side of the substrate, respectively. The first electrode is disposed inside the first electrode tank and the second electrode is disposed inside the second electrode tank. The substrate includes a single crystal plate having a diamond structure with (100) plane orientation or (110) plane orientation. The substrate has a first surface provided with a depression and a second surface facing this first surface. From the depression to the second surface, a through-hole is formed. The depression has an inner wall extending from the opening of the through-hole to the outer periphery, curving and being connected to the first surface.
摘要翻译： 用于测量细胞电位的装置包括基板，第一电极槽，第一电极，第二电极槽和第二电极。 第一电极槽和第二电极槽分别设置在基板的上侧和下侧。 第一电极设置在第一电极槽内，第二电极设置在第二电极槽的内部。 衬底包括具有（100）面取向或（110）面取向的金刚石结构的单晶板。 衬底具有设置有凹部的第一表面和面向该第一表面的第二表面。 从凹陷到第二表面，形成通孔。 凹陷具有从通孔的开口延伸到外周的内壁，弯曲并连接到第一表面。
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7.发明申请DEVICE FOR CELLULAR ELECTROPHYSIOLOGY SENSOR, CELLULAR ELECTROPHYSIOLOGY SENSOR USING THE DEVICE, AND METHOD FOR MANUFACTURING THE CELLULAR ELECTROPHYSIOLOGY SENSOR DEVICE 有权用于细胞电生理学传感器的装置，使用该装置的细胞电生理学传感器以及用于制造细胞电生理学传感器装置的方法公开(公告)号：US20090281410A1
公开(公告)日：2009-11-12
申请号：US12301307
申请日：2007-06-27
IPC分类号： A61B5/04
CPC分类号： G01N33/48728
摘要： A leakage current on a side surface of a sensor chip of a cell electrophysiological sensor is reduced. In order to do so, a sensor chip having a continuity hole and a chip holding part covering the side surface of the sensor chip are provided. The sensor chip includes silicon as a main component, and the chip holding part is made of glass. The chip holding part is adhesively bonded to the side surface of the sensor chip by glass welding. Thus, in the cell electrophysiological sensor device of the present invention, the airtightness between the side surface of the sensor chip and the chip holding part is improved, so that a leakage current can be reduced.
摘要翻译： 细胞电生理传感器的传感器芯片的侧表面的漏电流减少。 为了这样做，提供了具有连续孔的传感器芯片和覆盖传感器芯片的侧表面的芯片保持部分。 传感器芯片包括硅作为主要部件，芯片保持部分由玻璃制成。 通过玻璃焊接将芯片保持部粘合到传感器芯片的侧面。 因此，在本发明的细胞电生理传感器装置中，传感器芯片的侧面与芯片保持部之间的气密性提高，能够降低漏电流。
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8.发明申请公开(公告)号：US20090239033A1
公开(公告)日：2009-09-24
申请号：US12359426
申请日：2009-01-26
申请人： Masaya Nakatani , Soichiro Hiraoka , Hiroshi Ushio , Akiyoshi Oshima , Hiroaki Oka , Fumiaki Emoto
发明人： Masaya Nakatani , Soichiro Hiraoka , Hiroshi Ushio , Akiyoshi Oshima , Hiroaki Oka , Fumiaki Emoto
CPC分类号： G01N33/48728 , Y10T428/24322
摘要： A diaphragm is formed by etching a substrate. This substrate has a first surface provided with a depression by isotropic dry etching, and a second surface opposite the first surface. Furthermore, a through-hole is formed from the depression to the second surface by anisotropic dry etching. The depression and the through-hole are formed by using one resist mask. The depression has a hemispherical shape or a semi-elliptical spherical shape.
摘要翻译： 通过蚀刻基板形成隔膜。 该基板具有通过各向同性干蚀刻设置有凹部的第一表面和与第一表面相对的第二表面。 此外，通过各向异性干蚀刻从凹陷形成通孔到第二表面。 通过使用一个抗蚀剂掩模形成凹陷和通孔。 凹陷具有半球形或半椭圆形球形。
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9.发明授权公开(公告)号：US09261669B2
公开(公告)日：2016-02-16
申请号：US13978386
申请日：2012-02-16
CPC分类号： G02B7/1821 , B81B3/0043 , B81B3/007 , B81B2203/0109 , B81B2203/0163 , G02B26/0858 , G02B26/101 , G02B26/105 , H01L41/081 , H01L41/0953 , H02N2/10 , H02N2/108
摘要： A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.
摘要翻译： 具有曲折形状的振动元件包括振动梁和设置在振动梁上的压电致动器。 振动梁具有大致形成为多个连续折弯形状的曲折形状。 振动梁包括多个折弯单元和耦合到折弯单元的多个联接单元，并且联接单元和下降单元交替地设置。 压电致动器包括设置在振动梁上的下电极，设置在下电极上的压电膜和设置在压电膜上的上电极。 不存在压电膜的不存在区域设置在每个折射单元的内周的中点附近和曲率变化点的附近中的至少一个中，其中曲率 每个倒下的形状的内圆周都会发生变化。
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10.发明申请公开(公告)号：US20130271804A1
公开(公告)日：2013-10-17
申请号：US13978386
申请日：2012-02-16
CPC分类号： G02B7/1821 , B81B3/0043 , B81B3/007 , B81B2203/0109 , B81B2203/0163 , G02B26/0858 , G02B26/101 , G02B26/105 , H01L41/081 , H01L41/0953 , H02N2/10 , H02N2/108
摘要： A vibrating element having a meandering shape includes a vibrating beam and a piezoelectric actuator provided on the vibrating beam. The vibrating beam has a meandering-shape substantially formed into the plurality of continuous turned-down shapes. The vibrating beam includes the plurality of turned-down units and the plurality of coupling units coupled to the turned-down units, and the coupling units and the turned-down units are alternately disposed. The piezoelectric actuator includes a lower electrode provided on the vibrating beam, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A non-existence region where the piezoelectric film does not exist is provided in at least one of a neighborhood of a midpoint of an inner circumference of each of the turned-down units and a neighborhood of a curvature changing point in which a curvature of the inner circumference of each of the turned-down shapes changes.
摘要翻译： 具有曲折形状的振动元件包括振动梁和设置在振动梁上的压电致动器。 振动梁具有大致形成为多个连续折弯形状的曲折形状。 振动梁包括多个折弯单元和耦合到折弯单元的多个联接单元，并且联接单元和下降单元交替地设置。 压电致动器包括设置在振动梁上的下电极，设置在下电极上的压电膜和设置在压电膜上的上电极。 不存在压电膜的不存在区域设置在每个折射单元的内周的中点附近和曲率变化点的附近中的至少一个中，其中曲率 每个倒下的形状的内圆周都会发生变化。
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