公开(公告)号：US06691571B2

公开(公告)日：2004-02-17

申请号：US10258218

申请日：2003-05-29

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01C1900

CPC classification number: G01C19/5747

Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

Abstract translation: 描述了布置在基板的表面上的具有科里奥利元件的旋转速率传感器。 诱导科里奥利元件平行于第一轴振荡。 响应于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 提供证明元件以证明偏转。

公开(公告)号：US06187607B1

公开(公告)日：2001-02-13

申请号：US09292282

申请日：1999-04-15

Applicant: Michael Offenberg ,  Udo Bischof ,  Markus Lutz

Inventor： Michael Offenberg ,  Udo Bischof ,  Markus Lutz

IPC: H01L21302

CPC classification number: G01C19/5769 ,  B81B2201/025 ,  B81B2203/0136 ,  B81C1/00571 ,  B81C2201/014 ,  B81C2201/053

Abstract: A manufacturing method for a micromechanical component, and in particular for a micromechanical rotation rate sensor, which has a supporting first layer, an insulating second layer that is arranged on the first layer, and a conductive third layer that is arranged on the second layer. The method includes the following steps: provide the second layer, in the form of patterned first and second insulation regions, on the first layer; provide a first protective layer on an edge region of the first insulation regions and on a corresponding boundary region of the first layer; provide the third layer on the structure resulting from the previous steps; pattern out a structure of conductor paths running on the first insulation regions, and a functional structure of the micromechanical component above the second insulation regions, from the third layer; and remove the second layer in the second insulation regions, the second layer being protected in the first insulation regions by the first protective layer in such a way that it is essentially not removed there.

Abstract translation: 具有支撑第一层，布置在第一层上的绝缘第二层和布置在第二层上的导电第三层的微机械组件的制造方法，特别是用于微机械转速传感器的制造方法。 该方法包括以下步骤：在第一层上提供呈图案化的第一和第二绝缘区域的形式的第二层; 在所述第一绝缘区域的边缘区域和所述第一层的对应边界区域上提供第一保护层; 提供由上述步骤导致的结构上的第三层; 形成在第一绝缘区域上运行的导体路径的结构以及来自第三层的第二绝缘区域上方的微机械部件的功能结构; 并且在所述第二绝缘区域中移除所述第二层，所述第二层在所述第一绝缘区域中被所述第一保护层保护，使得其基本上不被去除。

公开(公告)号：US07270868B2

公开(公告)日：2007-09-18

申请号：US10618791

申请日：2003-07-14

Applicant: Thorsten Pannek ,  Udo Bischof ,  Silvia Kronmueller ,  Jens Frey ,  Ulf Wilhelm

Inventor： Thorsten Pannek ,  Udo Bischof ,  Silvia Kronmueller ,  Jens Frey ,  Ulf Wilhelm

IPC: B32B3/00 ,  B32B3/10 ,  B32B3/18 ,  H01L21/00 ,  H01L29/84

CPC classification number: B81C1/00595 ,  Y10T428/24612 ,  Y10T428/24628

Abstract: A component having a surface micromechanical structure containing both movable elements and immovable elements, and a method of manufacturing same are described. The surface micromechanical structure of the component is produced in a functional layer, which is connected to a substrate via at least one electrically non-conductive first insulation layer and at least one first sacrificial layer. The movable elements of the surface micromechanical structure are exposed by removing the first sacrificial layer. The first insulation layer is made of a material which is not substantially attacked by the process of removing the first sacrificial layer. Thus the removal of the sacrificial layer may be limited in a design-controlled manner. At the same time, a reliable electrical insulation of the surface micromechanical structure with respect to the substrate of the component and a reliable mechanical fastening of the immovable elements of the surface micromechanical structure to the substrate are ensured.

Abstract translation: 描述了具有包含可移动元件和不可移动元件的表面微机械结构的部件及其制造方法。 组件的表面微机械结构在功能层中产生，功能层通过至少一个不导电的第一绝缘层和至少一个第一牺牲层连接到基板。 通过去除第一牺牲层来暴露表面微机械结构的可移动元件。 第一绝缘层由不会被去除第一牺牲层的过程基本上受到攻击的材料制成。 因此，可以以设计控制的方式限制牺牲层的去除。 同时，确保表面微机械结构相对于部件的基板的可靠的电绝缘以及表面微机械结构的不动元件到基板的可靠的机械紧固。

公开(公告)号：US07134337B2

公开(公告)日：2006-11-14

申请号：US11328755

申请日：2006-01-09

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P9/04

CPC classification number: G01C19/5747

Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

公开(公告)号：US06905615B2

公开(公告)日：2005-06-14

申请号：US10057455

申请日：2002-01-24

Applicant: Frank Fischer ,  Wilhelm Frey ,  Udo Bischof ,  Lars Metzger

Inventor： Frank Fischer ,  Wilhelm Frey ,  Udo Bischof ,  Lars Metzger

IPC: B81B3/00 ,  B81C1/00 ,  C23F1/00 ,  B44C1/22

CPC classification number: B81C1/00896 ,  B81C2201/053

Abstract: A method of manufacturing a micromechanical component has the steps: providing a substrate having a front side and a back side; structuring the front side of the substrate; at least partially covering the structured front side of the substrate with a protective layer containing germanium; structuring the back of the substrate; and at least partially removing the protective layer containing germanium from the structured front side of the substrate.

Abstract translation: 微机械部件的制造方法具有以下步骤：提供具有正面和背面的基板; 构造衬底的前侧; 至少部分地用包含锗的保护层覆盖所述基板的结构化正面; 构造衬底的背面; 并且从所述基板的结构化正面至少部分地去除含有锗的保护层。

公开(公告)号：US06752017B2

公开(公告)日：2004-06-22

申请号：US10258339

申请日：2003-03-19

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P1514

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

Abstract translation: 一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴振荡。 由于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 第一和第二科里奥利元件通过被配置为在第一轴线和第二轴线中屈服的弹簧联接。 因此，对于同相和反相振荡，两轴的振荡频率不同。

公开(公告)号：US6117701A

公开(公告)日：2000-09-12

申请号：US907601

申请日：1997-08-08

Applicant: Nicholas Buchan ,  Horst Muenzel ,  Franz Laermer ,  Michael Offenberg ,  Udo Bischof ,  Markus Lutz

Inventor： Nicholas Buchan ,  Horst Muenzel ,  Franz Laermer ,  Michael Offenberg ,  Udo Bischof ,  Markus Lutz

IPC: G01C19/56 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/08 ,  H01L29/84 ,  H01L41/08 ,  H01L21/00 ,  G01P15/00

CPC classification number: G01C19/5755 ,  G01C19/5769 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A rate-of-rotation sensor includes a three-layer system. The rate-of-rotation sensor and the conductor traces are patterned out of the third layer. The conductor traces are electrically insulated (isolated) by cutouts from other regions of the third layer and by a second electrically insulating layer from a first layer. Thus, a simple electrical contacting (configuration) is achieved that is patterned out of a three-layer system. Since the same etching process is used for the first and the third layer, an especially efficient manufacturing is possible.

Abstract translation: 旋转速度传感器包括三层系统。 转速传感器和导体迹线从第三层图案化。 导体迹线通过从第三层的其它区域的切口和与第一层的第二电绝缘层的切口电绝缘（隔离）。 因此，实现了由三层系统构图的简单的电接触（构造）。 由于在第一和第三层使用相同的蚀刻工艺，所以可以进行特别有效的制造。

公开(公告)号：US08304845B2

公开(公告)日：2012-11-06

申请号：US12086893

申请日：2006-11-24

Applicant: Udo Bischof ,  Holger Hoefer ,  Volker Schmitz ,  Axel Grosse ,  Lutz Mueller ,  Ralf Hausner

Inventor： Udo Bischof ,  Holger Hoefer ,  Volker Schmitz ,  Axel Grosse ,  Lutz Mueller ,  Ralf Hausner

IPC: H01L29/84

CPC classification number: B81C1/00293 ,  B81C2203/0145

Abstract: An integrated component having a substrate, the substrate having a cavity which surrounds a mechanical structure. The cavity is filled by a fluid of a specific composition under a specific pressure, and the mechanical properties of the mechanical structure are influenced by the fluid.

Abstract translation: 具有基板的集成部件，该基板具有围绕机械结构的空腔。 空腔由特定组成的流体在特定压力下填充，机械结构的机械性能受到流体的影响。

公开(公告)号：US07316161B2

公开(公告)日：2008-01-08

申请号：US10471832

申请日：2002-09-25

Applicant: Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

Inventor： Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

IPC: G01C19/00

CPC classification number: G01C19/5747

Abstract: A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.

Abstract translation: 提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面之上; 所述科里奥利元件能够被诱导以平行于第一轴线（X）振动; 基于在第二轴线（Y）上的科里奥利力，基本上垂直于第一轴线（X）提供可检测的科里奥利元件的偏移; 所述第一和第二轴线（X，Y）平行于所述基板的表面设置，其中设置有力传递装置，所述装置被提供以在所述基板和所述科里奥利元件之间传递动态力效应。

公开(公告)号：US20060107738A1

公开(公告)日：2006-05-25

申请号：US11328755

申请日：2006-01-09

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01P15/08

CPC classification number: G01C19/5747

Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

Abstract translation: 本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。 微机电转速传感器的示例性实施例可以具有激活装置，第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。 微机电转速传感器的示例性实施例可以具有检测装置，通过该检测装置，第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测 的相应的科里奥利力量。 第一轴线和第二轴线可以平行于基板的表面延伸。 检测装置可以具有第一检测质量装置和第二检测质量装置。 当第一科里奥利质量元件，第二科里奥利质量元件，第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。