公开(公告)号：US6117701A

公开(公告)日：2000-09-12

申请号：US907601

申请日：1997-08-08

申请人： Nicholas Buchan ,  Horst Muenzel ,  Franz Laermer ,  Michael Offenberg ,  Udo Bischof ,  Markus Lutz

发明人： Nicholas Buchan ,  Horst Muenzel ,  Franz Laermer ,  Michael Offenberg ,  Udo Bischof ,  Markus Lutz

IPC分类号： G01C19/56 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/08 ,  H01L29/84 ,  H01L41/08 ,  H01L21/00 ,  G01P15/00

CPC分类号： G01C19/5755 ,  G01C19/5769 ,  G01P15/0802 ,  G01P2015/0814

摘要： A rate-of-rotation sensor includes a three-layer system. The rate-of-rotation sensor and the conductor traces are patterned out of the third layer. The conductor traces are electrically insulated (isolated) by cutouts from other regions of the third layer and by a second electrically insulating layer from a first layer. Thus, a simple electrical contacting (configuration) is achieved that is patterned out of a three-layer system. Since the same etching process is used for the first and the third layer, an especially efficient manufacturing is possible.

摘要翻译： 旋转速度传感器包括三层系统。 转速传感器和导体迹线从第三层图案化。 导体迹线通过从第三层的其它区域的切口和与第一层的第二电绝缘层的切口电绝缘（隔离）。 因此，实现了由三层系统构图的简单的电接触（构造）。 由于在第一和第三层使用相同的蚀刻工艺，所以可以进行特别有效的制造。

公开(公告)号：US6140709A

公开(公告)日：2000-10-31

申请号：US306181

申请日：1999-05-06

申请人： Horst Muenzel ,  Michael Offenberg ,  Udo Bischof ,  Eckhard Graf ,  Markus Lutz

发明人： Horst Muenzel ,  Michael Offenberg ,  Udo Bischof ,  Eckhard Graf ,  Markus Lutz

IPC分类号： H01L23/12 ,  B81B7/00 ,  B81C1/00 ,  G01C19/56 ,  G01P15/08 ,  H01L21/60 ,  H01L23/48 ,  H01L29/40 ,  H01L25/52

CPC分类号： G01P15/0802 ,  B81C1/00301 ,  B81C1/00801 ,  G01C19/56 ,  H01L24/02 ,  B81B2207/07 ,  B81B2207/097 ,  B81C2201/014 ,  B81C2201/053 ,  H01L2224/0401 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01033 ,  H01L2924/01068 ,  H01L2924/01072 ,  H01L2924/01074

摘要： A bonding pad structure, in particular for a micromechanical sensor, includes a substrate, an electrically insulating sacrificial layer provided on the substrate, a patterned conductor path layer buried in the sacrificial layer, a contact hole provided in the sacrificial layer, and a bonding pad base, composed of an electrically conductive material. The bonding pad base has a first region extending over the sacrificial layer, and a second layer in contact with the conductor path region and extending through the contact hole. A protective layer is provided at least temporarily on the sacrificial layer in a specific region beneath and around the bonding pad base to prevent underetching of the sacrificial layer beneath the bonding pad base during etching of the sacrificial layer in such a way that the substrate and/or the conductor path is exposed.

摘要翻译： 特别是用于微机械传感器的焊盘结构包括衬底，设置在衬底上的电绝缘牺牲层，埋在牺牲层中的图案化导体通路层，设置在牺牲层中的接触孔，以及焊盘 基底，由导电材料组成。 焊盘基部具有在牺牲层上延伸的第一区域，以及与导体路径区域接触并延伸穿过接触孔的第二层。 保护层至少临时地设置在接合焊盘基座的下面和周围的特定区域中的牺牲层上，以防止牺牲层在蚀刻牺牲层期间的牺牲层的去抛光，使得衬底和/ 或导体路径露出。

公开(公告)号：US06187607B1

公开(公告)日：2001-02-13

申请号：US09292282

申请日：1999-04-15

申请人： Michael Offenberg ,  Udo Bischof ,  Markus Lutz

发明人： Michael Offenberg ,  Udo Bischof ,  Markus Lutz

IPC分类号： H01L21302

CPC分类号： G01C19/5769 ,  B81B2201/025 ,  B81B2203/0136 ,  B81C1/00571 ,  B81C2201/014 ,  B81C2201/053

摘要： A manufacturing method for a micromechanical component, and in particular for a micromechanical rotation rate sensor, which has a supporting first layer, an insulating second layer that is arranged on the first layer, and a conductive third layer that is arranged on the second layer. The method includes the following steps: provide the second layer, in the form of patterned first and second insulation regions, on the first layer; provide a first protective layer on an edge region of the first insulation regions and on a corresponding boundary region of the first layer; provide the third layer on the structure resulting from the previous steps; pattern out a structure of conductor paths running on the first insulation regions, and a functional structure of the micromechanical component above the second insulation regions, from the third layer; and remove the second layer in the second insulation regions, the second layer being protected in the first insulation regions by the first protective layer in such a way that it is essentially not removed there.

摘要翻译： 具有支撑第一层，布置在第一层上的绝缘第二层和布置在第二层上的导电第三层的微机械组件的制造方法，特别是用于微机械转速传感器的制造方法。 该方法包括以下步骤：在第一层上提供呈图案化的第一和第二绝缘区域的形式的第二层; 在所述第一绝缘区域的边缘区域和所述第一层的对应边界区域上提供第一保护层; 提供由上述步骤导致的结构上的第三层; 形成在第一绝缘区域上运行的导体路径的结构以及来自第三层的第二绝缘区域上方的微机械部件的功能结构; 并且在所述第二绝缘区域中移除所述第二层，所述第二层在所述第一绝缘区域中被所述第一保护层保护，使得其基本上不被去除。

公开(公告)号：US06368885B1

公开(公告)日：2002-04-09

申请号：US09641438

申请日：2000-08-17

申请人： Michael Offenberg ,  Udo Bischof

发明人： Michael Offenberg ,  Udo Bischof

IPC分类号： G01R3126

CPC分类号： G01C19/5769 ,  B81C1/00801 ,  B81C2201/053 ,  G01P15/0802 ,  Y10S438/902 ,  Y10S438/928 ,  Y10S438/976

摘要： A method for manufacturing a micromechanical component, in particular, a surface-micromechanical yaw sensor, includes the following steps: providing a substrate having a front side and a back side; forming a micromechanical pattern on the front side; applying a protective layer on the micromechanical pattern on the front side; forming a micromechanical pattern on the back side, a resting on the micromechanical pattern on the front side taking place at least temporarily; removing the protective layer on the front side; and optionally further processing the micromechanical pattern on the front side and/or the micromechanical pattern on the back side.

摘要翻译： 一种用于制造微机械部件，特别是表面微机械偏航传感器的方法包括以下步骤：提供具有前侧和后侧的基板; 在前侧形成微机械图案; 在前侧的微机械图案上施加保护层; 在后侧形成微机械图案，其至少暂时发生在正面上的微机械图案上; 去除前侧的保护层; 并且可选地进一步处理前侧上的微机械图案和/或后侧的微机械图案。

公开(公告)号：US06691571B2

公开(公告)日：2004-02-17

申请号：US10258218

申请日：2003-05-29

申请人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

发明人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC分类号： G01C1900

CPC分类号： G01C19/5747

摘要： An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

摘要翻译： 描述了布置在基板的表面上的具有科里奥利元件的旋转速率传感器。 诱导科里奥利元件平行于第一轴振荡。 响应于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 提供证明元件以证明偏转。

公开(公告)号：US20060107738A1

公开(公告)日：2006-05-25

申请号：US11328755

申请日：2006-01-09

申请人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

发明人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC分类号： G01P15/08

CPC分类号： G01C19/5747

摘要： An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

摘要翻译： 本发明的示例性实施例创建了具有第一科里奥利质量元件和可位于衬底表面上的第二科里奥利质量元件的微机械转速传感器。 微机电转速传感器的示例性实施例可以具有激活装置，第一科里奥利质量元件和第二科里奥利质量元件可以通过该激活装置具有沿第一轴线激活的振动。 微机电转速传感器的示例性实施例可以具有检测装置，通过该检测装置，第一科里奥利质量元件和第二科里奥利元件的偏转能够沿着垂直于第一轴线的第二轴线被检测 的相应的科里奥利力量。 第一轴线和第二轴线可以平行于基板的表面延伸。 检测装置可以具有第一检测质量装置和第二检测质量装置。 当第一科里奥利质量元件，第二科里奥利质量元件，第一检测质量装置和第二检测质量装置的重心在静止时可以在共同的重心处重合。

公开(公告)号：US06705164B2

公开(公告)日：2004-03-16

申请号：US10258336

申请日：2003-03-19

申请人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

发明人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC分类号： G01C1900

CPC分类号： G01C19/5747

摘要： A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

摘要翻译： 一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在 在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。

公开(公告)号：US07134337B2

公开(公告)日：2006-11-14

申请号：US11328755

申请日：2006-01-09

申请人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

发明人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC分类号： G01P9/04

CPC分类号： G01C19/5747

摘要： An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

公开(公告)号：US06752017B2

公开(公告)日：2004-06-22

申请号：US10258339

申请日：2003-03-19

申请人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

发明人： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC分类号： G01P1514

CPC分类号： G01C19/5747

摘要： A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.

摘要翻译： 一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴振荡。 由于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 第一和第二科里奥利元件通过被配置为在第一轴线和第二轴线中屈服的弹簧联接。 因此，对于同相和反相振荡，两轴的振荡频率不同。

公开(公告)号：US20090174148A1

公开(公告)日：2009-07-09

申请号：US12086893

申请日：2006-11-24

申请人： Udo Bischof ,  Holger Hoefer ,  Volker Schmitz ,  Axel Grosse ,  Lutz Mueller ,  Ralf Hausner

发明人： Udo Bischof ,  Holger Hoefer ,  Volker Schmitz ,  Axel Grosse ,  Lutz Mueller ,  Ralf Hausner

IPC分类号： F16J15/02

CPC分类号： B81C1/00293 ,  B81C2203/0145

摘要： An integrated component having a substrate, the substrate having a cavity which surrounds a mechanical structure. The cavity is filled by a fluid of a specific composition under a specific pressure, and the mechanical properties of the mechanical structure are influenced by the fluid.

摘要翻译： 具有基板的集成部件，该基板具有围绕机械结构的空腔。 空腔由特定组成的流体在特定压力下填充，机械结构的机械性能受到流体的影响。