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1.发明授权Control system for a linear actuator including magnetic bearings for levitating a robot arm 失效用于线性致动器的控制系统，包括用于悬浮机器人臂的磁性轴承
公开(公告)号：US5720010A
公开(公告)日：1998-02-17
申请号：US699342
申请日：1996-08-19
IPC分类号： B25J13/00 , B25J9/18 , B25J18/02 , B25J19/00 , F16C32/04 , F16C39/06 , G05B19/19 , H02P25/06 , G05B15/00 , G05B19/00
CPC分类号： F16C32/0444 , G05B19/19 , F16C2300/62 , G05B2219/45083 , G05B2219/49271
摘要： A control system for controlling a linear actuator including magnetic bearings for levitating a robot arm and a pulse motor for linearly driving the arm in a non-contact manner is disclosed, which comprises a displacement detection unit including displacement sensors, first and second calculation units, moving amount detection unit and adding circuit. The displacement detection unit detects displacement values of the arm from a reference posture, the first calculation unit calculates guiding (y), levitation (z), roll (p), pitching (q), and yaw (r) control current values in response to the displacement values and provides guiding, levitation, roll, pitching, and yaw control current signals (, , , , ). The moving amount detecting circuit detects a moving amount (X.sub.0) of the arm from a reference position in response to an operation of the pulse motor, and provides a compensation current value (.DELTA.Iq") proportional to the moving amount, and the adding circuit adds the compensation current value (.DELTA.Iq") to the pitching control current signal (). The second calculation unit, in response to the guiding, levitation, roll and yaw control current signals (, , , ) and the added pitching control current signal (+.DELTA.Iq"), calculates drive current control values to compensate drive current flowing through the magnetic bearings.
摘要翻译： 公开了一种用于控制线性致动器的控制系统，包括用于悬浮机器人臂的磁轴承和用于以非接触方式线性驱动臂的脉冲电机，其包括位移检测单元，其包括位移传感器，第一和第二计算单元， 移动量检测单元和加法电路。 位移检测单元从参考姿势检测臂的位移值，第一计算单元计算响应中的引导（y），悬浮（z），滚动（p），俯仰（q）和偏航（r）控制电流值 提供位移值，并提供引导，悬挂，滚动，俯仰和偏航控制电流信号（+ Z，+ Z，+ Z，+ Z，+ Z）。 移动量检测电路响应于脉冲电动机的操作从参考位置检测臂的移动量（X0），并且提供与移动量成比例的补偿电流值（DELTA Iq“），并且添加 电路将补偿电流值（DELTA Iq“）添加到俯仰控制电流信号（+ Z）。 第二计算单元响应于引导，悬挂，转向和偏转控制电流信号（+ Z，+ Z，+ Z，+ Z）和增加的俯仰控制电流信号（+ Z + DELTA Iq“），计算 驱动电流控制值来补偿流经磁轴承的驱动电流。
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公开(公告)号：US5397212A
公开(公告)日：1995-03-14
申请号：US19678
申请日：1993-02-19
CPC分类号： H01L21/67766 , B25J9/041 , B25J9/123 , B25J9/126 , F16C32/0465 , H01L21/67742
摘要： A robot with no mechanically contacting components are suitable for use in special environments such as semiconductor manufacturing processes where dust and lubrication are matters of important concern. The robot has a linear actuator composed of magnetic bearings and a linear motor for moving a robot arm linearly without mechanical contact, and a rotary actuator composed of magnetic bearings and a rotary motor for rotating a body which supports the linear actuator, around the rotary actuator without mechanical contact.
摘要翻译： 没有机械接触部件的机器人适用于特殊环境，如半导体制造过程，其中灰尘和润滑是重要关注的问题。 机器人具有由磁性轴承构成的线性致动器和用于在不机械接触的情况下线性地移动机器人手臂的线性电动机，以及由磁性轴承和用于使支撑线性致动器的主体旋转的旋转电动机，围绕旋转致动器 无机械接触。
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公开(公告)号：US5223758A
公开(公告)日：1993-06-29
申请号：US665213
申请日：1991-03-05
申请人： Takashi Kataoka , Yuji Shirao , Daisuke Konno , Yoshio Sato , Yoichi Kanemitsu , Hideo Tsuboi , Shunichi Aiyoshizawa , Kazuyuki Kasahara
发明人： Takashi Kataoka , Yuji Shirao , Daisuke Konno , Yoshio Sato , Yoichi Kanemitsu , Hideo Tsuboi , Shunichi Aiyoshizawa , Kazuyuki Kasahara
CPC分类号： F16C32/044 , F16C17/02 , F16C17/107 , F16C25/045 , F16C32/0402 , F16C33/107 , H02K5/165 , H02K7/09
摘要： A spindle motor has a rotor supported by a stator through a thrust bearing and a radial bearing. At least the thrust bearing is a hydrodynamic bearing. The spindle motor is provided with a device for adjusting the thrust laod that is applied to the thrust bearing. The load adjusting device has an electromagnet that is provided on the stator and a permanent magnet that is provided on the rotor in opposing relation to the electromagnet. Either the repelling force or the attraction force, which acts between the electromagnet and the permanent magnet, is controlled by changing the current supplied to the electromagnet.
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4.发明授权Thin-film forming apparatus with magnetic bearings and a non-contact seal and drive 失效具有磁性轴承和非接触式密封和驱动的薄膜成型设备
公开(公告)号：US5630881A
公开(公告)日：1997-05-20
申请号：US289215
申请日：1994-08-12
申请人： Naoaki Ogure , Yoichi Kanemitsu
发明人： Naoaki Ogure , Yoichi Kanemitsu
IPC分类号： H01L21/205 , C23C16/458 , H01L21/31 , H01L21/683 , H01L21/687 , C23C16/00
CPC分类号： H01L21/68792 , C23C16/4584 , H01L21/6831
摘要： A thin-film forming device including a reaction chamber having an atmosphere different from that in the outside world, a susceptor rotatably disposed in the reaction chamber for mounting a substrate thereon to form a thin film thereon, and a nozzle disposed within the reaction chamber facing the susceptor for supplying a thin-film forming material on the substrate, the thin-film forming device comprises: a levitating means including magnetic bearings for non-contact support of the susceptor; and a driving means for rotating the susceptor at high speed, to thereby increase the rotational speed of the susceptor and the thin-film forming rate.
摘要翻译： 一种薄膜形成装置，包括具有与外界不同的气氛的反应室，可旋转地设置在反应室中的基座，用于在其上安装基板以在其上形成薄膜，以及设置在反应室内的喷嘴， 用于在基板上供给薄膜形成材料的基座，所述薄膜形成装置包括：悬浮装置，包括用于所述基座的非接触支撑的磁性轴承; 以及用于高速旋转基座的驱动装置，从而提高基座的旋转速度和薄膜形成速度。
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公开(公告)号：US5793598A
公开(公告)日：1998-08-11
申请号：US695850
申请日：1996-08-09
申请人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
发明人： Katsuhide Watanabe , Yoichi Kanemitsu , Takahide Haga , Kenichi Yano , Takayuki Mizuno , Ryuta Katamura
摘要： A magnetically levitated vibration damping apparatus includes a table having a flat board of a magnetic material, an electromagnetic actuator for applying magnetic attractive forces to the flat board to levitate the table, a displacement sensor for detecting relative displacement between the flat board and the electromagnetic actuator, an acceleration sensor for detecting absolute acceleration of the table, and a control system for controlling a current supplied to the electromagnetic actuator based on signals from the displacement sensor and the acceleration sensor according to a first control rule for controlling a gap between the flat board and the electromagnetic actuator based on the signal from the acceleration sensor and a second control rule for controlling vibrations of the table based on the signal from the acceleration sensor, the second control rule including stability control of relative displacement of the table.
摘要翻译： 一种磁悬浮减振装置，包括具有磁性材料的平板的工作台，用于向平板施加磁性吸引力以浮动工作台的电磁致动器，用于检测平板与电磁致动器之间的相对位移的位移传感器 ，用于检测工作台的绝对加速度的加速度传感器，以及用于根据用于控制平板之间的间隙的第一控制规则，根据来自位移传感器和加速度传感器的信号控制提供给电磁致动器的电流的控制系统 以及基于来自加速度传感器的信号的电磁致动器和用于基于来自加速度传感器的信号控制工作台的振动的第二控制规则，第二控制规则包括对工作台的相对位移的稳定性控制。
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公开(公告)号：US5765800A
公开(公告)日：1998-06-16
申请号：US724829
申请日：1996-10-02
IPC分类号： F16F15/023 , F16M13/00
CPC分类号： F16F15/0232
摘要： A vibration damping apparatus has a vibration-isolating table for placing an object thereon which is to be isolated from vibrations, an air spring mounted on an installation floor and supporting the vibration-isolating table for attenuating vibrations from the installation floor, an air pressure controller for controlling an air pressure of the air spring, a displacement sensor for detecting a relative displacement between the vibration-isolating table and the installation floor and supplying a signal indicative of the detected relative displacement to the air pressure controller, and a spring element acting between the vibration-isolating table and the installation floor for positioning the vibration-isolating table horizontally. An electromagnet is disposed between the vibration-isolating table and the installation floor for actively attenuating vibrations of the vibration-isolating table. The vibration damping apparatus is operated to position the vibration-isolating table horizontally by means of the spring elements, and vertically by means of the air spring.
摘要翻译： 减震装置具有用于放置要与振动隔离的物体的隔振台，安装在安装地板上的空气弹簧和支撑用于衰减来自安装地板的振动的防振台，空气压力控制器 用于控制所述空气弹簧的空气压力的位移传感器，用于检测所述防振台和所述安装地板之间的相对位移并将指示所述检测到的相对位移的信号提供给所述空气压力控制器的位移传感器;以及弹簧元件， 隔振台和用于水平定位防振台的安装地板。 电磁铁设置在防振台和安装地板之间，用于主动衰减隔振台的振动。 振动阻尼装置的作用是通过弹簧元件将隔振台水平放置，并通过空气弹簧垂直地定位。
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公开(公告)号：US5322369A
公开(公告)日：1994-06-21
申请号：US050727
申请日：1993-04-21
申请人： Tadashi Kataoka , Shunsuke Mimura , Yoichi Kanemitsu , Yoshiyuki Maruta , Tatsuo Hinata , Mamoru Suzuki , Manabu Toshimitsu , Shunichi Aiyoshizawa
发明人： Tadashi Kataoka , Shunsuke Mimura , Yoichi Kanemitsu , Yoshiyuki Maruta , Tatsuo Hinata , Mamoru Suzuki , Manabu Toshimitsu , Shunichi Aiyoshizawa
CPC分类号： F16C17/10 , F16C32/06 , F16C32/0611 , F16C39/00
摘要： A dynamic pressure bearing is provided with a moving side bearing member and a fixed side bearing member so as to support a rotor for rotation by generating a fluid dynamic pressure between the moving side bearing member and the fixed side bearing member. The dynamic pressure bearing includes a high-frequency exciting device for applying a high-frequency vibration to the fixed side bearing member at the time of at least one of start-up and shutdown of the rotor. In this way, both bearing members are kept almost free from contact with each other and a frictional resistance at start-up and/or shutdown is minimized.
摘要翻译： 动压轴承具有移动侧支承构件和固定侧支承构件，以便通过在移动侧支承构件和固定侧支承构件之间产生流体动压力来支撑转子来转动。 动压轴承包括在转子的起动和停止中的至少一个时对固定侧支承构件施加高频振动的高频励磁装置。 以这种方式，两个轴承构件保持几乎没有彼此接触，并且启动和/或停机时的摩擦阻力最小化。
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公开(公告)号：US4688989A
公开(公告)日：1987-08-25
申请号：US647150
申请日：1984-09-05
申请人： Hideki Kondo , Noburu Shimizu , Yoichi Kanemitsu
发明人： Hideki Kondo , Noburu Shimizu , Yoichi Kanemitsu
IPC分类号： F04D25/02 , F04D29/04 , F04D29/051 , F04D29/059 , F16C27/00 , F16C27/04 , F01D15/12
CPC分类号： F04D29/0513 , F04D25/02 , F04D29/059 , F04D29/668 , F16C27/04
摘要： A gas rotary machine of a type which is driven by a driving system with two parallel axes wherein a pinion shaft supporting a pinion is made as a flexible shaft and damper bearings including ball/roller bearings are employed to support the flexible shaft so that the whole machine is kept compact and the power required therefor is reduced.
摘要翻译： PCT No.PCT / JP84 / 00335 Sec。 371日期1984年9月5日第 102（e）1984年9月5日PCT PCT。1984年6月29日PCT公布。 公开号WO85 / 01328 日期：1985年3月28日。一种由具有两个平行轴线的驱动系统驱动的气体旋转机械，其中支撑小齿轮的小齿轮轴被制成柔性轴，并且采用包括滚珠/滚子轴承的阻尼器轴承来支撑 柔性轴使得整个机器保持紧凑并且所需的功率减小。
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公开(公告)号：US5641054A
公开(公告)日：1997-06-24
申请号：US362451
申请日：1995-03-07
申请人： Satoshi Mori , Masao Matsumura , Yoichi Kanemitsu , Takeshi Yoshioka , Masaaki Kajiyama , Fumio Kondo , Yuji Shirao , Masato Eguchi , Hiroyuki Shinozaki , Yukio Ikeda , Masayoshi Hirose , Masaru Nakaniwa , Norio Kimura , Katsuaki Usui , Katsuyuki Aoki
发明人： Satoshi Mori , Masao Matsumura , Yoichi Kanemitsu , Takeshi Yoshioka , Masaaki Kajiyama , Fumio Kondo , Yuji Shirao , Masato Eguchi , Hiroyuki Shinozaki , Yukio Ikeda , Masayoshi Hirose , Masaru Nakaniwa , Norio Kimura , Katsuaki Usui , Katsuyuki Aoki
IPC分类号： H01L21/00 , H01L21/677 , B65G35/00
CPC分类号： H01L21/67167 , H01L21/67184 , H01L21/67709 , H01L21/67736
摘要： A magnetic levitation conveyor apparatus has levitation electromagnets, linear motors, and displacement sensors which are disposed outside of a tunnel, and a carriage of simple structure which is movable in the tunnel. The carriage is of canned structure for preventing gases from being generated. The carriage of canned structure allows the tunnel to have a reduced cross-sectional area and to be filled with a highly purified atmosphere such as of a high vacuum. The tunnel has substantially orthogonal branches at a branched point. In the branched point, the carriage can move, while being lifted out of contact with the tunnel partition, with a directional change from a main conveyor passage into a branched conveyor passage. The magnetic levitation conveyor apparatus is highly practical as it can control the carriage to be lifted and moved as described above.
摘要翻译： PCT No.PCT / JP93 / 00930 Sec。 371日期：1995年3月7日 102（e）1995年3月7日PCT PCT 1993年7月6日PCT公布。 第WO94 / 01354号公报 日期1994年1月20日磁悬浮输送装置具有设置在隧道外部的悬浮电磁体，线性电动机和位移传感器，以及可在隧道中移动的简单结构的滑架。 滑架是用于防止产生气体的罐头结构。 罐头结构的支架允许隧道具有减小的横截面积，并且填充有高度净化的气氛，例如高真空。 隧道在分支点处具有大致正交的分支。 在分支点，托架可以在与主输送机通道分支输送通道的方向改变的同时被提升而不与隧道隔板接触。 磁悬浮输送装置是高度实用的，因为它可以如上所述地控制滑架被提升和移动。
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公开(公告)号：US5471802A
公开(公告)日：1995-12-05
申请号：US111438
申请日：1993-08-25
CPC分类号： F16F15/03
摘要： An electromagnetically suspended floating floor apparatus in which a floating floor on which machines are set up is suspended from an installation floor with electromagnetic actuators so that the floating floor is spatially separated from the installation floor whereby no vibration is transmitted to equipment on the floating floor. The floating floor apparatus comprises the floating floor suspended from the installation floor at a plurality of supporting points by electromagnetic actuators, a light emitting member, fixed to a beam or a pillar, which emits a horizontal light beam, and a photosensor fixed to the installation floor which outputs a position signal representing a position of incidence of the horizontal light beam to the electromagnetic actuators. On the basis of the position signal, the electromagnetic actuators control a vertical position of the floating floor.
摘要翻译： 一种电磁悬浮浮动地板装置，其中设置有机器的浮动地板从电磁致动器从安装地板悬挂，使得浮动地板在空间上与安装地板分离，从而没有振动传递到浮动地板上的设备。 浮动地板装置包括通过电磁致动器在多个支撑点处从安装地板悬吊的浮动地板，固定到发射水平光束的梁或柱的发光构件，以及固定到该装置的光电传感器 输出表示水平光束入射到电磁致动器的位置的位置信号。 基于位置信号，电磁致动器控制浮动地板的垂直位置。
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