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公开(公告)号:US10263151B2
公开(公告)日:2019-04-16
申请号:US15680977
申请日:2017-08-18
Applicant: GLOBALFOUNDRIES INC.
Inventor: Ajey P. Jacob , Srinivasa Banna , Deepak Nayak
IPC: H01L27/15 , H01L33/24 , H01L33/40 , H01L21/20 , H01L33/18 , H01L33/38 , H01L33/06 , H01L33/32 , H01L33/00 , H01L33/12 , H01L33/46 , H01L33/36 , H01L33/16
Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to light emitting diodes and methods of manufacture. The method includes: forming fin structures with a doped core region, on a substrate material; forming a first color emitting region by cladding the doped core region of a first fin structure of the fin structures, while protecting the doped core regions of a second fin structure and a third fin structure of the fin structures; forming a second color emitting region by cladding the doped core region of the second fin structure, while protecting the doped core regions of the first fin structure and the third fin structure; and forming a third color emitting region by cladding the doped core region of the third fin structure, while protecting the doped core regions of the first fin structure and the second fin structure.
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公开(公告)号:US10784402B2
公开(公告)日:2020-09-22
申请号:US16366811
申请日:2019-03-27
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Srinivasa Banna , Deepak Nayak
IPC: H01L29/06 , H01L31/00 , H01L33/06 , H01L33/00 , H01L33/32 , H01L33/30 , H01L27/15 , H01L33/42 , H01L33/44 , H01L33/62 , H01L33/24 , H01L25/16 , H01L33/18
Abstract: Methods of forming an integrated InGaN/GaN or AlInGaP/InGaP LED on Si CMOS for RGB colors and the resulting devices are provided. Embodiments include forming trenches having a v-shaped bottom through an oxide layer and a portion of a substrate; forming AlN or GaAs in the v-shaped bottom; forming a n-GaN or n-InGaP pillar on the AlN or GaAs through and above the first oxide layer; forming an InGaN/GaN MQW or AlInGaP/InGaP MQW over the n-GaN or n-InGaP pillar; forming a p-GaN or p-InGaP layer over the n-GaN pillar and InGaN/GaN MQW or the n-InGaP pillar and AlInGaP/InGaP MQW down to the first oxide layer; forming a TCO layer over the first oxide layer and the p-GaN or p-InGaP layer; forming a second oxide layer over the TCO layer; and forming a metal pad on the TCO layer above each n-GaN or n-InGaP pillar.
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公开(公告)号:US20190058087A1
公开(公告)日:2019-02-21
申请号:US15680977
申请日:2017-08-18
Applicant: GLOBALFOUNDRIES INC.
Inventor: Ajey P. Jacob , Srinivasa Banna , Deepak Nayak
Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to light emitting diodes and methods of manufacture. The method includes: forming fin structures with a doped core region, on a substrate material; forming a first color emitting region by cladding the doped core region of a first fin structure of the fin structures, while protecting the doped core regions of a second fin structure and a third fin structure of the fin structures; forming a second color emitting region by cladding the doped core region of the second fin structure, while protecting the doped core regions of the first fin structure and the third fin structure; and forming a third color emitting region by cladding the doped core region of the third fin structure, while protecting the doped core regions of the first fin structure and the second fin structure.
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公开(公告)号:US20190058002A1
公开(公告)日:2019-02-21
申请号:US15680948
申请日:2017-08-18
Applicant: GLOBALFOUNDRIES INC.
Inventor: Ajey P. Jacob , Srinivasa Banna , Deepak Nayak
CPC classification number: H01L27/153 , H01L29/785 , H01L33/007 , H01L33/06 , H01L33/24 , H01L33/32 , H01L33/502 , H01L33/504 , H01L33/60 , H01L2933/0041 , H01L2933/0058
Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to finFETs for light emitting diode displays and methods of manufacture. The method includes: forming replacement fin structures with a doped core region, on doped substrate material; forming quantum wells over the replacement fin structures; forming a first color emitting region by doping at least one of the quantum wells over at least a first replacement fin structure of the replacement fin structures, while protecting at least a second replacement fin structure of the replacement fin structures; and forming a second color emitting region by doping another one of the quantum wells over the at least second replacement fin structure of the replacement fin structures, while protecting the first replacement fin structure and other replacement fin structures which are not to be doped.
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公开(公告)号:US10199429B2
公开(公告)日:2019-02-05
申请号:US15901850
申请日:2018-02-21
Applicant: GLOBALFOUNDRIES INC.
Inventor: Srinivasa Banna , Deepak Nayak , Ajey P. Jacob
IPC: H01L21/00 , H01L27/15 , H01L33/06 , H01L33/16 , H01L33/32 , H01L33/12 , H01L33/62 , H01L33/20 , H01L33/00 , H01L33/24
Abstract: Devices and methods of forming the devices are disclosed. The device includes a substrate and a color LED pixel disposed on the substrate. The color LED pixel includes a red LED, a green LED and a blue LED. Each of the color LED includes a specific color LED body disposed on the respective color region on the substrate, a specific color multiple quantum well (MQW) on the respective color LED body and a specific color top LED layer disposed over the respective color MQW. The MQWs of the red LED, green LED and blue LED includes at least an indium gallium nitride (InxGa1-xN) layer and a gallium nitride (GaN), where x is the atomic percentage of In in the InxGa1-xN layer, and the MQWs of the red LED, green LED and blue LED have different bandgaps by varying x of the InxGa1-xN layer in the red LED, the green LED and the blue LED.
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公开(公告)号:US20170317169A1
公开(公告)日:2017-11-02
申请号:US15652873
申请日:2017-07-18
Applicant: GLOBALFOUNDRIES INC.
Inventor: Steven Bentley , Deepak Nayak
CPC classification number: H01L29/0673 , B82Y10/00 , B82Y40/00 , H01L21/02236 , H01L21/02532 , H01L29/0653 , H01L29/0665 , H01L29/0847 , H01L29/1037 , H01L29/16 , H01L29/165 , H01L29/42392 , H01L29/66439 , H01L29/66545 , H01L29/6656 , H01L29/66795 , H01L29/775 , H01L29/7848 , H01L29/785
Abstract: A semiconductor structure, comprising a semiconductor substrate; at least one fin, wherein the at least one fin comprises one or more first layers and one or more second layers, wherein the first layers and the second layers are interspersed and the first layers laterally extend further than the second layers; a dummy gate structure comprising a first spacer material disposed on sidewalls of the dummy gate; a second spacer material disposed adjacent to each of the second layers, wherein sidewalls of the fin comprise exposed portions of each of the first layers and the second spacer material, and an epitaxial source/drain material disposed on at least the exposed portions of each of the first layers. Methods and systems for forming the semiconductor structure.
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公开(公告)号:US10388691B2
公开(公告)日:2019-08-20
申请号:US15599427
申请日:2017-05-18
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Srinivasa Banna , Deepak Nayak , Ajey P. Jacob
Abstract: A color stacked light emitting diode (LED) pixel is disclosed. The color stacked LED includes an LED pixel structure body, a base LED disposed on at least a portion of the LED pixel structure body, an intermediate LED disposed on the base LED, and a top LED disposed on the intermediate LED. The stacked LED may be an overlapping or a non-overlapping LED pixel. The LED pixel structure body may be a fin body or a nanowire body.
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公开(公告)号:US10290768B2
公开(公告)日:2019-05-14
申请号:US15704982
申请日:2017-09-14
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Srinivasa Banna , Deepak Nayak
IPC: H01L29/06 , H01L31/00 , H01L33/06 , H01L33/00 , H01L33/32 , H01L33/30 , H01L27/15 , H01L33/42 , H01L33/44 , H01L33/62 , H01L33/24
Abstract: Methods of forming an integrated InGaN/GaN or AlInGaP/InGaP LED on Si CMOS for RGB colors and the resulting devices are provided. Embodiments include forming trenches having a v-shaped bottom through an oxide layer and a portion of a substrate; forming AlN or GaAs in the v-shaped bottom; forming a n-GaN or n-InGaP pillar on the AlN or GaAs through and above the first oxide layer; forming an InGaN/GaN MQW or AlInGaP/InGaP MQW over the n-GaN or n-InGaP pillar; forming a p-GaN or p-InGaP layer over the n-GaN pillar and InGaN/GaN MQW or the n-InGaP pillar and AlInGaP/InGaP MQW down to the first oxide layer; forming a TCO layer over the first oxide layer and the p-GaN or p-InGaP layer; forming a second oxide layer over the TCO layer; and forming a metal pad on the TCO layer above each n-GaN or n-InGaP pillar.
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公开(公告)号:US10249710B2
公开(公告)日:2019-04-02
申请号:US15652873
申请日:2017-07-18
Applicant: GLOBALFOUNDRIES INC.
Inventor: Steven Bentley , Deepak Nayak
IPC: H01L29/06 , H01L29/78 , H01L29/66 , H01L21/02 , H01L29/165 , H01L29/08 , B82Y10/00 , B82Y40/00 , H01L29/423 , H01L29/775 , H01L29/10 , H01L29/16
Abstract: A semiconductor structure, comprising a semiconductor substrate; at least one fin, wherein the at least one fin comprises one or more first layers and one or more second layers, wherein the first layers and the second layers are interspersed and the first layers laterally extend further than the second layers; a dummy gate structure comprising a first spacer material disposed on sidewalls of the dummy gate; a second spacer material disposed adjacent to each of the second layers, wherein sidewalls of the fin comprise exposed portions of each of the first layers and the second spacer material, and an epitaxial source/drain material disposed on at least the exposed portions of each of the first layers. Methods and systems for forming the semiconductor structure.
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公开(公告)号:US10037981B2
公开(公告)日:2018-07-31
申请号:US15599465
申请日:2017-05-18
Applicant: GLOBALFOUNDRIES Inc.
Inventor: Srinivasa Banna , Sanjay Jha , Deepak Nayak , Ajey P. Jacob
IPC: H01L33/00 , H01L25/16 , H01L23/48 , H01L25/00 , H01L23/00 , H01L25/075 , H01L27/15 , H01L33/32 , H01L33/06 , H01L33/24 , H01L27/092 , H01L21/8258 , H01L27/06
CPC classification number: H01L25/167 , H01L21/76898 , H01L21/8258 , H01L23/481 , H01L24/06 , H01L24/08 , H01L25/0753 , H01L25/50 , H01L27/0688 , H01L27/092 , H01L27/156 , H01L33/06 , H01L33/24 , H01L33/32 , H01L2224/06181 , H01L2224/08146 , H01L2224/08147
Abstract: A display system is disclosed. The display system comprises a light emitting diode (LED) device and a backplane (BP) device. The LED device comprises a plurality of LEDs having LED terminals. An LED bonding surface comprising a dielectric layer with LED bonding surface contact pads is coupled to diode terminals of the LEDs. The backplane (BP) device comprises a BP substrate having top and bottom surfaces. A plurality of system on chip (SoC) chips are bonded to chip pads disposed on a bottom surface of the BP device. The SoC chips are electrically coupled to the CMOS components of the BP device and LEDs of the LED device.
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