利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

13 条记录 (耗时 0.031 秒)

    Fast wavelength correction technique for a laser
    1.
    发明授权
    Fast wavelength correction technique for a laser 有权
    用于激光的快速波长校正技术

    公开(公告)号：US06529531B1

    公开(公告)日：2003-03-04

    申请号：US09597812

    申请日：2000-06-19

    申请人： George J. Everage ,  Igor V. Fomenkov ,  Palash P. Das ,  Richard L. Sandstrom ,  Frederick G. Erie ,  John M. Algots

    发明人： George J. Everage ,  Igor V. Fomenkov ,  Palash P. Das ,  Richard L. Sandstrom ,  Frederick G. Erie ,  John M. Algots

    IPC分类号： H01S310

    CPC分类号： G03F7/70333 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/139 ,  H01S3/225

    摘要： Electric discharge laser with fast chirp correction. Fast wavelength chirp correction equipment includes at least one piezoelectric drive and a fast wavelength detection means and has a feedback response time of less than 1.0 millisecond. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.

    摘要翻译： 具有快速啁啾校正的放电激光器。 快速波长啁啾校正装置包括至少一个压电驱动器和快速波长检测装置，并具有小于1.0毫秒的反馈响应时间。 在优选实施例中，描述了一种简单的学习算法，以便在预期学习的啁啾模式中允许预调谐镜调节。 技术包括相对较慢的步进电机和非常快的压电驱动器的组合。 在另一个优选实施例中，在脉冲对脉冲基础上进行啁啾校正，其中测量一个脉冲的波长，并且基于测量校正下一个脉冲的波长。 该校正技术能够以2000Hz及更高​​的重复速率工作。

    Narrow band laser with fine wavelength control
    3.
    发明授权
    Narrow band laser with fine wavelength control 有权
    窄带激光器，具有良好的波长控制

    公开(公告)号：US06192064B1

    公开(公告)日：2001-02-20

    申请号：US09470724

    申请日：1999-12-22

    申请人： John M. Algots ,  Christopher A. Marchi ,  Frederick G. Erie ,  Jesse D. Buck ,  Alexander I. Ershov ,  Palash P. Das ,  Igor V. Fomenkov

    发明人： John M. Algots ,  Christopher A. Marchi ,  Frederick G. Erie ,  Jesse D. Buck ,  Alexander I. Ershov ,  Palash P. Das ,  Igor V. Fomenkov

    IPC分类号： H01S308

    CPC分类号： G03F7/70025 ,  G02B5/1828 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/08009 ,  H01S3/08059 ,  H01S3/08081 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/10 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

    摘要： A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an RMAX mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic feedback control of horizontal and vertical beam profile by automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the RMAX tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the RMAX mirror. In other preferred embodiments a separate laser beam reflected off the RMAX mirror on to a photodiode array is used to position the mirror.

    摘要翻译： 智能激光器具有使用来自波形计的反馈信号自动计算脉冲能量，波长和带宽的计算机控制。 通过控制放电电压来控制脉冲能量。 通过在线窄模块中的RMAX镜子的非常精细和快速的定位来控制波长。 带宽是通过调整线窄化模块中的光栅的曲率来控制的。 优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈水平和垂直光束轮廓。 其它优选实施例包括在谐振腔内自动调整激光室的水平位置。 在优选实施例中，使用来自波长监视器的反馈信号来定位RMAX镜。 在其它优选实施例中，使用从RMAX镜反射到光电二极管阵列上的分离的激光束来定位反射镜。

    Laser spectral engineering for lithographic process
    10.
    发明授权
    Laser spectral engineering for lithographic process 有权
    激光光谱工程用于光刻工艺

    公开(公告)号：US07382815B2

    公开(公告)日：2008-06-03

    申请号：US10915517

    申请日：2004-08-09

    申请人： Ronald L. Spangler ,  Jacob P. Lipcon ,  John A. Rule ,  Robert N. Jacques ,  Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  John M. Algots

    发明人： Ronald L. Spangler ,  Jacob P. Lipcon ,  John A. Rule ,  Robert N. Jacques ,  Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  John M. Algots

    IPC分类号： H01S5/00

    CPC分类号： G03F7/70575 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0812 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258

    摘要： An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.

    摘要翻译： 一种称为光电工程的集成电路光刻技术，用于放电激光器的带宽控制。 在优选的方法中，使用计算机模型来模拟光刻参数以确定产生所需光刻结果所需的所需激光光谱。 然后使用快速响应的调谐机构来调整脉冲串中的激光脉冲的中心波长，以实现接近所需激光光谱的脉冲串的集成光谱。 控制激光束带宽以产生具有至少两个光谱峰值的有效光束光谱，以便在光致抗蚀剂膜中产生改进的图案分辨率。 提供了具有至少一个压电驱动器和具有小于约2.0毫秒的时间响应的快速带宽检测控制系统的线窄设备。 在优选实施例中，波长调谐镜以与激光器的重复频率相位的每秒超过500次抖动的抖动速率抖动。 在一种情况下，用方波信号驱动压电驱动，在第二种情况下，它是用正弦波信号驱动的。 在另一个实施例中，最大位移与激光脉冲在一对一的基础上匹配，以便为一系列激光脉冲产生具有两个峰值的所需平均光谱。 其它优选实施例利用三个独立的波长调谐位置，产生具有三个独立峰值的光谱。