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公开(公告)号：US20230168494A1
公开(公告)日：2023-06-01
申请号：US18103572
申请日：2023-01-31
Applicant: Hamamatsu Photonics K.K.
Inventor： Yuki MORINAGA , Anna YOSHIDA , Yoshihisa WARASHINA
CPC classification number: G02B27/0031 , G02B26/101 , G02B27/0006 , G02B26/085 , G02B26/0833 , G02B26/10
Abstract: An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.
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公开(公告)号：US20160190765A1
公开(公告)日：2016-06-30
申请号：US14909767
申请日：2014-06-26
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa WARASHINA
CPC classification number: H01S3/1062 , G01J3/10 , G02B26/001 , H01S3/025 , H01S3/07 , H01S3/08027 , H01S3/08059 , H01S3/08086 , H01S3/0809 , H01S3/0823 , H01S3/105 , H01S5/02248 , H01S5/02288 , H01S5/1092 , H01S5/142 , H01S5/183
Abstract: A variable-wavelength light source is provided with a first laser medium, a first optical resonator constituted of a total reflection mirror and a half-mirror, a second laser medium, a second optical resonator constituted of a total reflection mirror and the half-mirror, a first filter having a pair of first mirrors configured to cause first light and second light to be transmitted and reflected selectively, a second filter having a pair of second mirrors configured to cause the first light and the second light to be transmitted and reflected selectively, a first drive mechanism configured to operate the first mirror and the second mirror in conjunction with each other, and a second drive mechanism configured to operate the second mirror.
Abstract translation: 可变波长光源设置有第一激光介质，由全反射镜和半反射镜构成的第一光谐振器，第二激光介质，由全反射镜和半反射镜构成的第二光谐振器 第一滤光器，具有一对第一反射镜，其被配置为使得第一光和第二光被选择性地透射和反射;第二滤光器，具有一对第二反射镜，其被配置为使得第一光和第二光被选择性地透射和反射 第一驱动机构，被配置为相互结合地操作第一反射镜和第二反射镜;以及第二驱动机构，被配置为操作第二反射镜。
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公开(公告)号：US20240048012A1
公开(公告)日：2024-02-08
申请号：US18266640
申请日：2021-11-16
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Atsuya IIMA , Yoshihisa WARASHINA , Daiki SUZUKI , Yasuyuki SAKAKIBARA
Abstract: An actuator device manufacturing method includes: a preparation step of preparing an actuator device including a support portion, a movable portion, a connection portion, and a metal member disposed such that a stress acts on the metal member when the movable portion oscillates; an oscillation step of oscillating the movable portion for a predetermined time; an acquisition step of acquiring a parameter related to a viscous resistance in a vibration of the movable portion; and a determination step of determining that the actuator device is qualified, when a difference between the parameter acquired in the acquisition step and a reference value corresponding to the parameter at a start of the oscillation step is a predetermined value or more in a direction in which the viscous resistance decreases, and determining that the actuator device is disqualified, when the difference is less than the predetermined value.
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公开(公告)号：US20220236558A1
公开(公告)日：2022-07-28
申请号：US17722757
申请日：2022-04-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yuki MORINAGA , Anna YOSHIDA , Yoshihisa WARASHINA
Abstract: An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.
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公开(公告)号：US20160244320A1
公开(公告)日：2016-08-25
申请号：US15025691
申请日：2014-09-08
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa WARASHINA
CPC classification number: B81B3/0051 , B81B2201/038 , B81B2201/042 , B81B2203/0163 , G01J3/26 , G02B6/29395 , G02B26/001 , G02B26/0841 , H02N1/008
Abstract: An optical module includes a semiconductor substrate, an electrostatic actuator including a fixed portion fixed to the semiconductor substrate and a movable portion moved with respect to the fixed portion by an electrostatic force generated between the movable portion and the fixed portion, a first spring portion connected to the movable portion and having a first spring constant K1, a second spring portion connected between the first spring portion and the semiconductor substrate and having a second spring constant K2 greater than the first spring constant K1, and a movable mirror which is an optical component connected to a connection portion between the first spring portion and the second spring portion.
Abstract translation: 光学模块包括半导体衬底，静电致动器，其包括固定在半导体衬底上的固定部分和通过在可动部分和固定部分之间产生的静电力相对于固定部分移动的可移动部分;第一弹簧部分连接 并且具有第一弹簧常数K1，第二弹簧部分，连接在第一弹簧部分和半导体基板之间，并且具有大于第一弹簧常数K1的第二弹簧常数K2，以及作为光学部件的可移动镜 连接到第一弹簧部分和第二弹簧部分之间的连接部分。
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Patent Agency Ranking
公开(公告)号：US20220342210A1
公开(公告)日：2022-10-27
申请号：US17641192
申请日：2020-09-02
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Hidetaka KAWAOKA , Yoshihisa WARASHINA , Ryusuke KITAURA , Daiki SUZUKI
Abstract: A light scanning system includes a mirror device, a magnet, a temperature sensor, and an arithmetic part. The arithmetic part generates first and second current signals based on a first target deflection angle and a first target frequency, a second target deflection angle and a second target frequency, an operating temperature, first data for correcting a change in a deflection angle of a mirror with respect to a change in a frequency of a current signal input to each of first and second drive coils, second data for correcting at least one of a shift of the mirror swinging with a first axis from a Y-axis and a shift of the mirror swinging with a second axis from an X-axis, and third data for correcting a change in a deflection angle of the mirror with respect to a change in the operating temperature.
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公开(公告)号：US20190016589A1
公开(公告)日：2019-01-17
申请号：US16070562
申请日：2016-12-22
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.
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公开(公告)号：US20180195853A1
公开(公告)日：2018-07-12
申请号：US15741558
申请日：2015-07-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa WARASHINA , Tomofumi SUZUKI , Kohei KASAMORI , Ryosuke OKUMURA , Kyosuke KOTANI
IPC: G01B9/02
CPC classification number: G01B9/02049 , G01B9/02015 , G01B9/02027 , G01B9/02051 , G01J3/0205 , G01J3/021 , G01J3/0262 , G01J3/45 , G01J3/453 , G01J3/4535
Abstract: An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit, which can be MEMS-based components. The branching-combining unit includes a branching surface, an incident surface, an output surface, and a combining surface on an interface between the interior and the exterior of a transparent member. The branching-combining unit, on the branching surface, partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light. The branching-combining unit, on the combining surface, outputs the first branched light to the outside, reflects the second branched light, and combines the light beams to be output to the outside as combined light.
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公开(公告)号：US20230327039A1
公开(公告)日：2023-10-12
申请号：US18017866
申请日：2021-07-07
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshinori TSUKADA , Kohei KASAMORI , Masaki HIROSE , Yoshihisa WARASHINA
IPC: H01L31/107 , H01L31/0216
CPC classification number: H01L31/107 , H01L31/02164
Abstract: A photodetection device includes a photodetection element and a package. The photodetection element includes a semiconductor substrate and a light absorption film. The light absorption film is provided on a region of at least a part of a region around a photodetection region on a principal surface of the semiconductor substrate. The light absorption film has a multi-layer structure including a light absorption layer, a resonance layer, and a reflection layer. At a wavelength of detection target light, a light transmittance inside the resonance layer is larger than a light transmittance inside the light absorption layer, and a light reflectance on a surface of the reflection layer is larger than a light reflectance on a surface of the resonance layer.
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公开(公告)号：US20220342207A1
公开(公告)日：2022-10-27
申请号：US17641181
申请日：2020-09-02
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Yoshihisa WARASHINA , Ryusuke KITAURA , Hidetaka KAWAOKA
Abstract: A method for manufacturing a light scanning system includes a process of assembling a plurality of device structures, each of device structures including a mirror device and a magnet, a process of acquiring, for each of device structures, first data for correcting a change in a deflection angle of the mirror with respect to a change in a frequency of a current signal, and second data for correcting at least one of a shift of the mirror swinging with a first axis from a Y-axis and a shift of the mirror swinging with a second axis from an X-axis, a process of acquiring, for at least one of device structures, third data for correcting a change in a deflection angle of the mirror with respect to a change in an operating temperature, and a process of storing the first, second, and third data in the storage part.
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