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    TEMPLATE, IMPRINT DEVICE, AND CONTROL METHOD
    6.
    发明申请
    TEMPLATE, IMPRINT DEVICE, AND CONTROL METHOD 审中-公开

    公开(公告)号：US20170082918A1

    公开(公告)日：2017-03-23

    申请号：US15257121

    申请日：2016-09-06

    Applicant: Kabushiki Kaisha Toshiba

    Inventor： Tetsuya KUGIMIYA

    IPC: G03F1/50 ,  G03F7/00 ,  H01L21/67

    CPC classification number: G03F1/50 ,  G03F7/0002

    Abstract: A template for imprinting according to an embodiment configured to be pressed onto a semiconductor wafer to transfer thereto a pattern, and may include an imprint mask on which the pattern is formed, a photomask substrate on which the imprint mask is provided, and a plurality of deformation controllers that are provided at the photomask substrate outside a circumference of the imprint mask, and are configured to deform the photomask substrate.

    ELECTRONIC DEVICE, ABNORMALITY DETERMINATION METHOD, AND COMPUTER PROGRAM PRODUCT
    7.
    发明申请
    ELECTRONIC DEVICE, ABNORMALITY DETERMINATION METHOD, AND COMPUTER PROGRAM PRODUCT 审中-公开
    电子设备，异常测定方法和计算机程序产品

    公开(公告)号：US20160282291A1

    公开(公告)日：2016-09-29

    申请号：US15074499

    申请日：2016-03-18

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Yuu YAMAYOSE ,  Tetsuya KUGIMIYA

    IPC: G01N27/20 ,  G01N27/04 ,  G01N25/72

    CPC classification number: G01N27/20 ,  G01N27/045 ,  H05K1/0268 ,  H05K3/30 ,  H05K3/34 ,  H05K2201/10151 ,  H05K2201/10484

    Abstract: According to one embodiment, an electronic device comprises a circuit board, an electrical component, and a measurement unit. The circuit board has a first face. The electrical component includes a second face electrically connected to the first face via a bonding material, a first end in a first direction along the second face, and a second end. The second end is opposite to the first end in the first direction. The measurement unit is configured to measure a characteristic changing depending on a conductivity of the bonding material. A first distance between the first face and the first end is shorter than a second distance between the first face and the second end. The measurement unit includes a first measurement unit configured to measure the characteristic of a part of the bonding material. The part is adjacent to the first end.

    Abstract translation: 根据一个实施例，电子设备包括电路板，电气部件和测量单元。 电路板有第一面。 电气部件包括通过接合材料电连接到第一面的第二面，沿着第二面的沿第一方向的第一端和第二端。 第二端与第一方向的第一端相反。 测量单元被配置为测量根据接合材料的导电性而变化的特性。 第一面和第一端之间的第一距离比第一面和第二端之间的第二距离短。 测量单元包括被配置为测量接合材料的一部分的特性的第一测量单元。 该部分与第一端相邻。

    MASK MANUFACTURING EQUIPMENT AND MASK MANUFACTURING METHOD
    8.
    发明申请
    MASK MANUFACTURING EQUIPMENT AND MASK MANUFACTURING METHOD 有权
    屏蔽制造设备和面罩制造方法

    公开(公告)号：US20150268562A1

    公开(公告)日：2015-09-24

    申请号：US14645842

    申请日：2015-03-12

    Applicant: Kabushiki Kaisha Toshiba

    Inventor： Tetsuya KUGIMIYA ,  Kazuya Fukuhara ,  Hidenori Sato

    IPC: G03F7/20 ,  G03F1/82 ,  G03F1/00

    CPC classification number: G03F7/70191 ,  G03F1/00 ,  G03F1/72 ,  G03F1/82 ,  G03F1/84

    Abstract: According to an embodiment, mask manufacturing equipment includes a detector, an irradiator, a calculator, and a controller. The detector detects positional deviation of a pattern formed on a mask substrate. The irradiator irradiates the mask substrate with laser light to form a heterogeneous layer that is expanded in volume in the mask substrate. The calculator calculates an area periphery irradiation condition under which the irradiator is caused to emit laser light to a peripheral area of the pattern on the basis of the positional deviation detected by the detector so that the pattern area is reduced by forming the heterogeneous layer in the peripheral area of the pattern. The controller controls the irradiator to form the heterogeneous layer in the peripheral area of the pattern according to the area periphery irradiation condition.

    Abstract translation: 根据实施例，掩模制造设备包括检测器，照射器，计算器和控制器。 检测器检测在掩模基板上形成的图案的位置偏差。 照射器用激光照射掩模基板，以形成在掩模基板中体积扩大的异质层。 计算器计算区域周边照射条件，在该区域周围照射条件下，照射器根据检测器检测到的位置偏差，向图案的周边区域发射激光，使得图案区域通过在 外围区域的图案。 根据区域外围照射条件，控制器控制照射器在图案的外围区域中形成异质层。

    ADHESION/PEELING METHOD, AND ADHESION/PEELING DEVICE
    9.
    发明公开
    ADHESION/PEELING METHOD, AND ADHESION/PEELING DEVICE 审中-公开

    公开(公告)号：US20230295474A1

    公开(公告)日：2023-09-21

    申请号：US17929431

    申请日：2022-09-02

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Takashi USUI ,  Tetsuya KUGIMIYA ,  Kazuo WATABE ,  Keisuke UENO ,  Hidefumi TAKAMINE ,  Junko HIROKAWA ,  Yongfang LI ,  Yuki UEDA

    IPC: C09J9/02

    CPC classification number: C09J9/02 ,  C09J2301/502

    Abstract: An adhesion/peeling method according to an embodiment includes adhering a first surface side of an electrically peelable adhesive sheet to a predetermined position of a fixation target object, wherein the electrically peelable adhesive sheet is formed of an electro-peeling adhesive having adhesiveness on the first surface side and a second surface side thereof, and the adhesiveness of the electro-peeling adhesive is lowered due to an input of a voltage; adhering a first electrode of an adherend including the first electrode formed of a conductor to the second surface side of the electrically peelable adhesive sheet; containing a liquid at the predetermined position of the fixation target object to temporarily form a second electrode with conductivity on a surface of the fixation target object; and inputting a predetermined voltage between the first electrode and the second electrode to peel of the electrically peelable adhesive sheet from the fixation target object.

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