Apparatus and process for film deposition
    5.
    发明授权
    Apparatus and process for film deposition 失效
    用于膜沉积的装置和方法

    公开(公告)号:US06875478B2

    公开(公告)日:2005-04-05

    申请号:US10066380

    申请日:2002-02-05

    CPC分类号: C23C14/562

    摘要: A film deposition apparatus equipped with a vacuum chamber, comprising a pair of rollers for vertically traveling a continuous sheet as a substrate, and a pair of sputtering cathodes for continuously depositing the film on the surfaces of the sheet in the vacuum chamber. The cathodes are vertically arranged and horizontally faced each other. The sheet is traveled between a pair of the cathodes. The apparatus and the film deposition process using it make it possible to deposit a film even on surfaces of a flexible sheet without causing problems such as defective film deposition or abnormal discharge, while ensuring stable, continuous, long-term operation.

    摘要翻译: 一种装有真空室的成膜装置,包括用于垂直行进连续片材作为基底的一对辊子和用于在真空室中在片材表面上连续沉积薄膜的一对溅射阴极。 阴极垂直布置并水平面对。 片材在一对阴极之间行进。 使用它的装置和成膜方法使得可以在柔性片的表面上沉积膜,而不会导致诸如膜沉积错误或异常放电的问题,同时确保稳定,连续的长期操作。

    Transparent conductive film and touch panel
    6.
    发明授权
    Transparent conductive film and touch panel 失效
    透明导电膜和触摸屏

    公开(公告)号:US06896981B2

    公开(公告)日:2005-05-24

    申请号:US10194963

    申请日:2002-07-15

    IPC分类号: B32B9/00 B32B15/04 C03C27/08

    摘要: A transparent conductive film has a polymer film 4 and a transparent conductive layer 5 formed on the polymer film 4. The transparent conductive layer includes indium oxide, a zinc oxide system and a tin oxide system. A covering layer 9, made of material different from that of the transparent conductive layer 5, is formed on the transparent conductive layer 5. A touch panel is provided with the transparent conductive film as its upper electrode 6A or lower electrode. The surface of the transparent conductive layer is covered with the covering layer, so that physical or chemical stresses generated during the input to the touch panel do not affect transparent conductive layer directly, thus preventing damages and delamination of the transparent conductive layer. Furthermore, the covering layer formed on the transparent conductive layer improves the strength of the transparent conductive film, thereby enhancing a resistance to wear.

    摘要翻译: 透明导电膜具有在聚合物膜4上形成的聚合物膜4和透明导电层5。 透明导电层包括氧化铟,氧化锌系和氧化锡系。 在透明导电层5上形成由不同于透明导电层5的材料制成的覆盖层9。 触摸面板设置有透明导电膜作为其上电极6A或下电极。 透明导电层的表面被覆盖层覆盖,使得在输入到触摸面板期间产生的物理或化学应力不直接影响透明导电层,从而防止透明导电层的损坏和分层。 此外,形成在透明导电层上的覆盖层提高了透明导电膜的强度,从而提高了耐磨性。

    Plasma and heating method of cleaning vulcanizing mold for ashing residue
    9.
    发明授权
    Plasma and heating method of cleaning vulcanizing mold for ashing residue 失效
    清洗硫化模具等离子体和加热方法灰渣

    公开(公告)号:US5769953A

    公开(公告)日:1998-06-23

    申请号:US637376

    申请日:1996-04-25

    摘要: A method of cleaning a vulcanizing mold including the steps of providing, independently from a vacuum processing bath, a furnace for generating a plasma flow mainly containing neutral active species by a microwave discharge applied for a reactive gas; introducing the plasma flow in the processing bath and jetting it to the entire residue adhering surface of the mold positioned in the processing bath; and ashing residues by the jetted plasma gas. With this method, uniform ashing can be performed for residues adhering on the surface of a vulcanizing mold, without any adverse effect exerted on the mold.

    摘要翻译: 一种清洗硫化模具的方法,包括以下步骤:独立于真空处理槽提供用于通过施加于反应气体的微波放电产生主要含有中性活性物质的等离子体流的炉子; 将等离子体流引入处理槽中并将其喷射到位于处理槽中的模具的整个残留物粘附表面上; 并通过喷射的等离子体气体灰化残留物。 利用这种方法,可以对粘附在硫化模具的表面上的残留物进行均匀的灰化,而对模具没有任何不利影响。