Apparatus and process for film deposition
    1.
    发明授权
    Apparatus and process for film deposition 失效
    用于膜沉积的装置和方法

    公开(公告)号:US06875478B2

    公开(公告)日:2005-04-05

    申请号:US10066380

    申请日:2002-02-05

    CPC分类号: C23C14/562

    摘要: A film deposition apparatus equipped with a vacuum chamber, comprising a pair of rollers for vertically traveling a continuous sheet as a substrate, and a pair of sputtering cathodes for continuously depositing the film on the surfaces of the sheet in the vacuum chamber. The cathodes are vertically arranged and horizontally faced each other. The sheet is traveled between a pair of the cathodes. The apparatus and the film deposition process using it make it possible to deposit a film even on surfaces of a flexible sheet without causing problems such as defective film deposition or abnormal discharge, while ensuring stable, continuous, long-term operation.

    摘要翻译: 一种装有真空室的成膜装置,包括用于垂直行进连续片材作为基底的一对辊子和用于在真空室中在片材表面上连续沉积薄膜的一对溅射阴极。 阴极垂直布置并水平面对。 片材在一对阴极之间行进。 使用它的装置和成膜方法使得可以在柔性片的表面上沉积膜,而不会导致诸如膜沉积错误或异常放电的问题,同时确保稳定,连续的长期操作。

    Transparent conductive film and touch panel
    2.
    发明授权
    Transparent conductive film and touch panel 失效
    透明导电膜和触摸屏

    公开(公告)号:US06896981B2

    公开(公告)日:2005-05-24

    申请号:US10194963

    申请日:2002-07-15

    IPC分类号: B32B9/00 B32B15/04 C03C27/08

    摘要: A transparent conductive film has a polymer film 4 and a transparent conductive layer 5 formed on the polymer film 4. The transparent conductive layer includes indium oxide, a zinc oxide system and a tin oxide system. A covering layer 9, made of material different from that of the transparent conductive layer 5, is formed on the transparent conductive layer 5. A touch panel is provided with the transparent conductive film as its upper electrode 6A or lower electrode. The surface of the transparent conductive layer is covered with the covering layer, so that physical or chemical stresses generated during the input to the touch panel do not affect transparent conductive layer directly, thus preventing damages and delamination of the transparent conductive layer. Furthermore, the covering layer formed on the transparent conductive layer improves the strength of the transparent conductive film, thereby enhancing a resistance to wear.

    摘要翻译: 透明导电膜具有在聚合物膜4上形成的聚合物膜4和透明导电层5。 透明导电层包括氧化铟,氧化锌系和氧化锡系。 在透明导电层5上形成由不同于透明导电层5的材料制成的覆盖层9。 触摸面板设置有透明导电膜作为其上电极6A或下电极。 透明导电层的表面被覆盖层覆盖,使得在输入到触摸面板期间产生的物理或化学应力不直接影响透明导电层,从而防止透明导电层的损坏和分层。 此外,形成在透明导电层上的覆盖层提高了透明导电膜的强度,从而提高了耐磨性。

    ITO thin film, method of producing the same, transparent conductive film, and touch panel
    7.
    发明申请
    ITO thin film, method of producing the same, transparent conductive film, and touch panel 审中-公开
    ITO薄膜,其制造方法,透明导电膜和触摸面板

    公开(公告)号:US20060003188A1

    公开(公告)日:2006-01-05

    申请号:US11184811

    申请日:2005-07-20

    IPC分类号: H01L21/44 B32B19/00

    摘要: A crystalline ITO transparent conductive thin film is formed by heating a substrate at low temperature during the sputtering film formation. The crystalline ITO transparent conductive thin film is formed by using an ITO target comprising In2O3 and SnO2 where a weight percentage of SnO2 is 6% or less based on the total weight of In2O3 and SnO2 in the ITO target, and heating the substrate at 90 to 170° C. during the sputtering film formation. The crystalline ITO film with high strength and mechanical durability can be formed by heating at low temperature, which meets heat resistance of the substrate, without requiring annealing after the film formation. There are provided a transparent conductive film comprising a polymer film 4 and an ITO transparent conductive film 5 formed thereon, and a touch panel comprising the transparent conductive film.

    摘要翻译: 通过在溅射成膜期间在低温下加热基板来形成结晶ITO透明导电薄膜。 结晶ITO透明导电薄膜通过使用包含In 2 N 3 O 3和SnO 2 2的ITO靶形成,其中SnO 2的重量百分比 基于ITO靶中的In 2 N 3 O 3和SnO 2 N 2的总重量,SUB> 2 <6%或更小 在溅射成膜期间在90〜170℃下加热基板。 具有高强度和机械耐久性的结晶ITO膜可以通过在低温下加热而形成,其满足基板的耐热性,而不需要在成膜后退火。 提供了包含聚合物膜4和形成在其上的ITO透明导电膜5的透明导电膜,以及包括透明导电膜的触摸面板。