Semiconductor device
    2.
    发明授权

    公开(公告)号:US11908775B2

    公开(公告)日:2024-02-20

    申请号:US17645472

    申请日:2021-12-22

    CPC classification number: H01L23/485 H01L23/481 H01L23/535 H01L24/29 H01L24/45

    Abstract: A semiconductor device includes a semiconductor substrate having a first surface adjacent to an active layer; a first insulating layer disposed on the first surface of the semiconductor substrate; a second insulating layer disposed on the first insulating layer; an etch stop structure interposed between the first insulating layer and the second insulating layer and including a plurality of etch stop layers; a contact wiring pattern disposed inside the second insulating layer and surrounded by at least one etch stop layer of the plurality of etch stop layers; and a through electrode structure configured to pass through the semiconductor substrate, the first insulating layer, and at least one etch stop layer of the plurality of etch stop layers in a vertical direction and contact the contact wiring pattern.

    Filtration apparatus and control method thereof

    公开(公告)号:US12264087B2

    公开(公告)日:2025-04-01

    申请号:US17804574

    申请日:2022-05-30

    Abstract: A filtration apparatus includes a flow path, a valve provided on the flow path, a first light source configured to emit a first light including ultraviolet (UV) light toward the flow path, a second light source configured to emit a second light including visible light or infrared light toward the flow path, a first optical sensor located out of a path of the first light and the second light, electrodes provided on the flow path, and a processor electrically coupled to the valve, the first light source, the second light source, the first optical sensor, and the electrodes. The processor is configured to alternately operate the first light source and the second light source, receive a first signal from the first optical sensor while the first light source emits the first light, and control the valve and the electrodes to sterilize the flow path based on the first signal.

    Semiconductor device including through-electrodes

    公开(公告)号:US11961788B2

    公开(公告)日:2024-04-16

    申请号:US17708137

    申请日:2022-03-30

    Abstract: A semiconductor device includes: a semiconductor substrate having opposing first side and second sides; an active region and an isolation region on the first side; a circuit device on the active region; a front side interconnection structure on the first side and including front side interconnection layers disposed on different levels; first and second back side interconnection structures below the second side; a buried structure having a portion disposed in the isolation region and including a conductive line; a first through-electrode structure including a first through-electrode contacting the conductive line and penetrating the semiconductor substrate between the conductive line and the first back side interconnection structure; and a second through-electrode structure including a second through-electrode penetrating the semiconductor substrate between a first front side interconnection layer and the second back side interconnection structure. The first front side interconnection layer is on a level higher than that of the conductive line.

    SEMICONDUCTOR DEVICE
    8.
    发明申请

    公开(公告)号:US20220359348A1

    公开(公告)日:2022-11-10

    申请号:US17645472

    申请日:2021-12-22

    Abstract: A semiconductor device includes a semiconductor substrate having a first surface adjacent to an active layer; a first insulating layer disposed on the first surface of the semiconductor substrate; a second insulating layer disposed on the first insulating layer; an etch stop structure interposed between the first insulating layer and the second insulating layer and including a plurality of etch stop layers; a contact wiring pattern disposed inside the second insulating layer and surrounded by at least one etch stop layer of the plurality of etch stop layers; and a through electrode structure configured to pass through the semiconductor substrate, the first insulating layer, and at least one etch stop layer of the plurality of etch stop layers in a vertical direction and contact the contact wiring pattern.

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