Abstract:
An integrated circuit includes; a source region arranged in an upper portion of a substrate, a pair of split gate structures respectively on opposing sides of the source region, wherein each of the pair of split gate structures includes a floating gate electrode layer and a control gate electrode layer disposed on the floating gate electrode layer, an erase gate structure between the pair of split gate structures on the source region and including an erase gate electrode layer, a pair of selection gate structures respectively on outer sidewalls of the pair of split gate structures, and a pair of gate spacers, wherein each of the gate spacers is disposed between one of the pair of split gate structures and one of the pair of selection gate structures, includes a first gate spacer and a second gate spacer disposed on the first gate spacer, is further disposed on an outer side wall of the one of the pair of split gate structures, and a lowermost end of the second gate spacer is at a lower level than an upper surface of the floating gate electrode layer.
Abstract:
A resistive memory device includes memory cell array blocks, a reference cell array block, two first and second sink transistors, and a word line. Each of the memory cell array blocks includes a row line, and the reference cell array block includes a reference row line. One of the first sink transistors is disposed between one end of the row line and a ground and the other of the first sink transistors is disposed between an opposite end of the row line and the ground. One of the second sink transistors is disposed between one end of the reference row line and the ground and the other of the second sink transistors is disposed between an opposite end of the reference row line and the ground. The word line is coupled to gates of the first and second sink transistors.
Abstract:
A method of resetting a variable resistance memory cell in a nonvolatile memory device includes; programming the memory cell to a set state using a corresponding compliance current, and then programming the memory cell to a reset state by pre-reading the variable resistance memory cell to determine its resistance and resetting the memory cell using a variable reset voltage determined in response to the determined resistance.
Abstract:
A semiconductor device includes a memory cell array, which further includes an array of first magnetic memory cells and an array of second magnetic memory cells. Each of the first magnetic memory cells includes a first magnetic tunnel junction structure having a reversible resistance state, and each of the second magnetic memory cells includes a second magnetic tunnel junction structure having a one-time programmable (OTP) resistance state.
Abstract:
The inventive concepts provide a method for forming a hard mask pattern. The method includes forming a hard mask layer on an etch target layer disposed on a substrate, forming a photoresist pattern having an opening exposing one region of the hard mask layer, performing an oxygen ion implantation process on the one region using the photoresist pattern as a mask to form an oxidized portion in the one region, and patterning the hard mask layer using the oxidized portion as an etch mask.
Abstract:
A resistive memory device includes memory cell array blocks, a reference cell array block, two first and second sink transistors, and a word line. Each of the memory cell array blocks includes a row line, and the reference cell array block includes a reference row line. One of the first sink transistors is disposed between one end of the row line and a ground and the other of the first sink transistors is disposed between an opposite end of the row line and the ground. One of the second sink transistors is disposed between one end of the reference row line and the ground and the other of the second sink transistors is disposed between an opposite end of the reference row line and the ground. The word line is coupled to gates of the first and second sink transistors.
Abstract:
An integrated circuit includes: a source region, split gate structures on opposing sides of the source region, the split gate structures including a floating gate electrode layer and a control gate electrode layer, an erase gate structure between the split gate structures on the source region and including an erase gate electrode layer, a pair of selection gate structures on outer sidewalls of the split gate structures, and a pair of gate spacers. Each gate spacer is disposed between one of the split gate structures and one of the selection gate structures, includes a first gate spacer and a second gate spacer disposed on the first gate spacer, and is further disposed on an outer side wall of the one of the split gate structures. A lowermost end of the second gate spacer is at a lower level than an upper surface of the floating gate electrode layer.
Abstract:
A magnetic memory device includes a substrate, a landing pad on the substrate, first and second magnetic tunnel junction patterns disposed on the interlayer insulating layer and spaced apart from the landing pad when viewed from a plan view, and an interconnection structure electrically connecting a top surface of the second magnetic tunnel junction pattern to the landing pad. A distance between the landing pad and the first magnetic tunnel junction pattern is greater than a distance between the first and second magnetic tunnel junction patterns, and a distance between the landing pad and the second magnetic tunnel junction pattern is greater than the distance between the first and second magnetic tunnel junction patterns, when viewed from a plan view.
Abstract:
A semiconductor device includes a memory cell array, which further includes an array of first magnetic memory cells and an array of second magnetic memory cells. Each of the first magnetic memory cells includes a first magnetic tunnel junction structure having a reversible resistance state, and each of the second magnetic memory cells includes a second magnetic tunnel junction structure having a one-time programmable (OTP) resistance state.
Abstract:
A semiconductor device includes a substrate, a gate structure, source and drain regions, and first and second lightly doped drain (LDD) regions. The source and drain regions are spaced apart and formed in an active region of the substrate at opposite sides of the gate structure. The first LDD region surrounds one side surface and a bottom surface of the drain region and has a first junction depth. The second LDD region surrounds one side surface and a bottom surface of the source region and has a second junction depth less than the first junction depth. The gate structure includes a gate dielectric layer, a gate electrode, and gate spacers respectively disposed on opposite side walls of the gate dielectric layer and the gate electrode. One side wall of the gate dielectric layer and electrode is aligned with one side surface of the first LDD region.